JP2552546B2 - Metal thin film magnetic recording medium - Google Patents
Metal thin film magnetic recording mediumInfo
- Publication number
- JP2552546B2 JP2552546B2 JP1147641A JP14764189A JP2552546B2 JP 2552546 B2 JP2552546 B2 JP 2552546B2 JP 1147641 A JP1147641 A JP 1147641A JP 14764189 A JP14764189 A JP 14764189A JP 2552546 B2 JP2552546 B2 JP 2552546B2
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- JP
- Japan
- Prior art keywords
- magnetic
- film
- recording medium
- recording
- metal thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明はノイズ特性にすぐれた面内磁化記録用金属薄
膜型磁気記録媒体に関する。TECHNICAL FIELD The present invention relates to a metal thin film type magnetic recording medium for in-plane magnetization recording having excellent noise characteristics.
近年、磁気記録装置の記録媒体として、非磁性基体上
の磁性膜の強磁性金属薄膜とした金属薄膜型磁気記録媒
体が、その高密度記録性により、従来の所謂塗布型磁気
記録媒体に置き代わりつつある。その非磁性基体上に形
成される強磁性金属薄膜の成分構成は、磁気的性質、記
録再生特性、耐候性の総合的評価に基づいて決定され、
一般的にCo、CoNi系、CoCr系、またはCoNiCr系合金が使
用されている。In recent years, as a recording medium of a magnetic recording apparatus, a metal thin film type magnetic recording medium in which a ferromagnetic metal thin film of a magnetic film on a non-magnetic substrate is replaced with a conventional so-called coating type magnetic recording medium due to its high density recording property. It's starting. The composition of components of the ferromagnetic metal thin film formed on the non-magnetic substrate is determined based on comprehensive evaluation of magnetic properties, recording / reproducing characteristics, and weather resistance.
Generally, Co, CoNi-based, CoCr-based, or CoNiCr-based alloys are used.
その磁化記録方式には、磁性膜（磁気記録層）の膜厚
方向の磁化を利用した垂直磁化記録方式と、磁性膜に平
行な向き（面内方向）の磁化記録を行う面内磁化方式と
がある。The magnetization recording method includes a perpendicular magnetization recording method that utilizes magnetization in the film thickness direction of a magnetic film (magnetic recording layer) and an in-plane magnetization method that performs magnetization recording in a direction parallel to the magnetic film (in-plane direction). There is.
面内磁化方式の磁気記録媒体においては、上記Co系合
金からなる磁性膜に、磁化容易軸が面内方向に配向した
磁気異方性を導入することが必要である。このため、非
磁性基体上に磁性膜の下地層としてCr膜を設け、その膜
面に磁性膜を積層成膜している。これは、Cr（体心立方
構造）の結晶格子の（110）面の一辺 （ａは格子定数）と、磁性膜の主元素であるCo（最密六
方構造）の格子定数ｃとがほぼ等しく、Cr膜面上にCo系
合金磁性膜をエピタキシャル成長させることにより、積
層界面の整合性が良好で、磁性膜にｃ軸方向が面内方向
に配向した磁気異方性が導入されるからである。In the in-plane magnetization type magnetic recording medium, it is necessary to introduce magnetic anisotropy in which the easy axis of magnetization is oriented in the in-plane direction in the magnetic film made of the Co-based alloy. Therefore, a Cr film is provided as a base layer of the magnetic film on the non-magnetic substrate, and the magnetic film is laminated on the film surface. This is one side of the (110) plane of the crystal lattice of Cr (body centered cubic structure) (A is a lattice constant) and the lattice constant c of Co (closest hexagonal structure), which is the main element of the magnetic film, are substantially equal, and the Co-based alloy magnetic film is epitaxially grown on the Cr film surface to form a layered interface. This is because the conformity is good and the magnetic anisotropy in which the c-axis direction is oriented in the in-plane direction is introduced into the magnetic film.
上記金属薄膜型磁気記録媒体は、これまでの塗布型磁
気記録媒体にまさる高密度の記録が可能であるが、次世
代の磁気記録媒体としては更に記録密度の向上が要求さ
れる。そのためには、変調ノイズや再生波形ピークシフ
ト等の記録再生ノイズ特性を改善することが必要であ
る。The metal thin film type magnetic recording medium is capable of higher density recording than the conventional coating type magnetic recording medium, but further improvement in recording density is required for the next generation magnetic recording medium. For that purpose, it is necessary to improve recording / reproducing noise characteristics such as modulation noise and reproducing waveform peak shift.
