JP6820474B2 - Work transfer device - Google Patents

Work transfer device Download PDF

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JP6820474B2
JP6820474B2 JP2017019366A JP2017019366A JP6820474B2 JP 6820474 B2 JP6820474 B2 JP 6820474B2 JP 2017019366 A JP2017019366 A JP 2017019366A JP 2017019366 A JP2017019366 A JP 2017019366A JP 6820474 B2 JP6820474 B2 JP 6820474B2
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phase difference
transport
vibration
frequency
traveling wave
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JP2018127287A (en
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孝信 大西
孝信 大西
哲行 木村
哲行 木村
峰尚 前田
峰尚 前田
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Sinfonia Technology Co Ltd
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Priority to KR1020170105985A priority patent/KR102428116B1/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G27/00—Jigging conveyors
    • B65G27/10—Applications of devices for generating or transmitting jigging movements
    • B65G27/32—Applications of devices for generating or transmitting jigging movements with means for controlling direction, frequency or amplitude of vibration or shaking movement
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G27/00—Jigging conveyors
    • B65G27/10—Applications of devices for generating or transmitting jigging movements
    • B65G27/16—Applications of devices for generating or transmitting jigging movements of vibrators, i.e. devices for producing movements of high frequency and small amplitude
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2812/00—Indexing codes relating to the kind or type of conveyors
    • B65G2812/03—Vibrating conveyors
    • B65G2812/0304—Driving means or auxiliary devices
    • B65G2812/0308—Driving means

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Jigging Conveyors (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Description

本発明は、進行波により部品を搬送するワーク搬送装置に関するものである。 The present invention relates to a work transfer device that conveys parts by traveling waves.

従来より、部品を搬送する装置として、バネと駆動源を使って搬送部全体を斜め方向に振動させることで、部品を搬送するパーツフィーダが知られている。このような搬送装置では、振幅を大きくすることで部品の搬送速度を上げることが可能であるが、搬送部の下流端の水平振幅が大きくなると、搬送部の下流端に設定されるインターフェース部と次工程設備との間の隙間を広げる必要がある。その結果、次工程設備とインターフェース部との間に部品が落下したり、部品の詰まりが生じるおそれがある。特に、部品の微細化や搬送速度の高速化が進むほど、部品の落下や詰まりが生じる確率も高くなる。 Conventionally, as a device for transporting parts, a parts feeder for transporting parts by vibrating the entire transporting portion in an oblique direction using a spring and a drive source has been known. In such a transfer device, it is possible to increase the transfer speed of parts by increasing the amplitude, but when the horizontal amplitude at the downstream end of the transfer unit increases, the interface unit set at the downstream end of the transfer unit and It is necessary to widen the gap with the next process equipment. As a result, parts may fall between the next process equipment and the interface portion, or parts may be clogged. In particular, as the miniaturization of parts and the increase in transport speed progress, the probability that parts will fall or become clogged increases.

また、上述のパーツフィーダは、搬送部全体を斜め方向に振動させる駆動源の周波数を上げ、変位振幅を小さくすることで、ワークの搬送速度を上げることが可能であるが、一般的に３００Ｈｚ程度である駆動源の周波数をこれ以上に上げると、人間の耳の感度が高い１ｋＨｚ〜４ｋＨｚの周波数に近づき、騒音が大きくなる。また、板バネで共振させる構造では、３００Ｈｚを超え、１ｋＨｚ以上になると、搬送部などが弾性変形して、ワークを正常に搬送できなくなる（搬送部（シュート）を均一に平行振動させるのが困難になる）。 Further, in the above-mentioned parts feeder, the transfer speed of the work can be increased by increasing the frequency of the drive source that vibrates the entire transfer portion in an oblique direction and reducing the displacement amplitude, but generally about 300 Hz. When the frequency of the drive source is raised further, the frequency approaches the frequency of 1 kHz to 4 kHz, which is highly sensitive to the human ear, and the noise becomes louder. Further, in the structure of resonating with a leaf spring, when the frequency exceeds 300 Hz and exceeds 1 kHz, the transport portion or the like is elastically deformed and the work cannot be normally transported (it is difficult to uniformly vibrate the transport portion (chute) in parallel). become).

このような不具合の発生を回避可能なパーツフィーダとして、超音波振動によって生じる進行波を利用して部品を移送するパーツフィーダが知られている。特許文献１には、水平面に対して傾斜させて設置したリング（長円のリングも含む）状または円板状の振動体のうち、裏面に、定在波の１／２波長で分極方向を正負交互に繰り返す多数の分極領域を有する圧電体を貼り付け、圧電体の二つの分極領域群のそれぞれに時間的に９０°の位相のずれた２種類の高周波電圧（時間的な位相の異なる高周波電圧）を印加することで、圧電体の屈曲振動で進行波が励起され、振動体の振動面に乗った部品を移送する構成が開示されている。 As a parts feeder that can avoid the occurrence of such a defect, a parts feeder that transfers parts by using a traveling wave generated by ultrasonic vibration is known. In Patent Document 1, a ring (including an elliptical ring) or a disk-shaped vibrating body installed at an angle with respect to a horizontal plane has a polarization direction on the back surface at 1/2 wavelength of a standing wave. A piezoelectric body having a large number of polarization regions that repeat positive and negative alternately is attached, and two types of high-frequency voltages (high frequencies with different temporal phases) that are 90 ° out of phase in time are attached to each of the two polarization region groups of the piezoelectric body. By applying a voltage), a traveling wave is excited by the bending vibration of the piezoelectric body, and a configuration is disclosed in which a component on the vibrating surface of the vibrating body is transferred.

特開平６−１２７６５５号公報Japanese Unexamined Patent Publication No. 6-127655

ところで、空間的位相差と時間的位相差の両方が９０°で一致する時に、最も効率の良い進行波ができることが既に知られている。そして、特許文献１にも、上述の通り、１／４波長ずらして配置された２つの領域に圧電素子を配置することで、９０°の空間的位相差を実現し、それぞれ時間的な位相が９０°異なった高周波電圧を印加して加振させる構成が開示されている。 By the way, it is already known that the most efficient traveling wave is produced when both the spatial phase difference and the temporal phase difference match at 90 °. Further, in Patent Document 1, as described above, by arranging the piezoelectric elements in the two regions arranged with a 1/4 wavelength shift, a spatial phase difference of 90 ° is realized, and the temporal phases are set respectively. A configuration is disclosed in which a high frequency voltage different by 90 ° is applied to vibrate the vibration.

しかしながら、その後の本発明者による鋭意研究の末、搬送面に進行波を発生させてワークを搬送するワーク搬送装置に関して、更なる高速搬送のための改良の余地があることが判明し、本発明者は、その具体的な解決策を究明するに至った。 However, as a result of diligent research by the present inventor thereafter, it has been found that there is room for improvement for further high-speed transfer with respect to the work transfer device that generates a traveling wave on the transfer surface to transfer the work. Has come to find a concrete solution.

すなわち本発明は、同一周波数で空間的位相差がある複数の定在波を搬送面に生じさせる複数の駆動手段を備え、複数の駆動手段に時間的位相差を持たせた駆動信号を与えることで搬送面に進行波を発生させてワークを搬送するワーク搬送装置に関するものである。 That is, the present invention includes a plurality of driving means for generating a plurality of standing waves having a spatial phase difference at the same frequency on the transport surface, and gives a driving signal having a temporal phase difference to the plurality of driving means. The present invention relates to a work transfer device that transfers a work by generating a traveling wave on the transfer surface.

そして、本発明に係るワーク搬送装置は、搬送面を有し、且つ任意の軸に対して非対称な形状を有する搬送部と、機械的位相差取得手段と、電気的位相差調整手段とを備えることを特徴としている。本発明における機械的位相差取得手段は、少なくとも搬送部が有する相互に異なる固有振動数に対応した２つの振動モードの固有振動数の差に起因する機械的位相差を、時間的位相差に含まれる要素として取得するものである。また、電気的位相差調整手段は、機械的位相差に対して、複数の駆動手段への駆動信号の時間的な位相差を調整して付与するものである。「任意の軸に対して非対称な形状を有する搬送部」とは、例えば、搬送部の構造及び剛性について軸対称でないものを示している。 The work transfer device according to the present invention includes a transfer unit having a transfer surface and an asymmetrical shape with respect to an arbitrary axis, mechanical phase difference acquisition means, and electrical phase difference adjusting means. It is characterized by that. The mechanical phase difference acquisition means in the present invention includes at least the mechanical phase difference caused by the difference in the natural frequencies of the two vibration modes corresponding to the different natural frequencies of the transport unit in the temporal phase difference. It is acquired as an element. Further, the electrical phase difference adjusting means adjusts and imparts the temporal phase difference of the drive signals to the plurality of drive means with respect to the mechanical phase difference. The “conveying portion having an asymmetrical shape with respect to an arbitrary axis” refers to, for example, one that is not axisymmetric with respect to the structure and rigidity of the transport portion.

本発明者は、異なる複数の定在波の時間のずれである時間的位相差が、電気的位相差のみならず、搬送部が有する相互に異なる固有振動数に対応した２つの振動モードの固有振動数の差に起因する機械的位相差によっても変化するものであるということを突き止め、異なる２つの振動モードの固有振動数の差に起因する機械的位相差に電気的位相差を調整して付与した位相差を時間的位相差として扱うというこれまでに着想されることのない技術的思想に基づいて、同一周波数で空間的位相差がある複数の定在波を搬送面に生じさせる複数の駆動手段に、機械的位相差に電気的位相差を調整して付与した時間的位相差を持たせた駆動信号を与えることで、搬送面に発生する進行波によってワークを高速且つ適切に搬送することが可能なワーク搬送装置を案出するに至った。ここで、「固有振動数の差」とは、２つの振動モードが同じ変形形態および同じ波の数であることを意味しており、異なる２つの振動モードの固有振動数の差であり、振動モードの数と、進行波を生成するための定在波の数は必ずしも一致するものではない。ここで述べる「同じ変形形態」とは、例えば、２つの振動モードの振動方向や振動の仕方が同じであることを意味しており、「同じ波の数」とは、搬送部における振動モードの波の数を意味するものである。すなわち、物体を振動させた場合には、空間的に位相差を有する２つの振動モードがあり、振動モードが３つになるケースは皆無である。したがって、例えば同一周波数、同じ変形形態および同じ波の数であり、空間的位相差がある３つ以上の定在波を搬送面に生じさせる構成であっても、振動モードは、相互に固有振動数の異なる第１振動モードと第２振動モードの２つである。互いに空間位相が９０°ずれていることから、第１振動モードを０°モード、第２振動モードを９０°モードと定義することができる。 The present inventor presents that the temporal phase difference, which is the time lag of a plurality of different standing waves, corresponds not only to the electrical phase difference but also to the natural frequencies of the two vibration modes corresponding to the different natural frequencies of the transport unit. We found that it also changes due to the mechanical phase difference caused by the difference in frequency, and adjusted the electrical phase difference to the mechanical phase difference caused by the difference in natural frequencies of the two different vibration modes. Based on the unconceived technical idea of treating the applied phase difference as a temporal phase difference, a plurality of standing waves having a spatial phase difference at the same frequency are generated on the transport surface. By giving a drive signal having a temporal phase difference given by adjusting the electrical phase difference to the mechanical phase difference to the drive means, the workpiece is conveyed at high speed and appropriately by the traveling wave generated on the conveying surface. We have come up with a work transfer device that can be used. Here, the "difference in natural frequency" means that the two vibration modes have the same deformation form and the same number of waves, and is the difference in the natural frequencies of the two different vibration modes. The number of modes and the number of standing waves for generating a traveling wave do not always match. The "same deformation form" described here means, for example, that the vibration directions and vibration methods of the two vibration modes are the same, and the "same number of waves" is the vibration mode of the transport unit. It means the number of waves. That is, when the object is vibrated, there are two vibration modes having a spatial phase difference, and there is no case where the vibration modes are three. Therefore, for example, even in a configuration in which three or more standing waves having the same frequency, the same deformation form, and the same number of waves and having a spatial phase difference are generated on the transport surface, the vibration modes are mutually natural vibrations. There are two different numbers, the first vibration mode and the second vibration mode. Since the spatial phases are 90 ° out of alignment with each other, the first vibration mode can be defined as the 0 ° mode and the second vibration mode can be defined as the 90 ° mode.

