JPS5213315A - Photoresist composition - Google Patents
Photoresist compositionInfo
- Publication number
- JPS5213315A JPS5213315A JP51083611A JP8361176A JPS5213315A JP S5213315 A JPS5213315 A JP S5213315A JP 51083611 A JP51083611 A JP 51083611A JP 8361176 A JP8361176 A JP 8361176A JP S5213315 A JPS5213315 A JP S5213315A
- Authority
- JP
- Japan
- Prior art keywords
- photoresist composition
- photoresist
- composition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920002120 photoresistant polymer Polymers 0.000 title 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
- G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
- G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/597,226 US4093461A (en) | 1975-07-18 | 1975-07-18 | Positive working thermally stable photoresist composition, article and method of using |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5213315A true JPS5213315A (en) | 1977-02-01 |
Family
ID=24390630
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51083611A Pending JPS5213315A (en) | 1975-07-18 | 1976-07-15 | Photoresist composition |
Country Status (9)
Country | Link |
---|---|
US (1) | US4093461A (ja) |
JP (1) | JPS5213315A (ja) |
CA (1) | CA1063416A (ja) |
CH (1) | CH619055A5 (ja) |
DE (1) | DE2631535A1 (ja) |
FR (1) | FR2317680B1 (ja) |
GB (1) | GB1548583A (ja) |
IT (1) | IT1060035B (ja) |
NL (1) | NL164975C (ja) |
Cited By (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5622428A (en) * | 1979-08-01 | 1981-03-03 | Toray Ind Inc | Polyimide pattern forming method |
JPS59100135A (ja) * | 1982-11-30 | 1984-06-09 | Japan Synthetic Rubber Co Ltd | 樹脂組成物 |
JPS62299846A (ja) * | 1986-06-19 | 1987-12-26 | Ube Ind Ltd | 感光性ポリイミドのパタ−ン形成方法 |
JPS6313032A (ja) * | 1986-07-03 | 1988-01-20 | Ube Ind Ltd | 有機溶媒可溶性のポジ型感光性ポリイミド組成物 |
WO1992015045A1 (en) * | 1991-02-25 | 1992-09-03 | Chisso Corporation | Photosensitive polymer composition and pattern formation |
US6436593B1 (en) | 1999-09-28 | 2002-08-20 | Hitachi Chemical Dupont Microsystems Ltd. | Positive photosensitive resin composition, process for producing pattern and electronic parts |
US6541178B2 (en) | 1999-12-29 | 2003-04-01 | Samsung Electronics Co., Ltd. | Ion-type photoacid generator containing naphthol and photosensitive polyimide composition prepared by using the same |
US6600006B2 (en) | 2000-12-29 | 2003-07-29 | Samsung Electronics Co., Ltd. | Positive-type photosensitive polyimide precursor and composition comprising the same |
US7157204B2 (en) | 2002-11-07 | 2007-01-02 | Samsung Electronics Co., Ltd. | Soluble polyimide for photosensitive polyimide precursor and photosensitive polyimide precursor composition comprising the soluble polyimide |
US7435525B2 (en) | 2004-05-07 | 2008-10-14 | Hitachi Chemical Dupont Microsystems Ltd. | Positive photosensitive resin composition, method for forming pattern, and electronic part |
US7638254B2 (en) | 2004-05-07 | 2009-12-29 | Hitachi Chemical Dupont Microsystems Ltd | Positive photosensitive resin composition, method for forming pattern, and electronic part |
JP4730436B2 (ja) * | 2006-03-16 | 2011-07-20 | 旭硝子株式会社 | ネガ型感光性含フッ素芳香族系樹脂組成物 |
