JPH0460916A - Metal thin film type magnetic recording medium - Google Patents
Metal thin film type magnetic recording mediumInfo
- Publication number
- JPH0460916A JPH0460916A JP16779590A JP16779590A JPH0460916A JP H0460916 A JPH0460916 A JP H0460916A JP 16779590 A JP16779590 A JP 16779590A JP 16779590 A JP16779590 A JP 16779590A JP H0460916 A JPH0460916 A JP H0460916A
- Authority
- JP
- Japan
- Prior art keywords
- film
- magnetic
- recording
- base film
- alloy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 61
- 239000010409 thin film Substances 0.000 title claims abstract description 11
- 229910052751 metal Inorganic materials 0.000 title claims description 13
- 239000002184 metal Substances 0.000 title claims description 13
- 239000010408 film Substances 0.000 claims abstract description 70
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 19
- 239000000956 alloy Substances 0.000 claims abstract description 19
- 239000000203 mixture Substances 0.000 claims abstract description 7
- 230000005294 ferromagnetic effect Effects 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 5
- 229910019974 CrSi Inorganic materials 0.000 abstract description 10
- 230000000694 effects Effects 0.000 abstract description 7
- 230000007423 decrease Effects 0.000 abstract description 2
- 230000005415 magnetization Effects 0.000 abstract description 2
- 239000002244 precipitate Substances 0.000 abstract description 2
- 230000009467 reduction Effects 0.000 abstract description 2
- 239000006104 solid solution Substances 0.000 abstract description 2
- 230000007704 transition Effects 0.000 abstract description 2
- 239000011651 chromium Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 6
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- 229910002441 CoNi Inorganic materials 0.000 description 2
- 229910000684 Cobalt-chrome Inorganic materials 0.000 description 2
- 239000010952 cobalt-chrome Substances 0.000 description 2
- 238000007772 electroless plating Methods 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 239000000314 lubricant Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910018104 Ni-P Inorganic materials 0.000 description 1
- 229910018536 Ni—P Inorganic materials 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000005352 clarification Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 230000005381 magnetic domain Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はノイズ特性にすぐれた金属薄膜型面内記録用磁
気記録媒体に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a metal thin film type magnetic recording medium for longitudinal recording that has excellent noise characteristics.
近時、磁気記録媒体として、ＣｏＮｉ、ＣｏＣｒ。 Recently, CoNi and CoCr have been used as magnetic recording media.
ＣｏＣｒＮｉ等の強磁性金属の薄膜（磁性層）を非磁性
基体上に成膜した金属薄膜型磁気記録媒体が、その高密
度記録性により、従来の塗布型磁気記録媒体に置き代り
つつある。その記録層である磁性膜の形成は、スパッタ
リング、イオンブレーティング、真空蒸着等の各種物理
的蒸着法により行われる。磁気記録方式を面内磁化方式
とする場合の記録媒体では、その磁性膜に面内異方性を
導入するための下地層、代表的にはクロム膜が基体上に
成膜され、そのＣｒ膜面に上記磁性膜の積層成膜が行わ
れる。Metal thin film magnetic recording media, in which a thin film (magnetic layer) of ferromagnetic metal such as CoCrNi is formed on a nonmagnetic substrate, are replacing conventional coated magnetic recording media due to their high-density recording properties. The magnetic film, which is the recording layer, is formed by various physical vapor deposition methods such as sputtering, ion blasting, and vacuum deposition. In a recording medium in which the magnetic recording method is an in-plane magnetization method, an underlayer, typically a chromium film, is formed on the substrate to introduce in-plane anisotropy into the magnetic film, and the Cr film The above-mentioned magnetic film is laminated on the surface.
−Ｊ−記金属薄膜型磁気記録媒体は、ごれまでの塗布型
磁気記録媒体にまさる高密度の記録が可能であるが、次
世代の磁気記録媒体としては更に記録密度の向上が要求
される。-J- Metal thin film magnetic recording media are capable of higher density recording than conventional coated magnetic recording media, but as next-generation magnetic recording media, further improvements in recording density are required. .
本発明は、上記金属薄膜型磁気記録媒体について、更に
その高密度記録を可能とするためのノ、イズ特性の改良
された磁気記録媒体を提供しようとするものである。The present invention aims to provide a magnetic recording medium with improved noise and noise characteristics in order to further enable high-density recording of the metal thin film type magnetic recording medium.
