JP7383865B2 - コイル部品及びその製造方法 - Google Patents
コイル部品及びその製造方法 Download PDFInfo
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- JP7383865B2 JP7383865B2 JP2017205483A JP2017205483A JP7383865B2 JP 7383865 B2 JP7383865 B2 JP 7383865B2 JP 2017205483 A JP2017205483 A JP 2017205483A JP 2017205483 A JP2017205483 A JP 2017205483A JP 7383865 B2 JP7383865 B2 JP 7383865B2
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- 238000004519 manufacturing process Methods 0.000 title claims description 18
- 239000004020 conductor Substances 0.000 claims description 97
- 238000007747 plating Methods 0.000 claims description 28
- 238000000034 method Methods 0.000 claims description 18
- 229910052751 metal Inorganic materials 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 14
- 239000011347 resin Substances 0.000 claims description 14
- 229920005989 resin Polymers 0.000 claims description 14
- 239000006247 magnetic powder Substances 0.000 claims description 11
- 239000000696 magnetic material Substances 0.000 claims description 8
- 239000000126 substance Substances 0.000 claims description 6
- 238000011049 filling Methods 0.000 claims description 2
- 230000000149 penetrating effect Effects 0.000 claims 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 29
- 239000010949 copper Substances 0.000 description 13
- 239000010408 film Substances 0.000 description 13
- 229910052759 nickel Inorganic materials 0.000 description 10
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 9
- 229910000859 α-Fe Inorganic materials 0.000 description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 7
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 7
- 239000011324 bead Substances 0.000 description 7
- 239000011651 chromium Substances 0.000 description 7
- 229910052802 copper Inorganic materials 0.000 description 7
- 239000000758 substrate Substances 0.000 description 5
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910052709 silver Inorganic materials 0.000 description 4
- 239000004332 silver Substances 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 239000003822 epoxy resin Substances 0.000 description 3
- 230000014509 gene expression Effects 0.000 description 3
- 229920000647 polyepoxide Polymers 0.000 description 3
- 229920001721 polyimide Polymers 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229920001187 thermosetting polymer Polymers 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 229920000106 Liquid crystal polymer Polymers 0.000 description 2
- 239000004977 Liquid-crystal polymers (LCPs) Substances 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000000805 composite resin Substances 0.000 description 2
- 238000005553 drilling Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- -1 for example Inorganic materials 0.000 description 2
- 239000003365 glass fiber Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 229920001451 polypropylene glycol Polymers 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- GMWTXQKKRDUVQG-WOPPDYDQSA-N 4-amino-5-bromo-1-[(2r,3s,4s,5r)-4-hydroxy-5-(hydroxymethyl)-3-methyloxolan-2-yl]pyrimidin-2-one Chemical compound C[C@H]1[C@H](O)[C@@H](CO)O[C@H]1N1C(=O)N=C(N)C(Br)=C1 GMWTXQKKRDUVQG-WOPPDYDQSA-N 0.000 description 1