US8071273B2 (en) | 2008-03-31 | 2011-12-06 | Dai Nippon Printing Co., Ltd. | Polyimide precursor, resin composition comprising the polyimide precursor, pattern forming method using the resin composition, and articles produced by using the resin composition |
US8187788B2 (en) | 2006-04-28 | 2012-05-29 | Asahi Kasei Kabushiki Kaisha | Photosensitive resin composition and photosensitive film |
US8298747B2 (en) | 2007-03-12 | 2012-10-30 | Hitachi Chemical Dupont Microsystems, Ltd. | Photosensitive resin composition, process for producing patterned hardened film with use thereof and electronic part |
US8420291B2 (en) | 2007-10-29 | 2013-04-16 | Hitachi Chemical Dupont Microsystems, Ltd. | Positive photosensitive resin composition, method for forming pattern, electronic component |
US8476444B2 (en) | 2008-03-31 | 2013-07-02 | Dai Nippon Printing Co., Ltd. | Base generator |
US8697332B2 (en) | 2009-03-31 | 2014-04-15 | Dai Nippon Printing Co., Ltd. | Base generator, photosensitive resin composition, pattern forming material comprising the photosensitive resin composition, pattern forming method using the photosensitive resin composition and products comprising the same |
US8758977B2 (en) | 2005-09-22 | 2014-06-24 | Hitachi Chemical Dupont Microsystems, Ltd. | Negative-type photosensitive resin composition, pattern forming method and electronic parts |
US9134608B2 (en) | 2010-01-21 | 2015-09-15 | Hitachi Chemical Dupont Microsystems, Ltd. | Positive photosensitive resin composition, method for producing patterned cured film and electronic component |
KR20150121666A (ko) | 2014-04-18 | 2015-10-29 | (주)휴넷플러스 | 폴리실세스퀴옥산 공중합체 및 이를 포함하는 감광성 수지 조성물 |
KR20170128440A (ko) | 2015-03-16 | 2017-11-22 | 다이요 홀딩스 가부시키가이샤 | 포지티브형 감광성 수지 조성물, 드라이 필름, 경화물 및 프린트 배선판 |
KR20190040835A (ko) | 2017-10-11 | 2019-04-19 | 타코마테크놀러지 주식회사 | 바인더 수지 및 이를 포함하는 감광성 수지 조성물 또는 코팅 용액 |
KR20210061994A (ko) | 2018-09-21 | 2021-05-28 | 다이요 홀딩스 가부시키가이샤 | 감광성 수지 조성물, 드라이 필름, 경화물 및 전자 부품 |
KR20210069579A (ko) | 2019-12-03 | 2021-06-11 | 도쿄 오카 고교 가부시키가이샤 | 네가티브형 감광성 수지 조성물 및 경화막의 제조 방법 |
KR20220154043A (ko) | 2021-05-12 | 2022-11-21 | 도쿄 오카 고교 가부시키가이샤 | 감광성 수지, 네가티브형 감광성 수지 조성물, 패턴화된 경화막의 제조 방법 및 카르복시기 함유 수지 |
Families Citing this family (40)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4292384A (en) * | 1977-09-30 | 1981-09-29 | Horizons Research Incorporated | Gaseous plasma developing and etching process employing low voltage DC generation |
US4180404A (en) * | 1977-11-17 | 1979-12-25 | Asahi Kasei Kogyo Kabushiki Kaisha | Heat resistant photoresist composition and process for preparing the same |
US4326018A (en) * | 1977-12-12 | 1982-04-20 | Polychrome Corporation | Lithographic printing plate |
US4208477A (en) * | 1977-12-26 | 1980-06-17 | Asahi Kasei Kogyo Kabushiki Kaisha | Heat resistant photoresist composition and process for preparing the same |
US4268602A (en) * | 1978-12-05 | 1981-05-19 | Toray Industries, Ltd. | Photosensitive O-quinone diazide containing composition |
US4289573A (en) * | 1979-03-30 | 1981-09-15 | International Business Machines Corporation | Process for forming microcircuits |
US4339522A (en) * | 1979-06-18 | 1982-07-13 | International Business Machines Corporation | Ultra-violet lithographic resist composition and process |
