JPH03183773A - Method for synthesizing diamond by burning - Google Patents
Method for synthesizing diamond by burningInfo
- Publication number
- JPH03183773A JPH03183773A JP32148089A JP32148089A JPH03183773A JP H03183773 A JPH03183773 A JP H03183773A JP 32148089 A JP32148089 A JP 32148089A JP 32148089 A JP32148089 A JP 32148089A JP H03183773 A JPH03183773 A JP H03183773A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- flame
- voltage
- diamond
- burner
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010432 diamond Substances 0.000 title claims abstract description 35
- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 33
- 238000000034 method Methods 0.000 title claims description 15
- 230000002194 synthesizing effect Effects 0.000 title claims description 10
- 239000000758 substrate Substances 0.000 claims abstract description 42
- 238000002485 combustion reaction Methods 0.000 claims description 14
- 238000009841 combustion method Methods 0.000 claims description 10
- 238000001308 synthesis method Methods 0.000 claims description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 abstract description 8
- 239000000919 ceramic Substances 0.000 abstract description 2
- 238000000354 decomposition reaction Methods 0.000 description 7
- 239000002245 particle Substances 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000001133 acceleration Effects 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- -1 ethanol Chemical class 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は、燃焼法によるダイヤモンドの合成方法に関し
、特に、燃焼器と基板との間に電圧を印加することによ
り、大気中における燃焼炎中の基板に対して迅速にダイ
ヤモンドを生成するための新短な改良に関する。Detailed Description of the Invention [Industrial Application Field] The present invention relates to a method for synthesizing diamond by a combustion method, and in particular, by applying a voltage between a combustor and a substrate, diamond is synthesized in a combustion flame in the atmosphere. Concerning new and short improvements for rapid diamond production on substrates.
［従来の技術］
従来、用いられていたダイヤモンドの合成方法としては
種々あるが、その中で代表的なものについて述べると、
特開昭６１−１５１０９６号公報に開示された方法を挙
げることができる。[Prior Art] There are various methods of synthesizing diamonds that have been used in the past, but here are some typical ones:
The method disclosed in Japanese Unexamined Patent Publication No. 151096/1986 can be mentioned.
すなわち、特開昭６１−１５１０９６号公報の構成では
、一定雰囲気の反応容器内に設けられた基板に所定加速
電圧及び所定電流密度の電子線を無放電下で照射して反
応ガス中の炭化水素を励起及び分解させるようにしたも
ので、具体的には、電子線の加速電圧は５ｏｏｖ、電流
密度は２００−＾／ｃ１で、基板温度は約６００℃に上
昇した状態で行われている。That is, in the configuration of JP-A-61-151096, a substrate provided in a reaction vessel in a constant atmosphere is irradiated with an electron beam at a predetermined acceleration voltage and a predetermined current density in a non-discharge state to remove hydrocarbons in the reaction gas. Specifically, the acceleration voltage of the electron beam is 5 oov, the current density is 200-^/c1, and the substrate temperature is raised to about 600°C.
［課題を解決するための手段］
従来のダイヤモンドの合成方法は、以上のように構成さ
れていたため、次のような課題が存在していた。[Means for Solving the Problems] The conventional diamond synthesis method was configured as described above, and therefore had the following problems.
すなわち、一定の雰囲気（１０−’＝ｒｒ）の反応容器
内でダイヤモンドの生成工程を行わなければならず、装
置自体の付帯設備が大きくなり、装置全体のシステムが
大形化していた。That is, the diamond production process had to be carried out in a reaction vessel with a constant atmosphere (10-'=rr), which increased the size of the auxiliary equipment of the apparatus itself and the overall system size of the apparatus.
また、この反応容器内でしか合成することができないた
め、連続的に合成することができず、生産効率を向上さ
せることが極めて困難であった。Furthermore, since it can only be synthesized within this reaction vessel, continuous synthesis is not possible, making it extremely difficult to improve production efficiency.
