JPH01232517A - Thin metallic film type magnetic recording medium - Google Patents

Thin metallic film type magnetic recording medium

Info

Publication number
JPH01232517A
JPH01232517A JP5704388A JP5704388A JPH01232517A JP H01232517 A JPH01232517 A JP H01232517A JP 5704388 A JP5704388 A JP 5704388A JP 5704388 A JP5704388 A JP 5704388A JP H01232517 A JPH01232517 A JP H01232517A
Authority
JP
Japan
Prior art keywords
magnetic
film
alloy
conicr
recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5704388A
Other languages
Japanese (ja)
Inventor
Toshio Tani
谷 登志夫
Nobuhiko Tanaka
田中 暢彦
Hideji Tamenaga
為永 秀司
Tatsuhiko Kadowaki
門脇 達彦
Masami Kubota
久保田 昌実
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kubota Corp
Original Assignee
Kubota Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kubota Corp filed Critical Kubota Corp
Priority to JP5704388A priority Critical patent/JPH01232517A/en
Publication of JPH01232517A publication Critical patent/JPH01232517A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To lower recording and reproducing noises and to decrease the peak shift of reproducing waveforms by noises by forming a magnetic metallic film of a CoNiCr alloy added with a nonmagnetic element having a non-solutionizing property or low solutionizing property. CONSTITUTION:The magnetic metallic film is formed of the alloy having the compsn. which is the CoNiCr alloy added with the nonmagnetic element having the non-solutionizing property or the low solutionizing property as a 4th element. The example of the 4th element includes P, Bi, etc. The ternary alloy of the CoNiCr system is the alloy having the high coercive force and high residual magnetic flux density as the magnetic film. The remarkable effect of improving recording and reproducing noise characteristics is obtd. without impairing the magnetic and electrical characteristics possessed by the magnetic ternary alloy film of the CoNiCr system by adding a proper ratio of P, Bi, etc., as the 4th element thereto.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は金属薄膜型磁気記録媒体に関する。[Detailed description of the invention] [Industrial application field] The present invention relates to a metal thin film magnetic recording medium.

〔従来の技術〕[Conventional technology]

磁気記録装置における記録媒体として、従来より、非磁
性基体の表面に、酸化鉄粉末と有機バインダとからなる
磁性膜を形成した所謂塗布型磁気記録媒体が使用されて
きたが、近時は6n気記録の高密度化の要請から強磁性
金属薄膜を磁性膜とする金属薄膜型磁気記録媒体へと変
わりつつある。
So-called coated magnetic recording media, in which a magnetic film made of iron oxide powder and an organic binder is formed on the surface of a non-magnetic substrate, have traditionally been used as recording media in magnetic recording devices. Due to the demand for higher recording density, a shift is being made to metal thin film type magnetic recording media in which a ferromagnetic metal thin film is used as the magnetic film.

その非磁性基体に形成される磁性膜の成分組成は、磁気
的性質、記録再生特性、耐候性等を総合的に評価して決
定されるが、−a的にCo、CoNi系、CoCr系、
またはCoNiCr系合金が使用されている。
The component composition of the magnetic film formed on the non-magnetic substrate is determined by comprehensively evaluating magnetic properties, recording/reproducing characteristics, weather resistance, etc.;
Alternatively, a CoNiCr alloy is used.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

上記金属薄膜型磁気記録媒体は、これまでの塗布型磁気
記録媒体にまさる高密度の記録が可能であるが、その記
録再生ノイズが大きいため、これ以上の高密度化は期待
し難い。その記録密度の向上を実現するためには、再生
ノイズを低減し、ノイズによる再生波形のピークシフト
を少なくすることが必要である。
The metal thin film type magnetic recording medium allows higher density recording than conventional coating type magnetic recording media, but it is difficult to expect higher densities due to the large recording and reproduction noise. In order to improve the recording density, it is necessary to reduce reproduction noise and reduce the peak shift of the reproduced waveform due to noise.