〔課題を解決するための手段および作用〕本発明は、非
磁性基体上に記録層として強磁性金属からなる７！１１
膜が下地膜を介して積層形成されている面内記録用磁気
記録媒体において、前記下地膜か下式：
Ｃｒ１ｏｏ−ｘＳ ｉｘ −Ｎ：］（但し、Ｘ
は０．１〜３．０である〕
で示される組成を有する合金からなること特徴としてい
る。[Means and effects for solving the problems] The present invention provides a recording layer made of a ferromagnetic metal on a non-magnetic substrate.
In a magnetic recording medium for longitudinal recording in which films are laminated via a base film, the base film has the following formula: Cr1oo-xS ix -N:] (where X
is 0.1 to 3.0].
上記のように本発明の磁気記録媒体は、記録層である強
磁性金属薄膜（磁性膜）に面内異方性を付与する下地膜
か、（１）弐で示されるＣｒＳ ｉ合金を以て形成され
ている。この下地膜を形成するＣｒＳｉ合金中のＳｉは
Ｃｒに固溶せず、Ｃｒの粒界に析出して下地膜の結晶粒
界を明確化する。As described above, the magnetic recording medium of the present invention is formed using a base film that imparts in-plane anisotropy to a ferromagnetic metal thin film (magnetic film) serving as a recording layer, or (1) a CrSi alloy shown in (2). ing. Si in the CrSi alloy that forms this base film does not dissolve in solid solution with Cr, but precipitates at the grain boundaries of Cr to clarify the grain boundaries of the base film.
ぞの粒界の明確化に伴い、その下地膜面上に積層形成さ
れる磁性膜の粒界の明確化・磁区の孤立化か促され、結
果として磁性膜の保磁力増加、磁化遷移幅の減少等によ
る記録再生ノイズ特性の低減効果が得られる。With the clarification of the grain boundaries, the grain boundaries of the magnetic film laminated on the surface of the underlying film are clarified and the magnetic domains are isolated, resulting in an increase in the coercive force of the magnetic film and a reduction in the magnetic transition width. The effect of reducing recording and reproducing noise characteristics can be obtained by reducing the noise.
下地膜のＣｒＳｉ合金におけるＳｉ量（ｘ）の下限を０
．１としたのは、」−記効果を十分ならしめるためであ
る。しかし、その量かあまり多くなると、却って磁性膜
の保磁力（１−１ｃ ）の低下傾向をみる。The lower limit of the amount of Si (x) in the CrSi alloy of the base film is set to 0.
．． The reason for setting it to 1 is to ensure a sufficient effect. However, if the amount becomes too large, the coercive force (1-1c) of the magnetic film tends to decrease.
これは、Ｓｌの増量に伴ってＣｒの結晶に乱れが生じる
ごと等によるものと考えられる。このため、Ｓｉ量の１
−限を３．０とした。This is thought to be due to the occurrence of disorder in the Cr crystals as the amount of Sl increases. For this reason, 1 of the amount of Si
- limit was set to 3.0.
上記下地膜の膜面上に積層形成される磁性膜は、Ｃｏ、
ＣｏＮｉ、ＣｏＣｒ、ＣｏＣｒＮｉ等、あるいはその磁
気的・電気的特性の改善を目的として添加される、例え
ばＴａ、Ｎｂ、Ｖ等の元素を含有する各種の強磁性合金
であり、その合金組成の選択は自由である。The magnetic film laminated on the film surface of the base film is made of Co, Co,
CoNi, CoCr, CoCrNi, etc., or various ferromagnetic alloys containing elements such as Ta, Nb, and V added for the purpose of improving their magnetic and electrical properties, and the selection of the alloy composition Be free.