DE2931297A1 (de) * | 1979-08-01 | 1981-02-19 | Siemens Ag | Waermebestaendige positivresists und verfahren zur herstellung waermebestaendiger reliefstrukturen |
US4284706A (en) * | 1979-12-03 | 1981-08-18 | International Business Machines Corporation | Lithographic resist composition for a lift-off process |
US4414312A (en) * | 1980-09-03 | 1983-11-08 | E. I. Du Pont De Nemours & Co. | Photopolymerizable polyamide ester resin compositions containing an oxygen scavenger |
US4369247A (en) * | 1980-09-03 | 1983-01-18 | E. I. Du Pont De Nemours And Company | Process of producing relief structures using polyamide ester resins |
US4329419A (en) * | 1980-09-03 | 1982-05-11 | E. I. Du Pont De Nemours And Company | Polymeric heat resistant photopolymerizable composition for semiconductors and capacitors |
US4410612A (en) * | 1980-09-03 | 1983-10-18 | E. I. Du Pont De Nemours And Company | Electrical device formed from polymeric heat resistant photopolymerizable composition |
DE3110632A1 (de) * | 1981-03-19 | 1982-09-30 | Hoechst Ag, 6000 Frankfurt | Verfahren zum einbrennen von lichtempflindlichen schichten bei der herstellung von druckformen |
JPS57168942A (en) * | 1981-04-13 | 1982-10-18 | Hitachi Ltd | Photosensitive polymer composition |
US4476216A (en) * | 1981-08-03 | 1984-10-09 | Amdahl Corporation | Method for high resolution lithography |
US4439516A (en) * | 1982-03-15 | 1984-03-27 | Shipley Company Inc. | High temperature positive diazo photoresist processing using polyvinyl phenol |
JPS58223149A (ja) * | 1982-06-22 | 1983-12-24 | Toray Ind Inc | 感光性ポリイミド用現像液 |
US4857435A (en) * | 1983-11-01 | 1989-08-15 | Hoechst Celanese Corporation | Positive photoresist thermally stable compositions and elements having deep UV response with maleimide copolymer |
US5059513A (en) * | 1983-11-01 | 1991-10-22 | Hoechst Celanese Corporation | Photochemical image process of positive photoresist element with maleimide copolymer |
JPS60169852A (ja) * | 1984-02-14 | 1985-09-03 | Fuji Photo Film Co Ltd | 湿し水不要ネガ型感光性平版印刷版の製版法 |
US4745045A (en) * | 1985-03-11 | 1988-05-17 | International Business Machines Corporation | Method for improving resolution in microelectronic circuits using photoresist overlayer by using thermally processed polyimide underlayer formed from positive photoresist and polyamic acid |
CA1255142A (en) * | 1985-03-11 | 1989-06-06 | Edward C. Fredericks | Method and composition of matter for improving conductor resolution in microelectronic circuits |
US4942108A (en) * | 1985-12-05 | 1990-07-17 | International Business Machines Corporation | Process of making diazoquinone sensitized polyamic acid based photoresist compositions having reduced dissolution rates in alkaline developers |
EP0224680B1 (en) * | 1985-12-05 | 1992-01-15 | International Business Machines Corporation | Diazoquinone sensitized polyamic acid based photoresist compositions having reduced dissolution rates in alkaline developers |
CA1308596C (en) * | 1986-01-13 | 1992-10-13 | Rohm And Haas Company | Microplastic structures and method of manufacture |
US4720445A (en) * | 1986-02-18 | 1988-01-19 | Allied Corporation | Copolymers from maleimide and aliphatic vinyl ethers and esters used in positive photoresist |
