JP7140210B2 - 保管システム - Google Patents
保管システム Download PDFInfo
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- JP7140210B2 JP7140210B2 JP2020562909A JP2020562909A JP7140210B2 JP 7140210 B2 JP7140210 B2 JP 7140210B2 JP 2020562909 A JP2020562909 A JP 2020562909A JP 2020562909 A JP2020562909 A JP 2020562909A JP 7140210 B2 JP7140210 B2 JP 7140210B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0457—Storage devices mechanical with suspended load carriers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C17/00—Overhead travelling cranes comprising one or more substantially horizontal girders the ends of which are directly supported by wheels or rollers running on tracks carried by spaced supports
- B66C17/06—Overhead travelling cranes comprising one or more substantially horizontal girders the ends of which are directly supported by wheels or rollers running on tracks carried by spaced supports specially adapted for particular purposes, e.g. in foundries, forges; combined with auxiliary apparatus serving particular purposes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0407—Storage devices mechanical using stacker cranes
- B65G1/0414—Storage devices mechanical using stacker cranes provided with satellite cars adapted to travel in storage racks
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0485—Check-in, check-out devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/06—Storage devices mechanical with means for presenting articles for removal at predetermined position or level
- B65G1/065—Storage devices mechanical with means for presenting articles for removal at predetermined position or level with self propelled cars
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Warehouses Or Storage Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Aerials With Secondary Devices (AREA)
Description
図1は、第1実施形態に係る保管システムSYSの一例をY方向から見た図である。図2は、保管システムSYSをX方向から見た図である。図3は、保管システムSYSを平面視で模式的に示した図である。なお、図3では、図を判別しやすくするため、天井ストッカ100のクレーン用天井軌道20及び保管部11を白地で示し、天井搬送車システム200の天井軌道30及び受け渡しポート12をハッチングで示し、処理装置TLのロードポートLPを黒で塗って示している。
上記した第1実施形態では、搬送装置300が第2天井搬送車60である構成を示しているが、この構成に限定されない。図12は、第2実施形態に係る保管システムSYS2の一例を示す側面図である。図12は、保管システムSYS2をX方向から見た図である。なお、以下の説明において、上記した第1実施形態と同一又は同等の構成については同一の符号を付けて説明を省略又は簡略化する。
SYS、SYS2・・・保管システム
TL・・・処理装置
2・・・物品
10・・・棚
11・・・保管部
11a・・・棚板
12・・・受け渡しポート
20・・・クレーン用天井軌道
30・・・搬送車用軌道
40・・・クレーン
41・・・クレーン用走行部
42・・・移載装置
45・・・駆動部
54,64・・・昇降駆動部
50・・・天井搬送車
51・・・走行部
52・・・本体部
53・・・把持部
55・・・横出し機構
60・・・第2天井搬送車
61・・・第2走行部(搬送装置用走行部)
62・・・第2本体部
63・・・第2把持部
64・・・第2昇降駆動部(搬送装置用昇降駆動部)
65・・・第2横出し機構(搬送装置用横出し機構)
70・・・コンベヤ装置
100・・・天井ストッカ
200・・・天井搬送車システム
300,300A・・・搬送装置
Claims (7)
- クレーン用天井軌道と、物品を載置する保管部を上下方向に複数段備える棚と、前記クレーン用天井軌道に沿って走行し、複数段の前記保管部の間で物品を移載するクレーンと、を備える天井ストッカと、
所定の移載先に対して物品の受け渡しを行う天井搬送車システムと、
前記天井ストッカと前記天井搬送車システムとの間で上下方向に物品を搬送する搬送装置と、
前記天井搬送車システムと前記搬送装置との間で物品を受け渡すための受け渡しポートと、を備え、