- 229920001621 AMOLED Polymers 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 229910017082 Fe-Si Inorganic materials 0.000 description 1
- 229910017133 Fe—Si Inorganic materials 0.000 description 1
- 229910018605 Ni—Zn Inorganic materials 0.000 description 1
- 229910007565 Zn—Cu Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 239000011256 inorganic filler Substances 0.000 description 1
- 229910003475 inorganic filler Inorganic materials 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000005300 metallic glass Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 239000012779 reinforcing material Substances 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
- H01F17/0013—Printed inductances with stacked layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/28—Coils; Windings; Conductive connections
- H01F27/2804—Printed windings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/28—Coils; Windings; Conductive connections
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
- H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
- H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
- H01F1/12—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
- H01F1/14—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys
- H01F1/147—Alloys characterised by their composition
- H01F1/153—Amorphous metallic alloys, e.g. glassy metals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/04—Fixed inductances of the signal type with magnetic core
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/24—Magnetic cores
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/28—Coils; Windings; Conductive connections
- H01F27/29—Terminals; Tapping arrangements for signal inductances
- H01F27/292—Surface mounted devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/28—Coils; Windings; Conductive connections
- H01F27/32—Insulating of coils, windings, or parts thereof
- H01F27/324—Insulation between coil and core, between different winding sections, around the coil; Other insulation structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
- H01F41/041—Printed circuit coils
- H01F41/042—Printed circuit coils by thin film techniques
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
- H01F41/041—Printed circuit coils
- H01F41/046—Printed circuit coils structurally combined with ferromagnetic material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/04—Fixed inductances of the signal type with magnetic core
- H01F2017/048—Fixed inductances of the signal type with magnetic core with encapsulating core, e.g. made of resin and magnetic powder
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/28—Coils; Windings; Conductive connections
- H01F27/2804—Printed windings
- H01F2027/2809—Printed windings on stacked layers
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Coils Or Transformers For Communication (AREA)
- Manufacturing Cores, Coils, And Magnets (AREA)
Description
図1は電子機器に適用されるコイル部品の例を概略的に示す。図面を参照すると、電子機器には種々の電子部品が用いられることが分かる。例えば、アプリケーションプロセッサー(Application Processor)を中心として、DC/DC、コミュニケーションプロセッサー(Comm. Processor)、WLAN BT/WiFi(登録商標) FM GPS NFC、PMIC、電池、SMBC、LCD AMOLED、オーディオコーデック(Audio Codec)、USB2.0/3.0 HDMI(登録商標)、CAMなどが用いられることができる。この際、このような電子部品の間には、ノイズを除去するなどの目的で、種々のコイル部品がその用途に応じて適宜適用されることができる。例えば、パワーインダクター(Power Inductor)1、高周波インダクター(HF Inductor)2、通常のビーズ(General Bead)3、高周波用ビーズ(GHz Bead)4、コモンモードフィルター(Common Mode Filter)5などが挙げられる。
