JPS51121270A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS51121270A JPS51121270A JP4672775A JP4672775A JPS51121270A JP S51121270 A JPS51121270 A JP S51121270A JP 4672775 A JP4672775 A JP 4672775A JP 4672775 A JP4672775 A JP 4672775A JP S51121270 A JPS51121270 A JP S51121270A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- eliminate
- preventing
- epitaxial layer
- effect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To provide a method of preventing A or A2O3 in the sapphire base form entering the Si epitaxial layer in SOS devices and also eliminating leaks between S and D of MOST and further, to eliminate the effect of defective crystals near the boundary area.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4672775A JPS51121270A (en) | 1975-04-17 | 1975-04-17 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4672775A JPS51121270A (en) | 1975-04-17 | 1975-04-17 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51121270A true JPS51121270A (en) | 1976-10-23 |
Family
ID=12755360
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4672775A Pending JPS51121270A (en) | 1975-04-17 | 1975-04-17 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51121270A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60123049A (en) * | 1983-12-07 | 1985-07-01 | Agency Of Ind Science & Technol | Semiconductor solid circuit element |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50141283A (en) * | 1974-04-22 | 1975-11-13 |
-
1975
- 1975-04-17 JP JP4672775A patent/JPS51121270A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50141283A (en) * | 1974-04-22 | 1975-11-13 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60123049A (en) * | 1983-12-07 | 1985-07-01 | Agency Of Ind Science & Technol | Semiconductor solid circuit element |
JPH0336306B2 (en) * | 1983-12-07 | 1991-05-31 | Kogyo Gijutsuin |
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