JP7153525B2 - X線検査装置 - Google Patents
X線検査装置 Download PDFInfo
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- JP7153525B2 JP7153525B2 JP2018193331A JP2018193331A JP7153525B2 JP 7153525 B2 JP7153525 B2 JP 7153525B2 JP 2018193331 A JP2018193331 A JP 2018193331A JP 2018193331 A JP2018193331 A JP 2018193331A JP 7153525 B2 JP7153525 B2 JP 7153525B2
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- 238000007689 inspection Methods 0.000 title claims description 58
- 238000001514 detection method Methods 0.000 claims description 66
- 238000003491 array Methods 0.000 claims description 15
- 230000005540 biological transmission Effects 0.000 claims description 4
- 230000032258 transport Effects 0.000 description 17
- 230000035945 sensitivity Effects 0.000 description 6
- 238000003384 imaging method Methods 0.000 description 5
- 230000010354 integration Effects 0.000 description 4
- MARUHZGHZWCEQU-UHFFFAOYSA-N 5-phenyl-2h-tetrazole Chemical compound C1=CC=CC=C1C1=NNN=N1 MARUHZGHZWCEQU-UHFFFAOYSA-N 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000003111 delayed effect Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 241000251468 Actinopterygii Species 0.000 description 1
- 230000010485 coping Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 235000019688 fish Nutrition 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 235000020995 raw meat Nutrition 0.000 description 1
- 235000021067 refined food Nutrition 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V5/00—Prospecting or detecting by the use of ionising radiation, e.g. of natural or induced radioactivity
- G01V5/20—Detecting prohibited goods, e.g. weapons, explosives, hazardous substances, contraband or smuggled objects
- G01V5/22—Active interrogation, i.e. by irradiating objects or goods using external radiation sources, e.g. using gamma rays or cosmic rays
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
- G01T1/2914—Measurement of spatial distribution of radiation
- G01T1/2964—Scanners
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
- G01N23/083—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption the radiation being X-rays
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/02—Food
- G01N33/12—Meat; Fish
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
- G01T1/2018—Scintillation-photodiode combinations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/03—Investigating materials by wave or particle radiation by transmission
- G01N2223/04—Investigating materials by wave or particle radiation by transmission and measuring absorption
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/30—Accessories, mechanical or electrical features
- G01N2223/33—Accessories, mechanical or electrical features scanning, i.e. relative motion for measurement of successive object-parts
- G01N2223/3308—Accessories, mechanical or electrical features scanning, i.e. relative motion for measurement of successive object-parts object translates
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/60—Specific applications or type of materials
- G01N2223/618—Specific applications or type of materials food
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/60—Specific applications or type of materials
- G01N2223/643—Specific applications or type of materials object on conveyor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/60—Specific applications or type of materials
- G01N2223/652—Specific applications or type of materials impurities, foreign matter, trace amounts
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/02—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
- H05G1/08—Electrical details
- H05G1/10—Power supply arrangements for feeding the X-ray tube
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- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- High Energy & Nuclear Physics (AREA)
- Pathology (AREA)
- General Health & Medical Sciences (AREA)