本発明は上記に迄み、記録再生ノイズを低減し、再生波
形ピークシフトが改善された高密度記録用金属薄膜型磁
気記録媒体を提供することを目的としている。
SUMMARY OF THE INVENTION An object of the present invention is to provide a metal thin film magnetic recording medium for high-density recording, which reduces recording and reproduction noise and improves reproduction waveform peak shift.

〔問題点を解決するための手段および作用〕本発明の金
属薄膜型磁気記録媒体は、その金属系磁性膜が、非固溶
性ないしは低固溶性の非磁性元素が添加されたCoNi
Cr系合金からなることを特徴としている。
[Means and effects for solving the problems] The metal thin film magnetic recording medium of the present invention has a metal magnetic film made of CoNi to which a non-solid soluble or low solid soluble non-magnetic element is added.
It is characterized by being made of a Cr-based alloy.

本発明の磁気記録媒体の金属系磁性膜は、上記のように
、CoNiCr系合金に、第4元素として、非固溶性ま
たは低固溶性の非磁性元素が添加された組成を有する合
金である。この第4元素の例として、P、Bi等が挙げ
られる。CoNiCr系3元合金は、磁性膜として望ま
れる高保磁力(Hc)および高残留磁束密度(Br)を
有する合金であり、本発明に従ってこれに第4元素とし
て、P、Bi等を適量添加することにより、CoNiC
r系3元合金磁性膜の有する磁気特性・電気特性を損な
うことなく、記録再生ノイズ特性の顕著な改善効果が得
られる。これは上記第4元素の単体または化合物が、C
oNiCr合金磁性膜の結晶粒のまわりに晶出・析出す
ることにより結晶粒同士が分離・孤立化し、その結果と
して磁区の微細化が生じてノイズの主因である磁化遷移
幅が減少するものと考えられる。第4元素の添加は1種
の元素に限られず、複合添加の場合もある。
As described above, the metal-based magnetic film of the magnetic recording medium of the present invention is an alloy having a composition in which a non-solid-soluble or low-solid-soluble non-magnetic element is added as a fourth element to a CoNiCr-based alloy. Examples of this fourth element include P, Bi, and the like. The CoNiCr-based ternary alloy is an alloy that has a high coercive force (Hc) and a high residual magnetic flux density (Br) that are desired as a magnetic film, and according to the present invention, an appropriate amount of P, Bi, etc. can be added as a fourth element to this alloy. According to CoNiC
A remarkable improvement effect on recording/reproduction noise characteristics can be obtained without impairing the magnetic properties and electrical properties of the r-based ternary alloy magnetic film. This means that the simple substance or compound of the fourth element is C
It is thought that crystallization and precipitation around the crystal grains of the oNiCr alloy magnetic film causes the crystal grains to separate and become isolated, resulting in refinement of the magnetic domain and a decrease in the magnetization transition width, which is the main cause of noise. It will be done. The addition of the fourth element is not limited to one kind of element, but may be a combination of additions.

本発明の磁気記録媒体の磁性膜の合金組成は、下記の一
般式 %式% 〔但し、MはP、Bi等の第4元素であり、X。
The alloy composition of the magnetic film of the magnetic recording medium of the present invention is expressed by the following general formula % [where M is a fourth element such as P or Bi, and X.

y、zは原子比を表している〕 で示される。上記一般式で示される合金磁性膜は、好ま
しくはN i 量10〜35at%(x =0.lO〜
0.35)、Cr量5〜15at%(y =0.05〜
0.15)であり、また第4元素(M)は、その元素の
種類により異なるが、Pの場合は2〜?at%(z =
0.02〜0.07)、Biの場合は2〜1Oat%(
z =0.02〜0.10)が適当である。
y and z represent the atomic ratio]. The alloy magnetic film represented by the above general formula preferably has a Ni content of 10 to 35 at% (x = 0.1O to
0.35), Cr amount 5 to 15 at% (y = 0.05 to
0.15), and the fourth element (M) varies depending on the type of element, but in the case of P, it is 2~? at% (z =
0.02 to 0.07), 2 to 1 Oat% for Bi (
z = 0.02 to 0.10) is suitable.