本発明における「搬送部が有する相互に異なる固有振動数に対応した２つの振動モードの固有振動数の差に起因する機械的位相差」は、搬送部の非対称形状から派生する位相差であり、異なる２つの固有振動数の振動モードに対し、一つの周波数で加振する場合に、２つの定在波に生じる時間位相の差である。また、「電気的位相差」は、２つの振動モード用の２つの駆動手段に印加する電圧波形の位相差であり、外部から与える時間的な位相差指令であると捉えることもできる。電気的位相調整手段は、各振動モードに印加する波形の電気的位相差を調整するものであり、本発明では、電気的位相調整手段により、機械的位相差に対して、複数の駆動手段への駆動信号の時間的な位相差を調整して付与する構成であるため、電気的位相差と機械的位相差とを加算した時間的位相差を持たせた駆動信号を複数の駆動手段に与えることで搬送面に進行波を発生させてワークを搬送することができる。 The "mechanical phase difference caused by the difference in the natural frequencies of the two vibration modes corresponding to the different natural frequencies of the transport unit" in the present invention is a phase difference derived from the asymmetric shape of the transport unit. It is the difference in time phase that occurs in two standing waves when vibrating at one frequency for vibration modes of two different natural frequencies. Further, the "electrical phase difference" is the phase difference of the voltage waveform applied to the two driving means for the two vibration modes, and can be regarded as a temporal phase difference command given from the outside. The electrical phase adjusting means adjusts the electrical phase difference of the waveform applied to each vibration mode. In the present invention, the electrical phase adjusting means is used to drive a plurality of driving means with respect to the mechanical phase difference. Since the configuration is such that the temporal phase difference of the drive signal of the above is adjusted and given, the drive signal having the temporal phase difference obtained by adding the electrical phase difference and the mechanical phase difference is given to a plurality of drive means. As a result, a traveling wave can be generated on the transport surface to transport the work.

空間的位相差と時間的位相差の両方が９０°で一致する時に、最も効率の良い進行波ができることが既に知られているものの、電気的位相差のみで時間的位相差を調整する構成であれば、時間的位相差を９０°に一致させることができずに、最も効率の良い進行波を生成できないケースがあっても、本発明のように、電気的位相差のみならず、機械的位相差も含む位相差を時間的位相差と捉えることで、時間的位相差を９０°で一致させることが可能になり、最も効率の良い進行波比１の進行波を搬送面に発生させることが可能になる。 Although it is already known that the most efficient traveling wave can be produced when both the spatial phase difference and the temporal phase difference match at 90 °, the temporal phase difference is adjusted only by the electrical phase difference. If there is, even if there is a case where the temporal phase difference cannot be matched to 90 ° and the most efficient traveling wave cannot be generated, not only the electrical phase difference but also the mechanical one as in the present invention. By regarding the phase difference including the phase difference as the temporal phase difference, it is possible to match the temporal phase difference at 90 °, and the most efficient traveling wave with a traveling wave ratio of 1 is generated on the traveling surface. Will be possible.

なお、本発明における「搬送面」は、水平又は略水平な面（水平面）、又は水平に対して傾斜角度傾斜した面（傾斜面）、或いはＵ字状の面（曲面）の何れをも包含する概念である。またワークとしては、例えば電子部品などの微小部品を挙げることができるが、電子部品以外の物品であってもよい。 The "transport surface" in the present invention includes any of a horizontal or substantially horizontal surface (horizontal plane), a surface inclined at an inclination angle with respect to the horizontal (inclined surface), or a U-shaped surface (curved surface). It is a concept to do. Further, as the work, for example, a minute part such as an electronic part can be mentioned, but an article other than the electronic part may be used.

また、加振周波数や搬送部の減衰特性によって機械的位相差が変化することから、本発明における機械的位相差取得手段として、駆動信号の加振周波数に起因する機械的位相差を取得するものを適用したり、搬送部の減衰特性に起因する機械的位相差を取得するものを適用してもよい。加振周波数または搬送部の減衰特性を変化させることで機械的位相差を変動させることができ、特に、加振周波数を、異なる２つの振動モードの一方の固有振動数（第１振動モードの固有振動数）と他方の固有振動数（第２振動モードの固有振動数）との間に設定すれば、ワークの搬送に適した進行波を生成することが可能である。 Further, since the mechanical phase difference changes depending on the excitation frequency and the damping characteristic of the transport unit, the mechanical phase difference acquisition means in the present invention acquires the mechanical phase difference due to the excitation frequency of the drive signal. Or the one that acquires the mechanical phase difference due to the damping characteristics of the transport unit may be applied. The mechanical phase difference can be changed by changing the vibration frequency or the damping characteristic of the transport unit. In particular, the vibration frequency is set to the natural frequency of one of two different vibration modes (the natural frequency of the first vibration mode). If it is set between (frequency) and the other natural frequency (natural frequency in the second vibration mode), it is possible to generate a traveling wave suitable for transporting the work.

また、本発明に係るワーク搬送装置では、全ての定在波の振幅が等しくなるように調整する振幅調整手段をさらに備えたものを適用することもできる。 Further, in the work transfer device according to the present invention, it is also possible to apply an apparatus further provided with an amplitude adjusting means for adjusting the amplitudes of all standing waves so as to be equal.

特に、駆動手段による駆動信号が、超音波領域の周波数を加振周波数とするものであれば、超音波で駆動することで駆動音が人間の耳には聞こえず、高速搬送を実現しつつ、騒音問題を解消することができる。 In particular, if the drive signal by the drive means has a frequency in the ultrasonic region as the excitation frequency, the drive sound cannot be heard by the human ear by driving with ultrasonic waves, and high-speed transport is realized. The noise problem can be solved.

本発明によれば、搬送面に生成した進行波によって搬送面上のワークを搬送するため、搬送部の下流端に設定されるインターフェース部と次工程設備との間に、水平振幅を考慮した隙間を確保する必要がなく、その隙間を広げた場合に起こり得るワークの落下や詰まりを防止・抑制することができるとともに、任意の軸に対して回転方向に非対称な形状を有する搬送部と、搬送部の非対称形状から派生する機械的位相差を取得する機械的位相差取得手段と、取得した機械的位相差に対して付与する複数の駆動手段への駆動信号の時間的位相差を調整する電気的位相差調整手段とを備えているため、完全又はほぼ完全な進行波を生成することができ、従来よりもさらにスムーズ且つ高速な搬送処理を実現可能なワーク搬送装置を提供できる。 According to the present invention, in order to transport the work on the transport surface by the traveling wave generated on the transport surface, a gap in consideration of the horizontal amplitude between the interface portion set at the downstream end of the transport portion and the next process equipment. It is not necessary to secure a space, and it is possible to prevent and suppress the drop or clogging of the work that may occur when the gap is widened. The mechanical phase difference acquisition means that acquires the mechanical phase difference derived from the asymmetric shape of the part, and the electricity that adjusts the temporal phase difference of the drive signals to the plurality of drive means that are applied to the acquired mechanical phase difference. Since it is provided with the target phase difference adjusting means, it is possible to provide a work transfer device capable of generating a complete or almost perfect traveling wave and realizing a smoother and faster transfer process than before.

本発明の一実施形態に係るワーク搬送装置の全体図。The whole view of the work transfer apparatus which concerns on one Embodiment of this invention. 同実施形態に係るリニアフィーダの搬送部を下方（裏面）から見た模式図。The schematic diagram which looked at the transport part of the linear feeder which concerns on the same embodiment from the bottom (back side). 同実施形態に係るリニアフィーダの全体構成図。Overall configuration diagram of the linear feeder according to the same embodiment. 同実施形態に係るリニアフィーダの搬送部を一部省略して模式的に示す側断面図。A side sectional view schematically showing a transport portion of the linear feeder according to the same embodiment, with a part omitted. 同実施形態における０°モードと９０°モードの波の空間的位相差を示す図。The figure which shows the spatial phase difference of the wave of 0 ° mode and 90 ° mode in the same embodiment. 同実施形態における０°モードと９０°モードの加振力に対する撓み変位量の伝達特性及び位相特性を示す図。The figure which shows the transmission characteristic and the phase characteristic of the deflection displacement amount with respect to the excitation force of 0 ° mode and 90 ° mode in the same embodiment. 空間的位相差、時間位相差及び定在波の振幅の値による振幅の波形変化示す図。The figure which shows the waveform change of the amplitude by the value of the spatial phase difference, the temporal phase difference and the amplitude of a standing wave. 位相差と進行波比の関係を示す図。The figure which shows the relationship between a phase difference and a traveling wave ratio. 同実施形態における０°モード、９０°モードの周波数特性を示す図。The figure which shows the frequency characteristic of 0 ° mode and 90 ° mode in the same embodiment. 進行波比と固有振動数差率の関係を示す図。The figure which shows the relationship between a traveling wave ratio and a natural frequency difference rate. 同実施形態に係るボウルフィーダの側断面を模式的に示す図。The figure which shows typically the side cross section of the bowl feeder which concerns on the same embodiment. 同実施形態に係るボウルフィーダの搬送部を下方（裏面）から見た模式図。The schematic view which looked at the transport part of the bowl feeder which concerns on the same embodiment from the bottom (back side). 同実施形態における圧電素子の一変形例の模式図。The schematic diagram of one modification of the piezoelectric element in the same embodiment. 同実施形態における圧電素子のさらに異なる一変形例の模式図。The schematic diagram of one further modification of the piezoelectric element in the same embodiment.

以下、本発明の一実施形態を、図面を参照して説明する。 Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

本実施形態に係るワーク搬送装置は、例えば図１に示すリニアフィーダＬＦ及びボウルフィーダＢＦにそれぞれ適用されるものである。以下では、先にリニアフィーダＬＦについて説明する。図２は、図１に示すリニアフィーダＬＦを下方から見た模式図であり、図３は、リニアフィーダＬＦの全体構成を模式的に示す図である。 The work transfer device according to the present embodiment is applied to, for example, the linear feeder LF and the bowl feeder BF shown in FIG. 1, respectively. In the following, the linear feeder LF will be described first. FIG. 2 is a schematic view of the linear feeder LF shown in FIG. 1 as viewed from below, and FIG. 3 is a diagram schematically showing the overall configuration of the linear feeder LF.

本実施形態に係るリニアフィーダＬＦは、図１に示す供給用のボウルフィーダＢＦに接続されたものであり、図３に示すように、同一周波数で空間的位相差がある複数の定在波（第１定在波、第２定在波）を搬送面に生じさせる複数の駆動手段４を備え、これら複数の駆動手段４に時間的位相差を持たせた駆動信号を与えることで搬送面上のワークを搬送するものである。 The linear feeder LF according to the present embodiment is connected to the bowl feeder BF for supply shown in FIG. 1, and as shown in FIG. 3, a plurality of standing waves having a spatial phase difference at the same frequency (as shown in FIG. 3). A plurality of drive means 4 for generating (first standing wave, second standing wave) on the transport surface are provided, and by giving drive signals having a temporal phase difference to the plurality of drive means 4, the transport surface is provided. This is for transporting the work of.

リニアフィーダＬＦは、図３及び図４（図４はリニアフィーダＬＦの断面模式図である）に示すように、搬送中のワークが接触する面である搬送面を有する搬送部１と、搬送部１を下方から支持する支持台２と、搬送部１の所定箇所に設置された選別部３とを有する。 As shown in FIGS. 3 and 4 (FIG. 4 is a schematic cross-sectional view of the linear feeder LF), the linear feeder LF includes a transport unit 1 having a transport surface which is a surface to which the workpiece being transported contacts, and a transport unit. It has a support base 2 that supports 1 from below, and a sorting unit 3 installed at a predetermined position of the transport unit 1.

