JP7222245B2 - 気密パッケージ - Google Patents
気密パッケージ Download PDFInfo
- Publication number
- JP7222245B2 JP7222245B2 JP2018567411A JP2018567411A JP7222245B2 JP 7222245 B2 JP7222245 B2 JP 7222245B2 JP 2018567411 A JP2018567411 A JP 2018567411A JP 2018567411 A JP2018567411 A JP 2018567411A JP 7222245 B2 JP7222245 B2 JP 7222245B2
- Authority
- JP
- Japan
- Prior art keywords
- sealing material
- material layer
- package
- glass
- sealing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000003566 sealing material Substances 0.000 claims description 164
- 239000011521 glass Substances 0.000 claims description 121
- 239000000843 powder Substances 0.000 claims description 74
- 239000002131 composite material Substances 0.000 claims description 33
- 239000000945 filler Substances 0.000 claims description 25
- 239000000758 substrate Substances 0.000 claims description 24
- 229910052797 bismuth Inorganic materials 0.000 claims description 17
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims description 17
- 229910015902 Bi 2 O 3 Inorganic materials 0.000 claims description 12
- 239000002241 glass-ceramic Substances 0.000 claims description 9
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 7
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 5
- 239000006096 absorbing agent Substances 0.000 claims description 4
- 239000010410 layer Substances 0.000 description 158
- 238000007789 sealing Methods 0.000 description 56
- 239000002585 base Substances 0.000 description 51
- 230000007423 decrease Effects 0.000 description 16
- 238000004031 devitrification Methods 0.000 description 15
- 239000002245 particle Substances 0.000 description 13
- 239000000203 mixture Substances 0.000 description 10
- 230000003746 surface roughness Effects 0.000 description 10
- 238000000034 method Methods 0.000 description 8
- 239000011347 resin Substances 0.000 description 8
- 229920005989 resin Polymers 0.000 description 8
- 239000003981 vehicle Substances 0.000 description 8
- 230000008961 swelling Effects 0.000 description 7
- 239000011358 absorbing material Substances 0.000 description 5
- 239000012298 atmosphere Substances 0.000 description 5
- 238000003825 pressing Methods 0.000 description 5
- 239000002904 solvent Substances 0.000 description 5
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 4
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- -1 polymethylstyrene Polymers 0.000 description 4
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- MTHSVFCYNBDYFN-UHFFFAOYSA-N anhydrous diethylene glycol Natural products OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 229910000174 eucryptite Inorganic materials 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000001000 micrograph Methods 0.000 description 3
- 239000000049 pigment Substances 0.000 description 3
- 239000002344 surface layer Substances 0.000 description 3
- CXWXQJXEFPUFDZ-UHFFFAOYSA-N tetralin Chemical compound C1=CC=C2CCCCC2=C1 CXWXQJXEFPUFDZ-UHFFFAOYSA-N 0.000 description 3
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- 239000001856 Ethyl cellulose Substances 0.000 description 2
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical class CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 2
- 229910018068 Li 2 O Inorganic materials 0.000 description 2
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 2
- 239000005388 borosilicate glass Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 229910052878 cordierite Inorganic materials 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- JSKIRARMQDRGJZ-UHFFFAOYSA-N dimagnesium dioxido-bis[(1-oxido-3-oxo-2,4,6,8,9-pentaoxa-1,3-disila-5,7-dialuminabicyclo[3.3.1]nonan-7-yl)oxy]silane Chemical compound [Mg++].[Mg++].[O-][Si]([O-])(O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2)O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2 JSKIRARMQDRGJZ-UHFFFAOYSA-N 0.000 description 2
- 229920001249 ethyl cellulose Polymers 0.000 description 2