US5021320A (en) * | 1986-10-02 | 1991-06-04 | Hoechst Celanese Corporation | Polyamide containing the hexafluoroisopropylidene group with O-quinone diazide in positive working photoresist |
ATE67611T1 (de) * | 1986-10-02 | 1991-10-15 | Hoechst Celanese Corp | Polyamide mit hexafluorisopropyliden-gruppen, diese enthaltende positiv arbeitende lichtempfindliche gemische und damit hergestellte aufzeichnungsmaterialien. |
US5077378A (en) * | 1986-10-02 | 1991-12-31 | Hoechst Celanese Corporation | Polyamide containing the hexafluoroisopropylidene group |
EP0291779B1 (de) * | 1987-05-18 | 1994-07-27 | Siemens Aktiengesellschaft | Wärmebeständige Positivresists und Verfahren zur Herstellung wärmebeständiger Reliefstrukturen |
US5037720A (en) * | 1987-07-21 | 1991-08-06 | Hoechst Celanese Corporation | Hydroxylated aromatic polyamide polymer containing bound naphthoquinone diazide photosensitizer, method of making and use |
DE3835737A1 (de) * | 1988-10-20 | 1990-04-26 | Ciba Geigy Ag | Positiv-fotoresists mit erhoehter thermischer stabilitaet |
DE3837612A1 (de) * | 1988-11-05 | 1990-05-23 | Ciba Geigy Ag | Positiv-fotoresists von polyimid-typ |
US5024922A (en) * | 1988-11-07 | 1991-06-18 | Moss Mary G | Positive working polyamic acid/imide and diazoquinone photoresist with high temperature pre-bake |
DE69128187T2 (de) * | 1990-09-28 | 1998-03-26 | Toshiba Kawasaki Kk | Fotoempfindliche Harzzusammensetzung zum Herstellen eines Polyimidfilmmusters und Verfahren zum Herstellen eines Polyimidfilmmusters |
JP3677191B2 (ja) | 1999-03-15 | 2005-07-27 | 株式会社東芝 | 感光性ポリイミド用現像液、ポリイミド膜パターン形成方法、及び電子部品 |
WO2007148384A1 (ja) * | 2006-06-20 | 2007-12-27 | Hitachi Chemical Dupont Microsystems Ltd. | ネガ型感光性樹脂組成物、パターンの製造方法及び電子部品 |
US9274438B1 (en) * | 2008-06-25 | 2016-03-01 | Western Digital (Fremont), Llc | Method and system for exposing photoresist in a microelectric device |
US9519221B2 (en) * | 2014-01-13 | 2016-12-13 | Applied Materials, Inc. | Method for microwave processing of photosensitive polyimides |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL230139A (ja) * | 1957-08-03 | |||
NL247939A (ja) * | 1959-02-04 | |||
US3179634A (en) * | 1962-01-26 | 1965-04-20 | Du Pont | Aromatic polyimides and the process for preparing them |
GB1116674A (en) * | 1966-02-28 | 1968-06-12 | Agfa Gevaert Nv | Naphthoquinone diazide sulphofluoride |
US3551154A (en) * | 1966-12-28 | 1970-12-29 | Ferrania Spa | Light sensitive article comprising a quinone diazide and polymeric binder |
US3802885A (en) * | 1967-08-15 | 1974-04-09 | Algraphy Ltd | Photosensitive lithographic naphthoquinone diazide printing plate with aluminum base |
US3637384A (en) * | 1969-02-17 | 1972-01-25 | Gaf Corp | Positive-working diazo-oxide terpolymer photoresists |
US3623870A (en) * | 1969-07-22 | 1971-11-30 | Bell Telephone Labor Inc | Technique for the preparation of thermally stable photoresist |
DE2000623C3 (de) * | 1970-01-08 | 1979-06-28 | Agfa-Gevaert Ag, 5090 Leverkusen | Photographisches Verfahren zur Herstellung von Bildern |
US3759711A (en) * | 1970-09-16 | 1973-09-18 | Eastman Kodak Co | Er compositions and elements nitrogen linked apperding quinone diazide light sensitive vinyl polym |