搬送部１は、進行波を生成する弾性部材であるプレート弾性体１１によって形成され、長尺な形状をなし、任意の軸に対して回転方向に非対称な形状を有するものである。プレート弾性体１１は、例えば平面視矩形状をなし、例えば２０ｋＨｚ以上の加振によって撓み波が形成される弾性体である。本実施形態では、導体のプレート弾性体１１を適用している。プレート弾性体１１は、搬送部１のうち後述するメイントラック１６の始端部がボウルフィーダＢＦのうちボウル搬送部１（Ｂ）の終端部と接続されている。搬送部１は、ほぼ直線状に延伸する搬送面を有する。なお、搬送部１の形状は平面視長方形状に限定されず、図３に模式的に示すように平面視長円形状であってもよい。 The transport portion 1 is formed by a plate elastic body 11 which is an elastic member that generates a traveling wave, has a long shape, and has a shape asymmetrical in the rotation direction with respect to an arbitrary axis. The plate elastic body 11 has, for example, a rectangular shape in a plan view, and is an elastic body in which a deflection wave is formed by vibration of, for example, 20 kHz or more. In this embodiment, the plate elastic body 11 of the conductor is applied. In the plate elastic body 11, the start end portion of the main track 16 described later in the transport portion 1 is connected to the end portion of the bowl transport portion 1 (B) in the bowl feeder BF. The transport unit 1 has a transport surface that extends substantially linearly. The shape of the transport unit 1 is not limited to a rectangular shape in a plan view, and may be an oval shape in a plan view as schematically shown in FIG.

プレート弾性体１１の中央部分には、平面視略長円形状の凹部１２が形成され、凹部１２の外側が搬送トラック１３となっている。凹部１２には、凹部１２よりも一回り小さい長円形状の押さえ板１４が収められ、長手方向に並ぶ複数の止着具１５により押さえ板１４を支持台２に固定している。凹部１２の底面１２ａにおいて、押さえ板１４が固定された固定部分１２ｂと搬送トラック１３との間の位置に、他の部分よりも薄く、固定部分１２ｂ及び搬送トラックよりも剛性が小さい低剛性部分１２ｃが形成されている。このような構成により、低剛性部分１２ｃよりも外周側において、搬送トラック１３に沿って撓み進行波を効果的に発生させることができる。 A recess 12 having a substantially oval shape in a plan view is formed in the central portion of the plate elastic body 11, and the outside of the recess 12 is a transport track 13. An oval-shaped pressing plate 14 that is one size smaller than the recess 12 is housed in the recess 12, and the pressing plate 14 is fixed to the support base 2 by a plurality of fasteners 15 arranged in the longitudinal direction. On the bottom surface 12a of the recess 12, the low-rigidity portion 12c is located between the fixed portion 12b to which the holding plate 14 is fixed and the transport truck 13, which is thinner than the other portions and less rigid than the fixed portion 12b and the transport truck. Is formed. With such a configuration, it is possible to effectively generate a bending traveling wave along the transport track 13 on the outer peripheral side of the low-rigidity portion 12c.

そして、プレート弾性体１１の長手方向に沿った軸（以下、長軸Ｌ）を境界とする一方側のエリアと他方側のエリアとで搬送トラック１３の構造・形状を異ならせている。具体的には、ワークを整列させて搬送する直線状のメイントラック１６を、プレート弾性体１１のうち長軸Ｌを境界とする一方側のエリアにのみ設け、メイントラック１６から排除されたワークＷをボウルフィーダＢＦに戻すリターントラック１７を、プレート弾性体１１のうち長軸Ｌを境界とする一方側のエリアから他方側のエリア側に亘る広範囲に設けている。 The structure and shape of the transport truck 13 are different between the area on one side and the area on the other side with the axis (hereinafter, the long axis L) along the longitudinal direction of the plate elastic body 11 as a boundary. Specifically, the linear main track 16 for aligning and transporting the workpieces is provided only in the area of the plate elastic body 11 on one side with the long axis L as the boundary, and the workpiece W excluded from the main track 16. The return track 17 for returning the to the bowl feeder BF is provided in a wide range from the area on one side of the plate elastic body 11 with the long axis L as the boundary to the area side on the other side.

リターントラック１７は、プレート弾性体１１のうち長軸Ｌを境界とする一方側のエリアにおいてメイントラック１６よりも内周側に設けた直線状の上流側リターントラック１７ａと、プレート弾性体１１のうち長軸Ｌを境界とする他方側のエリアに設けた直線状の下流側リターントラック１７ｂと、上流側リターントラック１７ａの下流端（終端）から下流側リターントラック１７ｂの上流端（始端）に亘って設けた部分円弧状（Ｕ字状）の中間リターントラック１７ｃとから構成されている（図１参照）。 The return track 17 is a linear upstream return track 17a provided on the inner peripheral side of the main track 16 in an area on one side of the plate elastic body 11 with the major axis L as a boundary, and the plate elastic body 11. A linear downstream return track 17b provided in the area on the other side with the long axis L as a boundary, and from the downstream end (end) of the upstream return track 17a to the upstream end (start) of the downstream return track 17b. It is composed of an intermediate return track 17c having a partial arc shape (U shape) provided (see FIG. 1).

リターントラック１７は、図４に示すように、メイントラック１６よりも深い溝状に設定されている。本実施形態では、上流側リターントラック１７ａと下流側リターントラック１７ｂが、プレート弾性体１１の長軸Ｌに対して相互に対称となる位置に形成されている。また、部分円弧状の中間リターントラック１７ｃは、プレート弾性体１１の長軸Ｌを中心に対称となる形状に設定されている。リターントラック１７の上向き面が、「ワークが接触する搬送面」である。なお、搬送面は、水平又は略水平な面（水平面）、又は水平に対して所定角度傾斜した面（傾斜面）、或いはＵ字状の面（曲面）の何れであってもよい。 As shown in FIG. 4, the return track 17 is set in a groove shape deeper than that of the main track 16. In the present embodiment, the upstream return track 17a and the downstream return track 17b are formed at positions symmetrical with respect to the long axis L of the plate elastic body 11. Further, the partial arc-shaped intermediate return track 17c is set to have a shape symmetrical with respect to the long axis L of the plate elastic body 11. The upward surface of the return track 17 is the "conveyed surface with which the workpiece contacts". The transport surface may be a horizontal or substantially horizontal surface (horizontal plane), a surface inclined at a predetermined angle with respect to the horizontal (inclined surface), or a U-shaped surface (curved surface).

メイントラック１６は、プレート弾性体１１のうち長軸Ｌを境界とする一方側のエリアにおいて上流側リターントラック１７ａよりも外周側に形成され、断面形状が上流側リターントラック１７ａよりも浅い溝状に設定されている。メイントラック１６の上向き面が、「ワークが接触する搬送面」である。メイントラック１６の上向き面は、外周側に下り勾配となるように所定角度傾斜した面に設定されている。メイントラック１６では搬送中にワークを一列に整列させて次工程装置に供給することができる。以下では、プレート弾性体１１のうち長軸Ｌを境界とする一方側のエリアを「メイントラック側エリア」とし、他方側のエリアを「リターントラック側エリア」とする。これは軸対称性を崩す一例である。 The main track 16 is formed on the outer peripheral side of the upstream return track 17a in the area on one side of the plate elastic body 11 with the major axis L as a boundary, and has a groove shape whose cross-sectional shape is shallower than that of the upstream return track 17a. It is set. The upward surface of the main track 16 is the "conveyed surface with which the workpieces come into contact". The upward surface of the main track 16 is set to a surface inclined by a predetermined angle so as to have a downward slope toward the outer peripheral side. In the main truck 16, the workpieces can be aligned in a row during transportation and supplied to the next process apparatus. In the following, the area on one side of the plate elastic body 11 with the long axis L as the boundary is referred to as the “main track side area”, and the area on the other side is referred to as the “return track side area”. This is an example of breaking the axial symmetry.

このメイントラック１６には、図１及び図４に示す選別部３が設けてある。選別部３は、姿勢判別に利用されるセンサ３１と、姿勢判別の結果に基づいてエアを噴出させるエア噴出部３２とを有する。センサ３１が、所望の適正な姿勢ではない姿勢（異方向姿勢）あると判別したワークＷに対して、エア噴出部３２からエアを噴出することで、異方向姿勢のワークＷをメイントラック１６から排除し、メイントラック１６よりも内周側であって且つ低位置にある上流側リターントラック１７ａに落下させることができる。 The main track 16 is provided with a sorting unit 3 shown in FIGS. 1 and 4. The sorting unit 3 has a sensor 31 used for posture determination and an air ejection unit 32 for ejecting air based on the result of the attitude determination. By ejecting air from the air ejection portion 32 to the work W determined by the sensor 31 to have a posture (different direction posture) that is not the desired proper posture, the work W in the different direction posture is ejected from the main track 16. It can be eliminated and dropped onto the upstream return track 17a, which is on the inner peripheral side of the main track 16 and at a lower position.

上流側リターントラック１７ａに排除された異方向姿勢のワークＷは、中間リターントラック１７ｃ及び下流側リターントラック１７ｂを経てボウルフィーダＢＦのボウル弾性体１１に戻される。適正な姿勢であると判別されたワークＷは、メイントラック１６の終端に設けた排出口から排出される。 The work W in the different direction posture excluded from the upstream return track 17a is returned to the bowl elastic body 11 of the bowl feeder BF via the intermediate return track 17c and the downstream return track 17b. The work W determined to be in the proper posture is discharged from the discharge port provided at the end of the main track 16.

このような搬送部１を撓み変形させる複数の駆動手段４は、図２〜図４に示すように、圧電素子４１によって構成されている。搬送面（メイントラック１６の搬送面、リターントラック１７の搬送面）に進行波を発生させる進行波発生手段として機能する複数の圧電素子４１は、プレート弾性体１１のうち、搬送面（メイントラック１６の搬送面、リターントラック１７の搬送面）が形成された部分の裏面（下向き面）側に貼り付けられている。 As shown in FIGS. 2 to 4, the plurality of driving means 4 for bending and deforming the conveying portion 1 are composed of the piezoelectric element 41. Among the plate elastic bodies 11, the plurality of piezoelectric elements 41 that function as traveling wave generating means for generating traveling waves on the transport surface (the transport surface of the main track 16 and the transport surface of the return track 17) are the transport surface (main track 16). The transport surface of the return truck 17) is attached to the back surface (downward surface) side of the formed portion.

圧電素子４１は、プレート弾性体１１の長手方向に伸縮することで搬送面（メイントラック１６の搬送面、リターントラック１７の搬送面）に撓みを発生させるものであり、プレート弾性体１１のメイントラック側エリアとリターントラック側エリアに、それぞれ長軸Ｌ方向に沿って設けられる。メイントラック側エリアに沿った位置に配置された圧電素子４１と、リターントラック側エリアに沿った位置に配置された圧電素子４１は、図２及び図３に示すように互いに空間的位相差をもって設けられている。本実施形態では、メイントラック側エリアを、０°モードの波を発生させるための第１加振領域Ｚ１に設定し、リターントラック側エリアを、９０°モードの波を発生させるための第２加振領域Ｚ２に設定している。 The piezoelectric element 41 expands and contracts in the longitudinal direction of the plate elastic body 11 to cause bending on the transport surface (the transport surface of the main track 16 and the transport surface of the return track 17), and the main track of the plate elastic body 11 The side area and the return track side area are provided along the long axis L direction, respectively. The piezoelectric element 41 arranged at a position along the main track side area and the piezoelectric element 41 arranged at a position along the return track side area are provided with a spatial phase difference from each other as shown in FIGS. 2 and 3. Has been done. In the present embodiment, the main track side area is set to the first vibration region Z1 for generating a wave in 0 ° mode, and the return track side area is set to the second excitation region Z1 for generating a wave in 90 ° mode. It is set in the vibration region Z2.