本発明は上記要請に応えるべくなされたものであり、
Co系合金を磁性膜とする面内磁化記録用磁気記録媒体に
ついて、記録再生ノイズを可及的に低くして分解能とノ
イズのつり合いのとれたピークシフトの低い高密度記録
用金属薄膜型磁気記録媒体を提供する。The present invention has been made to meet the above demands,
Magnetic recording medium for in-plane magnetization recording using Co alloy as magnetic film. Metal thin film magnetic recording for high density recording with low peak shift, which balances resolution and noise by reducing recording / reproducing noise as much as possible. Provide media.
本発明の面内磁化記録用金属薄膜型磁気記録媒体は、
その磁性膜が、下式〔Ｉ〕または〔II〕で示される成分
組成を有する合金からなることを特徴としている。The metal thin film magnetic recording medium for in-plane magnetization recording of the present invention is
The magnetic film is characterized by being made of an alloy having a component composition represented by the following formula [I] or [II].
Co1-X-Y-ZNiXCrYMZ …〔II〕 Co1-Y-ZCrYMZ …〔Ｉ〕 式中、Ｍは、Ta,Nb,Vから選ばれる２種もしくは３種
の元素であり、x,yzは原子組成比を表し、ｘは0.05〜0.
25,yは0.07〜0.14,zは0.02〜0.10である。Co 1-XYZ Ni X Cr Y M Z ... [II] Co 1-YZ Cr Y M Z ... [I] In the formula, M is two or three elements selected from Ta, Nb and V, x and yz represent atomic composition ratios, and x is 0.05 to 0.
25, y is 0.07 to 0.14 and z is 0.02 to 0.10.
本発明の磁気記録媒体の金属系磁性膜は、上記のよう
にCoCr系、またはCoNiCr系合金をベースとし、これにＭ
で表される元素、すなわちTa,Nb,Vから選ばれる２種も
しくは３種の元素が複合添加された成分構成を有してい
る。CoCr系、またはCoNiCr系合金は、高保磁力（Hc）お
よび高残留磁束密度（Br）を有する合金であり、本発明
に従ってこれにＭで表される複数元素の適量が添加され
ると、Ｍ元素によるCrの粒界析出に伴い磁性粒子（磁
区）の孤立化がもたらされると共に、保磁力（Hc）の増
加をみる。このＭ元素の添加による保磁力増加と磁性粒
子の孤立化とによって顕著なノイズ特性改善効果が得ら
れる。なお、Ｍ元素のいずれか１種のみの単独添加にお
いても磁性粒子の孤立化、保磁力増加をみるが、後記実
施例に示したように、その顕著な改善効果はその複合添
加によって確保される。The metal-based magnetic film of the magnetic recording medium of the present invention is based on the CoCr-based or CoNiCr-based alloy as described above.
The element has a composition in which an element represented by, that is, two or three elements selected from Ta, Nb, and V are compositely added. A CoCr-based or CoNiCr-based alloy is an alloy having a high coercive force (Hc) and a high residual magnetic flux density (Br), and when an appropriate amount of a plurality of elements represented by M is added to the alloy according to the present invention, the M element is added. We observe that the coercive force (Hc) increases with the isolation of magnetic particles (domains) due to the grain boundary precipitation of Cr by. Due to the increase of coercive force and isolation of magnetic particles due to the addition of the M element, a remarkable noise characteristic improving effect can be obtained. Note that isolation of magnetic particles and increase of coercive force are observed even when only one of M elements is added alone, but as shown in Examples below, the remarkable improvement effect is secured by the combined addition thereof. .
本発明において磁性膜の合金成分組成につき、Cr量
（ｙ）を0.07〜0.14としたのは、0.07未満では、磁性膜
の耐候性が不足し、他方0.14より多くなると、良好な磁
気特性・電気特性を確保できなくなるからでてある。ま
た、Niを含む磁性膜である場合のNi量（ｘ）の下限を0.
05としたのは、Ni添加による耐候性改善効果を十分なら
しめるためであり、上限を0.25としたのは、それをこえ
ると、飽和磁束密度（Bs）が減少し、良好な磁気特性お
よび電気特性が得られなくなるからである。In the present invention, the Cr content (y) is set to 0.07 to 0.14 with respect to the alloy composition of the magnetic film. If it is less than 0.07, the weather resistance of the magnetic film is insufficient. This is because the characteristics cannot be secured. In addition, the lower limit of the Ni content (x) in the case of a magnetic film containing Ni is 0.