また、印加する電子線も高電圧、高電流であるため、電
源が大きくなり、装置の小形化の障害となっていた６
本発明は、以上のような課題を解決するためになされた
もので、特に、燃焼器と基板との間に電圧を印加するこ
とにより、大気中における燃焼炎中の基板に対して迅速
にダイヤモンドを生成するようにした燃焼法によるダイ
ヤモンドの合成方法を提供することを目的とする。In addition, since the applied electron beam also has a high voltage and high current, the power supply becomes large, which is an obstacle to miniaturizing the device.6 The present invention was made to solve the above problems. In particular, it is an object of the present invention to provide a method for synthesizing diamond by a combustion method in which diamond is rapidly produced on a substrate in a combustion flame in the atmosphere by applying a voltage between a combustor and a substrate. purpose.
［課題を解決するための手段］
本発明による燃焼法によるダイヤモンドの合成方法は、
燃焼器からの燃焼炎中に基板を位置させ、前記燃焼炎に
より前記基板にダイヤモンドを生成するようにした方法
において、前記燃焼器と基板間に、設けた電源により、
前記基板に対し正電圧又は負電圧もしくは正電圧と負電
圧との交互電圧の少なくとも何れか１つの電圧を付加し
た方法である。[Means for Solving the Problems] A method for synthesizing diamond by a combustion method according to the present invention includes:
In a method in which a substrate is placed in a combustion flame from a combustor, and diamond is generated on the substrate by the combustion flame, a power source provided between the combustor and the substrate,
In this method, at least one voltage of a positive voltage, a negative voltage, or an alternating voltage of a positive voltage and a negative voltage is applied to the substrate.
［作 用］
本発明による燃焼法によるダイヤモンドの合成方法にお
いては、燃焼器と基板間に設けた電源により、基板と燃
焼器間に対し電圧を付加しているため、電子が高速で飛
ぶ時のエネルギーによって、ダイヤモンド粒子を構成す
る成分がたたかれ、ダイヤモンド粒子を高速で基板に生
成することができる。[Function] In the diamond synthesis method using the combustion method according to the present invention, a voltage is applied between the substrate and the combustor by a power supply provided between the combustor and the substrate, so that when electrons fly at high speed, The energy bombards the components that make up the diamond particles, allowing diamond particles to be generated on the substrate at high speed.
また、ダイヤモンド生成雰囲気は、従来の方法に比べる
と、大気中で行われることにより、連続生成ができ、簡
単且つ安価に大量生産することができる。Furthermore, compared to conventional methods, the diamond-generating atmosphere is performed in the atmosphere, so diamond can be continuously generated and mass-produced easily and inexpensively.
［実施例］
以下、図面と共に本発明による燃焼法によるダイヤモン
ドの合成方法の好適な実施例について詳細に説明する。[Example] Hereinafter, a preferred example of the method for synthesizing diamond by the combustion method according to the present invention will be described in detail with reference to the drawings.
第１図は、本発明による燃焼法によるダイヤモンドの合
成方法を概略的に示す装置の構成図である。FIG. 1 is a block diagram of an apparatus schematically showing a method for synthesizing diamond by a combustion method according to the present invention.
図において符号１で示されるものは、含酸素有機化合物
（アルコール類）である例えばエタノール等を内蔵し大
気中に置かれた燃焼器であり、この燃焼器１の燃焼口２
からは、外炎３ａ及び内炎３ｂとからなる燃焼炎３が大
気中における上方に上昇し、内炎３ｂは外炎３ａによっ
て外気から遮断されている。The symbol 1 in the figure is a combustor that contains an oxygen-containing organic compound (alcohol), such as ethanol, and is placed in the atmosphere.
From there, a combustion flame 3 consisting of an outer flame 3a and an inner flame 3b rises upward in the atmosphere, and the inner flame 3b is shielded from the outside air by the outer flame 3a.
前記内炎３ｂ内の下部位置には、タングステンフィラメ
ントの電気抵抗発熱体よりなる炎中物質分解体４が位置
しており、この炎中物質分解体４は電源５に対して、ス
イッチ６を介して接続されている。A flame material decomposition body 4 made of a tungsten filament electric resistance heating element is located at a lower position within the inner flame 3b, and this flame substance decomposition body 4 is connected to a power source 5 via a switch 6. connected.
