JPS5419377A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5419377A
JPS5419377A JP8471277A JP8471277A JPS5419377A JP S5419377 A JPS5419377 A JP S5419377A JP 8471277 A JP8471277 A JP 8471277A JP 8471277 A JP8471277 A JP 8471277A JP S5419377 A JPS5419377 A JP S5419377A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
implanting
shortened
impurity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8471277A
Other languages
Japanese (ja)
Inventor
Shinya Yasue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP8471277A priority Critical patent/JPS5419377A/en
Publication of JPS5419377A publication Critical patent/JPS5419377A/en
Pending legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Element Separation (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To prevent impurity diffusion, and make possible considerable reduction of short channel effect even if gate width is shortened by implanting an impurity which becomes a channel stopper layer thereafter forming an oxide layer by a CVD method.
COPYRIGHT: (C)1979,JPO&Japio
JP8471277A 1977-07-14 1977-07-14 Production of semiconductor device Pending JPS5419377A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8471277A JPS5419377A (en) 1977-07-14 1977-07-14 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8471277A JPS5419377A (en) 1977-07-14 1977-07-14 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5419377A true JPS5419377A (en) 1979-02-14

Family

ID=13838266

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8471277A Pending JPS5419377A (en) 1977-07-14 1977-07-14 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5419377A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5717356A (en) * 1980-05-19 1982-01-29 Asea Ab Method and apparatus for agitating casting strand non-coagulated region

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5717356A (en) * 1980-05-19 1982-01-29 Asea Ab Method and apparatus for agitating casting strand non-coagulated region
JPH0220349B2 (en) * 1980-05-19 1990-05-09 Asea Brown Boveri

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