前記天井搬送車システムは、前記天井ストッカの下端より下方に設けられ、
前記搬送装置は、
保持した物品を昇降させる搬送装置用昇降駆動部と、
前記受け渡しポートの上方と複数段の前記保管部のうちの少なくとも1つの前記保管部の上方との間で前記搬送装置用昇降駆動部を横方向に移動させる搬送装置用横出し機構と、を備え、
前記搬送装置用昇降駆動部を前記受け渡しポートの上方に位置させた状態で、前記搬送装置用昇降駆動部により物品を昇降させて、前記受け渡しポートとの間で物品を受け渡し可能であり、
前記搬送装置用昇降駆動部を前記少なくとも1つの前記保管部の上方に移動させた状態で、前記搬送装置用昇降駆動部により物品を昇降させて、前記搬送装置用昇降駆動部の下方に存在する前記保管部との間で物品を受け渡し可能である、保管システム。 - 前記受け渡しポートは、複数配置される、請求項1に記載の保管システム。
- 前記天井搬送車システムは、
前記天井ストッカの下端よりも下方に配置された天井軌道と、
前記天井軌道に沿って走行する天井搬送車と、を備え、
前記天井搬送車は、
前記天井軌道に沿って走行する走行部と、
保持した物品を昇降させる昇降駆動部と、
前記走行部に対して前記昇降駆動部を横方向に移動させる横出し機構と、を備え、
前記受け渡しポートは、前記天井軌道に対して横方向かつ下方に設けられ、
前記天井搬送車は、
前記昇降駆動部により物品を昇降させて、前記所定の移載先との間で物品を受け渡し可能であり、
前記横出し機構により前記昇降駆動部を前記受け渡しポートの上方に移動させた状態で、前記昇降駆動部により物品を昇降させて、前記横出し機構により移動された前記昇降駆動部の下方に存在する前記受け渡しポートとの間で物品を受け渡し可能である、請求項1又は請求項2に記載の保管システム。 - 前記搬送装置は、前記クレーン用天井軌道を走行する搬送装置用走行部を備え、
前記受け渡しポートは、前記搬送装置に対して下方に設けられ、
前記搬送装置は、
前記搬送装置用昇降駆動部により物品を昇降させて、前記受け渡しポートとの間で物品を受け渡し可能であり、
前記搬送装置用横出し機構により前記搬送装置用昇降駆動部を複数段の前記保管部のうちの少なくとも1つの前記保管部の上方に移動させた状態で、前記搬送装置用昇降駆動部により物品を昇降させて、前記搬送装置用横出し機構により移動された前記搬送装置用昇降駆動部の下方に存在する前記保管部との間で物品を受け渡し可能である、請求項1から請求項3のいずれか一項に記載の保管システム。 - 前記受け渡しポートと前記所定の移載先とは、平面視においてずれている、請求項1から請求項4のいずれか一項に記載の保管システム。
- 前記棚の一部と前記所定の移載先とは、平面視において重なっている、請求項1から請求項5のいずれか一項に記載の保管システム。
- 前記クレーンは、
前記クレーン用天井軌道を走行するクレーン用走行部と、
複数段の前記保管部の間で物品を移載する移載装置と、を備え、
前記移載装置は、
前記クレーン用走行部から吊り下げられた状態で上下方向に延在するマストと、
前記マストに沿って昇降する昇降台と、
前記昇降台を昇降させる駆動部と、
前記昇降台から前記クレーン用走行部の走行方向と直交する方向に伸縮可能に設けられた伸縮部と、
前記伸縮部の先端に設けられて物品を保持する保持部と、を備える、請求項1から請求項6のいずれか一項に記載の保管システム。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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JP2018242936 | 2018-12-26 | ||
JP2018242936 | 2018-12-26 | ||
PCT/JP2019/044683 WO2020137225A1 (ja) | 2018-12-26 | 2019-11-14 | 保管システム |
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JPWO2020137225A1 JPWO2020137225A1 (ja) | 2021-11-04 |
JP7140210B2 true JP7140210B2 (ja) | 2022-09-21 |
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JP2020562909A Active JP7140210B2 (ja) | 2018-12-26 | 2019-11-14 | 保管システム |
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US (1) | US11942347B2 (ja) |
EP (1) | EP3882181A4 (ja) |
JP (1) | JP7140210B2 (ja) |
KR (1) | KR102530860B1 (ja) |
CN (1) | CN113195379B (ja) |
SG (1) | SG11202106551XA (ja) |
TW (1) | TWI818135B (ja) |
WO (1) | WO2020137225A1 (ja) |
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KR102684999B1 (ko) * | 2020-09-25 | 2024-07-12 | 세메스 주식회사 | 스토커 및 이를 갖는 캐리어 이송 장치 |
KR102661744B1 (ko) * | 2020-11-05 | 2024-04-26 | 세메스 주식회사 | 컨테이너 반송 장치 및 이를 구비하는 컨테이너 저장 시스템 |
TWI813393B (zh) * | 2022-02-17 | 2023-08-21 | 盟立自動化股份有限公司 | 高空走行式無人搬運車的搬運系統及無人搬運車 |
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- 2019-11-14 KR KR1020217018487A patent/KR102530860B1/ko active IP Right Grant
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US11942347B2 (en) | 2024-03-26 |
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