以下では、本発明によるコイル部品を説明するにあたり、便宜上、パワーインダクターの構造を例として説明するが、上述のような他の様々な用途のコイル部品にも本発明のコイル部品が適用可能であることは言うまでもない。
図2Bはコイル部品の一例を示す概略的な斜視図である。
2 高周波インダクター
3 通常のビーズ
4 高周波用ビーズ
5 コモンモードフィルター
100 コイル部品
10 本体
15 貫通孔
20 支持部材
21、22 コイルパターン
21a、22a 第1導体層
21b、22b 第2導体層
23 ビア
24、25 絶縁膜
31、32 外部電極
Claims (15)
- 磁性物質を含む本体と、
前記本体の内部に配置された支持部材と、
前記本体の内部の前記支持部材上に配置されたコイルパターンと、を含むコイル部品であって、
前記コイルパターンは、平面渦巻き状を有する第1導体層と、前記支持部材の少なくとも一部及び前記第1導体層を覆い、厚さが線幅よりも大きい第2導体層と、を含み、
前記本体の厚さ方向及び幅方向の断面視において、
前記第1導体層の最外側パターン及び最内側パターンの線幅が、前記最外側パターンと前記最内側パターンとの間に配置された少なくとも1つの内部パターンの線幅よりも狭く、
前記第2導体層は前記第1導体層の上面及び側面を覆う、コイル部品。 - 前記少なくとも1つの内部パターンは、厚さが線幅よりも小さい、請求項1に記載のコイル部品。
- 前記本体の厚さ方向及び幅方向の断面視において、
前記第1導体層の上面と前記第2導体層の上面との間の距離が、前記第1導体層の側面と前記第2導体層の側面との間の距離よりも大きい、請求項2に記載のコイル部品。 - 前記コイルパターンは、前記支持部材の上面及び下面にそれぞれ形成された第1コイルパターン及び第2コイルパターンを含み、
前記第1コイルパターン及び前記第2コイルパターンはそれぞれ前記第1導体層及び前記第2導体層を含む、請求項1から3のいずれか一項に記載のコイル部品。 - 前記第1コイルパターン及び前記第2コイルパターンは、前記支持部材を貫通するビアを介して連結されている、請求項4に記載のコイル部品。
- 前記第2導体層を覆う絶縁膜をさらに含む、請求項1から5のいずれか一項に記載のコイル部品。
- 前記磁性物質は金属磁性体粉末及び絶縁樹脂を含む、請求項1から6のいずれか一項に記載のコイル部品。
- 前記支持部材の中央部には貫通孔が形成されており、
前記貫通孔には前記磁性物質が充填されている、請求項1から7のいずれか一項に記載のコイル部品。 - 前記本体上に配置され、前記コイルパターンと電気的に連結された外部電極をさらに含む、請求項1から8のいずれか一項に記載のコイル部品。
- 前記第2導体層は1.2以上のアスペクト比を有する、請求項1から9のいずれか一項に記載のコイル部品。
- 前記ビアは円筒状を有する、請求項5に記載のコイル部品。
- 前記ビアは砂時計状を有する、請求項5に記載のコイル部品。
- 支持部材上にコイルパターンを形成する段階と、
前記支持部材を磁性物質で覆って本体を形成する段階と、を含むコイル部品の製造方法であって、
前記コイルパターンを形成する段階は、前記支持部材上に平面渦巻き状を有する第1導体層を形成する段階と、前記支持部材上に、前記支持部材の少なくとも一部及び前記第1導体層を覆い、厚さが線幅よりも大きい第2導体層を形成する段階と、を含み、
前記本体の厚さ方向及び幅方向の断面視において、
前記第1導体層の最外側パターン及び最内側パターンの線幅が、前記最外側パターンと前記最内側パターンとの間に配置された少なくとも1つの内部パターンの線幅よりも狭く、
前記第2導体層は前記第1導体層の上面及び側面を覆う、コイル部品の製造方法。 - 前記第1導体層を形成する段階は、
前記支持部材上に平面渦巻き状の開口部を有するレジストを形成する段階と、
前記開口部をめっきにより満たして第1導体層を形成する段階と、
前記レジストを除去する段階と、を含む、請求項13に記載のコイル部品の製造方法。 - 前記第2導体層を形成する段階は、
前記第1導体層の最外側及び最内側パターンの側部にダムを形成する段階と、
前記支持部材上に、前記第1導体層を引込線として用いて、幅方向に比べて厚さ方向の成長が大きいようにめっきを行うことで、前記第2導体層を形成する段階と、
前記ダムを除去する段階と、を含む、請求項14に記載のコイル部品の製造方法。
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KR1020170010480A KR102674655B1 (ko) | 2017-01-23 | 2017-01-23 | 코일부품 및 그 제조방법 |
KR10-2017-0010480 | 2017-01-23 |
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KR101830329B1 (ko) * | 2016-07-19 | 2018-02-21 | 주식회사 모다이노칩 | 파워 인덕터 |
JP2019165169A (ja) * | 2018-03-20 | 2019-09-26 | 太陽誘電株式会社 | コイル部品及び電子機器 |
KR102025709B1 (ko) * | 2018-11-26 | 2019-09-26 | 삼성전기주식회사 | 코일 부품 |
JP7369526B2 (ja) * | 2019-01-24 | 2023-10-26 | 太陽誘電株式会社 | コイル部品 |
KR102224311B1 (ko) * | 2019-07-29 | 2021-03-08 | 삼성전기주식회사 | 코일 부품 |
KR20210073286A (ko) * | 2019-12-10 | 2021-06-18 | 삼성전기주식회사 | 코일 부품 |
KR102253471B1 (ko) | 2020-01-21 | 2021-05-18 | 삼성전기주식회사 | 코일 부품 |
KR102276386B1 (ko) * | 2020-01-28 | 2021-07-13 | 삼성전기주식회사 | 코일 부품 |
KR102381269B1 (ko) * | 2020-04-27 | 2022-03-30 | 삼성전기주식회사 | 코일 부품 |
WO2021258303A1 (zh) * | 2020-06-23 | 2021-12-30 | 庆鼎精密电子(淮安)有限公司 | 相机模组及其制备方法 |
JP2022034441A (ja) * | 2020-08-18 | 2022-03-03 | Tdk株式会社 | コイル部品及びこれを用いた無線通信回路 |
JP7435387B2 (ja) * | 2020-09-28 | 2024-02-21 | Tdk株式会社 | 積層コイル部品 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2014197590A (ja) | 2013-03-29 | 2014-10-16 | Tdk株式会社 | コイル部品 |
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