The reason for setting 05 is to ensure that the effect of improving the weather resistance by adding Ni is sufficient, and the upper limit of 0.25 is that if it is exceeded, the saturation magnetic flux density (Bs) decreases and good magnetic characteristics and electrical properties are obtained. This is because the characteristics cannot be obtained.
更に、本発明の最も特徴とするＭ元素につき、その添
加量（複数元素の合計量）の下限値を0.02、としたの
は、その複合添加による磁性粒子の孤立化に伴う磁化遷
移幅の減少、高保磁力化の効果を確保するためである。
好ましくは各元素の量をそれぞれ0.01以上とする。他方
Ｍ元素の上限値を0.10、としたのは、それをこえると効
果がほぼ飽和してしまうだけでなく、却って磁気特性・
電気特性の低下を招くからである。Further, the lower limit of the added amount (total amount of a plurality of elements) of the M element, which is the most characteristic feature of the present invention, is 0.02. This is to secure the effect of increasing the coercive force.
Preferably, the amount of each element is 0.01 or more. On the other hand, the reason why the upper limit of M element is 0.10 is that not only is the effect almost saturated, but the magnetic characteristics
This is because the electrical characteristics are deteriorated.
本発明の金属薄膜型磁気記録媒体は、磁気ディスクを
はじめ、磁気ドラム、磁気テープ、磁気シート等を包含
する。これらは、いずれもその磁性膜が前記〔Ｉ〕式ま
たは〔II〕式で示される組成を有する合金からなる点を
除いて、公知の工程および条件に従って製作することが
できる。例えば、面内記録用磁気ディスクについて述べ
れば、アルミニウム合金板等を基体とし、その表面に無
電解めっきにより硬質のNi−Ｐめっき膜（膜厚：例えば
15〜25μｍ）を設け、めっき膜面にテキスチャ処理を施
したのち、磁性膜に面内異方性を与えるための下地層と
してCr膜を適宜の膜厚（例えば500〜3000Å）に形成す
る。そのCr膜面上に、前記組成をもつ磁性膜（膜厚は例
えば500〜2000Å）を成膜する。ついで磁性膜の摩耗・
損傷を防止するための保護膜として、潤滑性と耐摩耗性
を備えた被膜、例えば炭素質膜（膜厚：例えば150〜600
Å）を形成することにより、多層積層構造を有する面内
記録用磁気ディスクを得る。その積層構造は上記の例に
限定されず、例えば、磁性膜の上に：炭素質膜を成膜す
るに先立って、Cr膜（膜厚約100〜500Å）を形成するこ
とにより、磁気ディスクの耐候性をさらに高めることが
でき、また磁性膜面に炭素質膜を形成したうえ、更にそ
の表面に潤滑剤（膜厚：例えば10〜100Å）を設けて、
磁気ヘッドに対する保護潤滑機能をより良好なものとす
ることもできる。なお、各層の成膜は、スパッタリング
法、イオンプレーティング法、真空蒸着法などにより行
うことができる。The metal thin film type magnetic recording medium of the present invention includes a magnetic disk, a magnetic drum, a magnetic tape, a magnetic sheet and the like. Each of these can be manufactured according to known steps and conditions except that the magnetic film is made of an alloy having the composition represented by the above formula [I] or [II]. For example, referring to a magnetic disk for in-plane recording, an aluminum alloy plate or the like is used as a substrate, and a hard Ni-P plating film (film thickness:
15 to 25 μm) is provided, the surface of the plated film is textured, and then a Cr film is formed to an appropriate film thickness (for example, 500 to 3000 Å) as a base layer for giving in-plane anisotropy to the magnetic film. A magnetic film (having a film thickness of, for example, 500 to 2000Å) having the above composition is formed on the surface of the Cr film. Then wear of the magnetic film
As a protective film to prevent damage, a film having lubricity and wear resistance, such as a carbonaceous film (film thickness: for example, 150 to 600
By forming Å), an in-plane recording magnetic disk having a multilayer laminated structure is obtained. The laminated structure is not limited to the above example. For example, by forming a Cr film (film thickness of about 100 to 500Å) on the magnetic film: prior to forming the carbonaceous film, The weather resistance can be further enhanced, a carbonaceous film is formed on the magnetic film surface, and a lubricant (film thickness: 10 to 100Å) is further provided on the surface,
It is also possible to improve the protective lubrication function for the magnetic head. The film formation of each layer can be performed by a sputtering method, an ion plating method, a vacuum vapor deposition method, or the like.