図３に示すように、第１加振領域Ｚ１の圧電素子４１は第１アンプ５１に接続され、第２加振領域Ｚ２の圧電素子４１は第２アンプ５２に接続されている。各圧電素子４１は、第１加振領域Ｚ１及び第２加振領域Ｚ２においてそれぞれ振動モードの腹の位置に１／２波長間隔で配置されている。各加振領域（第１加振領域Ｚ１、第２加振領域Ｚ２）において隣り合う圧電素子４１は、振幅の山と谷の関係となることから、同じ駆動をした場合に逆方向の変位（図２及び図３で「＋」と「−」で表現）となるように構成されている。つまり、搬送面に上下方向の撓み振動を発生させて、効率良く加振させるために、搬送面の下方（裏側）に、振動モードの腹の位置に１／２波長間隔で圧電素子４１を貼り付け、搬送方向に隣り合う圧電素子４１の極性を交互に入れ替えている。 As shown in FIG. 3, the piezoelectric element 41 of the first vibration region Z1 is connected to the first amplifier 51, and the piezoelectric element 41 of the second vibration region Z2 is connected to the second amplifier 52. The piezoelectric elements 41 are arranged at intervals of 1/2 wavelength in the first vibration region Z1 and the second vibration region Z2 at the antinode positions of the vibration modes, respectively. Since the piezoelectric elements 41 adjacent to each other in each vibration region (first vibration region Z1 and second vibration region Z2) have an amplitude peak and valley relationship, they are displaced in the opposite directions when the same drive is applied. It is configured to be represented by "+" and "-" in FIGS. 2 and 3. That is, in order to generate bending vibration in the vertical direction on the transport surface and vibrate efficiently, the piezoelectric element 41 is attached below (back side) of the transport surface at the antinode position of the vibration mode at 1/2 wavelength intervals. The polarities of the piezoelectric elements 41 adjacent to each other in the transport direction are alternately exchanged.

第１加振領域Ｚ１と第２加振領域Ｚ２とでは、周波数を同じにしつつ、空間的に波の位相が９０°ずれた２つの振動モード、具体的には、図５に示す０°モードと９０°モードの波を発生させて効率良く加振するため、図３に示すように、例えば第２加振領域Ｚ２に対して第１加振領域Ｚ１はリターントラック１７におけるワークの搬送方向に沿って（ｎ＋１／４）λ（ｎ＝０又は正の整数）の空間的位相差が設定され、第１加振領域Ｚ１と第２加振領域Ｚ１とで同じ極性の圧電素子４１同士の配置が実質的にλ／４ずれるように取り付けられている（取付条件）。このように、本実施形態では、１／４波長ずらして圧電素子４１が配置されている。図５では、０°モードの波と９０°モードの波の同じ位置で、０°モードの波の節と９０°モードの波の腹が一致しており、９０°の空間的位相差があることが理解できる。 In the first vibration region Z1 and the second vibration region Z2, two vibration modes in which the phases of the waves are spatially shifted by 90 ° while having the same frequency, specifically, the 0 ° mode shown in FIG. 5 In order to generate a wave in the 90 ° mode and vibrate efficiently, for example, as shown in FIG. 3, the first vibration region Z1 is in the transport direction of the work in the return track 17 with respect to the second vibration region Z2. A spatial phase difference of (n + 1/4) λ (n = 0 or a positive integer) is set along the line, and the piezoelectric elements 41 having the same polarity are arranged in the first vibration region Z1 and the second vibration region Z1. Is installed so that it is substantially displaced by λ / 4 (installation conditions). As described above, in the present embodiment, the piezoelectric elements 41 are arranged with a 1/4 wavelength shift. In FIG. 5, at the same position of the 0 ° mode wave and the 90 ° mode wave, the node of the 0 ° mode wave and the antinode of the 90 ° mode wave coincide with each other, and there is a 90 ° spatial phase difference. Can be understood.

なお、定在波とは、共振すると単にその場で振動するものである。また、圧電素子４１は一体のもので、表面の電極の極性を交互に入れ替える構成であってもよく、極性は、図２及び図３に示す極性と逆であってもよい。さらに、圧電素子４１は、第１加振領域Ｚ１（メイントラック側エリア）及び第２加振領域Ｚ２（リターントラック側エリア）に１つずつ設けられる構成、あるいは片方の加振領域に圧電素子４１同士の配置がλ／４ずれて設けられる構成でもよい。またプレート弾性体１１のうち、搬送面（メイントラック１６の搬送面、リターントラック１７の搬送面）が形成された部分の裏側とオモテ側のそれぞれ取り付けられてもよい。すなわち、上述した取付条件を満たせば２以上の圧電素子４１が搬送部１のどこに設けられてもよい。 A standing wave simply vibrates on the spot when it resonates. Further, the piezoelectric element 41 may be integrated, and the polarities of the electrodes on the surface may be alternately exchanged, and the polarities may be opposite to those shown in FIGS. 2 and 3. Further, the piezoelectric element 41 is provided in each of the first vibration region Z1 (main track side area) and the second vibration region Z2 (return track side area), or the piezoelectric element 41 is provided in one vibration region. The arrangement may be arranged so as to be offset by λ / 4. Further, the plate elastic body 11 may be attached to the back side and the front side of the portion where the transport surface (the transport surface of the main track 16 and the transport surface of the return track 17) is formed. That is, two or more piezoelectric elements 41 may be provided anywhere in the transport unit 1 as long as the above-mentioned mounting conditions are satisfied.

そして、搬送部１の長軸Ｌを中心とする対称構造を崩すことによって、搬送部１のうち０°モードの固有振動数ｆ１と、９０°モードの固有振動数ｆ２とに差（ｆ１＜ｆ２）が生じている。本実施形態に係るリニアフィーダＬＦは、図３に示すように、少なくとも固有振動数ｆ１と固有振動数ｆ２の差に起因する機械的位相差を、進行波を発生させるための時間的位相差に含まれる要素として取得する機械的位相差取得手段を備えている。ここで、機械的位相差は、２つの振動モードの固有振動数の差に起因した位相差である。つまり、機械的位相差は、搬送部１の非対称形状から派生する位相差であり、異なる２つの固有振動数の振動モードに対し、一つの周波数で加振する場合に、２つの定在波に生じる時間位相の差である。「固有振動数の差」とは、２つの振動モードが同じ変形形態および同じ波の数であることを意味しており、異なる２つの振動モードの固有振動数の差であり、振動モードの数と、進行波を生成するための定在波の数は必ずしも一致するものではない。ここで述べる「同じ変形形態」とは、例えば、２つの振動モードの振動方向や振動の仕方が同じであることを意味しており、「同じ波の数」とは、搬送部が有する搬送面のうち、ワークが搬送される搬送経路全周における波長の数を意味するものである。すなわち、物体を振動させた場合には、空間的に位相差を有する２つの振動モードがあり、振動モードが３つになるケースは皆無である。したがって、例えば同一周波数、同じ変形形態および同じ波の数であり、空間的位相差がある３つ以上の定在波を搬送面に生じさせる構成であっても、振動モードは、相互に固有振動数の異なる第１振動モードと第２振動モードの２つである。互いに空間位相が９０°ずれていることから、２つの振動モードのうち第１振動モードを０°モード、第２振動モードを９０°モードと定義することができる。 Then, by breaking the symmetrical structure centered on the long axis L of the transport unit 1, there is a difference (f1 <f2) between the natural frequency f1 in the 0 ° mode and the natural frequency f2 in the 90 ° mode of the transport unit 1. ) Has occurred. As shown in FIG. 3, the linear feeder LF according to the present embodiment uses at least the mechanical phase difference caused by the difference between the natural frequency f1 and the natural frequency f2 as the temporal phase difference for generating the traveling wave. It is provided with a mechanical phase difference acquisition means to be acquired as a included element. Here, the mechanical phase difference is a phase difference caused by the difference in the natural frequencies of the two vibration modes. That is, the mechanical phase difference is a phase difference derived from the asymmetric shape of the transport unit 1, and when the vibration modes of two different natural frequencies are vibrated at one frequency, the two standing waves are formed. The difference in time phase that occurs. "Difference in natural frequency" means that the two vibration modes have the same deformation form and the same number of waves, which is the difference between the natural frequencies of the two different vibration modes, and the number of vibration modes. And the number of standing waves for generating a traveling wave does not always match. The "same deformation form" described here means, for example, that the vibration directions and vibration methods of the two vibration modes are the same, and the "same number of waves" means the transport surface of the transport unit. Of these, it means the number of wavelengths in the entire circumference of the transport path to which the work is transported. That is, when the object is vibrated, there are two vibration modes having a spatial phase difference, and there is no case where the vibration modes are three. Therefore, for example, even in a configuration in which three or more standing waves having the same frequency, the same deformation form, and the same number of waves and having a spatial phase difference are generated on the transport surface, the vibration modes are mutually natural vibrations. There are two different numbers, the first vibration mode and the second vibration mode. Since the spatial phases are 90 ° out of alignment with each other, the first vibration mode can be defined as the 0 ° mode and the second vibration mode can be defined as the 90 ° mode among the two vibration modes.

図６に空間的に波の位相差が９０°ずれた２つの振動モードの加振力（発生力）に対する撓み変位量の伝達特性及び位相特性を示す。加振周波数ｆを第１加振領域Ｚ１（０°モード）の固有周波数ｆ１とすると、位相特性について、第１加振領域Ｚ１（０°モード）では、共振駆動であるため、力に対する変位の位相差は９０°になる（同図における「９０−φ１」）。同図の変位／力の特性から、第１加振領域Ｚ１（０°モード）の波は、共振点ｆ１で駆動されるが、第２加振領域Ｚ２（９０°モード）の波は、共振点から外れ、振幅が低減することが理解できる。 FIG. 6 shows the transmission characteristics and the phase characteristics of the amount of deflection displacement with respect to the exciting force (generated force) of the two vibration modes in which the phase difference of the waves is spatially shifted by 90 °. Assuming that the excitation frequency f is the natural frequency f1 of the first excitation region Z1 (0 ° mode), the phase characteristic is the displacement with respect to the force because the resonance drive is performed in the first excitation region Z1 (0 ° mode). The phase difference is 90 ° (“90-φ 1 ” in the figure). From the displacement / force characteristics in the figure, the wave in the first excitation region Z1 (0 ° mode) is driven at the resonance point f1, but the wave in the second excitation region Z2 (90 ° mode) resonates. It can be seen that the amplitude is reduced off the point.

また、加振周波数ｆを第１加振領域Ｚ１（０°モード）の固有周波数ｆ１と第２加振領域Ｚ２（９０°モード）の固有周波数ｆ２の中間の周波数ｆ３にすると、力に対する変位の位相差は、同図における「φ３−φ２」になり、０°モードの振幅と、９０°モードの振幅は同じになる（同図中の符号ｂ参照）。 Further, when the excitation frequency f is set to a frequency f3 intermediate between the natural frequency f1 of the first vibration region Z1 (0 ° mode) and the natural frequency f2 of the second vibration region Z2 (90 ° mode), the displacement with respect to the force is set. The phase difference is “φ 3 − φ 2 ” in the figure, and the amplitude in the 0 ° mode and the amplitude in the 90 ° mode are the same (see reference numeral b in the figure).

このように、０°モードと９０°モードは、固有振動数が完全に一致しない。そのため、ある一つの周波数で駆動する場合、２つの定在波（０°モードと９０°モード）に位相差が生じる。また、加振周波数を変化すると、位相差も変化する。それと同時に、共振ピークから外れるため、振幅差も生じる。そのため、加振周波数を変化させることは、結果的に位相差と振幅比を変更していることと同等になる。そこで、本実施形態では、機械的位相差取得手段として、固有振動数ｆ１と固有振動数ｆ２の差に起因する機械的位相差のみならず、駆動信号の加振周波数に起因する機械的位相差を、進行波を発生させるための時間的位相差に含まれる要素として取得するものを適用している。 As described above, the natural frequencies of the 0 ° mode and the 90 ° mode do not completely match. Therefore, when driving at a certain frequency, a phase difference occurs between the two standing waves (0 ° mode and 90 ° mode). Moreover, when the excitation frequency is changed, the phase difference also changes. At the same time, since it deviates from the resonance peak, an amplitude difference also occurs. Therefore, changing the excitation frequency is equivalent to changing the phase difference and the amplitude ratio as a result. Therefore, in the present embodiment, as the mechanical phase difference acquisition means, not only the mechanical phase difference caused by the difference between the natural frequency f1 and the natural frequency f2, but also the mechanical phase difference caused by the excitation frequency of the drive signal. Is applied as an element included in the temporal phase difference for generating a traveling wave.