これらの理由について述べると、まずN1fi(10〜
35a t%)については、10at%に満だないと、
磁性膜の耐候性が不足し、他方35a t%をこえると
、飽和磁束密度(Bs)が減少し、良好な磁気特性・電
気特性の確保が困難となるからであり、またCr量(5
〜15at%)についても前記Niの場合と同じように
、5at%未満では耐候性が不足し、15at%をこえ
ると良好な磁気特性・電気特性の確保が困難となるから
である。第4元素(M)については、該元素がPである
場合、0.2at%以上の添加により、磁化遷移幅の減
少によるノイズ低減効果があられれ、添加量の増加とと
もにその効果は増すが、?at%をこえて多量に添加す
ると、CoNiCr系3元合金の有する磁気特性・電気
特性の低下を招くので、0.2〜7at%の範囲が適当
であり、またBiの場合についても、2〜10at%の
範囲において、CoNlCra元合金の磁気特性・電気
特性を損なわずに、磁化遷移幅の減少によるノイズ低減
効果を十分ならしめることができる。
To explain these reasons, first of all, N1fi (10~
35at%), if it is less than 10at%,
This is because the weather resistance of the magnetic film is insufficient, and if it exceeds 35 at%, the saturation magnetic flux density (Bs) decreases, making it difficult to ensure good magnetic and electrical properties.
15 at%), as in the case of Ni, if it is less than 5 at%, weather resistance is insufficient, and if it exceeds 15 at%, it becomes difficult to ensure good magnetic and electrical properties. Regarding the fourth element (M), when the element is P, addition of 0.2 at% or more produces a noise reduction effect by reducing the magnetization transition width, and the effect increases as the amount added increases. ? If added in a large amount exceeding at%, the magnetic and electrical properties of the CoNiCr-based ternary alloy will deteriorate, so a range of 0.2 to 7 at% is appropriate. In the range of 10 at %, it is possible to achieve a sufficient noise reduction effect by reducing the magnetization transition width without impairing the magnetic properties and electrical properties of the CoNlCra base alloy.

本発明の金属薄膜型磁気記録媒体は、磁気ディスクをは
じめ、各種磁気ドラム、磁気テープ、磁気シート等を包
含する。これらは、いずれもその磁性膜が前記組成を有
するCoNiCrM系合金からなる点を除いて、公知の
一般的な工程および条件に従って製作することができる
。例えば、面内記録用磁気ディスクについて述べれば、
アルミニウム合金板等を基体とし、その表面に無電解め
っきにより硬質のN1−Pめっき膜(膜厚:例えば15
〜25μm)を設け、めっき膜面にテキスチャ処理を施
したのち、磁性膜に面内異方性を与えるための下地層と
して適宜の膜厚のCr膜(例えば、1300〜5000
人)を形成する。そのCr膜面上に、前記組成をもつC
oNiCrM合金磁性膜を成膜する。その膜厚は、例え
ば500〜2000人であってよい。ついで磁性膜の摩
耗・損傷を防止するための保護膜として、潤滑性と耐摩
耗性を備えた被膜、例えば炭素質膜(膜厚:例えば15
0〜600人)を形成することにより、多層積層構造を
有する面内記録用磁気ディスクを得る。
The metal thin film magnetic recording medium of the present invention includes magnetic disks, various magnetic drums, magnetic tapes, magnetic sheets, and the like. These can be manufactured according to known general processes and conditions, except that the magnetic films are made of a CoNiCrM alloy having the above composition. For example, if we talk about a magnetic disk for longitudinal recording,
An aluminum alloy plate or the like is used as a base, and a hard N1-P plating film (thickness: e.g. 15
After applying a texture treatment to the plated film surface, a Cr film of an appropriate thickness (for example, 1300 to 5000
form people). On the Cr film surface, C having the above composition is
oNiCrM alloy magnetic film is formed. The film thickness may be, for example, 500 to 2000 people. Next, as a protective film to prevent wear and damage of the magnetic film, a film having lubricity and wear resistance, such as a carbonaceous film (thickness: e.g. 15
0 to 600 persons), a magnetic disk for longitudinal recording having a multilayer laminated structure is obtained.