DE2053363C3 (de) * | 1970-10-30 | 1980-09-18 | Hoechst Ag, 6000 Frankfurt | Lichtempfindliches Gemisch |
US3833436A (en) * | 1972-09-05 | 1974-09-03 | Buckbee Mears Co | Etching of polyimide films |
US3871930A (en) * | 1973-12-19 | 1975-03-18 | Texas Instruments Inc | Method of etching films made of polyimide based polymers |
-
1975
- 1975-07-18 US US05/597,226 patent/US4093461A/en not_active Expired - Lifetime
-
1976
- 1976-04-22 CA CA250,802A patent/CA1063416A/en not_active Expired
- 1976-05-12 IT IT23187/76A patent/IT1060035B/it active
- 1976-05-13 GB GB19875/76A patent/GB1548583A/en not_active Expired
- 1976-05-21 FR FR7615556A patent/FR2317680B1/fr not_active Expired
- 1976-07-08 CH CH874876A patent/CH619055A5/de not_active IP Right Cessation
- 1976-07-14 DE DE19762631535 patent/DE2631535A1/de not_active Withdrawn
- 1976-07-15 JP JP51083611A patent/JPS5213315A/ja active Pending
- 1976-07-16 NL NL7607897.A patent/NL164975C/xx not_active IP Right Cessation
Cited By (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5622428A (en) * | 1979-08-01 | 1981-03-03 | Toray Ind Inc | Polyimide pattern forming method |
JPS59100135A (ja) * | 1982-11-30 | 1984-06-09 | Japan Synthetic Rubber Co Ltd | 樹脂組成物 |
JPH0350787B2 (ja) * | 1982-11-30 | 1991-08-02 | Japan Synthetic Rubber Co Ltd | |
JPS62299846A (ja) * | 1986-06-19 | 1987-12-26 | Ube Ind Ltd | 感光性ポリイミドのパタ−ン形成方法 |
JPS6313032A (ja) * | 1986-07-03 | 1988-01-20 | Ube Ind Ltd | 有機溶媒可溶性のポジ型感光性ポリイミド組成物 |
WO1992015045A1 (en) * | 1991-02-25 | 1992-09-03 | Chisso Corporation | Photosensitive polymer composition and pattern formation |
US6436593B1 (en) | 1999-09-28 | 2002-08-20 | Hitachi Chemical Dupont Microsystems Ltd. | Positive photosensitive resin composition, process for producing pattern and electronic parts |
US6541178B2 (en) | 1999-12-29 | 2003-04-01 | Samsung Electronics Co., Ltd. | Ion-type photoacid generator containing naphthol and photosensitive polyimide composition prepared by using the same |
US6600006B2 (en) | 2000-12-29 | 2003-07-29 | Samsung Electronics Co., Ltd. | Positive-type photosensitive polyimide precursor and composition comprising the same |
US7157204B2 (en) | 2002-11-07 | 2007-01-02 | Samsung Electronics Co., Ltd. | Soluble polyimide for photosensitive polyimide precursor and photosensitive polyimide precursor composition comprising the soluble polyimide |
US7435525B2 (en) | 2004-05-07 | 2008-10-14 | Hitachi Chemical Dupont Microsystems Ltd. | Positive photosensitive resin composition, method for forming pattern, and electronic part |
US7638254B2 (en) | 2004-05-07 | 2009-12-29 | Hitachi Chemical Dupont Microsystems Ltd | Positive photosensitive resin composition, method for forming pattern, and electronic part |
EP2469337A1 (en) | 2004-05-07 | 2012-06-27 | Hitachi Chemical DuPont MicroSystems Ltd. | Positive photosensitive resin composition, method for forming pattern, and electronic component |
US8871422B2 (en) | 2005-09-22 | 2014-10-28 | Hitachi Chemical Dupont Microsystems Ltd. | Negative-type photosensitive resin composition, pattern forming method and electronic parts |