また、本実施形態では、機械的位相差取得手段が、搬送部１の減衰特性に起因する機械的位相差も、進行波を発生させるための時間的位相差に含まれる要素として取得するように構成している。これは、搬送部１の減衰特性が変化すれば機械的位相差も変動するという点に着目した構成である。 Further, in the present embodiment, the mechanical phase difference acquisition means acquires the mechanical phase difference due to the attenuation characteristic of the transport unit 1 as an element included in the temporal phase difference for generating the traveling wave. It is configured. This configuration focuses on the fact that the mechanical phase difference also changes if the damping characteristic of the transport unit 1 changes.

本実施形態に係るリニアフィーダＬＦは、図３に示すように、波形を選択する波形選択手段６を備えている。波形選択手段６は、例えば正弦波、矩形波、三角波等の複数種の波形から１つの波形を選択するものである。また、本実施形態に係るリニアフィーダＬＦは、各振動モードに印加する波形の電気的位相差を調整する電気的位相差調整手段７を備え、電気的位相差調整手段７が、機械的位相差取得手段で取得した機械的位相差に対して、複数の駆動手段４（第１駆動手段４１、第２駆動手段４２）への駆動信号の時間的な位相差を調整して付与するように構成している。「電気的位相差」は、２つの振動モード用のそれぞれの駆動手段４に印加する電圧波形の位相差であり、外部から与える時間的な位相差指令である。 As shown in FIG. 3, the linear feeder LF according to the present embodiment includes a waveform selection means 6 for selecting a waveform. The waveform selection means 6 selects one waveform from a plurality of types of waveforms such as a sine wave, a square wave, and a triangular wave. Further, the linear feeder LF according to the present embodiment includes an electrical phase difference adjusting means 7 for adjusting the electrical phase difference of the waveform applied to each vibration mode, and the electrical phase difference adjusting means 7 is a mechanical phase difference. It is configured to adjust and give the temporal phase difference of the drive signal to the plurality of drive means 4 (first drive means 41, second drive means 42) with respect to the mechanical phase difference acquired by the acquisition means. doing. The "electrical phase difference" is the phase difference of the voltage waveform applied to each of the driving means 4 for the two vibration modes, and is a temporal phase difference command given from the outside.

また、本実施形態に係るリニアフィーダＬＦは、加振周波数を調整する加振周波数調整手段８と、全ての定在波（０°モードの定在波、９０°モードの定在波）の振幅を調整する振幅調整手段（第１振幅調整手段９１、第２振幅調整手段９２）とを備えている。第１振幅調整手段９１、第２振幅調整手段９２は、０°モードの定在波の振幅と９０°モードの定在波の振幅が等しくなるように調整するものである。 Further, the linear feeder LF according to the present embodiment includes the excitation frequency adjusting means 8 for adjusting the excitation frequency and the amplitudes of all the standing waves (standing wave in 0 ° mode and standing wave in 90 ° mode). (1st amplitude adjusting means 91, 2nd amplitude adjusting means 92) are provided. The first amplitude adjusting means 91 and the second amplitude adjusting means 92 adjust so that the amplitude of the standing wave in the 0 ° mode and the amplitude of the standing wave in the 90 ° mode are equal to each other.

本実施形態に係るリニアフィーダＬＦは、このような構成において、第１加振領域Ｚ１の圧電素子４１と第２加振領域Ｚ２の圧電素子４１に対して、時間的に位相を９０°ずらした超音波の正弦波振動を与えると、空間的且つ時間的に９０°ずれた２つの定在波が重ね合わされ、搬送面（メイントラック１６の搬送面、リターントラック１７の搬送面）自体が弾性変形し、撓み振動が進行波となる（循環方式）。 In such a configuration, the linear feeder LF according to the present embodiment is phase-shifted by 90 ° with respect to the piezoelectric element 41 in the first vibration region Z1 and the piezoelectric element 41 in the second vibration region Z2. When ultrasonic sinusoidal vibration is applied, two standing waves that are spatially and temporally displaced by 90 ° are superposed, and the transport surface (convey surface of the main track 16 and the transport surface of the return track 17) itself is elastically deformed. Then, the bending vibration becomes a traveling wave (circulation method).

ここで、振動する領域における「最小振幅／最大振幅」で求められる進行波比は、その値が「１」である場合に理想的な進行波を生成することができる。そして、進行波比１の進行波を生成するためには、２つの定在波（０°モードの定在波、９０°モードの定在波）の時間的位相差及び空間的位相差が９０°且つ振幅が同じである必要がある。しかし、実際には、位相差を９０°及び両者の振幅を完全に一致させることは困難である。特に、２つの振動モードの固有振動数付近で駆動するため、固有振動数の差が生じる場合、機械的に時間的位相差が発生してしまう。また、減衰によってもその位相差が変化するため、時間的位相差を９０°に設定することは非常に難しい。そこで、本発明者は、２つの定在波の位相差及び振幅比が理想値からずれた場合、進行波比がどの程度変化するのかを検証した。 Here, the traveling wave ratio obtained by "minimum amplitude / maximum amplitude" in the vibrating region can generate an ideal traveling wave when its value is "1". Then, in order to generate a traveling wave with a traveling wave ratio of 1, the temporal phase difference and the spatial phase difference between the two standing waves (standing wave in 0 ° mode and standing wave in 90 ° mode) are 90. ° and amplitude must be the same. However, in reality, it is difficult to make the phase difference 90 ° and to completely match the amplitudes of both. In particular, since it is driven near the natural frequencies of the two vibration modes, if there is a difference in the natural frequencies, a temporal phase difference is mechanically generated. Further, it is very difficult to set the temporal phase difference to 90 ° because the phase difference changes due to the attenuation. Therefore, the present inventor has verified how much the traveling wave ratio changes when the phase difference and the amplitude ratio of the two standing waves deviate from the ideal values.

振幅が異なり、空間的及び時間的に位相差が生じた２つの定在波があり、一方の定在波の振幅をａ、他方の振幅をｂ、空間的位相差をφ１、時間位相差をφ２、周波数をω、波数をｋとすると、ある位置ｘにおける定在波の変位ｙ１、ｙ２は以下の式（１）で表すことができる。 There are two standing waves with different amplitudes and spatial and temporal phase differences. One standing wave has an amplitude of a, the other has an amplitude of b, a spatial phase difference of φ 1 , and a temporal phase difference. Let φ 2 , the frequency be ω, and the wave number be k, and the displacements y 1 and y 2 of the standing wave at a certain position x can be expressed by the following equation (1).

Figure 0006820474
この２つの波を合成し、整理すると、以下の式（２）となる。
Figure 0006820474
 When these two waves are combined and arranged, the following equation (2) is obtained.

Figure 0006820474
式（２）の正弦波の振幅「ｈ（ｘ）＝√Ａ２＋Ｂ２」を、位置ｘに対してプロットすると、図７となる。同図より、振幅ｈ（ｘ）の波形が、空間的位相差φ１、時間位相差φ２及び定在波の振幅ａ、ｂの値によって大きく変化することが理解できる。そして、空間的位相差φ１＝時間的位相差φ２＝９０°、一方の定在波の振幅ａ＝他方の定在波の振幅ｂの時に、振幅が位置ｘによらず一定になり、進行波比1の完全進行波となる。一方，空間的位相差φ１＝０または時間的位相差φ２＝０の時は、節の振幅が０になる完全定在波となる。それ以外の場合には、定在波と進行波が混在している状態となる。
Figure 0006820474
 When the amplitude "h (x) = √A 2 + B 2 " of the sine wave of the equation (2) is plotted against the position x, FIG. 7 is obtained. From the figure, it can be understood that the waveform of the amplitude h (x) changes greatly depending on the values of the spatial phase difference φ 1 , the time phase difference φ 2, and the amplitudes a and b of the standing wave. Then, when the spatial phase difference φ 1 = the temporal phase difference φ 2 = 90 ° and the amplitude a of one standing wave = the amplitude b of the other standing wave, the amplitude becomes constant regardless of the position x. It becomes a completely traveling wave with a traveling wave ratio of 1. On the other hand, when the spatial phase difference φ 1 = 0 or the temporal phase difference φ 2 = 0, the wave becomes a completely standing wave in which the amplitude of the node becomes 0. In other cases, standing waves and traveling waves are mixed.

ここで、空間的位相差φ１または時間的位相差φ２の一方の位相差を９０°に固定し、もう片方の位相差を０°から９０°まで変化させたときの進行波比の関係を図８に示す。パラメータとして、振幅比ａ／ｂ、つまり一方の定在波の振幅ａと他方の定在波の振幅ｂとの比率を、「１．０」、「１．５」、「２．０」と変化させた結果、位相差が０°に近づくほど進行波比は急激に小さくなり、０°で進行波比は０となり完全定在波となった。一方、９０°に近づくほど、進行波比が１に近づき、９０°で進行波比が１（振幅比が１の場合）になり、完全進行波となった。また、９０°から１８０°は０°から９０°の対称の特性になることも判明した。 Here, the spatial one phase difference of the phase difference phi 1 or temporal phase difference phi 2 were fixed to 90 °, the other traveling wave ratio relationship when the phase difference is varied from 0 ° to 90 ° Is shown in FIG. As a parameter, the amplitude ratio a / b, that is, the ratio of the amplitude a of one standing wave to the amplitude b of the other standing wave is set to "1.0", "1.5", "2.0". As a result of the change, the traveling wave ratio sharply decreased as the phase difference approached 0 °, and the traveling wave ratio became 0 at 0 °, resulting in a completely standing wave. On the other hand, as it approaches 90 °, the traveling wave ratio approaches 1, and at 90 °, the traveling wave ratio becomes 1 (when the amplitude ratio is 1), and the traveling wave becomes a complete traveling wave. It was also found that 90 ° to 180 ° has a symmetrical characteristic of 0 ° to 90 °.

以上の検証結果に基づいて、軸対象ではない搬送部１を備えた本実施形態に係るリニアフィーダＬＦでは、先ず、相互に異なる固有振動数に対応した２つの振動モードの固有振動数、つまり、０°モードの固有振動数ｆ１と、９０°モードの固有振動数ｆ２を適宜の手段によって測定し（固有振動数測定ステップ）、加振周波数を決定する（加振周波数決定ステップ）。固有振動数測定ステップで測定した各モードの固有振動数（０°モードの固有振動数ｆ１、９０°モードの固有振動数ｆ２）は、図９に示すグラフのように表すことができる。加振周波数決定ステップでは、加振周波数調整手段８によって、加振周波数を０°モードの固有振動数ｆ１と９０°モードの固有振動数ｆ２の間の周波数に設定する。 Based on the above verification results, in the linear feeder LF according to the present embodiment including the transport unit 1 that is not axially symmetrical, first, the natural frequencies of the two vibration modes corresponding to the different natural frequencies, that is, that is, The natural frequency f1 in the 0 ° mode and the natural frequency f2 in the 90 ° mode are measured by appropriate means (natural frequency measurement step), and the excitation frequency is determined (excitation frequency determination step). The natural frequencies of each mode measured in the natural frequency measurement step (natural frequencies f1 in the 0 ° mode and natural frequencies f2 in the 90 ° mode) can be represented as shown in the graph shown in FIG. In the vibration frequency determination step, the vibration frequency adjusting means 8 sets the vibration frequency to a frequency between the natural frequency f1 in the 0 ° mode and the natural frequency f2 in the 90 ° mode.

次に、本実施形態に係るリニアフィーダＬＦは、機械的位相差算出手段によって機械的位相差を算出する（機械的位相差算出ステップ）。具体的には、図９に示すグラフから機械的位相差（同図中で「φｍ」で示す機械的位相差）を算出することができる。機械的位相差算出ステップに続いて、本実施形態に係るリニアフィーダＬＦは、外部から与える時間的な位相差指令である電気的位相差を設定する（電気的位相差設定ステップ）。具体的には、電気的位相差と機械的位相差の和が９０°となるように電気的位相差を決定して設定する。すなわち、「電気的位相差＝９０−機械的位相差」の条件を満たす場合に進行波比が「１」となる。 Next, the linear feeder LF according to the present embodiment calculates the mechanical phase difference by the mechanical phase difference calculating means (mechanical phase difference calculation step). Specifically, the mechanical phase difference (mechanical phase difference indicated by "φm" in the figure) can be calculated from the graph shown in FIG. Following the mechanical phase difference calculation step, the linear feeder LF according to the present embodiment sets an electrical phase difference which is a temporal phase difference command given from the outside (electrical phase difference setting step). Specifically, the electrical phase difference is determined and set so that the sum of the electrical phase difference and the mechanical phase difference is 90 °. That is, the traveling wave ratio becomes "1" when the condition of "electrical phase difference = 90-mechanical phase difference" is satisfied.

