JP7192723B2 - 物品搬送設備 - Google Patents
物品搬送設備 Download PDFInfo
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0407—Storage devices mechanical using stacker cranes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0407—Storage devices mechanical using stacker cranes
- B65G1/0421—Storage devices mechanical using stacker cranes with control for stacker crane operations
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0457—Storage devices mechanical with suspended load carriers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/137—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed
- B65G1/1373—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed for fulfilling orders in warehouses
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67775—Docking arrangements
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
- B65G2203/02—Control or detection
- B65G2203/0208—Control or detection relating to the transported articles
- B65G2203/0233—Position of the article
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
- B65G2203/04—Detection means
- B65G2203/042—Sensors
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- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Automation & Control Theory (AREA)
- Human Computer Interaction (AREA)
- Warehouses Or Storage Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
以下、本発明にかかる物品搬送設備の実施形態について図面に基づいて説明する。
図1及び図2に示すように、物品搬送設備は、物品Wを収容する収容部1Aを複数備えた物品収容棚1と、物品Wを搬送するスタッカークレーン2と、を備えている。また、図1に示すように、物品搬送設備は、物品収容棚1やスタッカークレーン2が設置される領域の周囲を覆う壁体Kと、壁体Kを貫通する状態で設置されて物品Wを搬送する搬送コンベヤ4と、を備えている。尚、本実施形態では、物品Wを、半導体基板(ウェハ)を収容したFOUP(Front Opening Unified Pod)としている。
図4及び図5に示すように、物品Wは、半導体基板を収容する本体部12と、物品Wの上端部に備えられているフランジ部13と、本体部12の前面に形成された開口(図示せず)を閉じる着脱自在な蓋体(図示せず)と、を備えている。物品Wの底面16には、上方に窪む3つの溝状の被係合部17が形成されている。
図1及び図2に示すように、物品収容棚1は、上下方向Z及び左右方向Yに並ぶ状態で複数の収容部1Aを備えている。複数の収容部1Aの夫々は、収容した物品Wを支持する収容支持体21を備えている。収容支持体21は、物品Wの底面16を下方から支持するように構成されている。説明を加えると、図4及び図5に示すように、収容支持体21は、物品Wの被係合部17に下方から係合する3つの収容突起部21Aを備えている。そして、収容支持体21は、3つの収容突起部21Aが物品Wの被係合部17に下方から係合した状態で、物品Wの底面16を下方から支持するように構成されている。
図1及び図2に示すように、スタッカークレーン2は、左右方向Yに沿って走行する走行台車31と、走行台車31に立設されたマスト32と、マスト32に沿って昇降する昇降体33と、昇降体33に支持された移載装置34と、被検出部23を検出する検出部35と、を備えている。
物品搬送設備は、スタッカークレーン2及び表示部46を制御する制御部Hを備えている。制御部Hは、搬送コンベヤ4の内側箇所4Bと物品収容棚1の収容部1Aとの間で物品Wを搬送するように、スタッカークレーン2を制御する。また、制御部Hは、複数の収容部1Aの夫々について、物品Wの収容を許可する許可収容部51及び物品Wの収容を禁止する禁止収容部52のいずれであるか、を管理している。更に、制御部Hは、1つ又は複数の許可収容部51の夫々について、物品Wを収容していない空収容部53及び物品Wを収容している実収容部54のいずれであるか、を管理している。制御部Hは、複数の収容部1Aの夫々について許可収容部51及び禁止収容部52の何れであるかを示す情報である許可/禁止設定情報58と、1つ又は複数の許可収容部51の夫々について空収容部53及び実収容部54の何れかであるかを示す情報である空/実設定情報59と、を記憶部60に記憶している。
次に、物品搬送設備のその他の実施形態について説明する。
以下、上記において説明した物品搬送設備の概要について説明する。
1A:収容部
2:スタッカークレーン(搬送装置)
16:底面
21:収容支持体
23:被検出部
34:移載装置(移載部)
35:検出部
37:搬送支持部
51:許可収容部
52:禁止収容部
55:選択収容部
H:制御部
W:物品
Y:左右方向
Y1:右方向側
Y2:左方向側
Z:上下方向
Z2:下方向側
Claims (5)
- 上下方向及び左右方向に並ぶ状態で複数の収容部を備えた物品収容棚と、
前記収容部に物品を搬送する搬送装置と、
前記搬送装置を制御する制御部と、を備え、
複数の前記収容部の夫々は、収容した物品を支持する収容支持体を備え、
前記搬送装置は、物品を支持する搬送支持部と、前記搬送支持部が前記収容部に対応する対応位置にある状態で前記搬送支持部から前記収容部に物品を移載する移載部と、前記搬送支持部が前記対応位置にある状態で前記収容支持体に備えられた被検出部を検出する検出部と、を備え、