実施例１（CoNiCr系磁性膜） 〔Ｉ〕供試磁気ディスクの製作 アルミニウム合金基板（外径130mm、内径40mm、厚さ
1.9mm）の表面に、Ni−Ｐ無電解めっき膜（膜厚20μ
ｍ）を形成し、表面にポリッシュとテキスチャ処理を行
ったのち、マグネトロンスパッタリング法（但し、アル
ゴン雰囲気圧:0.7×10-2torr）により、Cr膜（下地
層）、CoNiCr系磁性膜および潤滑膜としての炭素質膜
（膜厚300Å）とをこの順に積層成膜して供試磁気ディ
スクを得た。各供試磁気ディスク同士の記録再生特性の
正当な比較を行うために、各供試磁気ディスクの保磁力
（Hc）、および残留磁束密度（Br）と膜厚（δ）の積
（Br・δ）が互いに等しくなるように下地層および磁性
膜の成膜が行った。そのHcは1250Oeとし、Br・δは450G
・μとした。Example 1 (CoNiCr magnetic film) [I] Manufacture of test magnetic disk Aluminum alloy substrate (outer diameter 130 mm, inner diameter 40 mm, thickness)
Ni-P electroless plating film (film thickness 20μ
m) is formed, the surface is polished and textured, and then the Cr film (underlayer), CoNiCr-based magnetic film and lubricating film are formed by the magnetron sputtering method (however, argon atmosphere pressure: 0.7 × 10 -2 torr). And a carbonaceous film (thickness of 300 Å) as described above were laminated in this order to obtain a test magnetic disk. In order to make a proper comparison of the recording / reproducing characteristics of each test magnetic disk, the coercive force (Hc) of each test magnetic disk and the product of residual magnetic flux density (Br) and film thickness (δ) (Br · δ) The underlayer and the magnetic film were formed so that the values of () are equal to each other. Its Hc is 1250 Oe, and Br / δ is 450G.
・ Set to μ.
〔II〕記録再生特性試験 各供試磁気ディスクについて、フェライトヘッドを使
用し、記録線密度19KFCI、および28KFCIで、信号の記録
再生試験を行い、再生信号出力とメディアノイズ強さの
比（S/N,dB）を求めた。なお、ヘッド仕様は、ギャップ
幅:13.5μ、ギャップ長さ:0.79μ、インダクタンス:8μ
Ｈ、フライングハイト:0.20μ、ローディング・フォー
ス:9.5gf、コイル巻数:26である。[II] Recording / reproduction characteristics test For each magnetic disk under test, a ferrite head was used and a signal recording / reproduction test was performed at recording linear densities of 19KFCI and 28KFCI, and the ratio of the reproduction signal output to the media noise strength (S / N, dB) was calculated. The head specifications are: gap width: 13.5μ, gap length: 0.79μ, inductance: 8μ
H, flying height: 0.20 μ, loading force: 9.5 gf, and number of coil turns: 26.
各供試磁気ディスクの試験結果を、その磁性膜の合金
組成と併せて第１表に示す。表中、No.11〜14はＭ元素
を複合含有する発明例、No.15,16はＭ元素の単独添加の
比較例である。The test results of each magnetic disk under test are shown in Table 1 together with the alloy composition of the magnetic film. In the table, Nos. 11 to 14 are inventive examples containing a composite of M element, and Nos. 15 and 16 are comparative examples of single addition of M element.
実施例２（CoCr系磁性膜） 磁性膜合金をCoCr系とした点を除いて実施例１と同じ
工程と条件で供試磁気ディスクを得、それぞれについて
前記と同じ記録再生特性試験を行った。各供試磁気ディ
スクの磁性膜合金組成および試験結果を第２表に示す。
No.21〜24はＭ元素を複合含有する発明例、No.25,26は
単独添加の例である。Example 2 (CoCr-based magnetic film) A test magnetic disk was obtained by the same steps and conditions as in Example 1 except that the magnetic film alloy was CoCr-based, and the same recording / reproducing characteristic test as described above was performed for each. Table 2 shows the magnetic film alloy composition of each magnetic disk under test and the test results.
Nos. 21 to 24 are invention examples in which the M element is compositely contained, and Nos. 25 and 26 are examples of single addition.