また、このスイッチ６をオンとすることにより、この炎
中物質分解体４に電流が通電され、赤熱するよう構成さ
れている。Moreover, by turning on this switch 6, an electric current is applied to this flame material decomposition body 4, so that it becomes red hot.
前記内炎３ｂ内には、アルミナ（＾１□０．〉等からな
るセラミック又はシリコン等からなる平板状の基板７が
位置しており、この基板７の被生成面７２１４ １ａ普
５ｄ３１Ｆ−’ｌ ｋ １．−膚Ｍ１．＊ｂ１トＡ ｌ
啼Ｎｔ ’ＩＩ ｆている。A flat substrate 7 made of ceramic or silicon made of alumina (^1□0.) or the like is located inside the inner flame 3b, and the generated surface 7214 1a 5d31F-'l of this substrate 7 k 1.-Skin M1.*b1toA l
啼Nt'II f.
また、前記燃焼器１と基板７間には、１〜３０Ｖの正電
圧又は負電圧もしくは正電圧と負電圧との交互電圧又は
パルス電圧の少なくとも何れか１つの電圧を供給するた
めの直流電圧又は交流からなる電源１０が設けられてお
り、この電源１０の第１リード線１０ａは前記基板７に
接続されると共に、第２リード線１０ｂは、バーナーと
しての前記燃焼器１に接続されている。Further, between the combustor 1 and the substrate 7, a DC voltage or An AC power source 10 is provided, and a first lead wire 10a of this power source 10 is connected to the substrate 7, and a second lead wire 10b is connected to the combustor 1 as a burner.
次に、以上のように構成された装置により、ダイヤモン
ドの合成を行う方法について説明する。Next, a method for synthesizing diamond using the apparatus configured as described above will be described.
まず、燃焼器１を点火すると、燃焼炎３が上方に向けて
発生する。First, when the combustor 1 is ignited, a combustion flame 3 is generated upward.
次に、基板７を内炎３ｂ内に位置させ、スイッチ６をオ
ンとすると、炎中物質分解体４に通電され、この炎中物
質分解体４が１７００〜１８００℃に加熱される。Next, when the substrate 7 is placed in the inner flame 3b and the switch 6 is turned on, electricity is applied to the flame substance decomposition body 4, and the flame substance decomposition body 4 is heated to 1700 to 1800°C.
同時に電源１０がオンとされることにより、基板７と燃
焼器１間に、１〜３０Ｖの電圧が印加され、電子が高速
で飛ぶ時のエネルギーでグイヤモンド粒子を構成するた
めの成分が加速されて基板７の被生成面７ａに衝突する
状態となる。At the same time, by turning on the power supply 10, a voltage of 1 to 30 V is applied between the substrate 7 and the combustor 1, and the components forming Guyamondo particles are accelerated by the energy of electrons flying at high speed. A state is reached in which the generated surface 7a of the substrate 7 is collided with.
前述の状態を継続すると、燃焼炎３中の炎中物質が分解
し、例えば、５分経過した段階で前記基板７に約１μの
膜状のダイヤモンドが生威し、約８時間後に約１００μ
のダイヤモンドを生成することができた。If the above-mentioned condition continues, the flame substance in the combustion flame 3 will decompose, and for example, after 5 minutes, a diamond film of about 1 μm will grow on the substrate 7, and after about 8 hours, about 100 μm of diamond will grow on the substrate 7.
of diamonds could be produced.
また、前述の電圧は、約５Ｖ〜３０Ｖの範囲内が好適で
あることが実験の結果判明し、この電圧範囲外では好適
な加速結果は得られなかった。Further, as a result of experiments, it has been found that the above-mentioned voltage is preferably within the range of about 5 V to 30 V, and no suitable acceleration results were obtained outside this voltage range.