なお、その積層構造は上記の例に限定されず、例えば、
磁性膜の上に、炭素質膜を成膜するに先立って、約10
0〜500人の膜厚のCr膜を形成することにより、磁
気ディスクの耐候性を更に高めることもできる。また、
各層の成膜は、スパッタリング法、イオンブレーティン
グ法、真空蒸着法などにより行うことができる。
Note that the laminated structure is not limited to the above example; for example,
Prior to forming the carbonaceous film on the magnetic film, about 10
By forming a Cr film with a thickness of 0 to 500 nm, the weather resistance of the magnetic disk can be further improved. Also,
Film formation of each layer can be performed by a sputtering method, an ion blating method, a vacuum evaporation method, or the like.

〔実施例〕〔Example〕

1隻炎上 (1)供試磁気ディスクの製作 アルミニウム合金基板(外径130[+[1、内径40
間、厚さ1.9++un)の表面に、N1−P無電解め
っき膜(膜厚20μm)を形成し、表面をテキスチャ処
理したのち、マグネトロンスパッタリング法(但し、ア
ルゴン雰囲気圧:2. OX 1O−2torr)によ
り、まずCr膜(膜厚: 1500人)を形成し、つい
でCo N tCrPd元合金をターゲットとして磁性
膜を形成した。磁性膜の組成はCoo、tN io、z
c r o、osPo、。、であり、膜厚は800人で
ある。更に、その磁性膜面上に保護膜として膜厚400
人の炭素質膜を形成して供試磁気ディスク1を得た。そ
の保磁力(Hc)は9500 e 、 611束密度(
Br)と膜厚(δ)の積(Br・δ)は550 G・μ
である。
One ship went up in flames (1) Production of test magnetic disk Aluminum alloy substrate (outer diameter 130[+[1, inner diameter 40
After forming an N1-P electroless plating film (film thickness 20 μm) on the surface of the 1.9++ un) and texturing the surface, the magnetron sputtering method (argon atmosphere pressure: 2. OX 1O- First, a Cr film (thickness: 1,500 mm) was formed at a temperature of 2 torr), and then a magnetic film was formed using a CoN tCrPd base alloy as a target. The composition of the magnetic film is Coo, tN io,z
cr o, osPo,. , and the film thickness is 800 people. Furthermore, a protective film with a thickness of 400 mm is applied on the magnetic film surface.
A test magnetic disk 1 was obtained by forming a carbonaceous film. Its coercive force (Hc) is 9500 e, 611 flux density (
The product (Br・δ) of Br) and film thickness (δ) is 550 G・μ
It is.

また、磁性膜形成用ターゲットとして、C0Ni合金、
CoNiCr合金、またはCoNlP合金を使用した点
を除いて上記と同じ条件により、COo、sN i O
,2合金磁性膜を有する供試磁気ディスク11、COo
、tNio、tCro、+合金磁性膜を有する供試磁気
ディスク12、およびCo 6.tN i +1. t
PO,1合金磁性膜を有する供試磁気ディスク13を得
た。
In addition, C0Ni alloy,
Under the same conditions as above except that CoNiCr alloy or CoNlP alloy was used, COo, sN i O
, 2 alloy magnetic film test magnetic disk 11, COo
, tNio, tCro, + test magnetic disk 12 having alloy magnetic films, and Co 6. tN i +1. t
A test magnetic disk 13 having a PO,1 alloy magnetic film was obtained.