本発明の金属薄膜型磁気記録媒体は、磁気ディスクをは
しめ、磁気ドラム、磁気テープ、（■気シート等を包含
する。これらは、いずれもその磁性膜に面内異方性を導
入するだめの下地膜が前記〔１９式で示される組成を有
するＣｒＳｉ合金からなる点を除いて、公知の工程およ
び条件に従って製作することができる。例えば、磁気デ
ィスクについて述へれば、アルミニウム合金板等を基体
とし、その表面に無電解めっぎにより硬質のＮｉＰめっ
き膜（膜厚：例えば１５〜２５μｍ）を設け、めっき膜
面にテキスチャ処理を施したのら、磁性膜に面内異方性
を与えるための下地層であるＣｒＳｉ合金膜を適宜膜厚
（例えば５００〜３０００人）に形成する。その膜面上
に、記録層である磁性膜（膜厚ば例えば５００〜２００
０人）を成膜する。ついで磁性膜の摩耗・１１１傷を防
１１・するだめの保護膜として、潤滑性と耐摩耗性を備
えた被膜、例えば炭素質膜（膜厚：例えば１５０〜６０
０人）を形成することにより、多層積層構造を有する面
内記録用磁気ディスクを得る。その積層構造は上記の例
に限定されず、例えば、磁性膜の上に、炭素質膜を成膜
するに先立って、Ｃｒ膜（膜厚約１００〜５００人）を
形成することにより、磁気ディスクの耐候性をさらに高
めることができ、また磁性膜面に炭素質膜を形成した後
、更にその表面に潤滑剤（膜厚：例えば１０〜１００人
）を設りて、磁気ヘン１′に対する保護潤滑機能をより
良好なものとすることもできる。なお、各層の成膜は、
スパンタリング法、イオンブレーティング法、真空蒸着
法などにより行うことかできる。The metal thin film magnetic recording medium of the present invention includes a magnetic disk, a magnetic drum, a magnetic tape, an air sheet, etc. All of these media are suitable for introducing in-plane anisotropy into the magnetic film. It can be manufactured according to known processes and conditions, except that the base film is made of a CrSi alloy having the composition shown in formula 19.For example, in the case of a magnetic disk, an aluminum alloy plate or the like is used as the base film. Then, a hard NiP plating film (film thickness: e.g. 15 to 25 μm) is provided on the surface by electroless plating, and the plating film surface is textured to give in-plane anisotropy to the magnetic film. A CrSi alloy film, which is a base layer for the
0 people) to form a film. Next, as a protective film to prevent wear and scratches on the magnetic film, a film having lubricity and wear resistance, such as a carbonaceous film (film thickness: e.g. 150 to 60
0 person) to obtain a magnetic disk for longitudinal recording having a multilayer laminated structure. The laminated structure is not limited to the above example, but for example, by forming a Cr film (film thickness of about 100 to 500 layers) on the magnetic film before forming the carbonaceous film, the magnetic disk Furthermore, after forming a carbonaceous film on the magnetic film surface, a lubricant (film thickness: e.g. 10 to 100 ml) can be further applied to the surface to provide protection against magnetic flux 1'. It is also possible to improve the lubrication function. In addition, the film formation of each layer is as follows:
This can be carried out by a sputtering method, an ion blating method, a vacuum evaporation method, or the like.
〔Ｉ］供試磁気ディスクの製作
アルミニウム合金基板（外径１３０ｍｍ、内径４０ｍｍ
、厚さ１ 、９ ｍｍ ）の表面に、Ｎ ｉ −Ｐ無電
解めっき膜（膜厚２０７ｚｍ）を形成し、表面にポリッ
シュとチー１−スヂ、１・処理を行ったのら、゛ｌグネ
１１１ンスパソタリング法（但し、アルゴン雰囲気圧：
］ ＸＩＯ””ｔｏｒｒ）により、ＣｒＳ ｉ合金か
らなる下地膜、強磁性合金からなる磁性膜および潤滑膜
としての炭素質膜（膜厚３００人）をこの順に積層成膜
して供試磁気ディスクを得た。なお、各供試磁気ディス
ク同士の記録再生特性の正当な比較を行うために、各供
試磁気ディスクの保磁力（１−Ｉ ｃ ） 、および残
留磁束密度（Ｂｒ）と膜厚（δ）の積（Ｂｒ・δ）が互
いに等しくなるように下地膜および磁性膜の成膜を行っ
た。そのＨｃは１０５００ｅとし、Ｂｒ・δば４５０Ｇ
・μとした。[I] Production of test magnetic disk Aluminum alloy substrate (outer diameter 130 mm, inner diameter 40 mm)
After forming a Ni-P electroless plating film (film thickness 207 zm) on the surface of 1.9 mm (thickness 1.9 mm) and performing polishing and treatment on the surface, Gune 111 spa sotering method (however, argon atmosphere pressure:
A test magnetic disk was prepared by laminating a base film made of a CrSi alloy, a magnetic film made of a ferromagnetic alloy, and a carbonaceous film (thickness: 300 mm) as a lubricant film in this order using XIO"" torr). Obtained. In addition, in order to make a fair comparison of the recording and reproducing characteristics of each test magnetic disk, the coercive force (1-I c ), residual magnetic flux density (Br), and film thickness (δ) of each test magnetic disk were determined. The base film and the magnetic film were formed so that the product (Br·δ) was equal to each other. Its Hc is 10500e, and Br・δ is 450G
・It was set to μ.
