JP7235059B2 - 保管システム - Google Patents
保管システム Download PDFInfo
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- JP7235059B2 JP7235059B2 JP2020567420A JP2020567420A JP7235059B2 JP 7235059 B2 JP7235059 B2 JP 7235059B2 JP 2020567420 A JP2020567420 A JP 2020567420A JP 2020567420 A JP2020567420 A JP 2020567420A JP 7235059 B2 JP7235059 B2 JP 7235059B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B61—RAILWAYS
- B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
- B61B3/00—Elevated railway systems with suspended vehicles
- B61B3/02—Elevated railway systems with suspended vehicles with self-propelled vehicles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0457—Storage devices mechanical with suspended load carriers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C17/00—Overhead travelling cranes comprising one or more substantially horizontal girders the ends of which are directly supported by wheels or rollers running on tracks carried by spaced supports
- B66C17/06—Overhead travelling cranes comprising one or more substantially horizontal girders the ends of which are directly supported by wheels or rollers running on tracks carried by spaced supports specially adapted for particular purposes, e.g. in foundries, forges; combined with auxiliary apparatus serving particular purposes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C7/00—Runways, tracks or trackways for trolleys or cranes
- B66C7/02—Runways, tracks or trackways for trolleys or cranes for underhung trolleys or cranes
- B66C7/04—Trackway suspension
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- E—FIXED CONSTRUCTIONS
- E04—BUILDING
- E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
- E04B9/00—Ceilings; Construction of ceilings, e.g. false ceilings; Ceiling construction with regard to insulation
- E04B9/006—Ceilings; Construction of ceilings, e.g. false ceilings; Ceiling construction with regard to insulation with means for hanging lighting fixtures or other appliances to the framework of the ceiling
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Architecture (AREA)
- Electromagnetism (AREA)
- Civil Engineering (AREA)
- Structural Engineering (AREA)
- Transportation (AREA)
- Warehouses Or Storage Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
本発明の態様に係る保管システムは、第1天井軌道と、上下方向に複数段の保管部を備えた棚と、第1天井軌道に沿って走行し、複数段の保管部の間で物品を受け渡しするクレーンと、を備えた天井ストッカと、天井ストッカの下端よりも下方に設けられた第2天井軌道と、第2天井軌道に沿って走行して所定の移載先に対して物品を受け渡しする天井搬送車と、を備え、天井ストッカと平面視において少なくとも一部が重なるように配置された天井搬送車システムと、を備え、棚は、天井に取り付けられた第1吊下部材により、天井の第1位置から吊り下げられて設けられ、第2天井軌道は、天井に取り付けられた第2吊下部材により、天井の第2位置から吊り下げられて設けられ、第1位置と第2位置とは、少なくとも所定距離を隔てて設定される。
GC・・・グリッド天井
L・・・所定距離
P1・・・第1位置
P2・・・第2位置
P3・・・第3位置
P4・・・第4位置
LP・・・ロードポート
TL・・・処理装置
SYS・・・保管システム
2・・・物品
3・・・第1吊下部材
4・・・第2吊下部材
5・・・第3吊下部材
6・・・第4吊下部材
10・・・棚
12・・・受け渡しポート
20・・・第1天井軌道
30・・・第2天井軌道
40・・・クレーン
50・・・天井搬送車
60・・・上側天井搬送車
70・・・梁部
100・・・天井ストッカ
200・・・天井搬送車システム
300・・・搬送装置
Claims (4)
- 第1天井軌道と、上下方向に複数段の保管部を備えた棚と、前記第1天井軌道に沿って走行し、前記複数段の保管部の間で物品を受け渡しするクレーンと、を備えた天井ストッカと、
前記天井ストッカの下端よりも下方に設けられた第2天井軌道と、前記第2天井軌道に沿って走行して所定の移載先に対して物品を受け渡しする天井搬送車と、を備え、前記天井ストッカと平面視において少なくとも一部が重なるように配置された天井搬送車システムと、を備え、
前記棚は、天井に取り付けられた第1吊下部材により、前記天井の第1位置から吊り下げられて設けられ、
前記第2天井軌道は、前記天井に取り付けられた第2吊下部材により、前記天井の第2位置から吊り下げられて設けられ、
前記第1位置と前記第2位置とは、少なくとも所定距離を隔てて設定され、
前記所定距離は、前記天井における単位面積あたりの荷重の大きさが所定値を超えないように設定された距離であり、
前記天井は、水平方向における直交方向のそれぞれに複数のマス目が並ぶグリッド天井であり、
前記単位面積は、1つの前記マス目の面積であり、
前記第1位置と前記第2位置とは、前記グリッド天井における異なる前記マス目に設定される、保管システム。 - 前記第1天井軌道は、前記天井に取り付けられた第3吊下部材により、前記天井の第3位置から吊り下げて設けられ、
複数の前記第1位置の1つと、複数の前記第3位置の1つとは、前記グリッド天井における1つの前記マス目に設定される、請求項1に記載の保管システム。 - 前記第1天井軌道の一部と、前記第2天井軌道の一部とは、平面視において重なって配置される、請求項1又は請求項2に記載の保管システム。
- 前記棚は、平面視において、前記所定の移載先を有する処理装置の直上を含む領域に設けられる、請求項1から請求項3のいずれか一項に記載の保管システム。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019011281 | 2019-01-25 | ||
JP2019011281 | 2019-01-25 | ||