なお、各供試磁気ディスクのノイズ特性の正当な比較の
ためには、互いの磁束密度と膜厚の積(Br・δ)およ
び保磁力(Hc)は同一にすべきであるので、供試磁気
ディスク11〜13のそれぞれについて、Br・δおよ
びHcが供試磁気ディスク1のそれと路間−となるよう
にCr膜および磁性膜の成膜を行った。
In addition, in order to properly compare the noise characteristics of each test magnetic disk, the product of magnetic flux density and film thickness (Br・δ) and coercive force (Hc) should be the same. For each of the magnetic disks 11 to 13, a Cr film and a magnetic film were formed so that Br.delta. and Hc were within the same range as those of the magnetic disk under test 1.

(II)ノイズ特性の比較試験 各供試磁気ディスク1および11〜13に信号を記録し
、再生時のバックグランドノイズのスペクトルをスペク
トルアナライザーにより分析する。但し、記録周波数は
2.5 M)Izおよび7.0 MHz、ディスク回転
数は2700rpm、記録電流は45mAρ−p、ヘッ
ドは薄膜ヘッドである。また、スペクトルアナライザー
の中心周波数は5Mtlz、周波数スパンは10MII
z、分解能は30Kllzである。
(II) Comparison Test of Noise Characteristics Signals are recorded on each test magnetic disk 1 and 11 to 13, and the spectrum of background noise during reproduction is analyzed using a spectrum analyzer. However, the recording frequency was 2.5 M)Iz and 7.0 MHz, the disk rotation speed was 2700 rpm, the recording current was 45 mAρ-p, and the head was a thin film head. In addition, the center frequency of the spectrum analyzer is 5Mtlz, and the frequency span is 10MII.
z, resolution is 30 Kllz.

各供試磁気ディスクの測定結果を第1図(磁気ディスク
1)、第2図(磁気ディスク11)、第3図(磁気ディ
スク12)および第4図(磁気ディスク13)に示す。
The measurement results for each test magnetic disk are shown in FIG. 1 (magnetic disk 1), FIG. 2 (magnetic disk 11), FIG. 3 (magnetic disk 12), and FIG. 4 (magnetic disk 13).

図中、A1は記録周波数7.0MHzのときの変調ノイ
ズ、A2は記録周波数2.5MHzのときの変調ノズル
、Bはシステムノイズである。各図の比較から、(1′
i性膜がCoNlCrP合金である発明例の磁気ディス
ク1(第1図)は、CoNi合金磁性膜の磁気ディスク
11 (第2図)、CoNiCr合金磁性膜の磁気ディ
スク12(第3図)のようにPを含まない従来品に比べ
て、そのノイズが大きく低減していることがわかる。更
に、注目すべきことは、磁気ディスク13(第4図)の
ように、Crを含まないCoNi系合金にPを添加した
場合のノイズ低減効果は小さく、これに対してC。
In the figure, A1 is the modulation noise when the recording frequency is 7.0 MHz, A2 is the modulation nozzle when the recording frequency is 2.5 MHz, and B is the system noise. From the comparison of each figure, (1'
The magnetic disk 1 (Fig. 1) of the invention example in which the i-based film is a CoNlCrP alloy is similar to the magnetic disk 11 (Fig. 2) made of a CoNi alloy magnetic film and the magnetic disk 12 (Fig. 3) made of a CoNiCr alloy magnetic film. It can be seen that the noise is significantly reduced compared to the conventional product that does not contain P. Furthermore, it should be noted that when P is added to a CoNi-based alloy that does not contain Cr, as in the magnetic disk 13 (FIG. 4), the noise reduction effect is small;

NiCr系合金にPを添加した発明例の磁気ディスク1
のノイズ低減効果が顕著であることである。
Invention example magnetic disk 1 in which P is added to NiCr-based alloy
The noise reduction effect is remarkable.

