JP6897864B2 - ストッカシステム - Google Patents
ストッカシステム Download PDFInfo
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- JP6897864B2 JP6897864B2 JP2020507409A JP2020507409A JP6897864B2 JP 6897864 B2 JP6897864 B2 JP 6897864B2 JP 2020507409 A JP2020507409 A JP 2020507409A JP 2020507409 A JP2020507409 A JP 2020507409A JP 6897864 B2 JP6897864 B2 JP 6897864B2
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0457—Storage devices mechanical with suspended load carriers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0464—Storage devices mechanical with access from above
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/06—Storage devices mechanical with means for presenting articles for removal at predetermined position or level
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66F—HOISTING, LIFTING, HAULING OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD
- B66F9/00—Devices for lifting or lowering bulky or heavy goods for loading or unloading purposes
- B66F9/06—Devices for lifting or lowering bulky or heavy goods for loading or unloading purposes movable, with their loads, on wheels or the like, e.g. fork-lift trucks
- B66F9/075—Constructional features or details
- B66F9/12—Platforms; Forks; Other load supporting or gripping members
- B66F9/14—Platforms; Forks; Other load supporting or gripping members laterally movable, e.g. swingable, for slewing or transverse movements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C19/00—Cranes comprising trolleys or crabs running on fixed or movable bridges or gantries
- B66C19/005—Straddle carriers
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- Condensed Matter Physics & Semiconductors (AREA)
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- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Transportation (AREA)
- Structural Engineering (AREA)
- Civil Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geology (AREA)
- Warehouses Or Storage Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Vehicle Body Suspensions (AREA)
Description
図1は、第1実施形態に係るストッカシステムSYSの一例をY方向から見た図である。図2は、ストッカシステムSYSを平面視で模式的に示した図である。図1及び図2に示すストッカシステムSYSは、例えば、半導体デバイスの製造工場等に設けられ、半導体デバイスの製造に用いられる半導体ウエハを収容したFOUP、あるいはレチクルなどを収容したレチクルポッドなどの物品2を保管する。ストッカシステムSYSは、物品2を搬送する搬送システムに接続するように設けられる。本実施形態では、物品2がFOUPである例を用いて説明するが、物品2は、FOUP以外であってもよい。また、ストッカシステムSYSは、半導体製造分野以外の設備に適用可能であり、物品2は、ストッカシステムSYSで保管可能な他の物品でもよい。
上記した第1実施形態では、周回天井軌道30が処理装置TLのロードポートLPの直上に位置しており、入出庫ポート12(複数の棚10)が周回天井軌道30の下方かつ側方に配置される構成を示しているが、この構成に限定されない。図12は、第2実施形態に係るストッカシステムSYS2の一例を示す平面図である。図13は、図12に示すストッカシステムSYS2をY方向から見た図である。なお、以下の説明において、上記した第1実施形態と同一又は同等の構成については同一の符号を付けて説明を省略又は簡略化する。
上記した第1及び第2実施形態では、平面視で周回天井軌道30、30Aの内側にストッカ100、100Aが配置される構成を例に挙げて説明したが、この構成に限定されない。図14は、第3実施形態に係るストッカシステムSYS3の一例をY方向から見た図である。なお、以下の説明において、上記した第1実施形態と同一又は同等の構成については同一の符号を付けて説明を省略又は簡略化する。
図15は、第4実施形態に係るストッカシステムSYS4の一例を示す平面図である。なお、以下の説明において、上記した実施形態と同一又は同等の構成については同一の符号を付けて説明を省略又は簡略化する。図15に示すストッカシステムSYS4は、ストッカ100Cを備えている。ストッカ100Cは、複数の棚10とクレーン40とを有する。なお、図15に示すストッカシステムSYS4では、2つの周回軌道であるクレーン用周回天井軌道20A、20Bを2本の接続軌道S4で接続した構成を有しており、クレーン40がクレーン用周回天井軌道20A、20B、接続軌道S4を走行する。
F・・・床面
SC1、SC2、SC3・・・システム天井
LP・・・ロードポート
TL・・・処理装置(装置)
PS・・・作業者用通路
PSA・・・メイン通路
SYS、SYS2、SYS3、SYS4・・・ストッカシステム
2・・・物品
10・・・複数の棚
11・・・保管棚
11S・・・第2保管棚
12・・・入出庫ポート
20・・・クレーン用天井軌道
20A・・・クレーン用周回天井軌道(周回軌道)
21・・・直線区間
22・・・接続区間
30、30A、30B・・・周回天井軌道(軌道)
31、31A、31B・・・直線部
32、32A、32B・・・接続部
40・・・クレーン
41・・・走行部
42・・・移載装置
43・・・マスト
44・・・昇降台
45・・・昇降駆動部
48・・・伸縮部
49・・・載置台
50・・・天井搬送車
51・・・搬送車走行部
52・・・本体部
53・・・把持部
54・・・昇降駆動部
55・・・横出し機構
100、100A、100B、100C・・・ストッカ
Claims (7)