前記制御部は、
複数の前記収容部の夫々について、物品の収容を許可する許可収容部及び物品の収容を禁止する禁止収容部のいずれであるかを設定する設定制御と、
複数の前記収容部のうちの前記許可収容部に設定されている前記収容部の1つを、選択収容部として選択する選択制御と、
前記搬送支持部を前記選択収容部に対応する前記対応位置に移動させるように前記搬送装置を制御する移動制御と、
前記移動制御の後に前記検出部によって前記被検出部が検出されたか否かを判定する判定制御と、
前記判定制御において前記被検出部が検出されたと判定した場合に、前記搬送支持部から、前記選択収容部が備える前記収容支持体に物品を移載するように前記搬送装置を制御する移載制御と、
前記判定制御において前記被検出部が検出されなかったと判定した場合に、前記選択収容部と、当該選択収容部に対して予め設定された位置関係にある前記収容部である関連収容部と、を前記禁止収容部に設定する更新設定制御と、を実行すると共に、
前記更新設定制御の後に、前記選択制御を再び実行して、複数の前記収容部のうちの前記許可収容部に設定されている前記収容部の1つを、新たな前記選択収容部として選択し、新たに選択された前記選択収容部に対応する前記対応位置に前記搬送支持部を移動させるように前記移動制御を実行する、物品搬送設備。 - 前記収容支持体は、物品の底面を下方から支持するように構成され、
前記関連収容部は、前記判定制御において前記被検出部が検出されなかったと判定した前記選択収容部に対して、下方向側、右方向側、及び左方向側に隣接する前記収容部である、請求項1に記載の物品搬送設備。 - 前記制御部は、前記更新設定制御を実行する場合において前記関連収容部に既に物品が収容されている場合には、前記搬送装置の作動を停止させる非常停止制御を実行する、請求項1又は2に記載の物品搬送設備。
- 前記制御部は、前記更新設定制御の直後に実行した前記選択制御及び前記移動制御に続く前記判定制御において、前記被検出部が検出されなかったと判定した場合には、前記搬送装置の作動を停止させる非常停止制御を実行する、請求項1から3のいずれか一項に記載の物品搬送設備。
- 前記判定制御では、前記搬送支持部が前記対応位置にある状態で前記検出部によって前記被検出部が検出されなかった場合、前記検出部の位置を規定範囲で移動させる走査制御を実行し、前記走査制御を実行しても前記検出部によって前記被検出部が検出されなかった場合に、前記被検出部が検出されなかったと判定する、請求項1から4のいずれか一項に記載の物品搬送設備。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019166398A JP7192723B2 (ja) | 2019-09-12 | 2019-09-12 | 物品搬送設備 |
TW109129207A TW202112632A (zh) | 2019-09-12 | 2020-08-26 | 物品搬送設備 |
KR1020200116814A KR20210031626A (ko) | 2019-09-12 | 2020-09-11 | 물품 반송 설비 |
CN202010952661.XA CN112478543B (zh) | 2019-09-12 | 2020-09-11 | 物品搬送设备 |
US17/017,968 US11345541B2 (en) | 2019-09-12 | 2020-09-11 | Article transport facility |
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JP2019166398A JP7192723B2 (ja) | 2019-09-12 | 2019-09-12 | 物品搬送設備 |
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JP2021042053A JP2021042053A (ja) | 2021-03-18 |
JP2021042053A5 JP2021042053A5 (ja) | 2021-05-27 |
JP7192723B2 true JP7192723B2 (ja) | 2022-12-20 |
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JP (1) | JP7192723B2 (ja) |
KR (1) | KR20210031626A (ja) |
CN (1) | CN112478543B (ja) |
TW (1) | TW202112632A (ja) |
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JP7147851B2 (ja) * | 2018-08-06 | 2022-10-05 | 村田機械株式会社 | 自動倉庫、及び、搬送装置 |
JP7322924B2 (ja) * | 2021-05-28 | 2023-08-08 | 株式会社ダイフク | 物品収容設備 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010064850A (ja) | 2008-09-10 | 2010-03-25 | Daifuku Co Ltd | 物品収納設備における学習装置 |
JP2010083593A (ja) | 2008-09-29 | 2010-04-15 | Daifuku Co Ltd | 物品収納設備における学習装置 |
JP2018039665A (ja) | 2016-09-09 | 2018-03-15 | 株式会社ダイフク | 物品搬送設備 |
JP2018065686A (ja) | 2016-10-21 | 2018-04-26 | 株式会社ダイフク | 物品搬送設備 |
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JP2010083593A (ja) | 2008-09-29 | 2010-04-15 | Daifuku Co Ltd | 物品収納設備における学習装置 |
JP2018039665A (ja) | 2016-09-09 | 2018-03-15 | 株式会社ダイフク | 物品搬送設備 |
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TW202112632A (zh) | 2021-04-01 |
CN112478543A (zh) | 2021-03-12 |
KR20210031626A (ko) | 2021-03-22 |
US20210078801A1 (en) | 2021-03-18 |
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