〔■〕記録再生特性試験
各供試＆’を気ディスクについて、フェライトヘッドを
使用し、記録線密度２８ＫＦＣＩで、信号の記録再生試
験を行った。ヘット仕様は、ギャップ幅＋ １３．５μ
、ギャップ長ざ： ０．７９μ、インダクタンス：８Ｉ
ＩＩＩ、フライングハイｌ、：０．２０μ、Ｉコーディ
ング・フォース：９．５ｇｆ、コイル巻数＝２６であり
、回転速度は３ＧＯＯｒｐｍとした。[■] Recording and Reproducing Characteristics Test A signal recording and reproducing test was conducted on each sample &' disc using a ferrite head at a recording linear density of 28 KFCI. Head specifications are gap width + 13.5μ
, gap length: 0.79μ, inductance: 8I
III, Flying height: 0.20 μ, I coding force: 9.5 gf, number of coil turns = 26, and rotation speed was 3 GOOrpm.
、４Ｃｒ Ｉ ２Ｔ ａ ４）をそれぞれ有する磁気デ
ィスクについての測定結果を示している。, 4Cr I 2T a 4), respectively.
上記試験結果から、ＣｒＳｉ合金下地膜とする発明例の
磁気ディスクは、変調ノイズ、Ｓ／Ｎ比等の改良された
ノイズ特性を有していることかわかる。From the above test results, it can be seen that the magnetic disk of the invention example using the CrSi alloy underlayer has improved noise characteristics such as modulation noise and S/N ratio.
各供試磁気ディスクの試験結果を、その磁性膜の合金組
成と併−已て第１表に示す。表中、Ｎｏ、 ］、２は下
地膜をＣｒＳｉ合金て形成した発明例、Ｎ。The test results for each sample magnetic disk are shown in Table 1, along with the alloy composition of the magnetic film. In the table, No. ], 2 are invention examples in which the base film is made of a CrSi alloy, and N.
１１．１２は下地膜がＣｒ単相和金属ある比較例である
。なお、「Ｓ／間」は再生信号出力とメチイアノイズ強
さの比を意味している。11 and 12 are comparative examples in which the underlying film is a Cr single-phase metal. Note that "S/distance" means the ratio between the reproduced signal output and the noise intensity.
また、第１図は、磁性膜の保磁力（Ｈｃ ）を、その下
地膜の膜厚（δ）との関係で示したグラフであり、図中
、（ａ）は」二足供試磁気ディスクＮｏ、 １と同じ合
金組成の下地膜（Ｃｒ９９Ｓｉ＋）と磁性膜（Ｃｏ、Ｃ
ｒ＋□Ｔａ、）、（ｂ）は供試磁気ディスクＮｏ、 １
１と同し合金組成の下地膜（Ｃｒ ＋ｏｏ）と磁性膜（
Ｃ。Fig. 1 is a graph showing the coercive force (Hc) of the magnetic film in relation to the film thickness (δ) of the underlying film. No. 1, a base film (Cr99Si+) with the same alloy composition and a magnetic film (Co, C
r+□Ta, ), (b) is test magnetic disk No. 1
A base film (Cr +oo) and a magnetic film (Cr+oo) having the same alloy composition as 1.
C.