PCT/JP2019/048871 WO2020153040A1 (ja) | 2019-01-25 | 2019-12-13 | 保管システム |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2020153040A1 JPWO2020153040A1 (ja) | 2021-11-25 |
JP7235059B2 true JP7235059B2 (ja) | 2023-03-08 |
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Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020567420A Active JP7235059B2 (ja) | 2019-01-25 | 2019-12-13 | 保管システム |
Country Status (8)
Country | Link |
---|---|
US (1) | US11673741B2 (ja) |
EP (1) | EP3915901A4 (ja) |
JP (1) | JP7235059B2 (ja) |
KR (1) | KR102531956B1 (ja) |
CN (1) | CN113329957B (ja) |
SG (1) | SG11202108086TA (ja) |
TW (1) | TWI828842B (ja) |
WO (1) | WO2020153040A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2021053989A1 (ja) * | 2019-09-18 | 2021-03-25 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111994538B (zh) * | 2020-08-25 | 2022-01-18 | 无锡职业技术学院 | 全自动双库区拉动式物流*** |
KR20230070508A (ko) * | 2020-10-26 | 2023-05-23 | 무라다기카이가부시끼가이샤 | 현수구 |
US11830750B2 (en) * | 2021-08-11 | 2023-11-28 | Changxin Memory Technologies, Inc. | Storage apparatus, transporting device and transporting method for front opening unified pod |
Citations (9)
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JP2000124284A (ja) | 1998-10-13 | 2000-04-28 | Hitachi Kiden Kogyo Ltd | 搬送装置 |
JP2007331906A (ja) | 2006-06-16 | 2007-12-27 | Murata Mach Ltd | 天井走行車システム |
WO2012060291A1 (ja) | 2010-11-04 | 2012-05-10 | ムラテックオートメーション株式会社 | 搬送システム及び搬送方法 |
WO2013183376A1 (ja) | 2012-06-08 | 2013-12-12 | 村田機械株式会社 | 搬送システム及び搬送システムでの物品の一時保管方法 |
JP2017030944A (ja) | 2015-08-04 | 2017-02-09 | 村田機械株式会社 | 搬送システム |
WO2017029871A1 (ja) | 2015-08-14 | 2017-02-23 | 村田機械株式会社 | 搬送システム |
US20170140966A1 (en) | 2015-11-13 | 2017-05-18 | Taiwan Semiconductor Manufacturing Co., Ltd. | High capacity overhead transport (oht) rail system with multiple levels |
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2019
- 2019-12-13 JP JP2020567420A patent/JP7235059B2/ja active Active
- 2019-12-13 US US17/425,364 patent/US11673741B2/en active Active
- 2019-12-13 WO PCT/JP2019/048871 patent/WO2020153040A1/ja unknown
- 2019-12-13 CN CN201980090003.XA patent/CN113329957B/zh active Active
- 2019-12-13 KR KR1020217023444A patent/KR102531956B1/ko active IP Right Grant
- 2019-12-13 SG SG11202108086TA patent/SG11202108086TA/en unknown
- 2019-12-13 EP EP19911175.8A patent/EP3915901A4/en active Pending
-
2020
- 2020-01-14 TW TW109101130A patent/TWI828842B/zh active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2000124284A (ja) | 1998-10-13 | 2000-04-28 | Hitachi Kiden Kogyo Ltd | 搬送装置 |
JP2007331906A (ja) | 2006-06-16 | 2007-12-27 | Murata Mach Ltd | 天井走行車システム |
WO2012060291A1 (ja) | 2010-11-04 | 2012-05-10 | ムラテックオートメーション株式会社 | 搬送システム及び搬送方法 |
WO2013183376A1 (ja) | 2012-06-08 | 2013-12-12 | 村田機械株式会社 | 搬送システム及び搬送システムでの物品の一時保管方法 |
JP2017030944A (ja) | 2015-08-04 | 2017-02-09 | 村田機械株式会社 | 搬送システム |
WO2017029871A1 (ja) | 2015-08-14 | 2017-02-23 | 村田機械株式会社 | 搬送システム |
US20170140966A1 (en) | 2015-11-13 | 2017-05-18 | Taiwan Semiconductor Manufacturing Co., Ltd. | High capacity overhead transport (oht) rail system with multiple levels |
WO2018055883A1 (ja) | 2016-09-26 | 2018-03-29 | 村田機械株式会社 | 天井搬送システム、及び天井搬送車 |
WO2019003753A1 (ja) | 2017-06-30 | 2019-01-03 | 村田機械株式会社 | 搬送システム及び搬送方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JPWO2021053989A1 (ja) * | 2019-09-18 | 2021-03-25 | ||
JP7380694B2 (ja) | 2019-09-18 | 2023-11-15 | 村田機械株式会社 | 走行車システム |
Also Published As
Publication number | Publication date |
---|---|
JPWO2020153040A1 (ja) | 2021-11-25 |
TW202031573A (zh) | 2020-09-01 |
TWI828842B (zh) | 2024-01-11 |
US11673741B2 (en) | 2023-06-13 |
KR102531956B1 (ko) | 2023-05-12 |
CN113329957A (zh) | 2021-08-31 |
CN113329957B (zh) | 2023-07-11 |
EP3915901A4 (en) | 2022-09-28 |
KR20210106550A (ko) | 2021-08-30 |
EP3915901A1 (en) | 2021-12-01 |
US20220097965A1 (en) | 2022-03-31 |
SG11202108086TA (en) | 2021-08-30 |
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