以上の処理を経ることによって、本実施形態に係るリニアフィーダＬＦは、２つの領域（第１加振領域Ｚ１、第２加振領域Ｚ２）の圧電素子４１に与える波の振動（例えば正弦波振動）の位相差を調整することで、進行波比（進行波比＝最小振幅／最大振幅）を調整して、空間的且つ時間的に９０°ずれた２つの定在波が重ね合わされ、撓み振動は進行波になり、完全又はほぼ完全な進行波を生成して、ワークＷを搬送することができる。 Through the above processing, the linear feeder LF according to the present embodiment vibrates waves (for example, sine wave vibration) applied to the piezoelectric element 41 in two regions (first vibration region Z1 and second vibration region Z2). By adjusting the phase difference of), the traveling wave ratio (traveling wave ratio = minimum amplitude / maximum amplitude) is adjusted, and two standing waves that are spatially and temporally deviated by 90 ° are superposed and flexed and vibrated. Becomes a traveling wave, which can generate a complete or almost complete traveling wave to carry the work W.

進行波が生成されると、搬送面のある一点の軌跡が楕円振動を描き、この楕円振動が搬送面の頂点に達する時にワークと接触し、ワークに摩擦力を与える。摩擦力が作用する方向にワークは搬送される。このワークの搬送方向は、進行波の進む方向の逆になる。 When a traveling wave is generated, the locus of a certain point on the transport surface draws an elliptical vibration, and when this elliptical vibration reaches the apex of the transport surface, it comes into contact with the work and gives a frictional force to the work. The work is conveyed in the direction in which the frictional force acts. The transport direction of this work is opposite to the traveling direction of the traveling wave.

ここで、０°モードの固有振動数ｆ１と９０°モードの固有振動数ｆ２は互いに異なる値であり、これらの差は、以下の式３に示すように、０°モードの固有振動数ｆ１に対する９０°モードの固有振動数ｆ２の差の割合である固有振動数差率Δｆとして表すことができる。
Δｆ＝（ｆ２−ｆ１）／ｆ１×１００ ただしｆ２＞ｆ１とする …式３ Here, the natural frequency f1 in the 0 ° mode and the natural frequency f2 in the 90 ° mode are different values, and the difference between them is as shown in the following equation 3 with respect to the natural frequency f1 in the 0 ° mode. It can be expressed as the natural frequency difference rate Δf, which is the ratio of the difference between the natural frequencies f2 in the 90 ° mode.
Δf = (f2-f1) / f1 × 100 where f2> f1 ... Equation 3

進行波比と固有振動数差率Δｆの関係を図１０に示す。ここで述べる進行波比とは、進行波による搬送面における垂直振幅のうち、搬送面のうち所定範囲にて最も大きく振動する位置における最大振幅に対する、前記所定範囲にて最も小さく振動する位置における最小振幅の比、を意味する。式３及び図１０より、実用上支障なくワークを搬送可能とする進行波比（搬送限界進行波比）の値（本発明者は、検証実験により搬送限界進行波比の値が「０．１３以上」であることを見出した）となるのは、固有振動数差率Δｆの値がΔｆ≦１．５４であることが把握できる。したがって、固有振動数差率Δｆ≦１．５４であれば、実用上支障なくワークを搬送可能なワーク搬送装置を形成できる。 The relationship between the traveling wave ratio and the natural frequency difference rate Δf is shown in FIG. The traveling wave ratio described here is the minimum of the vertical amplitudes of the traveling wave on the transport surface at the position where it vibrates the smallest in the predetermined range with respect to the maximum amplitude at the position where the transport surface vibrates the most in the predetermined range. It means the ratio of amplitude. From Equation 3 and FIG. 10, the value of the traveling wave ratio (traveling limit traveling wave ratio) that enables the work to be conveyed without any problem in practical use (the present inventor determined that the value of the traveling limit traveling wave ratio was "0.13" by the verification experiment. It can be understood that the value of the natural frequency difference rate Δf is Δf ≦ 1.54. Therefore, if the natural frequency difference ratio Δf ≦ 1.54, it is possible to form a work transfer device capable of conveying the work without any problem in practical use.

また、上述の各ステップを経る電気的な処理によっても適切な進行波を生成することができない場合は、搬送部１の減衰特性を変化させることを目的に搬送部１の構造を変更してもよい。搬送部１の減衰特性を変化させると、それに伴って機械的位相差が変動し、その変動した機械的位相差を、時間的位相差に含まれる要素として機械的位相差取得手段で取得して、その後の電気的な処理（固有振動数測定ステップ以降の処理）を経ることで、搬送部１の減衰特性に起因する機械的特性を含む時間的位相差を９０°又はほぼ９０°に一致させることができる。 Further, if an appropriate traveling wave cannot be generated by the electrical processing through each of the above steps, the structure of the transport unit 1 may be changed for the purpose of changing the damping characteristics of the transport unit 1. Good. When the damping characteristic of the transport unit 1 is changed, the mechanical phase difference fluctuates accordingly, and the fluctuated mechanical phase difference is acquired by the mechanical phase difference acquisition means as an element included in the temporal phase difference. By undergoing subsequent electrical processing (processing after the natural frequency measurement step), the temporal phase difference including the mechanical characteristics due to the damping characteristics of the transport unit 1 is matched to 90 ° or approximately 90 °. be able to.

このように、本実施形態に係るリニアフィーダＬＦは、搬送面を有し、且つ任意の軸に対して非対称な形状を有する搬送部１と、機械的位相差取得手段と、電気的位相差調整手段７とを備え、少なくとも搬送部１が有する相互に異なる固有振動数に対応した２つの振動モードの固有振動数の差に起因した機械的位相差を、時間的位相差に含まれる要素として機械的位相差取得手段で取得し、その取得した機械的位相差に対して、電気的位相差調整手段７によって、複数の駆動手段４への駆動信号の時間的な位相差を調整して付与するように構成し、機械的位相差に電気的位相差を調整して付与した時間的位相差を持たせた駆動信号を、同一周波数で空間的位相差がある複数の定在波を搬送面に生じさせる複数の駆動手段４に与えるように構成しているため、搬送面に完全又はほぼ完全な進行波を発生させることができ、この進行波によってワークを高速且つ適切に搬送することが可能である。特に、加振周波数を、異なる２つの振動モードの一方の固有振動数（第１振動モードの固有振動数）と他方の固有振動数（第２振動モードの固有振動数）との間の適宜の値、好適な例として、第１振動モードの固有振動数と他方の固有振動数の中間値に設定すれば、ワークの搬送に適した進行波を生成することが可能である。 As described above, the linear feeder LF according to the present embodiment has a transport portion 1 having a transport surface and an asymmetrical shape with respect to an arbitrary axis, a mechanical phase difference acquisition means, and an electrical phase difference adjustment. A machine provided with means 7 and having a mechanical phase difference caused by a difference in natural frequencies of at least two vibration modes corresponding to different natural frequencies of the transport unit 1 as an element included in the temporal phase difference. It is acquired by the target phase difference acquisition means, and the temporal phase difference of the drive signals to the plurality of drive means 4 is adjusted and imparted to the acquired mechanical phase difference by the electrical phase difference adjusting means 7. A drive signal having a temporal phase difference given by adjusting the electrical phase difference to the mechanical phase difference is applied to the transport surface of a plurality of standing waves having a spatial phase difference at the same frequency. Since it is configured to be provided to a plurality of driving means 4 to be generated, a complete or almost perfect traveling wave can be generated on the conveying surface, and the work can be conveyed at high speed and appropriately by this traveling wave. is there. In particular, the excitation frequency is appropriately set between the natural frequency of one of the two different vibration modes (the natural frequency of the first vibration mode) and the natural frequency of the other (the natural frequency of the second vibration mode). If the value is set to an intermediate value between the natural frequency of the first vibration mode and the other natural frequency as a suitable example, it is possible to generate a traveling wave suitable for transporting the work.

本実施形態に係るリニアフィーダＬＦは、電気的位相差のみならず、機械的位相差も含む位相差を時間的位相差と捉えることで、時間的位相差を９０°又はほぼ９０°に一致させることが可能になり、最も効率の良い進行波比の進行波を搬送面に発生させることができる。 The linear feeder LF according to the present embodiment regards the phase difference including not only the electrical phase difference but also the mechanical phase difference as the temporal phase difference, so that the temporal phase difference matches 90 ° or almost 90 °. This makes it possible to generate a traveling wave with the most efficient traveling wave ratio on the transport surface.

また、本実施形態に係るリニアフィーダＬＦは、機械的位相差取得手段として、駆動信号の加振周波数に起因する機械的位相差や、搬送部１の減衰特性に起因する機械的位相差を取得するものを適用しているため、加振周波数や搬送部１の減衰特性によって変動する機械的位相差を的確に把握することができ、時間的位相差にそれらの機械的位相差を含ませることができる。 Further, the linear feeder LF according to the present embodiment acquires the mechanical phase difference due to the excitation frequency of the drive signal and the mechanical phase difference due to the damping characteristic of the transport unit 1 as the mechanical phase difference acquisition means. It is possible to accurately grasp the mechanical phase difference that fluctuates depending on the excitation frequency and the damping characteristic of the transport unit 1, and to include those mechanical phase differences in the temporal phase difference. Can be done.

特に、本実施形態に係るリニアフィーダＬＦでは、駆動手段４による駆動信号が、超音波領域の周波数を加振周波数とするものであるため、超音波の駆動音が人間の耳には聞こえず、高速搬送を実現しつつ、騒音問題を解消することができる。 In particular, in the linear feeder LF according to the present embodiment, since the drive signal by the drive means 4 uses the frequency in the ultrasonic region as the excitation frequency, the ultrasonic drive sound cannot be heard by the human ear. It is possible to solve the noise problem while realizing high-speed transportation.

また、本実施形態に係るリニアフィーダＬＦは、上下方向の超音波撓み進行波でワークを搬送するため、搬送部１の先端の水平振幅がゼロに近く、搬送部１の先端を次工程装置に接近させて設置でき、小さいワークの落下を防止・抑制することができるとともに、圧電素子４１が、超音波振動により進行波を発生させるように構成していることから、駆動音が人間の耳に聞こえず、無音化でき、騒音が大きくなることを防止しつつ高速化を達成できる。 Further, since the linear feeder LF according to the present embodiment transports the work by the ultrasonic deflection traveling wave in the vertical direction, the horizontal amplitude of the tip of the transport unit 1 is close to zero, and the tip of the transport unit 1 is used as the next process device. Since it can be installed close to each other, it is possible to prevent and suppress the fall of small workpieces, and the piezoelectric element 41 is configured to generate a traveling wave by ultrasonic vibration, the driving sound is heard by the human ear. It is inaudible, can be muted, and can achieve high speed while preventing loud noise.

本実施形態に係るリニアフィーダＬＦは、搬送面のみを撓み振動させるので、前述のように、搬送部１の中央部を固定しても搬送面の撓み振動モードに影響を与えず、進行波が得られる。なお、第１加振領域Ｚ１の圧電素子４１と、第２加振領域Ｚ２の圧電素子４１とで、それらに与える波の位相差を反転させることで（時間位相を反転（−９０°））、逆方向にワークを搬送させることができ、ワークの詰まりが発生した場合などで、ワークを一旦逆送させて詰まりを解除することができる。 Since the linear feeder LF according to the present embodiment bends and vibrates only the transport surface, as described above, even if the central portion of the transport portion 1 is fixed, the bending vibration mode of the transport surface is not affected, and the traveling wave is generated. can get. By inverting the phase difference of the waves given to the piezoelectric element 41 in the first excitation region Z1 and the piezoelectric element 41 in the second excitation region Z2 (time phase is inverted (−90 °)). , The work can be conveyed in the opposite direction, and when the work is clogged, the work can be temporarily fed back and the clogging can be cleared.

