JPS51121270A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS51121270A
JPS51121270A JP4672775A JP4672775A JPS51121270A JP S51121270 A JPS51121270 A JP S51121270A JP 4672775 A JP4672775 A JP 4672775A JP 4672775 A JP4672775 A JP 4672775A JP S51121270 A JPS51121270 A JP S51121270A
Authority
JP
Japan
Prior art keywords
semiconductor device
eliminate
preventing
epitaxial layer
effect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4672775A
Other languages
Japanese (ja)
Inventor
Katsuki Komatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP4672775A priority Critical patent/JPS51121270A/en
Publication of JPS51121270A publication Critical patent/JPS51121270A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To provide a method of preventing A or A2O3 in the sapphire base form entering the Si epitaxial layer in SOS devices and also eliminating leaks between S and D of MOST and further, to eliminate the effect of defective crystals near the boundary area.
COPYRIGHT: (C)1976,JPO&Japio
JP4672775A 1975-04-17 1975-04-17 Semiconductor device Pending JPS51121270A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4672775A JPS51121270A (en) 1975-04-17 1975-04-17 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4672775A JPS51121270A (en) 1975-04-17 1975-04-17 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS51121270A true JPS51121270A (en) 1976-10-23

Family

ID=12755360

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4672775A Pending JPS51121270A (en) 1975-04-17 1975-04-17 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS51121270A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60123049A (en) * 1983-12-07 1985-07-01 Agency Of Ind Science & Technol Semiconductor solid circuit element

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50141283A (en) * 1974-04-22 1975-11-13

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50141283A (en) * 1974-04-22 1975-11-13

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60123049A (en) * 1983-12-07 1985-07-01 Agency Of Ind Science & Technol Semiconductor solid circuit element
JPH0336306B2 (en) * 1983-12-07 1991-05-31 Kogyo Gijutsuin

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