Ｘ胤明ユ
エタノールで得られた燃焼炎３の中に、炎中物質分解体
４として、前述のタングステンフィラメントの代わりに
アーク放電を用い燃焼器側をプラス、基板側をマイナス
、直流５Ｖの電位差をかけたところ、炎中物質が分解し
、１０分間経過後に基板７の面に厚さ１０μのダイヤモ
ンドを生成することができた。In the combustion flame 3 obtained with X-Tanemeiyu ethanol, as the flame material decomposition body 4, arc discharge was used instead of the above-mentioned tungsten filament, and the combustor side was positive, the substrate side was negative, and a potential difference of 5 V DC was created. As a result, the substance in the flame decomposed, and diamond with a thickness of 10 μm was produced on the surface of the substrate 7 after 10 minutes.
夏旌舅ユ
前述のエタノールの代わりに含炭素ガスであるアセチレ
ン（Ｃ２Ｌ）と酸素（０２）を燃焼させることによって
得られた燃焼炎３の中に、炎中物質分解体４として、前
述の実施例１と同様のタングステンフィラメントを設け
、電流を印加して１７００〜１８００℃に加熱し、燃焼
器側をマイナス基板側をプラス、直流５Ｖの電位差をか
けたところ、炎中物質が分解し、１０分間経過後、基板
７の被処理面７ａに厚さ２０μのダイヤモンドを生成す
ることができた。In the combustion flame 3 obtained by burning carbon-containing gas acetylene (C2L) and oxygen (02) instead of the above-mentioned ethanol, the above-mentioned implementation is carried out as the flame material decomposition body 4. A tungsten filament similar to that in Example 1 was provided, heated to 1,700 to 1,800°C by applying a current, and a potential difference of 5 V DC was applied, with the combustor side being negative and the board side being positive. After a few minutes had elapsed, diamond with a thickness of 20 μm was able to be produced on the treated surface 7a of the substrate 7.
尚、前述の含炭素ガスは、アセチレン（Ｃ２Ｌ）に限ら
ず、プロパンガスを用いた場合も同様の作用を得ること
ができる。Note that the above-mentioned carbon-containing gas is not limited to acetylene (C2L), but the same effect can be obtained even when propane gas is used.
又、前述の各実施例においては、燃焼炎３を大気中で燃
焼させた場合について述べたが、一定の雰囲気中で燃焼
させることもできるものである。Further, in each of the above-described embodiments, the case where the combustion flame 3 is burned in the atmosphere has been described, but the combustion flame 3 can also be burned in a certain atmosphere.
又、前記基板７は定位値に固定することもできるが、回
転するように構成すると、生成面積を広くすることがで
きる。Further, although the substrate 7 can be fixed at a fixed position, if it is configured to rotate, the generated area can be increased.
［発明の効果］
本発明による燃焼法によるダイヤモンドの合成方法は１
以上のように構成されているため、次ぎのような効果を
得ることができる。[Effect of the invention] The method for synthesizing diamond by the combustion method according to the present invention is as follows:
With the above configuration, the following effects can be obtained.
すなわち、燃焼器と基板間に設けた電源により、基板と
燃焼器間に対し電圧を付加しているため、電子が高速で
飛ぶ時のエネルギーによって、ダイヤモンド粒子を構成
する成分がたたかれダイヤモンド粒子が高速で基板に生
成することができる。In other words, since a voltage is applied between the substrate and the combustor by a power supply installed between the combustor and the substrate, the components that make up the diamond particles are hit by the energy of the electrons flying at high speed, and the diamond particles are can be generated on the substrate at high speed.
また、ダイヤモンド生成雰囲気は、大気中で行われるた
め、従来の方法に比べると、ダイヤモンドの生成が大気
中で行われることにより、連続生成ができ、簡単且つ安
価に大量生産することができる。Further, since the diamond generation atmosphere is performed in the atmosphere, compared to conventional methods, diamond generation is performed in the atmosphere, which allows continuous generation and mass production easily and inexpensively.