このようにして、搬送部１に沿って生成された進行波により、ワークと搬送面（メイントラック１６の搬送面、リターントラック１７の搬送面）との間に摩擦力が発生し、ワークの供給と回収が行なわれる。 In this way, the traveling wave generated along the transport unit 1 generates a frictional force between the work and the transport surface (the transport surface of the main track 16 and the transport surface of the return track 17), and supplies the work. And recovery is done.

また、本実施形態に係るボウルフィーダＢＦは、図１、図１１及び図１２に示すように、螺旋状の搬送トラックである螺旋トラック１３（Ｂ）の搬送面に発生させた進行波によりワークを移動させながら所定の搬送先（供給先、本実施形態ではリニアフィーダＬＦのメイントラックの上流端）に搬送する装置である。ボウルフィーダＢＦは、底部側から上昇し且つ螺旋形状を描く搬送面を有し、任意の軸に対して非対称な形状を有するボウル状の搬送部１（Ｂ）と、同一周波数で空間的位相差がある複数の定在波を搬送面に生じさせる複数の駆動手段４（Ｂ）とを備え、これら複数の駆動手段４（Ｂ）に、上述のリニアフィーダＬＦと同様または準じた構成によって、電気的位相差に加えて機械的位相差を含む時間的位相差を持たせた駆動信号を与えることで、ボウル状搬送部１（Ｂ）の搬送面に進行波を発生させてワークを搬送するものである。図１１は、ボウルフィーダＢＦの側断面を模式的に示す図であり、図１２は、ボウルフィーダＢＦを下方から見た模式図である。なお、図１１では、断面部分を示す平行斜線（ハッチング）を省略している。 Further, as shown in FIGS. 1, 11 and 12, the bowl feeder BF according to the present embodiment uses a traveling wave generated on the traveling surface of the spiral truck 13 (B), which is a spiral transport truck, to perform a work. It is a device that conveys to a predetermined transfer destination (supply destination, upstream end of the main track of the linear feeder LF in this embodiment) while moving. The bowl feeder BF has a transport surface that rises from the bottom side and draws a spiral shape, and has a spatial phase difference at the same frequency as the bowl-shaped transport portion 1 (B) having an asymmetric shape with respect to an arbitrary axis. A plurality of driving means 4 (B) for generating a plurality of standing waves on a transport surface are provided, and the plurality of driving means 4 (B) are electrically provided with the same or similar configuration as the above-mentioned linear feeder LF. By giving a drive signal having a temporal phase difference including a mechanical phase difference in addition to the target phase difference, a traveling wave is generated on the transport surface of the bowl-shaped transport unit 1 (B) to transport the work. Is. FIG. 11 is a diagram schematically showing a side cross section of the bowl feeder BF, and FIG. 12 is a schematic view of the bowl feeder BF viewed from below. In FIG. 11, parallel diagonal lines (hatching) indicating the cross-sectional portion are omitted.

ボウル状搬送部１（Ｂ）は、進行波を生成する弾性部材であるボウル弾性体１１（Ｂ）によって形成され、任意の軸に対して非対称な形状を有するものである。搬送部１（Ｂ）のうち螺旋トラック１３（Ｂ）の終端部（下流端部）がリニアフィーダＬＦのうちメイントラック１６の始端部（上流端部）に接続されている。 The bowl-shaped transport portion 1 (B) is formed by a bowl elastic body 11 (B) which is an elastic member that generates a traveling wave, and has a shape asymmetrical with respect to an arbitrary axis. The end portion (downstream end portion) of the spiral track 13 (B) of the transport portion 1 (B) is connected to the start end portion (upstream end portion) of the main track 16 of the linear feeder LF.

本実施形態では、ボウル弾性体１１（Ｂ）の中央部分を適宜のパーツ（図１では止着具（ボルト）、図１１では押さえ部材１４（Ｂ））によって支持台２（Ｂ）に固定している。ボウル状搬送部１（Ｂ）は、ボウル弾性体１１（Ｂ）の内周面に螺旋トラック１３（Ｂ）を形成しているため、幾何学的に軸対象となるような対称軸を搬送部１（Ｂ）のどこにも設定できない。螺旋トラック１３（Ｂ）の上向き面が、「ワークが接触する搬送面」である。 In the present embodiment, the central portion of the bowl elastic body 11 (B) is fixed to the support base 2 (B) by appropriate parts (fastener (bolt) in FIG. 1 and holding member 14 (B) in FIG. 11). ing. Since the bowl-shaped transport portion 1 (B) forms the spiral track 13 (B) on the inner peripheral surface of the bowl elastic body 11 (B), the bowl-shaped transport portion 1 (B) has a symmetrical axis that is geometrically symmetrical. It cannot be set anywhere in 1 (B). The upward surface of the spiral track 13 (B) is the “conveying surface with which the workpieces come into contact”.

このようなボウル状搬送部１（Ｂ）を撓み変形させる複数の駆動手段４（Ｂ）は、図１１及び図１２に示すように、圧電素子４１（Ｂ）によって構成されている。圧電素子４１（Ｂ）は、ボウル弾性体１１（Ｂ）のうち、螺旋トラック１３（Ｂ）の搬送面が形成された部分の裏面（下向き面）側に貼り付けられている。 As shown in FIGS. 11 and 12, the plurality of driving means 4 (B) that bend and deform the bowl-shaped transport portion 1 (B) are composed of the piezoelectric element 41 (B). The piezoelectric element 41 (B) is attached to the back surface (downward surface) side of the portion of the bowl elastic body 11 (B) on which the transport surface of the spiral track 13 (B) is formed.

圧電素子４１（Ｂ）は、ボウル弾性体１１（Ｂ）の周方向に伸縮することで螺旋トラック１３（Ｂ）の搬送面に撓みを発生させるものであり、ボウル弾性体１１（Ｂ）のうち直径に相当する任意の直線を境界にして区別される半円状のエリアに、それぞれ周方向に沿って設けられる。複数の圧電素子４１（Ｂ）は、互いに空間的位相差をもって設けられている。本実施形態では、一方の半円状のエリアを、０°モードの波を発生させるための第１加振領域に設定し、他方の半円状のエリアを、９０°モードの波を発生させるための第２加振領域に設定している（図１２参照）。なお、片方の半円状のエリアに、第１加振領域及び第２加振領域を設定してもよい。各圧電素子４１は、第１加振領域及び第２加振領域においてそれぞれ振動モードの腹の位置に１／２波長間隔で配置されている。各加振領域（第１加振領域、第２加振領域）において隣り合う圧電素子は、振幅の山と谷の関係となることから、同じ駆動をした場合に逆方向の変位（図１２で「＋」と「−」で表現）となるように構成されている。また、第１加振領域と第２加振領域とで同じ極性の圧電素子同士の配置が実質的にλ／４ずれるように取り付けられている The piezoelectric element 41 (B) expands and contracts in the circumferential direction of the bowl elastic body 11 (B) to cause bending on the transport surface of the spiral track 13 (B), and is among the bowl elastic bodies 11 (B). It is provided along the circumferential direction in semicircular areas that are distinguished by an arbitrary straight line corresponding to the diameter as a boundary. The plurality of piezoelectric elements 41 (B) are provided with a spatial phase difference from each other. In the present embodiment, one semicircular area is set as the first vibration region for generating a wave in 0 ° mode, and the other semicircular area is set as a wave in 90 ° mode. It is set in the second excitation region for this (see FIG. 12). The first vibration region and the second vibration region may be set in one of the semicircular areas. Each of the piezoelectric elements 41 is arranged at the antinode position of the vibration mode in the first vibration region and the second vibration region at 1/2 wavelength intervals. Since the piezoelectric elements adjacent to each other in each vibration region (first vibration region and second vibration region) have an amplitude peak and valley relationship, they are displaced in the opposite directions when the same drive is applied (FIG. 12). It is configured to be (expressed by "+" and "-"). Further, the piezoelectric elements having the same polarity in the first vibration region and the second vibration region are attached so as to be substantially displaced by λ / 4.

このようなボウル状搬送部１（Ｂ）を備えるボウルフィーダＢＦは、上述のリニアフィーダＬＦに関する図３と同様の構成、つまり、第１加振領域の圧電素子４１（Ｂ）が接続されている第１アンプと、第２加振領域の圧電素子４１（Ｂ）が接続されている第２アンプと、機械的位相差取得手段と、電気的位相差調整手段と、加振周波数調整手段と、振幅調整手段（第１振幅調整手段、第２振幅調整手段）とを備えた構成である。そして、上述のリニアフィーダＬＦと同様に、機械的位相差を含んだ時間的位相差を９０°に完全に一致又はほぼ一致させた進行波を生成することができる。 The bowl feeder BF provided with such a bowl-shaped transport portion 1 (B) has the same configuration as that of FIG. 3 regarding the linear feeder LF described above, that is, the piezoelectric element 41 (B) in the first vibration region is connected. The first amplifier, the second amplifier to which the piezoelectric element 41 (B) in the second excitation region is connected, the mechanical phase difference acquisition means, the electrical phase difference adjusting means, the excitation frequency adjusting means, and the like. It is configured to include an amplitude adjusting means (first amplitude adjusting means, second amplitude adjusting means). Then, similarly to the linear feeder LF described above, it is possible to generate a traveling wave in which the temporal phase difference including the mechanical phase difference is completely matched or substantially matched with 90 °.

したがって、ボウルフィーダＢＦは、上述のリニアフィーダＬＢと同様又はほぼ同様の作用効果を奏する。 Therefore, the bowl feeder BF has the same or almost the same effect as the linear feeder LB described above.

なお、本発明は上述した各実施形態に限定されるものではない。例えば同一周波数で空間的位相差がある３つ以上の定在波を搬送面に生じさせる構成であっても、振動モードは、相互に固有振動数の異なる第１振動モードと第２振動モードの２つである。すなわち、物体を振動した場合には、空間的に位相差を有する２つの振動モードがあり、振動モードが３つ以上になるケースは皆無であり、本発明における「固有振動数の差」は、異なる２つのモードの固有振動数の差であって、進行波を生成するための定在波の数と振動モードの数とは必ずしも一致するものではない。 The present invention is not limited to the above-described embodiments. For example, even in a configuration in which three or more standing waves having the same frequency and spatial phase difference are generated on the transport surface, the vibration modes are the first vibration mode and the second vibration mode in which the natural frequencies are different from each other. There are two. That is, when an object is vibrated, there are two vibration modes having a spatial phase difference, and there is no case where the vibration modes are three or more, and the "difference in natural frequency" in the present invention is. It is the difference between the natural frequencies of two different modes, and the number of standing waves for generating a traveling wave and the number of vibration modes do not always match.