- 天井搬送車により搬送される物品を保管可能なストッカを有し、前記天井搬送車が、物品の上部を上方側からつかむ把持部と、前記把持部を昇降させる昇降駆動部とを備え、建屋の天井に敷設された軌道を走行し、前記軌道の下方に設置されている装置のロードポートに物品を降ろして置く、ストッカシステムであって、
前記ストッカは、
前記装置よりも上方に配置され、
上下方向に多段に設けられて物品を置くための複数の棚と、
前記棚に物品を置き、又は前記棚に置かれた物品を取り出すクレーンと、を有し、
前記複数の棚の下端の高さは、前記装置の高さよりも高く、
前記クレーンの下端の高さは、前記装置の高さよりも高く、
前記複数の棚は、前記天井搬送車及び前記クレーンのそれぞれが物品を置くための入出庫ポートと、前記クレーンが物品を置くための保管棚と、を含み、
前記入出庫ポートは、前記把持部が上方から物品を降ろして置けるだけの上下寸法を有するように設けられており、
前記保管棚は、前記入出庫ポートよりも数が多く、かつ前記入出庫ポートよりも上下寸法が小さく設けられており、
前記クレーンは、
物品を載せて、前記入出庫ポート又は前記保管棚に物品を降ろして置く移載装置を備え、
前記天井搬送車により前記入出庫ポートに置かれた物品を前記保管棚に置き、又は前記保管棚に置かれた物品を取り出して前記入出庫ポートに置く、ストッカシステム。 - 前記軌道は、前記ロードポートの直上に位置しており、
前記入出庫ポートは、前記軌道の下方かつ側方に配置され、
前記天井搬送車は、前記昇降駆動部を前記軌道の側方に横出しさせる横出し機構を備え、前記横出し機構により前記昇降駆動部を横出しして前記把持部を下降させることにより前記入出庫ポートに物品を降ろして置く、又は前記入出庫ポートに置かれた物品を受け取る、請求項1に記載のストッカシステム。 - 前記保管棚は、前記入出庫ポートの上方側及び下方側の少なくとも一方に多段に設けられる、請求項2に記載のストッカシステム。
- 前記入出庫ポートは、前記軌道の直下に配置され、
前記天井搬送車は、前記昇降駆動部を前記軌道の側方に横出しさせる横出し機構を備え、前記横出し機構により前記昇降駆動部を横出しして前記把持部を下降させることにより前記ロードポートに物品を降ろして置く、又は前記ロードポートに置かれた物品を受け取る、請求項1に記載のストッカシステム。 - 前記保管棚は、前記入出庫ポートの下方側に多段に設けられる、請求項4に記載のストッカシステム。
- 前記クレーンは、周回軌道を走行し、
前記複数の棚は、前記周回軌道における直線区間に対応して設けられる、請求項1から請求項5のいずれか一項に記載のストッカシステム。 - 前記入出庫ポートに対して前記クレーンの走行領域を挟んで反対側に、前記クレーンにより物品を置く又は物品を取り出すことが可能な第2保管棚が設けられる、請求項1から請求項6のいずれか一項に記載のストッカシステム。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018054470 | 2018-03-22 | ||
JP2018054470 | 2018-03-22 | ||
PCT/JP2019/003837 WO2019181241A1 (ja) | 2018-03-22 | 2019-02-04 | ストッカシステム |
Publications (2)
Publication Number | Publication Date |
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JPWO2019181241A1 JPWO2019181241A1 (ja) | 2021-05-13 |
JP6897864B2 true JP6897864B2 (ja) | 2021-07-07 |
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Application Number | Title | Priority Date | Filing Date |
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JP2020507409A Active JP6897864B2 (ja) | 2018-03-22 | 2019-02-04 | ストッカシステム |
Country Status (9)
Country | Link |
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US (1) | US11239102B2 (ja) |
EP (1) | EP3770082B1 (ja) |
JP (1) | JP6897864B2 (ja) |
KR (1) | KR102431540B1 (ja) |
CN (1) | CN111886190B (ja) |
IL (1) | IL277445A (ja) |
SG (1) | SG11202009270XA (ja) |
TW (1) | TWI814792B (ja) |
WO (1) | WO2019181241A1 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
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US7632299B2 (en) | 2004-01-22 | 2009-12-15 | Boston Scientific Scimed, Inc. | Medical devices |
CN112912321B (zh) * | 2018-11-06 | 2022-11-11 | 村田机械株式会社 | 顶棚悬吊搁板 |
EP3882181A4 (en) * | 2018-12-26 | 2022-08-10 | Murata Machinery, Ltd. | STORAGE SYSTEM |
KR102235517B1 (ko) * | 2020-11-02 | 2021-04-01 | 시너스텍 주식회사 | 오버헤드 호이스트 방식의 스토커 시스템 |
TWI747623B (zh) * | 2020-11-20 | 2021-11-21 | 迅得機械股份有限公司 | 晶圓盒倉儲的校正補償系統與方法 |
KR20230094359A (ko) | 2021-12-21 | 2023-06-28 | 세메스 주식회사 | 물품 처리 장치 |
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TW348162B (en) * | 1996-09-30 | 1998-12-21 | Murada Kikai Kk | Work carrying system |
JP3991852B2 (ja) * | 2002-12-09 | 2007-10-17 | 村田機械株式会社 | 天井搬送車システム |
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2019
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TW201940396A (zh) | 2019-10-16 |
US11239102B2 (en) | 2022-02-01 |
WO2019181241A1 (ja) | 2019-09-26 |
KR20200121355A (ko) | 2020-10-23 |
EP3770082A1 (en) | 2021-01-27 |
EP3770082B1 (en) | 2023-09-06 |
US20210043487A1 (en) | 2021-02-11 |
KR102431540B1 (ko) | 2022-08-11 |
EP3770082A4 (en) | 2021-12-15 |
SG11202009270XA (en) | 2020-10-29 |
JPWO2019181241A1 (ja) | 2021-05-13 |
CN111886190B (zh) | 2022-06-28 |
CN111886190A (zh) | 2020-11-03 |
TWI814792B (zh) | 2023-09-11 |
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