第１区は本発明による燃焼法によるダイヤモンドのき成
方法を示すための概略構成図である。
１は燃焼器、３は燃焼炎、７は基板、１０は電源である
。
（３）は燃火尭炎
（７）は基板The first section is a schematic diagram showing the method of forming diamond by the combustion method according to the present invention. 1 is a combustor, 3 is a combustion flame, 7 is a substrate, and 10 is a power source. (3) is the flame and flame (7) is the board
Claims (1)
させ、前記燃焼炎（３）により前記基板（７）にダイヤ
モンドを生成するようにした燃焼法によるダイヤモンド
の合成方法において、 前記燃焼器（１）と基板（７）間に設けた電源（１０）
により、前記基板（７）に対し正電圧又は負電圧もしく
は正電圧と負電圧との交互電圧の少なくとも何れか１つ
の電圧を付加することを特徴とする燃焼法によるダイヤ
モンドの合成方法。[Claims] A combustion method in which a substrate (7) is placed in a combustion flame (3) from a combustor (1), and diamond is generated on the substrate (7) by the combustion flame (3). In the diamond synthesis method according to the method, a power source (10) provided between the combustor (1) and the substrate (7)
A method for synthesizing diamond by a combustion method, characterized in that at least one voltage of a positive voltage, a negative voltage, or an alternating voltage of a positive voltage and a negative voltage is applied to the substrate (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32148089A JPH03183773A (en) | 1989-12-13 | 1989-12-13 | Method for synthesizing diamond by burning |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32148089A JPH03183773A (en) | 1989-12-13 | 1989-12-13 | Method for synthesizing diamond by burning |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03183773A true JPH03183773A (en) | 1991-08-09 |
Family
ID=18133034
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32148089A Pending JPH03183773A (en) | 1989-12-13 | 1989-12-13 | Method for synthesizing diamond by burning |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03183773A (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01264997A (en) * | 1988-04-14 | 1989-10-23 | Yoichi Hirose | Method of synthesizing diamond by vapor phase |
-
1989
- 1989-12-13 JP JP32148089A patent/JPH03183773A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01264997A (en) * | 1988-04-14 | 1989-10-23 | Yoichi Hirose | Method of synthesizing diamond by vapor phase |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5370855A (en) | Conversion of fullerenes to diamond | |
| US5900225A (en) | Formation of diamond materials by rapid-heating and rapid-quenching of carbon-containing materials | |
| EP0656870A4 (en) | Methods and apparati for producing fullerenes. | |
| JPS62102827A (en) | Production of metallic or ceramic fine grain | |
| DE3772506D1 (en) | METHOD AND DEVICE FOR APPLYING HYDRATED AMORPHIC SILICON TO A SUBSTRATE IN A PLASMA ENVIRONMENT. | |
| US4897283A (en) | Process of producing aligned permanent magnets | |
| JPS6169185A (en) | Metal vapor laser device | |
| JP2000294542A5 (en) | ||
| JPH03183773A (en) | Method for synthesizing diamond by burning | |
| JP4416402B2 (en) | Plasma device for forming functional layer and method for forming functional layer | |
| RU2032765C1 (en) | Method of diamond coating application from vapor phase and a device for it realization | |
| DE3778794D1 (en) | METHOD AND DEVICE FOR FORMING A LAYER THROUGH PLASMA MECHANICAL PROCESS. | |
| JPS6250098A (en) | Power metallurgical device for metallic compound | |
| JP2530356B2 (en) | Induction plasma generator | |
| JPH04242933A (en) | Formation of oxide film | |
| KR100422108B1 (en) | Apparatus for producing glow discharge plasma in atmosphere | |
| JPH0367496A (en) | Induction plasma generation device | |
| JPH01313392A (en) | Method for synthesizing diamond | |
| US3223552A (en) | Method for producing thin titano-ceramic film | |
| JPH0445261A (en) | Method for degassing vacuum member, vacuum member and electron beam generating device | |
| JPS641957Y2 (en) | ||
| HUP9900992A2 (en) | Method and apparatus for the production of fluctuating power plasma | |
| JPH0367497A (en) | Induction plasma generation device | |
| JPS6010617A (en) | Substrate heating method in plasma cvd apparatus | |
| JPH03247591A (en) | Method for synthesizing diamond by combustion method |