本発明の金属薄膜型磁気記録媒体は、ノイズ特性にすぐ
れ、記録再生ノイズが低いことにより従来品を凌く高密
度記録が可能であり、これにより磁気記録媒体のコンパ
クト化と高品質・高性能化等の効果を得ることができる
。The metal thin film magnetic recording medium of the present invention has excellent noise characteristics and low recording/reproduction noise, making it possible to perform higher density recording than conventional products.This allows the magnetic recording medium to be made more compact, with high quality and high performance. It is possible to obtain effects such as
第１図は、磁性膜の保磁力（Ｈｃ）を、その下地層の膜
厚との関係で示したグラフである。FIG. 1 is a graph showing the coercive force (Hc) of a magnetic film in relation to the thickness of its underlying layer.
Claims (1)
る薄膜が下地膜を介して積層形成されている面内記録用
磁気記録媒体において、 前記下地膜が下式： Ｃｒ＿１＿０＿０＿−＿ｘＳｉ＿ｘ 〔但し、ｘは０．１〜３．０である〕 で示される組成を有する合金からなることを特徴とする
ノイズ特性にすぐれた金属薄膜型磁気記録媒体。(1) In a magnetic recording medium for longitudinal recording in which a thin film made of ferromagnetic metal is laminated as a recording layer on a non-magnetic substrate with an underlayer interposed therebetween, the underlayer has the following formula: Cr_1_0_0_−_xSi_x [However, , x is 0.1 to 3.0] A thin metal film type magnetic recording medium having excellent noise characteristics, characterized in that it is made of an alloy having a composition shown in the following.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16779590A JPH0460916A (en) | 1990-06-26 | 1990-06-26 | Metal thin film type magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16779590A JPH0460916A (en) | 1990-06-26 | 1990-06-26 | Metal thin film type magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0460916A true JPH0460916A (en) | 1992-02-26 |
Family
ID=15856251
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16779590A Pending JPH0460916A (en) | 1990-06-26 | 1990-06-26 | Metal thin film type magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0460916A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7239828B2 (en) | 2003-09-19 | 2007-07-03 | Canon Kabushiki Kaisha | Image forming apparatus with adjustment of belt member |
-
1990
- 1990-06-26 JP JP16779590A patent/JPH0460916A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7239828B2 (en) | 2003-09-19 | 2007-07-03 | Canon Kabushiki Kaisha | Image forming apparatus with adjustment of belt member |
| US7379690B2 (en) | 2003-09-19 | 2008-05-27 | Canon Kabushiki Kaisha | Image forming apparatus with adjustment of belt member |
| US7389068B2 (en) | 2003-09-19 | 2008-06-17 | Canon Kabushiki Kaisha | Image forming apparatus with adjustment of belt member |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0460916A (en) | Metal thin film type magnetic recording medium | |
| US5082750A (en) | Magnetic recording medium of thin metal film type | |
| JPH0312816A (en) | Thin metallic film type magnetic recording medium | |
| JP2001093139A (en) | Magnetic recording medium and magnetic recording and reproducing device | |
| JP2527616B2 (en) | Metal thin film magnetic recording medium | |
| JPH0770037B2 (en) | Metal thin film magnetic recording medium for in-plane magnetization recording | |
| JPH08329442A (en) | Magnetic recording medium | |
| JP2001250223A (en) | Magnetic recording medium and magnetic recorder | |
| JPS6313256B2 (en) | ||
| JP2527618B2 (en) | Metal thin film magnetic recording medium | |
| JP3434845B2 (en) | Magnetic recording medium, method for manufacturing the magnetic recording medium, and magnetic storage device | |
| JP2527617B2 (en) | Metal thin film magnetic recording medium | |
| JP2834154B2 (en) | Metal thin film magnetic recording media for in-plane magnetization recording | |
| JP2732153B2 (en) | Metal thin-film magnetic recording media | |
| JPH01232517A (en) | Thin metallic film type magnetic recording medium | |
| JPH01232516A (en) | Thin metallic film type magnetic recording medium | |
| JPH03102615A (en) | Magnetic recording medium | |
| JPH02192010A (en) | Thin metallic film type magnetic recording medium | |
| JPH05189741A (en) | Magnetic recording medium | |
| JPH0268712A (en) | Thin film magnetic recording medium | |
| JPH10162338A (en) | Metallic thin film type magnetic recording medium | |
| JPH0223511A (en) | Thin metallic film type magnetic recording medium | |
| JPH03283016A (en) | Magnetic recording medium | |
| JP2000182233A (en) | Magnetic recording medium | |
| JPH0258723A (en) | Magnetic recording medium and magnetic memory medium |