- 235000019325 ethyl cellulose Nutrition 0.000 description 2
- MLFHJEHSLIIPHL-UHFFFAOYSA-N isoamyl acetate Chemical compound CC(C)CCOC(C)=O MLFHJEHSLIIPHL-UHFFFAOYSA-N 0.000 description 2
- 238000007561 laser diffraction method Methods 0.000 description 2
- 230000031700 light absorption Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000007517 polishing process Methods 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- WUOACPNHFRMFPN-SECBINFHSA-N (S)-(-)-alpha-terpineol Chemical compound CC1=CC[C@@H](C(C)(C)O)CC1 WUOACPNHFRMFPN-SECBINFHSA-N 0.000 description 1
- CUVLMZNMSPJDON-UHFFFAOYSA-N 1-(1-butoxypropan-2-yloxy)propan-2-ol Chemical compound CCCCOCC(C)OCC(C)O CUVLMZNMSPJDON-UHFFFAOYSA-N 0.000 description 1
- VXQBJTKSVGFQOL-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethyl acetate Chemical compound CCCCOCCOCCOC(C)=O VXQBJTKSVGFQOL-UHFFFAOYSA-N 0.000 description 1
- FPZWZCWUIYYYBU-UHFFFAOYSA-N 2-(2-ethoxyethoxy)ethyl acetate Chemical compound CCOCCOCCOC(C)=O FPZWZCWUIYYYBU-UHFFFAOYSA-N 0.000 description 1
- JDSQBDGCMUXRBM-UHFFFAOYSA-N 2-[2-(2-butoxypropoxy)propoxy]propan-1-ol Chemical compound CCCCOC(C)COC(C)COC(C)CO JDSQBDGCMUXRBM-UHFFFAOYSA-N 0.000 description 1
- WAEVWDZKMBQDEJ-UHFFFAOYSA-N 2-[2-(2-methoxypropoxy)propoxy]propan-1-ol Chemical compound COC(C)COC(C)COC(C)CO WAEVWDZKMBQDEJ-UHFFFAOYSA-N 0.000 description 1
- QCAHUFWKIQLBNB-UHFFFAOYSA-N 3-(3-methoxypropoxy)propan-1-ol Chemical compound COCCCOCCCO QCAHUFWKIQLBNB-UHFFFAOYSA-N 0.000 description 1
- MFKRHJVUCZRDTF-UHFFFAOYSA-N 3-methoxy-3-methylbutan-1-ol Chemical compound COC(C)(C)CCO MFKRHJVUCZRDTF-UHFFFAOYSA-N 0.000 description 1
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 239000000020 Nitrocellulose Substances 0.000 description 1
- 239000002202 Polyethylene glycol Chemical class 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 125000005396 acrylic acid ester group Chemical group 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- OVKDFILSBMEKLT-UHFFFAOYSA-N alpha-Terpineol Natural products CC(=C)C1(O)CCC(C)=CC1 OVKDFILSBMEKLT-UHFFFAOYSA-N 0.000 description 1
- 229940088601 alpha-terpineol Drugs 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000007496 glass forming Methods 0.000 description 1
- 150000002334 glycols Chemical class 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 229940117955 isoamyl acetate Drugs 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 239000005340 laminated glass Substances 0.000 description 1
- 238000013035 low temperature curing Methods 0.000 description 1
- 239000002075 main ingredient Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000005499 meniscus Effects 0.000 description 1
- 125000005397 methacrylic acid ester group Chemical group 0.000 description 1
- 229910000484 niobium oxide Inorganic materials 0.000 description 1
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 1
- 229920001220 nitrocellulos Polymers 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- WVDDGKGOMKODPV-ZQBYOMGUSA-N phenyl(114C)methanol Chemical compound O[14CH2]C1=CC=CC=C1 WVDDGKGOMKODPV-ZQBYOMGUSA-N 0.000 description 1
- 229920001223 polyethylene glycol Chemical class 0.000 description 1
- 229920000379 polypropylene carbonate Polymers 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- RUOJZAUFBMNUDX-UHFFFAOYSA-N propylene carbonate Chemical compound CC1COC(=O)O1 RUOJZAUFBMNUDX-UHFFFAOYSA-N 0.000 description 1
- 239000005361 soda-lime glass Substances 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 239000002562 thickening agent Substances 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- JLGLQAWTXXGVEM-UHFFFAOYSA-N triethylene glycol monomethyl ether Chemical compound COCCOCCOCCO JLGLQAWTXXGVEM-UHFFFAOYSA-N 0.000 description 1
- YFNKIDBQEZZDLK-UHFFFAOYSA-N triglyme Chemical compound COCCOCCOCCOC YFNKIDBQEZZDLK-UHFFFAOYSA-N 0.000 description 1
- 229910052844 willemite Inorganic materials 0.000 description 1