上述の実施形態では、駆動手段を構成する圧電素子を１枚ずつ個別に搬送部に貼り付けた態様を例示したが、図１３に示すように、圧電素子４１のセラミック部４２を一体化して、電極４３のみ別々にする構成にしてもよい。同図（ａ）、（ｂ）は、セラミック部４２を一体化した圧電素子４１の平面模式図、側面模式図である。同図（ｂ）において矢印で示す各電極４３の分極方向から把握できるように、セラミック部４２が一体化されていても電極４３を部分的に変更することが可能である。このようなセラミック部一体化タイプの圧電素子４１を搬送部１に貼り付けた時点で、セラミック部４２の一方の面側（例えば上向き面側）の各電極４３は導体の搬送部１に接触してコモン（共通電極）になり、セラミック部４２の他方の面側（例えば下向き面側）の各電極４３は導体の搬送部１に接触しないため、適宜の手段によってコモンにする必要がある。このようなセラミック部一体化タイプの圧電素子４１であれば、上述の実施形態で例示したタイプの圧電素子４１と比較して、圧電素子４１を搬送部１に貼り付ける作業負担の軽減化と、貼り付け精度の向上を図ることができる。なお、セラミック部４２の一方の面側（例えば上向き面側）の各電極４３を導体の搬送部１に貼り付けた場合、各電極４３と導体の搬送部１の間に接着層が形成されるが、電極４３と搬送部１の表面粗さによって導通する。 In the above-described embodiment, the embodiment in which the piezoelectric elements constituting the driving means are individually attached to the transport portion is illustrated, but as shown in FIG. 13, the ceramic portion 42 of the piezoelectric element 41 is integrated. Only the electrode 43 may be configured separately. FIGS. (A) and (b) are a schematic plan view and a schematic side view of the piezoelectric element 41 in which the ceramic portion 42 is integrated. As can be seen from the polarization direction of each electrode 43 indicated by the arrow in FIG. 3B, the electrode 43 can be partially changed even if the ceramic portion 42 is integrated. When such a ceramic portion integrated type piezoelectric element 41 is attached to the transport portion 1, each electrode 43 on one surface side (for example, the upward surface side) of the ceramic portion 42 comes into contact with the conductor transport portion 1. Since each electrode 43 on the other surface side (for example, the downward surface side) of the ceramic portion 42 does not come into contact with the conductor transport portion 1, it is necessary to make it common by an appropriate means. In the case of such a piezoelectric element 41 integrated with a ceramic portion, the work load of attaching the piezoelectric element 41 to the transport portion 1 can be reduced as compared with the piezoelectric element 41 of the type exemplified in the above embodiment. It is possible to improve the pasting accuracy. When each electrode 43 on one surface side (for example, the upward surface side) of the ceramic portion 42 is attached to the conductor transport portion 1, an adhesive layer is formed between each electrode 43 and the conductor transport portion 1. Is conductive due to the surface roughness of the electrode 43 and the transport portion 1.

また、図１３に示すセラミック一体化タイプの圧電素子４１のさらに改良バージョンとして、図１４に示すようなセラミック部４２の一方の面側（例えば上向き面側）の電極４３を別々にし、他方の面側（例えば下向き面側）の電極４４を一体化したものを挙げることができる。図１４（ａ）、（ｂ）、（ｃ）は、セラミック部４２と片方の面側の電極４４をそれぞれ一体化した圧電素子４１の平面模式図、側面模式図、底面模式図である。このように、セラミック部４２と片方の面側の電極４４をそれぞれ一体化した圧電素子４１を搬送部１に貼り付けた時点で、セラミック部４２の一方の面側（例えば上向き面側）の各電極４３は導体の搬送部１に接触してコモン（共通電極）になり、セラミック部４２の他方の面側（例えば下向き面側）の電極４４は一体化されているためコモン作業が不要である。 Further, as a further improved version of the ceramic integrated type piezoelectric element 41 shown in FIG. 13, the electrodes 43 on one surface side (for example, the upward surface side) of the ceramic portion 42 as shown in FIG. 14 are separated and the other surface is separated. Examples thereof include an integrated electrode 44 on the side (for example, the downward surface side). 14 (a), (b), and (c) are a schematic plan view, a schematic side view, and a schematic bottom view of the piezoelectric element 41 in which the ceramic portion 42 and the electrode 44 on one surface side are integrated, respectively. In this way, when the piezoelectric element 41 in which the ceramic portion 42 and the electrode 44 on one surface side are integrated is attached to the transport portion 1, each of the ceramic portions 42 on one surface side (for example, the upward surface side). The electrode 43 comes into contact with the conductor transport portion 1 to become a common (common electrode), and the electrode 44 on the other surface side (for example, the downward surface side) of the ceramic portion 42 is integrated, so that common work is not required. ..

また、上述の実施形態では、電気的位相差設定ステップの具体例として、電気的位相差と機械的位相差の和が９０°となるように電気的位相差を決定して設定する態様を例示したが、「機械的位相差の和が９０±１８０ｎ（ｎは正の整数）」となるように電気的位相差を決定して設定するようにしても良い。すなわち、「電気的位相差＝９０±１８０ｎ（ｎは正の整数）−機械的位相差」の条件を満たす場合にも進行波比が「１」となる。 Further, in the above-described embodiment, as a specific example of the electrical phase difference setting step, an embodiment in which the electrical phase difference is determined and set so that the sum of the electrical phase difference and the mechanical phase difference is 90 ° is exemplified. However, the electrical phase difference may be determined and set so that the sum of the mechanical phase differences is 90 ± 180 n (n is a positive integer). That is, the traveling wave ratio is "1" even when the condition of "electrical phase difference = 90 ± 180n (n is a positive integer) -mechanical phase difference" is satisfied.

上述の実施形態では、２つの領域の駆動手段に与える波の振動として、正弦波振動を例示したが、矩形波振動であってもよい。 In the above-described embodiment, the sine wave vibration is exemplified as the vibration of the wave applied to the driving means in the two regions, but it may be a rectangular wave vibration.

本発明では、駆動手段として、圧電素子に代えて、磁歪素子を適用することができる。 In the present invention, a magnetostrictive element can be applied as the driving means instead of the piezoelectric element.

さらに、上記実施形態では進行波を循環方式により発生させたが、循環方式ではない方式（搬送面の両端をそれぞれ位相差を変えて加振する両端加振方式等）で進行波を発生させてもよい。 Further, in the above embodiment, the traveling wave is generated by the traveling method, but the traveling wave is generated by a method other than the circulating method (such as a double-ended vibration method in which both ends of the transport surface are vibrated by changing the phase difference). May be good.

ワークとしては、例えば電子部品などの微小部品を挙げることができるが、電子部品以外の物品であってもよい。 Examples of the work include minute parts such as electronic parts, but may be articles other than electronic parts.

その他、各部の具体的構成についても上記実施形態に限られるものではなく、本発明の趣旨を逸脱しない範囲で種々変形が可能である。 In addition, the specific configuration of each part is not limited to the above embodiment, and various modifications can be made without departing from the spirit of the present invention.

１、１（Ｂ）…搬送部
４、４（Ｂ）…駆動手段
７…電気的位相差調整手段
９１、９２…振幅調整手段（第１振幅調整手段、第２振幅調整手段）
ＬＦ、ＢＦ…ワーク搬送装置（リニアフィーダ、ボウルフィーダ） 1, 1 (B) ... Conveying unit 4, 4 (B) ... Driving means 7 ... Electrical phase difference adjusting means 91, 92 ... Amplitude adjusting means (first amplitude adjusting means, second amplitude adjusting means)
LF, BF ... Work transfer device (linear feeder, bowl feeder)

Claims (5)

同一周波数で空間的位相差がある複数の定在波を搬送面に生じさせる複数の駆動手段を備え、これら複数の駆動手段に時間的位相差を持たせた駆動信号を与えることで前記搬送面に進行波を発生させてワークを搬送するワーク搬送装置であって、
前記搬送面を有し、任意の軸に対して非対称な形状を有する搬送部と、
前記搬送部が有する各々異なる固有振動数に対応した２つの振動モードの固有振動数の差に起因する機械的位相差を、前記時間的位相差に含まれる要素として取得する機械的位相差取得手段と、
前記複数の駆動手段への前記駆動信号の時間的な位相差を調整して前記機械的位相差に対し付与する電気的位相差調整手段とを備えることを特徴とするワーク搬送装置。 The carrier surface is provided with a plurality of drive means for generating a plurality of standing waves having a spatial phase difference at the same frequency on the carrier surface, and by giving a drive signal having a temporal phase difference to the plurality of drive means. It is a work transfer device that generates a traveling wave to convey the work.
A transport portion having the transport surface and having an asymmetrical shape with respect to an arbitrary axis,
Mechanical phase difference acquisition means for acquiring the mechanical phase difference caused by the difference in the natural frequencies of the two vibration modes corresponding to the different natural frequencies of the transport unit as an element included in the temporal phase difference. When,
A work transfer device including an electrical phase difference adjusting means for adjusting the temporal phase difference of the drive signal to the plurality of drive means and applying the mechanical phase difference to the mechanical phase difference. 前記機械的位相差取得手段は、前記駆動信号の加振周波数に起因する機械的位相差を取得するものであり、
前記駆動手段において、前記加振周波数を、前記２つの振動モードのうち一方の振動モードの固有振動数と他方の振動モードの固有振動数との間に設定している請求項１に記載のワーク搬送装置。 The mechanical phase difference acquisition means acquires the mechanical phase difference caused by the excitation frequency of the drive signal.
The work according to claim 1, wherein in the driving means, the excitation frequency is set between the natural frequency of one of the two vibration modes and the natural frequency of the other vibration mode. Transport device. 前記機械的位相差取得手段は、前記搬送部の減衰特性に起因する機械的位相差を取得するものである請求項１又は２に記載のワーク搬送装置。 The work transfer device according to claim 1 or 2, wherein the mechanical phase difference acquisition means acquires a mechanical phase difference due to the damping characteristic of the transfer unit. 全ての前記定在波の振幅が等しくなるように調整する振幅調整手段をさらに備えている請求項１乃至３の何れかに記載のワーク搬送装置。 The work transfer device according to any one of claims 1 to 3, further comprising an amplitude adjusting means for adjusting the amplitudes of all the standing waves so as to be equal. 前記駆動手段による駆動信号が、超音波領域の周波数を加振周波数とするものである請求項１乃至４の何れかに記載のワーク搬送装置。 The work transfer device according to any one of claims 1 to 4, wherein the drive signal by the drive means has a frequency in the ultrasonic region as a vibration frequency.
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Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020040713A (en) * 2018-09-11 2020-03-19 国立大学法人東京工業大学 Electronic component supply device
JP7335484B2 (en) * 2019-01-10 2023-08-30 シンフォニアテクノロジー株式会社 Parts feeder controller and parts feeder
JP7274698B2 (en) * 2019-03-26 2023-05-17 シンフォニアテクノロジー株式会社 Work transfer device
JP6819010B2 (en) * 2019-03-27 2021-01-27 シンフォニアテクノロジー株式会社 Work transfer device
CN112758695B (en) * 2020-12-21 2022-06-21 哈尔滨工业大学 Ultrasonic transmission reversing control method based on excitation phase difference modulation
CN113680405A (en) * 2021-08-26 2021-11-23 哈尔滨工业大学 Method for controlling moving speed and direction of micro-droplets driven by surface acoustic waves

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2711030C2 (en) * 1977-03-14 1983-11-17 Uhde Gmbh, 4600 Dortmund Method and device for setting the conveying speed of a vibratory conveyor with rotary drive
JPH04322271A (en) * 1991-04-22 1992-11-12 Canon Inc Powder carrying device
JPH06127655A (en) * 1992-10-16 1994-05-10 Nasuka:Kk Ultrasonic part feeder
JPH0661837U (en) * 1993-02-08 1994-09-02 神鋼電機株式会社 Rotary parts feeder
JPH0965674A (en) * 1995-06-15 1997-03-07 Nikon Corp Vibration actuator
JP4095282B2 (en) * 2001-11-21 2008-06-04 キヤノン株式会社 Vibration wave drive
JP4303258B2 (en) * 2005-10-20 2009-07-29 株式会社ダイシン Vibrating transfer device
CN101862974B (en) * 2010-05-26 2014-07-23 梁呈旺 Work piece transmission device of machine tool
CN102118118B (en) * 2011-03-18 2012-12-19 广东嘉和微特电机股份有限公司 Linear type ultrasonic micromotor
JP5882796B2 (en) * 2011-03-31 2016-03-09 キヤノン株式会社 Driving method for vibrating body, vibrating device, driving device having the vibrating device, and optical apparatus
CN103492292B (en) * 2011-04-27 2015-04-15 昕芙旎雅有限公司 Article separation and conveyance device
JP5227449B2 (en) * 2011-11-02 2013-07-03 株式会社ダイシン Vibrating transfer device
KR102018933B1 (en) * 2012-03-16 2019-09-05 엔티엔 가부시키가이샤 Vibration-type component transport device
JP6136122B2 (en) * 2012-06-08 2017-05-31 シンフォニアテクノロジー株式会社 Work separation system
JP6460833B2 (en) * 2015-02-25 2019-01-30 キヤノン株式会社 Vibrating body, driving method of vibrating body, vibration type driving device, dust removing device, and imaging device
JP6817513B2 (en) * 2015-08-24 2021-01-20 シンフォニアテクノロジー株式会社 Work transfer device

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