上記各実施例の試験結果から、CoCr系またはCoNiCr系
合金にＭ元素が複合添加された磁性膜を有する発明例の
磁気ディスクは、S/N比が高く、改良されたノイズ特性
を有していることがわかる。From the test results of each of the above-mentioned examples, the magnetic disk of the invention example having the magnetic film in which the M element is compositely added to the CoCr-based or CoNiCr-based alloy has a high S / N ratio and has improved noise characteristics. You can see that
〔発明の効果〕 本発明の金属薄膜型磁気記録媒体は、ノイズ特性にす
ぐれ、記録再生ノイズが低いことにより従来品を凌ぐ高
密度記録が可能であり、これにより磁気記録媒体のコウ
パクト化と高品質・高性能化等の効果を得ることができ
る。 [Advantages of the Invention] The metal thin film magnetic recording medium of the present invention has excellent noise characteristics and low recording / reproducing noise, which enables high-density recording superior to that of conventional products, thereby making the magnetic recording medium compact and high. It is possible to obtain effects such as quality and high performance.
フロントページの続き (56)参考文献 特開 昭63−64623（ＪＰ，Ａ) 特開 昭61−222023（ＪＰ，Ａ)Continuation of the front page (56) References JP-A-63-64623 (JP, A) JP-A-61-222023 (JP, A)
Claims (2)
膜が形成された面内磁化記録用磁気記録媒体において、
該金属系磁性膜が、 Co1-X-Y-ZNiXCrYMZ 〔但し、Ｍは、Ta,Nb,Vから選ばれる２種もしくは３種
の元素を表す。x,y,zは原子組成比であり、ｘは0.05〜
0.25,yは0.07〜0.14,zは0.02〜0.10である〕 で示される組成を有することを特徴とするノイズ特性に
すぐれた面内磁化記録用金属薄膜型磁気記録媒体。1. A magnetic recording medium for in-plane magnetization recording in which a metallic magnetic film is formed on a non-magnetic substrate via a Cr film,
The metal magnetic film is Co 1-XYZ Ni X Cr Y M Z [wherein M represents two or three elements selected from Ta, Nb and V]. x, y, z are atomic composition ratios, and x is 0.05 to
0.25, y is 0.07 to 0.14, and z is 0.02 to 0.10.] A metal thin film type magnetic recording medium for in-plane magnetization recording having excellent noise characteristics.
膜が形成された面内磁化記録用磁気記録媒体において、
該金属系磁性膜が、 Co1-Y-ZCrYMZ 〔但し、Ｍは、Ta,Nb,Vから選ばれる２種もしくは３種
の元素を表す。y,zは原子組成比であり、ｙは0.07〜0.1
4,zは0.02〜0.10である〕 で示される組成を有することを特徴とするノイズ特性に
すぐれた面内磁化記録用金属薄膜型磁気記録媒体。2. A magnetic recording medium for in-plane magnetization recording in which a metallic magnetic film is formed on a non-magnetic substrate via a Cr film,
The metal-based magnetic film is Co 1 -YZ Cr Y M Z [wherein M represents two or three elements selected from Ta, Nb and V]. y and z are atomic composition ratios, and y is 0.07 to 0.1
4, z is 0.02 to 0.10.] A metal thin film magnetic recording medium for in-plane magnetization recording having excellent noise characteristics, characterized in that
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1147641A JP2552546B2 (en) | 1989-06-09 | 1989-06-09 | Metal thin film magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1147641A JP2552546B2 (en) | 1989-06-09 | 1989-06-09 | Metal thin film magnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0312816A JPH0312816A (en) | 1991-01-21 |
| JP2552546B2 true JP2552546B2 (en) | 1996-11-13 |
Family
ID=15434931
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1147641A Expired - Fee Related JP2552546B2 (en) | 1989-06-09 | 1989-06-09 | Metal thin film magnetic recording medium |
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| Country | Link |
|---|---|
| JP (1) | JP2552546B2 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05109042A (en) * | 1991-10-14 | 1993-04-30 | Nec Corp | Magnetic recording medium |
| JPH05151553A (en) * | 1991-11-28 | 1993-06-18 | Nec Corp | Magnetic recording medium |
| JPH06104120A (en) * | 1992-08-03 | 1994-04-15 | Hitachi Metals Ltd | Sputtering target for magnetic recording medium and its production |
| CA2916665C (en) * | 2013-07-09 | 2018-06-05 | Mitsubishi Hitachi Power Systems, Ltd. | Combustion device with after-air port having primary and secondary nozzles |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61222023A (en) * | 1985-03-28 | 1986-10-02 | Victor Co Of Japan Ltd | Vertical magnetic recording medium |
| JPS6364623A (en) * | 1986-09-04 | 1988-03-23 | Fuji Electric Co Ltd | Magnetic recording medium |
-
1989
- 1989-06-09 JP JP1147641A patent/JP2552546B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0312816A (en) | 1991-01-21 |
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