- Molecular Biology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Immunology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Toxicology (AREA)
- Food Science & Technology (AREA)
- Engineering & Computer Science (AREA)
- Medicinal Chemistry (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geophysics (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Description
11 X線照射部
11b X線管
13 コリメータ
15 X線ラインセンサ
15a 検出素子列
31 撮像条件入力部(指定部)
33 画像データ処理部(判定部)
34 処理結果表示部(表示部)
35 タッチパネル
W 被検査物
Claims (2)
- 搬送される被検査物にX線を照射し、前記被検査物を透過するX線透過量に基づいて前記被検査物を検査するX線検査装置であって、
X線を発生するX線管を有するX線照射部と、
前記被検査物の搬送方向の平面上で前記搬送方向に直交する主走査方向に直線状に配置された複数の検出素子からなる検出素子列を、前記搬送方向に沿って複数段有するX線ラインセンサと、
前記X線ラインセンサに対するX線の照射領域を制限するコリメータと、
前記コリメータにより制限された前記照射領域内で、かつ、X線を効率良く検出する前記検出素子列の位置に基づき、検査に使用する前記検出素子列の位置を指定する指定部と、
複数段の前記検出素子列により検出したX線の前記搬送方向の検出量の分布を前記検出素子列の位置を横軸とするグラフで表示する表示部と、を備えたことを特徴とするX線検査装置。 - 複数段の前記検出素子列により検出したX線の前記搬送方向の検出量の分布を示すグラフから検査に使用する前記検出素子列の位置を判定する判定部を備え、
前記判定部により判定された位置が、検査に使用する前記検出素子列の位置として前記指定部により指定されることを特徴とする請求項1に記載のX線検査装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018193331A JP7153525B2 (ja) | 2018-10-12 | 2018-10-12 | X線検査装置 |
US16/578,523 US10866331B2 (en) | 2018-10-12 | 2019-09-23 | X-ray inspection apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018193331A JP7153525B2 (ja) | 2018-10-12 | 2018-10-12 | X線検査装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020060512A JP2020060512A (ja) | 2020-04-16 |
JP7153525B2 true JP7153525B2 (ja) | 2022-10-14 |
Family
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Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018193331A Active JP7153525B2 (ja) | 2018-10-12 | 2018-10-12 | X線検査装置 |
Country Status (2)
Country | Link |
---|---|
US (1) | US10866331B2 (ja) |
JP (1) | JP7153525B2 (ja) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070064868A1 (en) | 2004-04-02 | 2007-03-22 | Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. | Method and apparatus for determining an object material |
JP2009180718A (ja) | 2008-02-01 | 2009-08-13 | Ishida Co Ltd | X線検査装置 |
JP2013036805A (ja) | 2011-08-05 | 2013-02-21 | Sii Nanotechnology Inc | 透過x線分析装置及び方法 |
JP2015090341A (ja) | 2013-11-07 | 2015-05-11 | キヤノン株式会社 | 放射線検査システム |
JP2018146554A (ja) | 2017-03-09 | 2018-09-20 | アンリツインフィビス株式会社 | X線検査装置 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59221642A (ja) * | 1983-05-31 | 1984-12-13 | Toshiba Corp | 放射線検査装置 |
JP3328942B2 (ja) | 1991-04-30 | 2002-09-30 | 株式会社島津製作所 | X線ct装置 |
JP4565896B2 (ja) * | 2004-06-11 | 2010-10-20 | 株式会社イシダ | X線検査装置 |
JP4585907B2 (ja) * | 2005-04-28 | 2010-11-24 | 株式会社イシダ | X線検査装置 |
JP5041751B2 (ja) * | 2006-07-24 | 2012-10-03 | 株式会社イシダ | X線検査装置およびx線検査プログラム |
JP5555048B2 (ja) | 2010-05-21 | 2014-07-23 | アンリツ産機システム株式会社 | X線検査装置 |
EP3064930B1 (en) * | 2013-10-31 | 2018-04-18 | Tohoku University | Non-destructive inspection device |
JP6397690B2 (ja) * | 2014-08-11 | 2018-09-26 | 株式会社日立ハイテクノロジーズ | X線透過検査装置及び異物検出方法 |
-
2018
- 2018-10-12 JP JP2018193331A patent/JP7153525B2/ja active Active
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2019
- 2019-09-23 US US16/578,523 patent/US10866331B2/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070064868A1 (en) | 2004-04-02 | 2007-03-22 | Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. | Method and apparatus for determining an object material |
JP2009180718A (ja) | 2008-02-01 | 2009-08-13 | Ishida Co Ltd | X線検査装置 |
JP2013036805A (ja) | 2011-08-05 | 2013-02-21 | Sii Nanotechnology Inc | 透過x線分析装置及び方法 |
JP2015090341A (ja) | 2013-11-07 | 2015-05-11 | キヤノン株式会社 | 放射線検査システム |
JP2018146554A (ja) | 2017-03-09 | 2018-09-20 | アンリツインフィビス株式会社 | X線検査装置 |
Also Published As
Publication number | Publication date |
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US10866331B2 (en) | 2020-12-15 |
US20200116877A1 (en) | 2020-04-16 |
JP2020060512A (ja) | 2020-04-16 |
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