- 229910052845 zircon Inorganic materials 0.000 description 1
- 229910000166 zirconium phosphate Inorganic materials 0.000 description 1
- LEHFSLREWWMLPU-UHFFFAOYSA-B zirconium(4+);tetraphosphate Chemical compound [Zr+4].[Zr+4].[Zr+4].[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O LEHFSLREWWMLPU-UHFFFAOYSA-B 0.000 description 1
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 1
- 229910000500 β-quartz Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/483—Containers
- H01L33/486—Containers adapted for surface mounting
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/88—Mounts; Supports; Enclosures; Casings
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C8/00—Enamels; Glazes; Fusion seal compositions being frit compositions having non-frit additions
- C03C8/24—Fusion seal compositions being frit compositions having non-frit additions, i.e. for use as seals between dissimilar materials, e.g. glass and metal; Glass solders
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/04—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/06—Containers; Seals characterised by the material of the container or its electrical properties
- H01L23/08—Containers; Seals characterised by the material of the container or its electrical properties the material being an electrical insulator, e.g. glass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/10—Containers; Seals characterised by the material or arrangement of seals between parts, e.g. between cap and base of the container or between leads and walls of the container
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
- H01L23/14—Mountings, e.g. non-detachable insulating substrates characterised by the material or its electrical properties
- H01L23/15—Ceramic or glass substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
- H01L23/291—Oxides or nitrides or carbides, e.g. ceramics, glass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/161—Cap
- H01L2924/1615—Shape
- H01L2924/16195—Flat cap [not enclosing an internal cavity]
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Glass Compositions (AREA)
- Electroluminescent Light Sources (AREA)
Description
10 パッケージ基体
11 ガラス蓋
12 基部
13 枠部
14 内部素子(例えば、深紫外LED素子)
15 封着材料層
16 封着材料層の内側端部
17 封着材料層の外側端部
18 レーザー照射装置
L レーザー光
Claims (6)
- パッケージ基体とガラス蓋とが封着材料層を介して気密封着された気密パッケージにおいて、
パッケージ基体が、基部と基部上に設けられた枠部とを有し、
パッケージ基体の枠部内に、内部素子が収容されており、
パッケージ基体の枠部の頂部とガラス蓋の間に封着材料層が配されており、
封着材料層の端部が、断面視で円弧状に側方に突き出ており、
封着材料層が、少なくともビスマス系ガラス粉末と耐火性フィラー粉末を含む複合粉末の焼結体であり、
ビスマス系ガラス粉末が、モル%で、Bi2O3 28~60%、B2O3 15~37%、ZnO 1~30%、CuO 1~40%、Fe 2 O 3 0.1~10%を含有することを特徴とする気密パッケージ。 - 封着材料層の平均厚みを封着材料層の最大幅で除した値が0.003以上であることを特徴とする請求項1に記載の気密パッケージ。
- 封着材料層が、枠部の頂部の内側端縁から離間した位置に形成されると共に、枠部の頂部の外側端縁から離間した位置に形成されていることを特徴とする請求項1又は2に記載の気密パッケージ。
- 封着材料層の平均厚みが8.0μm未満であると共に、封着材料層の最大幅が1~1000μmであることを特徴とする請求項1~3の何れかに記載の気密パッケージ。
- 封着材料層が、実質的にレーザー吸収材を含んでいないことを特徴とする請求項1~4の何れかに記載の気密パッケージ。
- パッケージ基体が、ガラス、ガラスセラミック、窒化アルミニウム、酸化アルミニウムの何れか、或いはこれらの複合材料であることを特徴とする請求項1~5の何れかに記載の気密パッケージ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017020004 | 2017-02-07 | ||
JP2017020004 | 2017-02-07 | ||
PCT/JP2018/003753 WO2018147210A1 (ja) | 2017-02-07 | 2018-02-05 | 気密パッケージ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2018147210A1 JPWO2018147210A1 (ja) | 2019-12-19 |
JP7222245B2 true JP7222245B2 (ja) | 2023-02-15 |
Family
ID=63108210
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018567411A Active JP7222245B2 (ja) | 2017-02-07 | 2018-02-05 | 気密パッケージ |
Country Status (6)
Country | Link |
---|---|
US (1) | US11871676B2 (ja) |
JP (1) | JP7222245B2 (ja) |
KR (1) | KR102414498B1 (ja) |
CN (1) | CN110249421B (ja) |
TW (1) | TW201839918A (ja) |
WO (1) | WO2018147210A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI692125B (zh) * | 2018-12-05 | 2020-04-21 | 大陸商光寶光電(常州)有限公司 | 發光封裝結構及其製造方法 |
CN111276588B (zh) * | 2018-12-05 | 2021-09-28 | 光宝光电(常州)有限公司 | 发光封装结构及其制造方法 |