実上拠又 CoNiCrB1合金をターゲットとし、COO,68
N io、zc ro、+B !o、oz合金磁性膜を
形成した点を除いて前記実施例1の供試磁気ディスクl
と同一の条件で供試磁気ディスク2を製造し、記録再生
時のバックグランドノイズのスペクトル分析を実施例1
と同一の条件で行った結果、実施例1の供試磁気ディス
ク1と同等の改良されたノイズ特性を有することが観察
された。
In fact, targeting CoNiCrB1 alloy, COO,68
N io, zc ro, +B! The test magnetic disk l of Example 1 except that an o, oz alloy magnetic film was formed.
A test magnetic disk 2 was manufactured under the same conditions as in Example 1, and a spectrum analysis of background noise during recording and reproduction was performed.
As a result, it was observed that the test magnetic disk 1 had improved noise characteristics equivalent to those of the test magnetic disk 1 of Example 1.

〔発明の効果〕〔Effect of the invention〕

本発明の磁気記録媒体は、CoNiCr三元合金磁性膜
のすぐれた磁気特性・電気特性と、その3元合金磁性膜
を凌ぐ良好なノイズ特性を有しており、再生波形相互の
干渉によるピークシフトに変化を与えずに、ノイズによ
るピークシフトが大幅に改善され、従って磁気記録の−
そうの高密度化、磁気記録媒体のコンパクト化、高品質
・高性能化を可能とするものである。
The magnetic recording medium of the present invention has excellent magnetic properties and electrical properties of a CoNiCr ternary alloy magnetic film, as well as good noise characteristics superior to those of the ternary alloy magnetic film, and peak shift due to mutual interference of reproduced waveforms. The peak shift due to noise is significantly improved without any change in the magnetic recording.
This makes it possible to increase the density of magnetic recording media, make magnetic recording media more compact, and improve quality and performance.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図〜第4図は、磁気ディスクの記録再生時のバック
グランドノイズスペクトル分析を示すグラ゛フである。
1 to 4 are graphs showing background noise spectrum analysis during recording and reproduction of a magnetic disk.

Claims (1)

【特許請求の範囲】[Claims] 1、非磁性基体上に金属系磁性膜が形成された磁気記録
媒体において、該金属系磁性膜が、非固溶性ないしは低
固溶性の非磁性元素が添加されたCoNiCr系合金か
らなることを特徴とするノイズ特性にすぐれた金属薄膜
型磁気記録媒体。
1. A magnetic recording medium in which a metal-based magnetic film is formed on a non-magnetic substrate, characterized in that the metal-based magnetic film is made of a CoNiCr-based alloy to which a non-solid-soluble or low-solid-soluble non-magnetic element is added. A metal thin film magnetic recording medium with excellent noise characteristics.
JP5704388A 1988-03-10 1988-03-10 Thin metallic film type magnetic recording medium Pending JPH01232517A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5704388A JPH01232517A (en) 1988-03-10 1988-03-10 Thin metallic film type magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5704388A JPH01232517A (en) 1988-03-10 1988-03-10 Thin metallic film type magnetic recording medium

Publications (1)

Publication Number Publication Date
JPH01232517A true JPH01232517A (en) 1989-09-18

Family

ID=13044418

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5704388A Pending JPH01232517A (en) 1988-03-10 1988-03-10 Thin metallic film type magnetic recording medium

Country Status (1)

Country Link
JP (1) JPH01232517A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5516547A (en) * 1991-09-06 1996-05-14 International Business Machines Corporation Method for fabricating magnetic recording medium

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62298919A (en) * 1986-06-18 1987-12-26 Matsushita Electric Ind Co Ltd Magnetic recording medium

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62298919A (en) * 1986-06-18 1987-12-26 Matsushita Electric Ind Co Ltd Magnetic recording medium

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5516547A (en) * 1991-09-06 1996-05-14 International Business Machines Corporation Method for fabricating magnetic recording medium
US5658680A (en) * 1991-09-06 1997-08-19 International Business Machines Corporation Magnetic recording medium and its fabrication method

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