US8758977B2 (en) | 2005-09-22 | 2014-06-24 | Hitachi Chemical Dupont Microsystems, Ltd. | Negative-type photosensitive resin composition, pattern forming method and electronic parts |
JP4730436B2 (ja) * | 2006-03-16 | 2011-07-20 | 旭硝子株式会社 | ネガ型感光性含フッ素芳香族系樹脂組成物 |
US8187788B2 (en) | 2006-04-28 | 2012-05-29 | Asahi Kasei Kabushiki Kaisha | Photosensitive resin composition and photosensitive film |
US8298747B2 (en) | 2007-03-12 | 2012-10-30 | Hitachi Chemical Dupont Microsystems, Ltd. | Photosensitive resin composition, process for producing patterned hardened film with use thereof and electronic part |
US8420291B2 (en) | 2007-10-29 | 2013-04-16 | Hitachi Chemical Dupont Microsystems, Ltd. | Positive photosensitive resin composition, method for forming pattern, electronic component |
US8071273B2 (en) | 2008-03-31 | 2011-12-06 | Dai Nippon Printing Co., Ltd. | Polyimide precursor, resin composition comprising the polyimide precursor, pattern forming method using the resin composition, and articles produced by using the resin composition |
US8778596B2 (en) | 2008-03-31 | 2014-07-15 | Dai Nippon Printing Co., Ltd. | Photosensitive resin composition, pattern forming material comprising the photosensitive resin composition, and pattern forming method and article using the photosensitive resin composition |
US8859186B2 (en) | 2008-03-31 | 2014-10-14 | Dai Nippon Printing Co., Ltd. | Polyimide precursor, resin composition comprising the polyimide precursor, pattern forming method using the resin composition, and articles produced by using the resin composition |
US8476444B2 (en) | 2008-03-31 | 2013-07-02 | Dai Nippon Printing Co., Ltd. | Base generator |
US8697332B2 (en) | 2009-03-31 | 2014-04-15 | Dai Nippon Printing Co., Ltd. | Base generator, photosensitive resin composition, pattern forming material comprising the photosensitive resin composition, pattern forming method using the photosensitive resin composition and products comprising the same |
US9134608B2 (en) | 2010-01-21 | 2015-09-15 | Hitachi Chemical Dupont Microsystems, Ltd. | Positive photosensitive resin composition, method for producing patterned cured film and electronic component |
KR20150121666A (ko) | 2014-04-18 | 2015-10-29 | (주)휴넷플러스 | 폴리실세스퀴옥산 공중합체 및 이를 포함하는 감광성 수지 조성물 |
KR20170128440A (ko) | 2015-03-16 | 2017-11-22 | 다이요 홀딩스 가부시키가이샤 | 포지티브형 감광성 수지 조성물, 드라이 필름, 경화물 및 프린트 배선판 |
KR20190040835A (ko) | 2017-10-11 | 2019-04-19 | 타코마테크놀러지 주식회사 | 바인더 수지 및 이를 포함하는 감광성 수지 조성물 또는 코팅 용액 |
KR20210061994A (ko) | 2018-09-21 | 2021-05-28 | 다이요 홀딩스 가부시키가이샤 | 감광성 수지 조성물, 드라이 필름, 경화물 및 전자 부품 |
KR20210069579A (ko) | 2019-12-03 | 2021-06-11 | 도쿄 오카 고교 가부시키가이샤 | 네가티브형 감광성 수지 조성물 및 경화막의 제조 방법 |
KR20220154043A (ko) | 2021-05-12 | 2022-11-21 | 도쿄 오카 고교 가부시키가이샤 | 감광성 수지, 네가티브형 감광성 수지 조성물, 패턴화된 경화막의 제조 방법 및 카르복시기 함유 수지 |
Also Published As
Publication number | Publication date |
---|---|
IT1060035B (it) | 1982-07-10 |
CH619055A5 (ja) | 1980-08-29 |
CA1063416A (en) | 1979-10-02 |
NL164975B (nl) | 1980-09-15 |
NL7607897A (nl) | 1977-01-20 |
GB1548583A (en) | 1979-07-18 |
DE2631535A1 (de) | 1977-02-03 |
FR2317680B1 (fr) | 1981-08-07 |
NL164975C (nl) | 1981-02-16 |
US4093461A (en) | 1978-06-06 |
FR2317680A1 (fr) | 1977-02-04 |
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