KR102566572B1 (ko) | 2022-12-08 | 2023-08-16 | 주식회사 엔유씨전자 | 식품 가공기 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006143585A (ja) | 2005-12-09 | 2006-06-08 | Nippon Electric Glass Co Ltd | ビスマス系ガラス混合物 |
JP2016027610A (ja) | 2014-06-27 | 2016-02-18 | 旭硝子株式会社 | パッケージ基板、パッケージ、および電子デバイス |
WO2016136899A1 (ja) | 2015-02-26 | 2016-09-01 | 日本電気硝子株式会社 | 気密パッケージの製造方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4775647A (en) * | 1984-09-19 | 1988-10-04 | Olin Corporation | Sealing glass composite |
JPH05226493A (ja) * | 1992-01-08 | 1993-09-03 | Nec Corp | ガラス封止型集積回路 |
JP3814810B2 (ja) * | 1996-04-05 | 2006-08-30 | 日本電気硝子株式会社 | ビスマス系ガラス組成物 |
KR100442830B1 (ko) | 2001-12-04 | 2004-08-02 | 삼성전자주식회사 | 저온의 산화방지 허메틱 실링 방법 |
EP2460780A4 (en) * | 2009-07-31 | 2013-12-04 | Asahi Glass Co Ltd | SEALING GLASS, SEALING MATERIAL AND PASTE FOR SEALING MATERIAL FOR SEMICONDUCTOR DEVICES, AND SEMICONDUCTOR DEVICE AND PRODUCTION METHOD THEREOF |
WO2013015414A1 (ja) * | 2011-07-27 | 2013-01-31 | 日本電気硝子株式会社 | 封着材料層付きガラス基板、これを用いた有機elデバイス、及び電子デバイスの製造方法 |
JP2013239609A (ja) | 2012-05-16 | 2013-11-28 | Asahi Glass Co Ltd | 気密部材とその製造方法 |
JP2014236202A (ja) | 2013-06-05 | 2014-12-15 | 旭硝子株式会社 | 発光装置 |
JP6237989B2 (ja) * | 2013-07-24 | 2017-11-29 | 日本電気硝子株式会社 | 電気素子パッケージの製造方法及び電気素子パッケージ |
WO2015060248A1 (ja) * | 2013-10-21 | 2015-04-30 | 日本電気硝子株式会社 | 封着材料 |
JP2016086049A (ja) * | 2014-10-24 | 2016-05-19 | セイコーエプソン株式会社 | パッケージ、パッケージの製造方法、電子デバイス、電子機器及び移動体 |
US20190296194A1 (en) * | 2016-06-10 | 2019-09-26 | Nippon Electric Glass Co., Ltd. | Method for producing hermetic package, and hermetic package |
JP6913276B2 (ja) * | 2017-01-26 | 2021-08-04 | 日本電気硝子株式会社 | 気密パッケージ |
-
2018
- 2018-02-05 CN CN201880010453.9A patent/CN110249421B/zh active Active
- 2018-02-05 TW TW107104000A patent/TW201839918A/zh unknown
- 2018-02-05 US US16/482,764 patent/US11871676B2/en active Active
- 2018-02-05 KR KR1020197017896A patent/KR102414498B1/ko active IP Right Grant
- 2018-02-05 WO PCT/JP2018/003753 patent/WO2018147210A1/ja active Application Filing
- 2018-02-05 JP JP2018567411A patent/JP7222245B2/ja active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006143585A (ja) | 2005-12-09 | 2006-06-08 | Nippon Electric Glass Co Ltd | ビスマス系ガラス混合物 |
JP2016027610A (ja) | 2014-06-27 | 2016-02-18 | 旭硝子株式会社 | パッケージ基板、パッケージ、および電子デバイス |
WO2016136899A1 (ja) | 2015-02-26 | 2016-09-01 | 日本電気硝子株式会社 | 気密パッケージの製造方法 |
Also Published As
Publication number | Publication date |
---|---|
KR20190112716A (ko) | 2019-10-07 |
US11871676B2 (en) | 2024-01-09 |
CN110249421A (zh) | 2019-09-17 |
JPWO2018147210A1 (ja) | 2019-12-19 |
CN110249421B (zh) | 2023-10-24 |
TW201839918A (zh) | 2018-11-01 |
KR102414498B1 (ko) | 2022-06-29 |
US20190355893A1 (en) | 2019-11-21 |
WO2018147210A1 (ja) | 2018-08-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6819943B2 (ja) | 気密パッケージの製造方法及び気密パッケージ | |
WO2017179381A1 (ja) | 気密パッケージの製造方法及び気密パッケージ | |
JP7222245B2 (ja) | 気密パッケージ | |
JP7168903B2 (ja) | 気密パッケージ | |
WO2018139148A1 (ja) | 気密パッケージ | |
WO2018155373A1 (ja) | パッケージ基体及びそれを用いた気密パッケージ | |
WO2018216587A1 (ja) | 気密パッケージの製造方法及び気密パッケージ | |
JP7169739B2 (ja) | ビスマス系ガラス粉末、封着材料及び気密パッケージ | |
WO2018173834A1 (ja) | カバーガラス及び気密パッケージ | |
JP6944642B2 (ja) | 気密パッケージの製造方法及び気密パッケージ | |
JP6819933B2 (ja) | 気密パッケージ及びその製造方法 | |
JP6922253B2 (ja) | ガラス蓋 | |
WO2018131471A1 (ja) | 気密パッケージ及びガラス蓋 | |
JP7047270B2 (ja) | 封着材料層付きパッケージ基体の製造方法及び気密パッケージの製造方法 | |
WO2018193767A1 (ja) | カバーガラス及びこれを用いた気密パッケージ |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20210106 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20220314 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220401 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20220819 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220902 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20230104 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20230117 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7222245 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |