TWI725193B - Workpiece handling device - Google Patents

Workpiece handling device Download PDF

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TWI725193B
TWI725193B TW106118706A TW106118706A TWI725193B TW I725193 B TWI725193 B TW I725193B TW 106118706 A TW106118706 A TW 106118706A TW 106118706 A TW106118706 A TW 106118706A TW I725193 B TWI725193 B TW I725193B
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phase difference
conveying
workpiece
frequency
mechanical
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TW106118706A
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TW201829272A (en
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大西孝信
木村哲行
前田峰尚
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日商昕芙旎雅股份有限公司
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G27/00—Jigging conveyors
    • B65G27/10—Applications of devices for generating or transmitting jigging movements
    • B65G27/32—Applications of devices for generating or transmitting jigging movements with means for controlling direction, frequency or amplitude of vibration or shaking movement
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G27/00—Jigging conveyors
    • B65G27/10—Applications of devices for generating or transmitting jigging movements
    • B65G27/16—Applications of devices for generating or transmitting jigging movements of vibrators, i.e. devices for producing movements of high frequency and small amplitude
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2812/00—Indexing codes relating to the kind or type of conveyors
    • B65G2812/03—Vibrating conveyors
    • B65G2812/0304—Driving means or auxiliary devices
    • B65G2812/0308—Driving means

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Jigging Conveyors (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

提供一種工件搬運裝置，係可以使完全或是幾乎完全的行進波發生在搬運面，並平順且高速地搬運搬運面上的工件。 Provided is a workpiece conveying device, which can cause complete or almost complete traveling waves to occur on the conveying surface, and convey the workpiece on the conveying surface smoothly and at a high speed.

一種工件搬運裝置(LF)，係具備使以相同頻率具有空間上的相位差之複數個駐波產生在搬運面之複數個驅動手段(4)，把具有時間上的相位差之驅動訊號給予到這些複數個驅動手段(4)，來使行進波發生在搬運面而搬運工件；其中，構成具備：搬運部(1)，係相對於任意的軸具有非對稱的形狀；機械的相位差取得手段，係取得起因於與搬運部(1)所具有之各個相異的固有頻率對應之2個振動模式的固有頻率的差所致之機械的相位差，作為包含到時間上的相位差之要件；以及電性的相位差調整手段(7)，係調整對複數個驅動手段(4)之驅動訊號的時間上的相位差，相對於機械的相位差來賦予。 A workpiece conveying device (LF) is provided with a plurality of driving means (4) for generating a plurality of standing waves with a spatial phase difference at the same frequency on the conveying surface, and giving a driving signal with a temporal phase difference to These plural driving means (4) are used to generate traveling waves on the conveying surface to convey the workpiece; among them, the structure includes: a conveying part (1) having an asymmetrical shape with respect to an arbitrary axis; mechanical phase difference acquisition means , To obtain the mechanical phase difference caused by the difference in the natural frequencies of the two vibration modes corresponding to the different natural frequencies possessed by the conveying part (1), as a requirement for the phase difference in time; And the electrical phase difference adjusting means (7) is to adjust the time phase difference of the driving signals to the plurality of driving means (4), and give it relative to the mechanical phase difference.

Description

工件搬運裝置 Workpiece handling device

本發明乃是有關利用行進波搬運零件的工件搬運裝置者。 The present invention relates to a workpiece conveying device that uses traveling waves to convey parts.

以往，作為搬運零件的裝置，以使用彈簧與驅動源，使搬運部整體振動在斜方向的方式，搬運零件之零件供料器是廣為人知。在這樣的搬運裝置，以增大振幅的方式式可以提升零件的搬運速度，但搬運部的下游端的水平振幅變大的話，是有必要擴開設定在搬運部的下游端的介面部與下個製程設備之間的間隙。其結果，是有在下個製程設備與介面部之間掉落零件，或是發生零件的堵塞之虞。特別是，越是零件的細微化或搬運速度的高速化，零件的掉落或發生堵塞的準確率也越高。 In the past, as a device for conveying parts, a part feeder for conveying parts is widely known by using a spring and a drive source to vibrate the entire conveying part in an oblique direction. In such a conveying device, the conveying speed of parts can be increased by increasing the amplitude. However, if the horizontal amplitude of the downstream end of the conveying section becomes larger, it is necessary to expand the interface section set at the downstream end of the conveying section and the next process. The gap between devices. As a result, there is a risk of parts falling between the next process equipment and the interface surface, or parts clogging may occur. In particular, the more miniaturization of parts or the higher the speed of conveyance, the higher the accuracy of parts dropping or clogging.

而且，上述的零件供料器，係以提高使搬運部整體振動在斜方向的驅動源的頻率，縮小變位振幅的方式，可以提升工件的搬運速度，把一般為300Hz左右之驅動源的頻率再往上提升的話，會接近到人類的耳的感度高的1kHz~4kHz的頻率，噪音變大。而且，在用板彈簧使其共振的構造下，超過300Hz，達1kHz以上的話，搬運 部等彈性變形，變成無法正常搬運工件(使搬運部(滑槽)均一平行振動是有困難)。 In addition, the above-mentioned parts feeder can increase the frequency of the driving source that vibrates the entire conveying part in an oblique direction, and reduce the displacement amplitude, which can increase the conveying speed of the workpiece, and reduce the frequency of the driving source, which is generally about 300 Hz. If you increase it further, it will be close to the frequency of 1kHz~4kHz, which is the high sensitivity of human ears, and the noise will increase. Furthermore, in a structure that resonates with a leaf spring, if the frequency exceeds 300 Hz and reaches 1 kHz or more, the conveying part will be elastically deformed and the workpiece cannot be conveyed normally (it is difficult to make the conveying part (chute) vibrate uniformly and in parallel).

作為可以迴避這樣的不適切的發生之零件供料器，利用藉由超音波振動所產生的行進波來移送零件之零件供料器是廣為人知。在專利文獻1，揭示有：相對於水平面傾斜設置的環(也包含長圓的環)狀或是圓板狀的振動體中，在背面，以駐波的1/2波長貼附有反覆正負交互在極化方向之具有多數個極化範圍之壓電體，對壓電體之二個極化範圍群之各個施加時間上錯位90°的相位之2種類的高頻電壓(時間上的相位相異的高頻電壓)的方式，用壓電體的彎曲振動激勵行進波，移送乘載在振動體的振動面的零件之構成。 As a parts feeder that can avoid such unsuitable occurrences, a part feeder that uses traveling waves generated by ultrasonic vibration to transfer parts is widely known. Patent Document 1 discloses that in a ring (also including an oblong ring) or a disc-shaped vibrating body arranged obliquely with respect to the horizontal plane, on the back side, a repetitive positive-negative interaction is attached at 1/2 wavelength of the standing wave. For a piezoelectric body with multiple polarization ranges in the polarization direction, two types of high-frequency voltages with a phase shifted by 90° in time are applied to each of the two polarization range groups of the piezoelectric body (the phase phase in time) Different high-frequency voltage) method, which excites the traveling wave with the bending vibration of the piezoelectric body, and transfers the components carried on the vibrating surface of the vibrating body.

〔先前技術文獻〕 [Prior technical literature] 〔專利文獻〕 〔Patent Literature〕

[專利文獻1]日本特開平6-127655號專利公報 [Patent Document 1] Japanese Patent Laid-Open No. 6-127655 Patent Publication

順便一說，在空間上的相位差與時間上的相位差之兩方為90°一致時，可以是最有效率之良好的行進波是已經廣為人知。接著，也在專利文獻1，如上述，是揭示有以在錯開1/4波長配置之2個範圍配置有壓電元件的方式，實現90°的空間上的相位差，分別施加時間上的相位為90°相異的高頻電壓使其激振之構成。 By the way, when the phase difference in space and the phase difference in time are equal to 90°, the most efficient and good traveling wave is well known. Next, also in Patent Document 1, as described above, it is disclosed that piezoelectric elements are arranged in two ranges shifted by 1/4 wavelength to achieve a 90° spatial phase difference, and the temporal phases are respectively applied. It is composed of 90°different high-frequency voltage to excite it.

但是，之後本案發明者所致之潛心研究的結果，有關在搬運面使行進波發生而搬運工件之工件搬運裝置，明白了是還有用於更高速搬運的改良餘地，本案發明者，係研究出其具體的解決方案。 However, as a result of painstaking research conducted by the inventor of the present case, it is understood that there is room for improvement for higher-speed transportation of the workpiece conveying device that generates traveling waves on the conveying surface. The inventor of the present case has researched Its specific solution.

亦即有關本發明，係具備使以相同頻率具有空間上的相位差之複數個駐波產生在搬運面之複數個驅動手段，把具有時間上的相位差之驅動訊號給予到複數個驅動手段，藉此，使行進波發生在搬運面，而搬運工件之工件搬運裝置。 In other words, the present invention is provided with a plurality of driving means for generating a plurality of standing waves with a spatial phase difference at the same frequency on the conveying surface, and a driving signal with a temporal phase difference is given to the plurality of driving means, In this way, the traveling wave is generated on the conveying surface and the workpiece conveying device is used to convey the workpiece.

接著，有關本發明之工件搬運裝置，係具備：具有搬運面且相對於任意的軸具有非對稱的形狀之搬運部、機械的相位差取得手段、以及電性的相位差調整手段。本發明中的機械的相位差取得手段，乃是取得至少起因於與搬運部所具有之互為相異的固有頻率對應之2個振動模式的固有頻率的差所致之機械的相位差，作為包含到時間上的相位差之要件者。而且，電性的相位差調整手段，乃是相對於機械的相位差，調整並賦予對複數個驅動手段的驅動訊號的時間上的相位差者。所謂「相對於任意的軸具有非對稱的形狀之搬運部」，例如，表示有就搬運部的構造及剛性不為軸對稱者。 Next, the workpiece conveying device according to the present invention includes a conveying part having a conveying surface and an asymmetrical shape with respect to an arbitrary axis, a mechanical phase difference acquisition means, and an electrical phase difference adjustment means. The mechanical phase difference obtaining means of the present invention is to obtain at least the mechanical phase difference caused by the difference in the natural frequencies of the two vibration modes corresponding to the different natural frequencies possessed by the conveying unit, as Contains the requirements of the phase difference in time. In addition, the electrical phase difference adjustment means adjusts and gives the time phase difference of the driving signals to the plurality of driving means with respect to the mechanical phase difference. The term "a conveying part having an asymmetrical shape with respect to an arbitrary axis", for example, means that there is a conveying part that is not axially symmetrical in terms of its structure and rigidity.

本案發明者徹底調查相異之複數個駐波的時 間的錯位也就是時間上的相位差係不僅是電性的相位差，也因為起因於與搬運部所具有之互為相異的固有頻率對應之2個振動模式的固有頻率的差所致之機械的相位差而變化之情事，根據一直到構思出把調整電性的相位差並賦予到起因於相異之2個振動模式的固有頻率的差所致之機械的相位差之相位差作為時間上的相位差而解決的技術之前的技術的思想，提案出一種工件搬運裝置，其係把具有調整電性的相位差並賦予到機械的相位差之時間上的相位差之驅動訊號給予到使以相同頻率具有空間上的相位差之複數個駐波產生在搬運面之複數個驅動手段，藉此，藉由發生在搬運面的行進波，可以高速且適切搬運工件。在此，所謂「固有頻率的差」，係意味著2個振動模式為相同的變形型態及相同的波的數值，為相異的2個振動模式的固有頻率的差，振動模式的數值、與用於產生行進波的駐波的數值未必一致。在此敘述之所謂「相同的變形型態」，係例如，意味著2個振動模式的振動方向或振動的方法為相同者，所謂「相同的波的數值」，係意味著搬運部中的振動模式的波的數值者。亦即，在使物體振動的情況下，有在空間上具有相位差之2個振動模式，振動模式為3個的案例係皆無。因此，例如為相同頻率、相同的變形型態及相同的波的數值，即便是使具有空間上的相位差之3個以上的駐波產生在搬運面之構成，振動模式乃是固有頻率互為相異之第1振動模式與第2振動模式之2個。經由空間相位相互錯位90°，可以把第1振動模式定義為0°模式，把第2振動模式定義為90°模式。 The inventor of this case thoroughly investigated the timing of multiple different standing waves The misalignment, that is, the phase difference in time is not only an electrical phase difference, but also due to the difference in the natural frequencies of the two vibration modes corresponding to the different natural frequencies of the conveying unit. When the mechanical phase difference changes, it is conceived that the electrical phase difference is adjusted and the phase difference of the mechanical phase difference caused by the difference in the natural frequency of the two different vibration modes is given as the time. The technical idea before the technology to solve the above phase difference, proposes a workpiece conveying device that adjusts the electrical phase difference and imparts the drive signal of the phase difference in the time of the mechanical phase difference to the drive signal. A plurality of standing waves with a spatial phase difference at the same frequency are generated by a plurality of driving means on the conveying surface, whereby the traveling waves generated on the conveying surface can be conveyed at high speed and appropriately. Here, the so-called "difference in natural frequency" means that the two vibration modes have the same deformation pattern and the same value of the wave, which is the difference between the natural frequencies of the two different vibration modes, the value of the vibration mode, It does not necessarily coincide with the value of the standing wave used to generate the traveling wave. The "same deformation pattern" described here means, for example, that the vibration direction or vibration method of the two vibration modes are the same. The so-called "same wave value" means the vibration in the conveying part. The numerical value of the wave of the pattern. That is, when the object is vibrated, there are two vibration modes that have a phase difference in space, and there are no cases where there are three vibration modes. Therefore, for example, with the same frequency, the same deformation pattern, and the same wave value, even if three or more standing waves with a spatial phase difference are generated on the conveying surface, the vibration mode is the natural frequency of each other. Two of the different first vibration mode and second vibration mode. Through the mutual displacement of the space phase by 90°, the first vibration mode can be defined as the 0° mode, and the second vibration mode can be defined as the 90° mode.

本發明中的「起因於與搬運部所具有之互為相異的固有頻率對應之2個振動模式的固有頻率的差所致之機械的相位差」，乃是從搬運部的非對稱形狀派生的相位差，也就是相對於相異之2個固有頻率的振動模式，在以一個頻率進行激振的情況下，產生到2個駐波之時間相位的差。而且，「電性的相位差」，乃是施加到2個振動模式用的2個驅動手段之電壓波形的相位差，可以視為從外部所給予的時間上的相位差指令。電性的相位調整手段，乃是調整施加到各振動模式的波形的電性的相位差者，在本發明，乃是經由電性的相位調整手段，相對於機械的相位差，調整並賦予對複數個驅動手段的驅動訊號的時間上的相位差之構成者的緣故，把具有把電性的相位差與機械的相位差予以相加之時間上的相位差之驅動訊號給予到複數個驅動手段，藉此，可以使行進波發生在搬運面而搬運工件。 In the present invention, "the mechanical phase difference caused by the difference in the natural frequencies of the two vibration modes corresponding to the different natural frequencies of the conveying part" is derived from the asymmetrical shape of the conveying part The phase difference of, that is, with respect to the two different natural frequency vibration modes, in the case of excitation at one frequency, the time phase difference between the two standing waves is generated. Moreover, the "electrical phase difference" is the phase difference of the voltage waveforms applied to the two driving means for the two vibration modes, and can be regarded as a phase difference command given from the outside in terms of time. The electrical phase adjustment means adjusts the electrical phase difference of the waveform applied to each vibration mode. In the present invention, the electrical phase adjustment means adjusts the phase difference relative to the mechanical Because of the composition of the time phase difference of the driving signals of the plural driving means, the driving signal with the time phase difference added to the electrical phase difference and the mechanical phase difference is given to the plural driving means By this, it is possible to cause traveling waves to be generated on the conveying surface to convey the workpiece.

在空間上的相位差與時間上的相位差之兩方為在90°一致時，可以是最有效率的行進波這一點已經是廣為人知的，若為僅以電性的相位差調整時間上的相位差之構成的話，即便是有無法使時間上的相位差一致在90°，無法產生最有效率的行進波之案例，如本發明般，把不僅是電性的相位差，也包含有機械的相位差之相位差視為時間上的相位差，藉此，可以使時間上的相位差一致在90°，可以使最有效率的行進波比1的行進波發生在搬 運面。 It is well known that when the two sides of the phase difference in space and the phase difference in time are the same at 90°, it can be the most efficient traveling wave. If only the electrical phase difference is used to adjust the time In the phase difference configuration, even if there is a case where the time phase difference cannot be aligned at 90°, the most efficient traveling wave cannot be generated. Like the present invention, not only the electrical phase difference, but also the mechanical phase difference is included. The phase difference of the phase difference is regarded as the phase difference in time, whereby the phase difference in time can be aligned at 90°, and the most efficient traveling wave of traveling wave ratio 1 can be generated on the conveying surface.

尚且，本發明中的「搬運面」，乃是包含有可以是水平或是略水平的面(水平面)，或是相對於水平傾斜傾斜角度的面(傾斜面)、或者是U字形狀的面(曲面)之任一者的概念。而且作為工件，係可以舉例例如電子零件等的微小零件，但也可以是電子零件以外的物品。 Furthermore, the "conveying surface" in the present invention includes a surface that may be horizontal or slightly horizontal (horizontal plane), a surface that is inclined at an angle relative to the horizontal (inclined surface), or a U-shaped surface. The concept of any one of (curved surface). Moreover, as the workpiece, for example, a minute part such as an electronic part may be used, but it may be an article other than an electronic part.

而且，因為激振頻率或搬運部的衰減特性，機械的相位差變化，從而，作為本發明中的機械的相位差取得手段，適用取得起因於驅動訊號的激振頻率所致之機械的相位差者，或是也可以適用取得起因於搬運部的衰減特性所致之機械的相位差者。以使激振頻率或是搬運部的衰減特性變化的方式，可以使機械的相位差變動，特別是，若把激振頻率設定在相異之2個振動模式的其中一方的固有頻率(第1振動模式的固有頻率)與另一方的固有頻率(第2振動模式的固有頻率)之間的話，可以產生適用在工件的搬運之行進波。 Moreover, the mechanical phase difference changes due to the excitation frequency or the attenuation characteristics of the conveying unit, so as the mechanical phase difference acquisition means in the present invention, it is suitable to obtain the mechanical phase difference caused by the excitation frequency of the drive signal. Alternatively, it is also possible to apply a mechanical phase difference caused by the attenuation characteristics of the conveying part. The phase difference of the machine can be changed by changing the excitation frequency or the attenuation characteristics of the conveying part. In particular, if the excitation frequency is set to the natural frequency of one of the two different vibration modes (the first If it is between the natural frequency of the vibration mode) and the other natural frequency (the natural frequency of the second vibration mode), a traveling wave suitable for the conveyance of the workpiece can be generated.

而且，在有關本發明之工件搬運裝置，也可以適用更具備調整成全部的駐波的振幅為相等之振幅調整手段者。 Furthermore, in the workpiece conveying device according to the present invention, it is also possible to apply one that is further provided with an amplitude adjustment means that adjusts the amplitude of all the standing waves to be equal.

特別是，若驅動手段所致之驅動訊號是把超音波範圍的頻率作為激振頻率者的話，用超音波進行驅動，藉此，人類的耳朵聽不到驅動音，可以一方面實現高速搬運，一方面消解噪音問題。 In particular, if the driving signal caused by the driving means uses the frequency in the ultrasonic range as the excitation frequency, it is driven by ultrasonic waves, so that the human ears cannot hear the driving sound, and high-speed transportation can be achieved on the one hand. On the one hand, it eliminates the noise problem.

根據本發明，可以提供一種工件搬運裝置，係藉由產生在搬運面的行進波搬運搬運面上的工件的緣故，在設定在搬運部的下游端的介面部與下個製程設備之間，沒有必要確保考慮到水平振幅的間隙，可以防止、抑制在擴開其間隙的情況下引起的工件掉落或堵塞，並且，具備：相對於任意的軸在旋轉方向具有非對稱的形狀之搬運部、取得從搬運部的非對稱形狀派生的機械的相位差之機械的相位差取得手段、以及相對於已取得的機械的相位差所賦予之調整對複數個驅動手段的驅動訊號的時間上的相位差之電性的相位差調整手段的緣故，可以產生完全或是幾乎完全的行進波，可以實現比起以往更進一步平順且高速的搬運處理。 According to the present invention, it is possible to provide a workpiece conveying device that conveys the workpiece on the conveying surface by the traveling wave generated on the conveying surface, and there is no need for the interface between the interface section set at the downstream end of the conveying section and the next process equipment. Securing a gap that takes into account the horizontal amplitude can prevent and suppress the falling or clogging of the workpiece when the gap is expanded, and it is equipped with: a transport part that has an asymmetrical shape in the direction of rotation with respect to any axis, and The mechanical phase difference obtained from the mechanical phase difference derived from the asymmetrical shape of the conveying part, and the mechanical phase difference acquisition means, and the adjustment of the time phase difference of the drive signals of the plural drive means with respect to the obtained mechanical phase difference Due to the electrical phase difference adjustment means, a complete or almost complete traveling wave can be generated, and a smoother and higher-speed transportation process can be achieved than before.

1、1(B)‧‧‧搬運部 1, 1(B)‧‧‧Transportation Department

4、4(B)‧‧‧驅動手段 4, 4(B)‧‧‧Drive means

7‧‧‧電性的相位差調整手段 7‧‧‧Electrical phase difference adjustment method

91、92‧‧‧振幅調整手段(第1振幅調整手段、第2振幅調整手段) 91, 92‧‧‧Amplitude adjustment means (1st amplitude adjustment means, 2nd amplitude adjustment means)

LF、BF‧‧‧工件搬運裝置(線型供料器、器皿供料器) LF, BF‧‧‧Workpiece handling device (line feeder, vessel feeder)

[圖1]有關本發明的一實施方式之工件搬運裝置的總圖。 [Fig. 1] A general view of a workpiece conveying device related to an embodiment of the present invention.

[圖2]從下方(背面)看有關同實施方式的線型供料器的搬運部之示意圖。 [Fig. 2] A schematic view of the conveying part of the linear feeder of the same embodiment viewed from below (back).

[圖3]有關同實施方式之線型供料器的整體構成圖。 [Fig. 3] A diagram of the overall configuration of the linear feeder in the same embodiment.

[圖4]把有關同實施方式之線型供料器的搬運部省略一部分省略，並示意性表示之側剖視圖。 [Fig. 4] A side cross-sectional view schematically showing the conveying part of the linear feeder related to the same embodiment with a part omitted and omitted.

[圖5]表示同實施方式中的0°模式與90°模式的波的 空間上的相位差之圖。 [Fig. 5] A diagram showing the spatial phase difference of waves in the 0° mode and the 90° mode in the same embodiment.

[圖6]表示與同實施方式中的0°模式及90°模式的激振力相對應之撓曲位移量的傳遞特性及相位特性之圖。 [FIG. 6] A graph showing the transfer characteristics and phase characteristics of the flexural displacement corresponding to the excitation force of the 0° mode and the 90° mode in the same embodiment.

[圖7]表示空間上的相位差、時間相位差及駐波的振幅的值所致之振幅的波形變化之圖。 [FIG. 7] A diagram showing the waveform change of the amplitude due to the values of the spatial phase difference, the temporal phase difference, and the amplitude of the standing wave.

[圖8]表示相位差與行進波比的關係之圖。 [Fig. 8] A graph showing the relationship between the phase difference and the traveling wave ratio.

[圖9]表示同實施方式中的0°模式、90°模式的頻率特性之圖。 [Fig. 9] A diagram showing the frequency characteristics of the 0° mode and the 90° mode in the same embodiment.

[圖10]表示行進波比與固有頻率差率的關係之圖。 [Fig. 10] A graph showing the relationship between the traveling wave ratio and the natural frequency difference rate.

[圖11]示意性表示有關同實施方式之器皿供料器的側剖面之圖。 [Fig. 11] A diagram schematically showing a side section of the vessel feeder related to the same embodiment.

[圖12]從下方(背面)看有關同實施方式的器皿供料器的搬運部之示意圖。 [Fig. 12] A schematic view of the conveying part of the vessel feeder according to the same embodiment as viewed from below (back side).

[圖13]同實施方式中的壓電元件的一變形例的示意圖。 [Fig. 13] A schematic diagram of a modification of the piezoelectric element in the same embodiment.

[圖14]同實施方式中的壓電元件之更進一步相異之一變形例的示意圖。 [Fig. 14] A schematic diagram of a further modification of the piezoelectric element in the same embodiment.

以下，參閱圖面說明本發明之其中一實施方式。 Hereinafter, one embodiment of the present invention will be described with reference to the drawings.

有關本實施方式之工件搬運裝置，係例如分別適用到圖1表示的線型供料器LF及器皿供料器BF。以下，先說明有關線型供料器LF。圖2為從下方看圖1表 示的線型供料器LF之示意圖；圖3為示意性表示線型供料器LF的整體構成之圖。 The workpiece conveying device of the present embodiment is applied to, for example, the linear feeder LF and the vessel feeder BF shown in FIG. 1, respectively. Hereinafter, the linear feeder LF will be explained first. Fig. 2 is a schematic diagram of the linear feeder LF shown in Fig. 1 viewed from below; Fig. 3 is a diagram schematically showing the overall structure of the linear feeder LF.

有關本實施方式之線型供料器LF，為連接到圖1表示的供給用的器皿供料器BF者，如圖3表示，具備使以相同頻率具有空間上的相位差之複數個駐波(第1駐波、第2駐波)產生在搬運面之複數個驅動手段4，以把具有時間上的相位差之驅動訊號給予到這些複數個驅動手段4的方式，來搬運搬運面上的工件。 The linear feeder LF of this embodiment is connected to the vessel feeder BF for supply shown in FIG. 1, as shown in FIG. 3, and is provided with a plurality of standing waves ( The first standing wave and the second standing wave) generate a plurality of driving means 4 on the conveying surface, and convey the workpiece on the conveying surface by giving a driving signal with a phase difference in time to these plural driving means 4 .

線型供料器LF，係如圖3及圖4(圖4為線型供料器LF的剖面示意圖)表示，具有：具有接觸搬運中的工件的面也就是搬運面之搬運部1、從下方支撐搬運部1之支撐臺2、以及設置在搬運部1的指定處之篩選部3。 The linear feeder LF is shown in Figures 3 and 4 (Figure 4 is a schematic cross-sectional view of the linear feeder LF). It has: a conveying section with a surface contacting the workpiece being conveyed, which is the conveying surface. 1. Supporting from below The supporting table 2 of the conveying unit 1 and the screening unit 3 arranged at the designated place of the conveying unit 1.

搬運部1，係藉由產生行進波的彈性構件也就是板彈性體11所形成，成為長條的形狀，相對於任意的軸在旋轉方向上具有非對稱的形狀者。板彈性體11，係例如俯視下為矩形形狀，例如藉由20kHz以上的激振形成撓曲波之彈性體者。在本實施方式，適用導體的板彈性體11。板彈性體11，係搬運部1中的後述的主軌16的始端部與器皿供料器BF中的器皿搬運部1(B)的終端部相連接。搬運部1，係具有延伸成幾乎直線狀的搬運面。尚且，俯視看搬運部1的形狀係不限定於長方形狀，也可以是如圖3示意性表示般，俯視看為長圓形形狀者。 The conveying unit 1 is formed by a plate elastic body 11, which is an elastic member that generates a traveling wave, and has an elongated shape and has an asymmetrical shape in the rotation direction with respect to an arbitrary axis. The plate elastic body 11 is, for example, a rectangular shape in a plan view, for example, an elastic body that forms a flexural wave by excitation of 20 kHz or more. In this embodiment, a conductive plate elastic body 11 is applied. The plate elastic body 11 is connected to the start end of the main rail 16 described later in the conveying unit 1 and the end of the vessel conveying unit 1 (B) in the vessel feeder BF. The conveying unit 1 has a conveying surface that extends almost linearly. In addition, the shape of the conveying unit 1 in plan view is not limited to a rectangular shape, and may be an oblong shape in plan view as schematically shown in FIG. 3.

在板彈性體11的中央部分，形成俯視看為略 長圓形形狀的凹部12，凹部12的外側成為搬運軌13。在凹部12，收納有比凹部12小一整圈的長圓形形狀的推壓板14，經由排列在縱長方向之複數個固定具15把推壓板14固定在支撐臺2。凹部12的底面12a中，在固定推壓板14的固定部分12b與搬運軌13之間的位置，形成比其他的部分更薄，比固定部分12b及搬運軌其剛性更小之低剛性部分12c。經由這樣的構成，在比低剛性部分12c更靠外周圍側中，沿搬運軌13可以使撓曲行進波有效發生。 In the center portion of the plate elastic body 11, a recessed portion 12 having a substantially oblong shape in plan view is formed, and the outer side of the recessed portion 12 serves as a conveyance rail 13. In the recess 12, an oblong pressing plate 14 which is one full turn smaller than the recess 12 is accommodated, and the pressing plate 14 is fixed to the support table 2 via a plurality of fixtures 15 arranged in the longitudinal direction. In the bottom surface 12a of the recess 12, a position between the fixed portion 12b of the fixing pressing plate 14 and the conveying rail 13 is formed with a low rigidity portion 12c that is thinner than other portions and has lower rigidity than the fixed portion 12b and the conveying rail. With such a configuration, it is possible to efficiently generate a flexural traveling wave along the conveyance rail 13 in the outer peripheral side than the low-rigidity portion 12c.

接著，在把沿板彈性體11的縱長方向的軸(以下，稱為長軸L)作為邊界之其中一方側的區域與另一方側的區域，使搬運軌13的構造、形狀相異。具體方面，僅把使工件整齊排列並進行搬運的直線狀的主軌16，設在板彈性體11中以長軸L為邊界之其中一方側的區域，把讓從主軌16排除掉的工件W回到器皿供料器BF之返回軌17，廣範圍設在從板彈性體11中以長軸L為邊界之其中一方側的區域涵蓋到另一方側的區域側。 Next, the structure and shape of the conveyance rail 13 are different in the region on one side and the region on the other side with the axis along the longitudinal direction of the plate elastic body 11 (hereinafter referred to as the major axis L) as the boundary. Specifically, only the linear main rail 16 for arranging and conveying the workpieces is provided in the area on one side of the plate elastic body 11 with the long axis L as the boundary, and the workpieces excluded from the main rail 16 The return rail 17 of the W return vessel feeder BF is provided in a wide range from the area on one side of the plate elastic body 11 bounded by the long axis L to the area on the other side.

返回軌17，係利用以下所構成(參閱圖1)：板彈性體11中以長軸L為邊界之其中一方側的區域中，設在比主軌16更靠內周圍側之直線狀的上游側返回軌17a；設在板彈性體11中以長軸L為邊界之另一方側的區域之直線狀的下游側返回軌17b；以及從上游側返回軌17a的下游端(終端)涵蓋到下游側返回軌17b的上游端(始端)而設置之部分圓弧狀(U字形狀)的中間返回 軌17c。 The return rail 17 is constituted by the following structure (see Figure 1): In the area on one side of the plate elastic body 11 bordered by the long axis L, it is provided on the linear upstream side of the inner peripheral side of the main rail 16 Side return rail 17a; a linear downstream side return rail 17b provided in the area on the other side of the plate elastic body 11 bordered by the long axis L; and the downstream end (terminal) of the upstream side return rail 17a covers the downstream A partial arc-shaped (U-shaped) intermediate return rail 17c is provided on the upstream end (starting end) of the side return rail 17b.

返回軌17，係如圖4表示，設定成比主軌16還深的溝狀。在本實施方式，上游側返回軌17a與下游側返回軌17b，係形成在相對於板彈性體11的長軸L而相互對稱之位置。而且，部分圓弧狀的中間返回軌17c，係設定成以板彈性體11的長軸L為中心對稱之形狀。返回軌17的朝上面，乃是「工件所接觸的搬運面」。尚且，搬運面，係可以是水平或是略水平的面(水平面)、或是相對於水平傾斜指定角度的面(傾斜面)、或者是U字形狀的面(曲面)之任一者。 The return rail 17, as shown in FIG. 4, is set in a groove shape that is deeper than the main rail 16. In this embodiment, the upstream return rail 17a and the downstream return rail 17b are formed at positions symmetrical to each other with respect to the long axis L of the plate elastic body 11. In addition, the intermediate return rail 17c in the shape of a partial arc is set to be symmetrical with the long axis L of the plate elastic body 11 as the center. The upward direction of the return rail 17 is the "conveyance surface that the workpiece touches." Furthermore, the conveying surface may be either a horizontal or a slightly horizontal surface (horizontal surface), a surface inclined at a predetermined angle with respect to the horizontal (inclined surface), or a U-shaped surface (curved surface).

主軌16，係形成在板彈性體11中以長軸L為邊界之其中一方側的區域中，比上游側返回軌17a更靠外周圍側，剖面形狀被設定成比上游側返回軌17a還淺的溝狀。主軌16的朝上面，乃是「工件所接觸的搬運面」。主軌16的朝上面，係設定成以指定角度傾斜成下降梯度般到外周圍側的面。在主軌16，是可以於搬運中，使工件整齊排列成一列，供給到下個製程裝置。以下，把板彈性體11中以長軸L為邊界之其中一方側的區域作為「主軌側區域」，把另一方側的區域作為「返回軌側區域」。此乃是崩壞軸對稱性之其中一例。 The main rail 16 is formed in an area on one side of the plate elastic body 11 with the long axis L as the boundary, and is closer to the outer peripheral side than the upstream return rail 17a, and the cross-sectional shape is set to be smaller than the upstream return rail 17a Shallow groove-shaped. The upward direction of the main rail 16 is the "conveying surface that the workpiece touches." The upper side of the main rail 16 is set to incline at a predetermined angle in a descending gradient to the outer peripheral side. On the main rail 16, it is possible to arrange the workpieces neatly in a row during transportation and supply them to the next process device. Hereinafter, the area on one side of the plate elastic body 11 bordered by the long axis L is referred to as the "main rail side area", and the area on the other side is referred to as the "return rail side area". This is one example of the collapse of the axis symmetry.

在該主軌16，設有圖1及圖4表示的篩選部3。篩選部3，係具有：利用在姿勢判別之感測器31、以及根據姿勢判別的結果使空氣噴出之空氣噴出部32。對感測器31判別出不是期望適當的姿勢的姿勢(異方向姿 勢)之工件W，以從空氣噴出部32噴出空氣的方式，可以從主軌16排除異方向姿勢的工件W，並使其掉落在比主軌16更靠內周圍側且位在低位置之上游側返回軌17a。 The main rail 16 is provided with a screening unit 3 shown in Figs. 1 and 4. The screening unit 3 has a sensor 31 for posture discrimination, and an air ejection unit 32 for blowing air based on the result of posture discrimination. The sensor 31 discriminates that the workpiece W is not in the desired posture (different orientation posture), and the workpiece W in the different posture posture can be removed from the main rail 16 by blowing air from the air ejection portion 32, and make it It falls on the return rail 17a on the upstream side at a lower position on the inner peripheral side than the main rail 16.

排除到上游側返回軌17a之異方向姿勢的工件W，係經過中間返回軌17c及下游側返回軌17b，回到器皿供料器BF的器皿彈性體11。被判別為適當的姿勢之工件W，係從設在主軌16的終端之排出口被排出。 The workpiece W, which is excluded from the different orientation of the upstream return rail 17a, passes through the middle return rail 17c and the downstream return rail 17b, and returns to the vessel elastic body 11 of the vessel feeder BF. The workpiece W judged to be the proper posture is discharged from the discharge port provided at the terminal end of the main rail 16.

使這樣的搬運部1撓曲變形之複數個驅動手段4，係如圖2~圖4表示，是藉由壓電元件41來構成。作為使行進波發生在搬運面(主軌16的搬運面、返回軌17的搬運面)之行進波產生手段而發揮功能之複數個壓電元件41，係被貼附在板彈性體11中，形成搬運面(主軌16的搬運面、返回軌17的搬運面)之部分的背面(下方向面)側。 The plurality of driving means 4 for flexing and deforming such a conveying part 1 are shown in FIGS. 2 to 4 and are constituted by piezoelectric elements 41. A plurality of piezoelectric elements 41 functioning as a means for generating traveling waves to generate traveling waves on the conveying surface (the conveying surface of the main rail 16 and the conveying surface of the return rail 17) are attached to the plate elastic body 11. The back surface (downward direction surface) side of the part forming the conveyance surface (the conveyance surface of the main rail 16 and the conveyance surface of the return rail 17).

壓電元件41，乃是以伸縮在板彈性體11的縱長方向的方式，使撓曲發生在搬運面(主軌16的搬運面、返回軌17的搬運面)者，沿長軸L方向分別設在板彈性體11的主軌側區域與返回軌側區域。配置在沿主軌側區域的位置之壓電元件41、與配置在沿返回軌側區域的位置之壓電元件41，係如圖2及圖3表示，設成相互具有空間上的相位差。在本實施方式，把主軌側區域，設定在用於使0°模式的波發生的第1激振範圍Z1；把返回軌側區域，設定在用於使90°模式的波發生的第2激振範圍Z2。 The piezoelectric element 41 stretches in the longitudinal direction of the plate elastic body 11, so that the deflection occurs on the conveying surface (the conveying surface of the main rail 16 and the conveying surface of the return rail 17) along the long axis L direction. They are respectively provided in the main rail side area and the return rail side area of the plate elastic body 11. The piezoelectric element 41 arranged at the position along the main rail side area and the piezoelectric element 41 arranged at the position along the return rail side area are as shown in FIGS. 2 and 3, and are set to have a spatial phase difference with each other. In this embodiment, the main rail side area is set to the first excitation range Z1 for generating the 0° mode wave; the return rail side area is set to the second excitation range Z1 for generating the 90° mode wave Excitation range Z2.

如圖3表示，第1激振範圍Z1的壓電元件41係連接到第1放大器51，第2激振範圍Z2的壓電元件41係連接到第2放大器52。各壓電元件41，係以1/2波長間隔分別配置在，分別在第1激振範圍Z1及第2激振範圍Z2中振動模式的腹的位置。各激振範圍(第1激振範圍Z1、第2激振範圍Z2)中相鄰的壓電元件41，係成為振幅的波峰與波谷的關係，因此，在進行相同的驅動的情況下，成為反方向的變位(圖2及圖3中用「+」與「-」來表現)。亦即，為了使上下方向的撓曲振動發生在搬運面且有效率激振，在搬運面的下方(背側)，以1/2波長間隔貼附壓電元件41在振動模式的腹的位置，交互調換在搬運方向上相鄰的壓電元件41的極性。 As shown in FIG. 3, the piezoelectric element 41 in the first excitation range Z1 is connected to the first amplifier 51, and the piezoelectric element 41 in the second excitation range Z2 is connected to the second amplifier 52. The piezoelectric elements 41 are respectively arranged at 1/2 wavelength intervals at the position of the anti-node of the vibration mode in the first excitation range Z1 and the second excitation range Z2, respectively. Adjacent piezoelectric elements 41 in each excitation range (the first excitation range Z1 and the second excitation range Z2) have the relationship between the peak and the valley of the amplitude. Therefore, when the same drive is performed, the piezoelectric element 41 becomes Displacement in the opposite direction (shown with "+" and "-" in Figure 2 and Figure 3). That is, in order to cause flexural vibration in the vertical direction to occur on the conveying surface and to efficiently excite the vibration, the piezoelectric element 41 is attached to the belly of the vibration mode at a 1/2 wavelength interval below the conveying surface (back side). , The polarities of piezoelectric elements 41 adjacent to each other in the conveying direction are alternately exchanged.

在第1激振範圍Z1與第2激振範圍Z2，為一方面讓頻率為相同，一方面空間上波的相位錯位90°之2個振動模式，具體方面，使圖5表示的0°模式與90°模式的波發生，進行有效率激振的緣故，如圖3表示，例如相對於第2激振範圍Z2，第1激振範圍Z1係沿返回軌17中的工件的搬運方向，設定成(n+1/4)λ(n=0或是正的整數)的空間上的相位差，對第1激振範圍Z1與第2激振範圍Z1為相同的極性的壓電元件41彼此的配置安裝成實質上偏離λ/4(安裝條件)。如此，在本實施方式，偏離1/4波長而配置壓電元件41。在圖5，在0°模式的波與90°模式的波的相同位置，0°模式的波的節與90°模式的波 的腹為一致，具有90°的空間上的相位差這一點是可以理解。 In the first excitation range Z1 and the second excitation range Z2, on the one hand, the frequency is the same, on the other hand, the phase of the wave in space is shifted by 90°, and the specific aspect is the 0° mode shown in Figure 5. As shown in Figure 3, the 90°-mode wave is generated to perform efficient excitation. For example, with respect to the second excitation range Z2, the first excitation range Z1 is set along the conveying direction of the workpiece on the return rail 17. The phase difference in space is (n+1/4)λ (n=0 or a positive integer), and the piezoelectric elements 41 having the same polarity in the first excitation range Z1 and the second excitation range Z1 are mutually separated The configuration is installed so as to deviate substantially from λ/4 (installation condition). In this manner, in the present embodiment, the piezoelectric element 41 is arranged shifted from the quarter wavelength. In Figure 5, at the same position of the wave in the 0° mode and the wave in the 90° mode, the node of the wave in the 0° mode and the wave in the 90° mode It’s understandable that the abdomen of is consistent, and there is a 90° spatial phase difference.

尚且，所謂駐波，係共振的話，單純在該場域振動者。而且，壓電元件41為一體者，也可以是交互調換表面的電極的極性之構成，極性係也可以是如圖2及圖3表示與極性相逆者。更進一步，壓電元件41，係1個1個設置在第1激振範圍Z1(主軌側區域)及第2激振範圍Z2(返回軌側區域)之構成，或者也可以是在一方的激振範圍壓電元件41彼此的配置錯位λ/4而設置之構成。而且也可以分別安裝在板彈性體11中，形成搬運面(主軌16的搬運面、返回軌17的搬運面)的部分的背側與表側。亦即，只要是可以滿足上述的安裝條件，2個以上的壓電元件41是可以設在搬運部1的任意處。 Moreover, the so-called standing wave is one that simply vibrates in the field if it resonates. Furthermore, if the piezoelectric element 41 is integrated, the polarity of the electrodes on the surface may be alternately exchanged, and the polarity system may be the opposite of the polarity as shown in FIGS. 2 and 3. Furthermore, the piezoelectric elements 41 are arranged one by one in the first excitation range Z1 (main rail side area) and the second excitation range Z2 (return rail side area), or they may be in one of them. The arrangement of the piezoelectric elements 41 in the excitation range is shifted by λ/4. Moreover, it may be separately attached to the plate elastic body 11, and the back side and the front side of the part of the conveyance surface (the conveyance surface of the main rail 16 and the conveyance surface of the return rail 17) may be formed. In other words, as long as the above-mentioned mounting conditions can be satisfied, two or more piezoelectric elements 41 may be provided in any place of the conveying unit 1.

接著，藉由崩壞以搬運部1的長軸L為中心之對稱構造的方式，在搬運部1中0°模式的固有頻率f1、與90°模式的固有頻率f2，產生有差(f1<f2)。有關本實施方式的線型供料器LF，係如圖3表示，至少具備機械的相位差取得手段，其係取得起因於固有頻率f1與固有頻率f2的差所致之機械的相位差，作為包含到用於使行進波發生的時間上的相位差之要件。在此，機械的相位差，乃是起因於2個振動模式的固有頻率的差所致之相位差。亦即，機械的相位差為從搬運部1的非對稱形狀所派生的相位差，為對於相異之2個固有頻率的振動模式，在以一個頻率激振的情況下，產生2個駐波之時間相 位的差。所謂「固有頻率的差」，係意味著2個振動模式為相同的變形型態及相同的波的數值，為相異的2個振動模式的固有頻率的差，振動模式的數值、與用於產生行進波的駐波的數值未必一致。在此敘述之所謂「相同的變形型態」，係例如，意味著2個振動模式的振動方向或振動的方法為相同者，所謂「相同的波的數值」，係意味著搬運部所具有的搬運面中，搬運工件的搬運路徑一整周中的波長的數值者。亦即，在使物體振動的情況下，有在空間上具有相位差之2個振動模式，振動模式為3個的案例係皆無。因此，例如為相同頻率、相同的變形型態及相同的波的數值，即便是使具有空間上的相位差之3個以上的駐波產生在搬運面之構成，振動模式乃是固有頻率互為相異之第1振動模式與第2振動模式之2個。經由空間相位相互錯位90°，可以把2個振動模式中的第1振動模式定義為0°模式，把第2振動模式定義為90°模式。 Next, by collapsing the symmetrical structure centered on the long axis L of the conveying unit 1, there is a difference between the natural frequency f1 of the 0° mode and the natural frequency f2 of the 90° mode in the conveying unit 1 (f1< f2). Regarding the linear feeder LF of this embodiment, as shown in FIG. 3, it has at least a mechanical phase difference obtaining means, which obtains the mechanical phase difference caused by the difference between the natural frequency f1 and the natural frequency f2, and includes It is a requirement for the phase difference in time for generating the traveling wave. Here, the mechanical phase difference is the phase difference caused by the difference in the natural frequencies of the two vibration modes. That is, the mechanical phase difference is the phase difference derived from the asymmetrical shape of the conveying unit 1, and is for two different natural frequency vibration modes. When excited at one frequency, two standing waves are generated. Time phase The difference in position. The so-called "difference in natural frequency" means that the two vibration modes have the same deformation pattern and the same value of the wave. It is the difference between the natural frequencies of the two different vibration modes. The value of the vibration mode and the value used for The values of the standing waves that generate the traveling waves are not necessarily the same. The so-called "same deformation type" described here means, for example, that the vibration directions or vibration methods of the two vibration modes are the same. The so-called "same wave value" means that the conveying unit has On the conveying surface, the value of the wavelength of the entire cycle of the conveying path for conveying the workpiece. That is, when the object is vibrated, there are two vibration modes that have a phase difference in space, and there are no cases where there are three vibration modes. Therefore, for example, with the same frequency, the same deformation pattern, and the same wave value, even if three or more standing waves with a spatial phase difference are generated on the conveying surface, the vibration mode is the natural frequency of each other. Two of the different first vibration mode and second vibration mode. By shifting the phases of the space by 90°, the first vibration mode of the two vibration modes can be defined as the 0° mode, and the second vibration mode can be defined as the 90° mode.

於圖6表示與空間上的波的相位差為錯位90°之2個振動模式的激振力(發生力)相對之撓曲位移量的傳遞特性及相位特性。把激振頻率f作為第1激振範圍Z1(0°模式)的固有頻率f1的話，關於相位特性，在第1激振範圍Z1(0°模式)為共振驅動的緣故，與力相對之變位的相位差係成為90°(同一圖中的「90-

Figure 106118706-A0305-02-0017-8
」)。從同一圖的變位/力的特性可以理解到，第1激振範圍Z1(0°模式)的波，係被驅動在共振點f1，第2激振範圍Z2(90°模式)的波，係從共振點遠離而振幅減低。 Fig. 6 shows the transmission characteristics and phase characteristics of the excitation force (generating force) of the two vibration modes in which the phase difference with the wave in space is 90° shifted relative to the amount of deflection displacement. If the excitation frequency f is taken as the natural frequency f1 of the first excitation range Z1 (0° mode), the phase characteristic is due to the resonance drive in the first excitation range Z1 (0° mode), which changes relative to the force. The phase difference of the position becomes 90° (the "90-
Figure 106118706-A0305-02-0017-8
"). From the displacement/force characteristics in the same figure, it can be understood that the wave in the first excitation range Z1 (0° mode) is driven at the resonance point f1, and the wave in the second excitation range Z2 (90° mode), It is far from the resonance point and the amplitude is reduced.

而且，把激振頻率f作為第1激振範圍Z1(0°模式)的固有頻率f1與第2激振範圍Z2(90°模式)的固有頻率f2的中間的頻率f3的話，與力相對之變位的相位差，係成為同一圖中的「

Figure 106118706-A0305-02-0018-9
-
Figure 106118706-A0305-02-0018-10
」，0°模式的振幅與90°模式的振幅成為相同(參閱同一圖中的元件符號b)。 Furthermore, if the excitation frequency f is taken as the frequency f3 between the natural frequency f1 of the first excitation range Z1 (0° mode) and the natural frequency f2 of the second excitation range Z2 (90° mode), it is opposite to the force The phase difference of the displacement becomes the "
Figure 106118706-A0305-02-0018-9
-
Figure 106118706-A0305-02-0018-10
", the amplitude of the 0° mode and the amplitude of the 90° mode are the same (refer to the symbol b in the same figure).

如此，0°模式與90°模式，係固有頻率完全不一致。為此，在以某一個頻率進行驅動的情況下，於2個駐波(0°模式與90°模式)產生相位差。而且，變化激振頻率的話，相位差也變化。與此同時，從共振波峰遠離的緣故，也產生振幅差。為此，使激振頻率變化這點，係結果上是與變更相位差與振幅比這點為同等。在此，在本實施方式，作為機械的相位差取得手段，是適用在不僅是取得起因於固有頻率f1與固有頻率f2的差所致之機械的相位差，也取得起因於驅動訊號的激振頻率所致之機械的相位差，作為包含到用於使行進波發生之時間上的相位差之要件者。 In this way, the natural frequencies of the 0° mode and the 90° mode are completely inconsistent. For this reason, when driving at a certain frequency, a phase difference occurs between two standing waves (0° mode and 90° mode). Furthermore, if the excitation frequency is changed, the phase difference also changes. At the same time, due to the distance from the resonance peak, the amplitude difference also occurs. Therefore, changing the excitation frequency is equivalent to changing the phase difference and amplitude ratio. Here, in this embodiment, as a means of obtaining mechanical phase difference, it is applicable not only to obtain the mechanical phase difference caused by the difference between the natural frequency f1 and the natural frequency f2, but also to obtain the excitation caused by the drive signal. The mechanical phase difference due to frequency is included as a requirement for the temporal phase difference for generating the traveling wave.

而且，在本實施方式，係構成機械的相位差取得手段也取得起因於搬運部1的衰減特性所致之機械的相位差，作為包含到用於使行進波發生之時間上的相位差之要件。此乃是著眼在若搬運部1的衰減特性變化，機械的相位差也變動這點之構成。 Furthermore, in this embodiment, the phase difference obtaining means constituting the machine also obtains the phase difference of the machine due to the attenuation characteristics of the conveying unit 1 as a requirement including the phase difference in the time for generating the traveling wave . This is a configuration that focuses on the fact that if the attenuation characteristic of the conveying unit 1 changes, the mechanical phase difference also changes.

有關本實施方式之線型供料器LF，係如圖3表示，具備選擇波形之波形選擇手段6。波形選擇手段6乃是從例如正弦波、矩形波、三角波等的複數種的波形中 選擇1個波形者。而且，有關本實施方式之線型供料器LF，係構成為：具備調整施加到各振動模式的波形的電性的相位差之電性的相位差調整手段7，電性的相位差調整手段7係相對於以機械的相位差取得手段所取得之機械的相位差，調整並賦予對複數個驅動手段4(第1驅動手段41、第2驅動手段42)之驅動訊號的時間上的相位差。「電性的相位差」，乃是施加到2個振動模式用之各個的驅動手段4之電壓波形的相位差，為從外部所給予時間上的相位差指令。 Regarding the linear feeder LF of this embodiment, as shown in FIG. 3, it is equipped with the waveform selection means 6 which selects a waveform. Waveform selection means 6 is selected from a plurality of waveforms such as sine wave, rectangular wave, triangle wave, etc. Choose 1 waveform. In addition, the linear feeder LF of the present embodiment is configured to include electrical phase difference adjustment means 7 and electrical phase difference adjustment means 7 for adjusting the electrical phase difference of the waveform applied to each vibration mode. It is to adjust and provide the temporal phase difference of the driving signal to the plurality of driving means 4 (the first driving means 41 and the second driving means 42) with respect to the mechanical phase difference obtained by the mechanical phase difference obtaining means. "Electrical phase difference" is the phase difference of the voltage waveform applied to the driving means 4 for each of the two vibration modes, and is a phase difference command given from the outside in terms of time.

而且，有關本實施方式的線型供料器LF，係具備：調整激振頻率之激振頻率調整手段8、以及調整全部的駐波(0°模式的駐波、90°模式的駐波)的振幅之振幅調整手段(第1振幅調整手段91、第2振幅調整手段92)。第1振幅調整手段91、第2振幅調整手段92，係調整成0°模式的駐波的振幅與90°模式的駐波的振幅為相等者。 Furthermore, the linear feeder LF of this embodiment is provided with: an excitation frequency adjustment means 8 for adjusting the excitation frequency, and a device for adjusting all standing waves (0° mode standing wave, 90° mode standing wave) Amplitude adjustment means (first amplitude adjustment means 91, second amplitude adjustment means 92). The first amplitude adjustment means 91 and the second amplitude adjustment means 92 are adjusted so that the amplitude of the standing wave in the 0° mode is equal to the amplitude of the standing wave in the 90° mode.

有關本實施方式之線型供料器LF，係在這樣的構成下，對第1激振範圍Z1的壓電元件41與第2激振範圍Z2的壓電元件41，給予時間上相位錯開90°之超音波的正弦波振動的話，在空間上且時間上錯位90°之2個駐波重合，搬運面(主軌16的搬運面、返回軌17的搬運面)本身彈性變形，撓曲振動成行進波(循環方式)。 Regarding the linear feeder LF of the present embodiment, under such a configuration, the piezoelectric element 41 in the first excitation range Z1 and the piezoelectric element 41 in the second excitation range Z2 are given a phase shift of 90° in time. If the ultrasonic sine wave vibrates, the two standing waves, which are displaced by 90° in space and time, overlap, and the conveying surface (the conveying surface of the main rail 16 and the conveying surface of the return rail 17) itself is elastically deformed, and the flexural vibration becomes Traveling wave (circular mode).

在此，以進行振動的範圍中的「最小振幅/最大振幅」求出的行進波比，係在其值為「1」的情況下， 可以產生理想上的行進波。接著，為了產生行進波比1的行進波，2個駐波(0°模式的駐波、90°模式的駐波)的時間上的相位差及空間上的相位差為90°且振幅為相同是有必要的。但是，實際上，使相位差為90°及使兩者的振幅完全一致是困難的。特別是，在2個振動模式的固有頻率附近進行驅動的緣故，在產生有固有頻率的差的情況下，可惜於機械上發生有時間上的相位差。而且，也因為衰減，其相位差變化的緣故，把時間上的相位差設定成90°是非常難的。在此，本案發明者，係在2個駐波的相位差及振幅比從理想值錯位的情況下，檢驗行進波比進行何種程度的變化。 Here, the traveling wave ratio calculated by the "minimum amplitude/maximum amplitude" in the vibration range is set to be "1". Can produce ideal traveling waves. Next, in order to generate a traveling wave with a traveling wave ratio of 1, the temporal phase difference and the spatial phase difference of the two standing waves (0° mode standing wave and 90° mode standing wave) are 90° and the amplitude is the same It is necessary. However, in reality, it is difficult to make the phase difference 90° and the amplitudes of the two to be completely consistent. In particular, because the driving is performed near the natural frequencies of the two vibration modes, when a difference in natural frequency occurs, it is a pity that there is a mechanical phase difference in time. Moreover, it is very difficult to set the time phase difference to 90° because of the attenuation and the change of the phase difference. Here, the inventor of the present application examined how much the traveling wave ratio has changed when the phase difference and the amplitude ratio of the two standing waves are misaligned from the ideal value.

振幅相異，是有於空間上及時間上產生相位差之2個駐波，令其中一方的駐波的振幅為a，另一方的振幅為b，空間上的相位差為

Figure 106118706-A0305-02-0020-11
，時間相位差為
Figure 106118706-A0305-02-0020-12
，頻率為ω，波數為k的話，某位置x中的駐波的變位y1、y2係可以用以下的式子(1)表示。 Different amplitudes are two standing waves that produce a phase difference in space and time. Let the amplitude of one of the standing waves be a, the amplitude of the other is b, and the phase difference in space is
Figure 106118706-A0305-02-0020-11
, The time phase difference is
Figure 106118706-A0305-02-0020-12
If the frequency is ω and the wave number is k, the displacements y 1 and y 2 of the standing wave at a certain position x can be expressed by the following equation (1).

Figure 106118706-A0305-02-0020-1
Figure 106118706-A0305-02-0020-1

合成該2個波並整理的話，成為以下的式子(2)。When these two waves are synthesized and arranged, it becomes the following equation (2).

Figure 106118706-A0202-12-0019-2
Figure 106118706-A0202-12-0019-2

相對於位置x作圖式子(2)的正弦波的振幅「h(x)=√A2+B2」的話，成為圖7。由同一圖，可以理解到振幅h(x)的波形，係因為空間上的相位差

Figure 106118706-A0202-12-0019-3
、時間相位差
Figure 106118706-A0202-12-0019-5
及駐波的振幅a、b的值而大幅變化。接著，在空間上的相位差
Figure 106118706-A0202-12-0019-6
=時間上的相位差
Figure 106118706-A0202-12-0019-4
，其中一方的駐波的振幅a=另一方的駐波的振幅b時，振幅部依存於位置x而成為一定，成為行進波比1之完全行進波。另一方面，空間上的相位差
Figure 106118706-A0202-12-0019-7
或是時間上的相位差
Figure 106118706-A0202-12-0019-8
時，成為節的振幅為0之完全駐波。在此以外的情況下，成為駐波與行進波混合存在的狀態。 If the amplitude "h(x)=√A 2 +B 2 "of the sine wave of the formula (2) is plotted with respect to the position x, it becomes FIG. 7. From the same figure, it can be understood that the waveform of the amplitude h(x) is due to the spatial phase difference
Figure 106118706-A0202-12-0019-3
, Time phase difference
Figure 106118706-A0202-12-0019-5
And the values of the amplitudes a and b of the standing wave greatly change. Then, the phase difference in space
Figure 106118706-A0202-12-0019-6
= Phase difference in time
Figure 106118706-A0202-12-0019-4
When the amplitude a of one standing wave = the amplitude b of the other standing wave, the amplitude part is constant depending on the position x, and becomes a perfect traveling wave with a traveling wave ratio of 1. On the other hand, the spatial phase difference
Figure 106118706-A0202-12-0019-7
Or the phase difference in time
Figure 106118706-A0202-12-0019-8
At this time, it becomes a complete standing wave with the amplitude of the node being zero. In other cases, the standing wave and the traveling wave are mixed.

在此，把空間上的相位差

Figure 106118706-A0202-12-0019-9
或是時間上的相位差
Figure 106118706-A0202-12-0019-10
的其中一方的相位差固定在90°，使另一方的相位差從0°一直變化到90°為止時的行進波比的關係，表示在圖8。作為參數，使振幅比a/b，亦即使其中一方的駐波的振幅a與另一方的駐波的振幅b之比例，變化成「1.0」、「1.5」、「2.0」之結果，相位差越靠近0°行進波比越急遽變小，在0°行進波比成為0，成為完全駐波。另一方面，越靠近90°，行進波比越靠近1，在90°行進波比成為1(振幅比為1的情況)，成為完全行進波。而且，也可以判別明白從90°到180°成為從0°到90°的對稱 的特性。 Here, the phase difference in space
Figure 106118706-A0202-12-0019-9
Or the phase difference in time
Figure 106118706-A0202-12-0019-10
The relationship of the traveling wave ratio when the phase difference of one of them is fixed at 90° and the phase difference of the other is changed from 0° to 90° is shown in FIG. 8. As a parameter, the amplitude ratio a/b, even if the ratio between the amplitude a of one standing wave and the amplitude b of the other standing wave, is changed to "1.0", "1.5", "2.0", the phase difference The traveling wave ratio decreases rapidly as it approaches 0°. At 0°, the traveling wave ratio becomes 0 and becomes a complete standing wave. On the other hand, the closer to 90°, the closer the traveling wave ratio is to 1, and the traveling wave ratio becomes 1 at 90° (in the case of an amplitude ratio of 1), and it becomes a complete traveling wave. Furthermore, it can also be distinguished that the characteristic of symmetry from 0° to 90° from 90° to 180° can be understood.

根據以上的檢驗結果，在有關具備不為軸對象的搬運部1之本實施方式之線型供料器LF，首先，藉由適宜的手段測定與互為相異的固有頻率對應之2個振動模式的固有頻率，亦即0°模式的固有頻率f1與90°模式的固有頻率f2(固有頻率測定步驟)，決定激振頻率(激振頻率決定步驟)。在固有頻率測定步驟測定出的各模式的固有頻率(0°模式的固有頻率f1、90°模式的固有頻率f2)，係可以表示成如圖9表示的圖表。在激振頻率決定步驟，藉由激振頻率調整手段8，把激振頻率設定成0°模式的固有頻率f1與90°模式的固有頻率f2的間的頻率。 Based on the above test results, regarding the linear feeder LF of the present embodiment with the conveying unit 1 that is not a shaft object, firstly, two vibration modes corresponding to different natural frequencies are measured by appropriate means. The natural frequency of, that is, the natural frequency f1 of the 0° mode and the natural frequency f2 of the 90° mode (natural frequency determination step), determine the excitation frequency (excitation frequency determination step). The natural frequency of each mode (the natural frequency f1 of the 0° mode and the natural frequency f2 of the 90° mode) measured in the natural frequency measurement step can be expressed as a graph as shown in FIG. 9. In the step of determining the excitation frequency, the excitation frequency is set to a frequency between the natural frequency f1 of the 0° mode and the natural frequency f2 of the 90° mode by the excitation frequency adjustment means 8.

接著，有關本實施方式之線型供料器LF，係藉由機械的相位差算出手段算出機械的相位差(機械的相位差算出步驟)。具體方面，可以從圖9表示的圖表，算出機械的相位差(在同一圖中，以「

Figure 106118706-A0202-12-0020-32
m」表示的機械的相位差)。繼續機械的相位差算出步驟，有關本實施方式之線型供料器LF，係設定從外部給予的時間上的相位差指令之電性的相位差(電性的相位差設定步驟)。具體方面，設定決定電性的相位差，使得電性的相位差與機械的相位差的和為90°。亦即，在滿足「電性的相位差=90-機械的相位差」的條件的情況下，行進波比為「1」。 Next, regarding the linear feeder LF of the present embodiment, the mechanical phase difference is calculated by the mechanical phase difference calculation means (mechanical phase difference calculation step). Specifically, the mechanical phase difference can be calculated from the graph shown in Figure 9 (in the same figure, with "
Figure 106118706-A0202-12-0020-32
m" represents the mechanical phase difference). Continuing the mechanical phase difference calculation step, regarding the linear feeder LF of this embodiment, the electrical phase difference of the temporal phase difference command given from the outside is set (electrical phase difference setting step). Specifically, the electrical phase difference is set so that the sum of the electrical phase difference and the mechanical phase difference is 90°. That is, when the condition of "electrical phase difference=90-mechanical phase difference" is satisfied, the traveling wave ratio is "1".

藉由經過以上的處理，有關本實施方式之線型供料器LF，係以調整給予到2個區域(第1激振範圍Z1、第2激振範圍Z2)的壓電元件41之波的振動(例如正弦波振動)的相位差的方式，調整行進波比(行進波比=最小振幅/最大振幅)，在空間上且時間上錯位90°之2個駐波重合，撓曲振動成行進波，產生完全或是幾乎完全的行進波，可以搬運工件W。 Through the above processing, the linear feeder LF of this embodiment adjusts the vibration of the wave applied to the piezoelectric element 41 in two areas (the first excitation range Z1 and the second excitation range Z2) (For example, sine wave vibration), adjust the traveling wave ratio (traveling wave ratio=minimum amplitude/maximum amplitude), and the two standing waves that are displaced by 90° in space and time are superimposed, and the flexural vibration becomes a traveling wave. , A complete or almost complete traveling wave is generated, and the workpiece W can be transported.

產生行進波的話，搬運面的某一點的軌跡描繪出橢圓振動，該橢圓振動係在到達搬運面的頂點時與工件接觸，給予摩擦力到工件。工件被搬運在摩擦力所作用的方向上。該工件的搬運方向，係與行進波的前進方向相反。 When a traveling wave is generated, the trajectory of a certain point of the conveying surface depicts an elliptical vibration, and this elliptical vibration is in contact with the workpiece when it reaches the apex of the conveying surface and imparts friction to the workpiece. The workpiece is transported in the direction of friction. The conveying direction of the workpiece is opposite to the advancing direction of the traveling wave.

在此，0°模式的固有頻率f1與90°模式的固有頻率f2為互為相異的值，這些差係如以下的式子3所表示，可以表示作為與0°模式的固有頻率f1相對之90°模式的固有頻率f2的差的比例也就是固有頻率差率△f。 Here, the natural frequency f1 of the 0° mode and the natural frequency f2 of the 90° mode are different values. These differences are expressed by the following equation 3, which can be expressed as relative to the natural frequency f1 of the 0° mode The ratio of the difference of the natural frequency f2 of the 90° mode is the natural frequency difference rate Δf.

△f=(f2-f1)/f1×100 但是，f2>f1...式子3 △f=(f2-f1)/f1×100 However, f2>f1...Equation 3

把行進波比與固有頻率差率△f的關係表示在圖10。在此記述的行進波比，係意味著行進波所致之搬運面中的垂直振幅中，與搬運面中在指定範圍下最大的振動的位置中的最大振幅相對之，在前述指定範圍下最小的振動的位置中的最小振幅之比。由式子3及圖10，作為實用上沒障礙且可以搬運工件的行進波比(搬運界限行進波比)的值(本案發明者經由檢驗實驗，發現到搬運界限行進波比的值為「0.13以上」)，係可以把握的是固有頻率差率△f的值為△f≦1.54者。因此，固有頻率差率△f≦1.54的話，可以形成實用上沒障礙且可以搬運工件之工件 搬運裝置。 The relationship between the traveling wave ratio and the natural frequency difference Δf is shown in Fig. 10. The traveling wave ratio described here means that the vertical amplitude of the conveying surface caused by the traveling wave is relative to the maximum amplitude in the position of the maximum vibration in the specified range on the conveying surface, and is the smallest in the aforementioned specified range. The ratio of the smallest amplitude in the position of the vibration. From equation 3 and Fig. 10, as the value of the traveling wave ratio (transport limit traveling wave ratio) that is practically unobstructed and the workpiece can be transported (the inventor of this case has found that the value of the traveling wave ratio at the transportation limit is "0.13 through inspection experiments). Above”), it can be understood that the value of the natural frequency difference △f is △f≦1.54. Therefore, if the natural frequency difference ratio △f≦1.54, it can form a workpiece that is practically unobstructed and can carry the workpiece. Handling device.

而且，在即便經過上述的各步驟之電性的處理也無法產生適切的行進波的情況下，也可以以使搬運部1的衰減特性變化為目的，來變更搬運部1的構造。使搬運部1的衰減特性變化的話，伴隨於此，機械的相位差變動，用機械的相位差取得手段取得其變動的機械的相位差來作為包含到時間上的相位差之要件，經過之後的電性的處理(固有頻率測定步驟以後的處理)，藉此，可以使包含起因於搬運部1的衰減特性所致之機械的特性之時間上的相位差與90°或是幾乎與90°一致。 In addition, in a case where appropriate traveling waves cannot be generated even after the electrical processing of each step described above, the structure of the conveying section 1 may be changed for the purpose of changing the attenuation characteristics of the conveying section 1. When the attenuation characteristics of the conveying unit 1 are changed, the mechanical phase difference will fluctuate as a result of this. The mechanical phase difference acquisition means obtains the fluctuating mechanical phase difference as a requirement including the phase difference in time. Electrical processing (processing after the natural frequency measurement step), by which it is possible to make the time phase difference including the mechanical characteristics due to the attenuation characteristics of the conveying unit 1 equal to or almost equal to 90° .

如此，有關本實施方式之線型供料器LF，係具備：具有搬運面且相對於任意的軸具有非對稱的形狀之搬運部1、機械的相位差取得手段、以及電性的相位差調整手段7；用機械的相位差取得手段，取得起因於至少與搬運部1所具有之互為相異的固有頻率對應之2個振動模式的固有頻率的差所致之機械的相位差，來作為包含到時間上的相位差之要件；構成對其取得的機械的相位差，藉由電性的相位差調整手段7，調整並賦予對複數個驅動手段4之驅動訊號的時間上的相位差；構成把具有調整電性的相位差並賦予到機械的相位差之時間上的相位差之驅動訊號，給予到使以相同頻率具有空間上的相位差之複數個駐波產生在搬運面之複數個驅動手段4；所以，可以使完全或是幾乎完全的行進波發生在搬運面，藉由該行進波可以高速且適切地搬運工件。特別是，把激振頻率，設定成相異的2個振動模式的其中一方的固有頻率(第1振動模式的固有頻率)與另一方的固有頻率(第2振動模式的固有頻率)之間的適宜的值，也就是作為適合的例子之第1振動模式的固有頻率與另一方的固有頻率的中間值的話，可以產生合適於工件的搬運之行進波。 In this way, the linear feeder LF of the present embodiment is provided with: a conveying part having a conveying surface and an asymmetrical shape with respect to an arbitrary axis 1, a mechanical phase difference obtaining means, and an electrical phase difference adjusting means 7; Use mechanical phase difference acquisition means to obtain the mechanical phase difference caused by the difference in the natural frequencies of at least two vibration modes corresponding to the different natural frequencies possessed by the conveying unit 1, as the inclusion The requirements of the phase difference in time; constitute the mechanical phase difference obtained from it, and adjust and give the time phase difference of the driving signal to the plurality of driving means 4 through the electrical phase difference adjustment means 7; A drive signal that adjusts the electrical phase difference and imparts the mechanical phase difference to the temporal phase difference is given to generate multiple standing waves with the same frequency and spatial phase difference to generate multiple drives on the conveying surface Means 4; Therefore, a complete or almost complete traveling wave can be generated on the conveying surface, and the workpiece can be conveyed at a high speed and appropriately by the traveling wave. In particular, set the excitation frequency to be between the natural frequency of one of the two different vibration modes (the natural frequency of the first vibration mode) and the natural frequency of the other (the natural frequency of the second vibration mode). An appropriate value, that is, an intermediate value between the natural frequency of the first vibration mode and the other natural frequency as a suitable example, can generate a traveling wave suitable for the conveyance of the workpiece.

有關本實施方式之線型供料器LF，係以把不僅是電性的相位差，也包含機械的相位差之相位差視為時間上的相位差的方式，可以使時間上的相位差為90°或是幾乎與90°一致，可以使最有效率之優秀的行進波比的行進波發生在搬運面。 Regarding the linear feeder LF of the present embodiment, the phase difference including not only the electrical phase difference but also the mechanical phase difference is regarded as the time phase difference, so that the time phase difference can be 90 °Or almost the same as 90°, the most efficient and excellent traveling wave ratio can be generated on the conveying surface.

而且，有關本實施方式之線型供料器LF，係作為機械的相位差取得手段，適用在取得起因於驅動訊號的激振頻率所致之機械的相位差、或起因於搬運部1的衰減特性所致之機械的相位差者，所以，可以正確掌握藉由激振頻率或搬運部1的衰減特性而變動的機械的相位差，可以把這些機械的相位差包含到時間上的相位差。 Furthermore, the linear feeder LF of the present embodiment is used as a means for obtaining mechanical phase difference, and is suitable for obtaining the mechanical phase difference caused by the excitation frequency of the drive signal, or the attenuation characteristics caused by the conveying unit 1. Because of the resulting mechanical phase difference, the mechanical phase difference that varies by the excitation frequency or the attenuation characteristic of the conveying unit 1 can be accurately grasped, and the mechanical phase difference can be included in the temporal phase difference.

特別是，在有關本實施方式之線型供料器LF，驅動手段4所致之驅動訊號為把超音波範圍的頻率作為激振頻率者的緣故，人類的耳朵聽不到超音波的驅動音，可以一方面實現高速搬運，一方面消解噪音問題。 In particular, in the linear feeder LF of the present embodiment, the driving signal by the driving means 4 uses the frequency in the ultrasonic range as the excitation frequency, and human ears cannot hear the ultrasonic driving sound. It can realize high-speed transportation on the one hand, and eliminate noise problems on the other.

而且，有關本實施方式的線型供料器LF，係用上下方向的超音波撓曲行進波搬運工件的緣故，搬運部1的末端的水平振幅趨近於零，可以把搬運部1的末端設置接近到下個製程裝置，可以防止、抑制小的工件的掉 落，並且，壓電元件41係構成經由超音波振動使行進波發生，所以人類的耳朵聽不到驅動音，可以無音化，一方面防止加大噪音，一方面可以達成高速化。 Furthermore, regarding the linear feeder LF of this embodiment, because the workpiece is conveyed by the ultrasonic flexural traveling wave in the vertical direction, the horizontal amplitude of the end of the conveying unit 1 is close to zero, and the end of the conveying unit 1 can be installed. Close to the next process device, it can prevent and suppress the drop of small workpieces. In addition, the piezoelectric element 41 is configured to generate traveling waves through ultrasonic vibration, so the human ears cannot hear the driving sound and can be silenced. On the one hand, it can prevent the increase of noise, on the one hand, it can achieve high speed.

有關本實施方式的線型供料器LF，係僅使搬運面撓曲振動的緣故，如前述般，即便固定搬運部1的中央部也不會影響到搬運面的撓曲振動模式，能夠得到行進波。尚且，以用第1激振範圍Z1的壓電元件41與第2激振範圍Z2的壓電元件41，使給予到該些的波的相位差反轉的方式(把時間相位反轉(-90°))，可以使工件搬運在反方向，在發生工件的堵塞的情況等，可以暫時逆向輸送工件，解除堵塞。 Regarding the linear feeder LF of this embodiment, only the conveying surface is flexed and vibrated. As described above, even if the central part of the conveying section 1 is fixed, the flexural vibration mode of the conveying surface is not affected, and travel can be obtained. wave. Furthermore, the piezoelectric element 41 in the first excitation range Z1 and the piezoelectric element 41 in the second excitation range Z2 are used to invert the phase difference of the waves given to these (invert the time phase (- 90°)), the workpiece can be transported in the opposite direction, and the workpiece can be transported in the reverse direction temporarily to remove the clogging when the workpiece is blocked.

如此，經由沿搬運部1產生的行進波，在工件與搬運面(主軌16的搬運面、返回軌17的搬運面)之間發生摩擦力，進行工件的供給與回收。 In this way, frictional force is generated between the workpiece and the conveying surface (the conveying surface of the main rail 16 and the conveying surface of the return rail 17) via the traveling wave generated along the conveying section 1, and the workpiece is supplied and recovered.

而且，有關本實施方式之器皿供料器BF，乃是如圖1、圖11及圖12表示，經由在螺旋狀的搬運軌也就是螺旋軌13(B)的搬運面發生的行進波，使工件一邊移動一邊搬運到指定的搬運端(供給端，在本實施方式為線型供料器LF的主軌的上游端)之裝置。器皿供料器BF，乃是具備：從底部側上升且具有描繪出螺旋形狀的搬運面並對任意的軸具有非對稱的形狀之器皿狀的搬運部1(B)、以及使以相同頻率具有空間上的相位差之複數個駐波產生在搬運面之複數個驅動手段4(B)；藉由與上述的線型供料器LF同樣或是相當之構成，把施加到電性 的相位差而具有包含機械的相位差之時間上的相位差之驅動訊號給予到這些複數個驅動手段4(B)，使行進波發生在器皿狀搬運部1(B)的搬運面而搬運工件者。圖11為示意性表示器皿供料器BF的側剖面之圖，圖12為從下方看器皿供料器BF之示意圖。尚且，在圖11，省略表示剖面部分之平行斜線(剖面線)。 Furthermore, regarding the vessel feeder BF of this embodiment, as shown in Figs. 1, 11, and 12, a traveling wave generated on the conveying surface of the spiral rail 13(B), which is a spiral conveying rail, causes The workpiece is conveyed to a designated conveying end (supply end, in this embodiment, the upstream end of the main rail of the linear feeder LF) while being moved. The vessel feeder BF is provided with: a vessel-like conveying section 1 (B) that rises from the bottom side and has a conveying surface drawing a spiral shape and an asymmetrical shape on an arbitrary axis, and a conveying section 1 (B) that has the same frequency The plurality of standing waves of the spatial phase difference are generated on the plurality of driving means 4(B) on the conveying surface; by the same or equivalent configuration as the linear feeder LF described above, the electrical phase difference is applied to the A driving signal having a temporal phase difference including a mechanical phase difference is given to these plural driving means 4 (B), and a traveling wave is generated on the conveying surface of the vessel-shaped conveying part 1 (B) to convey the workpiece. Fig. 11 is a diagram schematically showing a side section of the vessel feeder BF, and Fig. 12 is a schematic diagram of the vessel feeder BF viewed from below. Incidentally, in FIG. 11, parallel diagonal lines (hatched lines) showing the cross-sectional portion are omitted.

器皿狀搬運部1(B)，係藉由產生行進波的彈性構件也就是器皿彈性體11(B)所形成，相對於任意的軸具有非對稱的形狀者。搬運部1(B)中螺旋軌13(B)的終端部(下游端部)連接到線型供料器LF中主軌16的始端部(上游端部)。 The vessel-shaped conveying portion 1 (B) is formed by the vessel elastic body 11 (B), which is an elastic member that generates a traveling wave, and has an asymmetrical shape with respect to an arbitrary axis. The terminal part (downstream end part) of the spiral rail 13 (B) in the conveyance part 1 (B) is connected to the start end part (upstream end part) of the main rail 16 in the linear feeder LF.

在本實施方式，藉由適宜的零組件(在圖1為固定具(螺栓)，在圖11為推壓構件14(B))把器皿彈性體11(B)的中央部分固定在支撐臺2(B)。器皿狀搬運部1(B)，係在器皿彈性體11(B)的內周圍面形成螺旋軌13(B)的緣故，並無法把成為幾何學上的軸對象般的對稱軸設定在搬運部1(B)的任意處。螺旋軌13(B)的朝上面，乃是「工件所接觸的搬運面」。 In this embodiment, the central part of the vessel elastic body 11 (B) is fixed to the support table 2 by appropriate components (fixing tool (bolt) in FIG. 1 and pressing member 14 (B) in FIG. 11). (B). The container-like conveying part 1(B) is formed with a spiral rail 13(B) on the inner peripheral surface of the container elastic body 11(B), and it is impossible to set the symmetry axis as a geometrical axis object in the conveying part. 1(B) anywhere. The upward direction of the spiral rail 13 (B) is the "conveying surface that the workpiece touches".

使這樣的器皿狀搬運部1(B)撓曲變形之複數個驅動手段4(B)，係如圖11及圖12表示，藉由壓電元件41(B)來構成。壓電元件41(B)係被貼附在器皿彈性體11(B)中，形成螺旋軌13(B)的搬運面的部分的背面(下方向面)側。 The plurality of driving means 4 (B) for flexing and deforming such a vessel-shaped conveying portion 1 (B) is constituted by piezoelectric elements 41 (B) as shown in FIGS. 11 and 12. The piezoelectric element 41 (B) is attached to the container elastic body 11 (B), and forms the back surface (downward direction surface) side of the part of the conveyance surface of the spiral rail 13 (B).

壓電元件41(B)，係以伸縮在器皿彈性體 11(B)的圓周方向的方式，使撓曲發生在螺旋軌13(B)的搬運面者，分別沿圓周方向設在把器皿彈性體11(B)中相當於直徑之任意的直線作為邊界而區別的半圓狀的區域。複數個壓電元件41(B)，係設置成相互具有空間上的相位差。在本實施方式，把其中一方的半圓狀的區域，設定在用於使0°模式的波發生的第1激振範圍；把另一方的半圓狀的區域，設定在用於使90°模式的波發生的第2激振範圍(參閱圖12)。尚且，也可在一方的半圓狀的區域，設定第1激振範圍及第2激振範圍。各壓電元件41，係以1/2波長間隔分別配置在，分別在第1激振範圍及第2激振範圍中振動模式的腹的位置。各激振範圍(第1激振範圍、第2激振範圍)中相鄰的壓電元件，係成為振幅的波峰與波谷的關係，因此，在進行相同的驅動的情況下，成為反方向的變位(圖12中用「+」與「-」來表現)。而且，在第1激振範圍與第2激振範圍相同的極性的壓電元件彼此的配置係安裝成實質上偏離λ/4。 Piezoelectric elements 41 (B) are arranged in the circumferential direction of the vessel elastic body 11 (B) so that the deflection occurs on the conveying surface of the spiral rail 13 (B). They are respectively arranged on the vessel elastic body 11 (B) in the circumferential direction. In the body 11 (B), a semicircular area distinguished by an arbitrary straight line corresponding to the diameter as a boundary. The plurality of piezoelectric elements 41 (B) are arranged so as to have a spatial phase difference with each other. In this embodiment, one of the semicircular regions is set in the first excitation range for generating 0° mode waves; the other semicircular region is set in the 90° mode. The second excitation range where the wave occurs (see Figure 12). Furthermore, it is also possible to set the first excitation range and the second excitation range in one semicircular area. The piezoelectric elements 41 are respectively arranged at 1/2 wavelength intervals at the position of the belly of the vibration mode in the first excitation range and the second excitation range, respectively. Adjacent piezoelectric elements in each excitation range (the first excitation range and the second excitation range) have a relationship between the peak and the valley of the amplitude. Therefore, when the same drive is performed, the piezoelectric elements in the opposite direction Displacement (shown with "+" and "-" in Figure 12). In addition, the arrangement of piezoelectric elements having the same polarity in the first excitation range and the second excitation range is mounted so as to be substantially deviated from λ/4.

具備這樣的器皿狀搬運部1(B)之器皿供料器BF，乃是與和上述的線型供料器LF有關之圖3為同樣的構成，亦即，乃是具備：連接第1激振範圍的壓電元件41(B)之第1放大器、連接第2激振範圍的壓電元件41(B)之第2放大器、機械的相位差取得手段、電性的相位差調整手段、激振頻率調整手段、以及振幅調整手段(第1振幅調整手段、第2振幅調整手段)之構成者。接著，與上述的線型供料器LF同樣，可以使包含有機械的 相位差之時間上的相位差完全或幾乎與90°一致之行進波產生。 The vessel feeder BF provided with such a vessel-shaped conveying portion 1(B) has the same structure as that shown in Fig. 3 related to the above-mentioned linear feeder LF, that is, it is provided with: connection of the first excitation The first amplifier of the piezoelectric element 41 (B) in the range, the second amplifier of the piezoelectric element 41 (B) connected to the second excitation range, the mechanical phase difference acquisition means, the electrical phase difference adjustment means, and the excitation A constituent of frequency adjustment means and amplitude adjustment means (first amplitude adjustment means, second amplitude adjustment means). Next, similar to the above-mentioned linear feeder LF, it is possible to generate a traveling wave whose temporal phase difference including a mechanical phase difference completely or almost coincides with 90°.

因此，器皿供料器BF，係發揮與上述的線型供料器LB同樣或是幾乎同樣的作用效果。 Therefore, the vessel feeder BF exerts the same or almost the same effect as the linear feeder LB described above.

尚且，本發明並不限定在上述之各實施方式。例如即便是使以相同頻率具有空間上的相位差之3個以上的駐波產生在搬運面之構成，振動模式也是固有頻率互為相異之第1振動模式與第2振動模式之2個。亦即，在振動了物體的情況下，是有在空間上具有相位差之2個振動模式，皆無振動模式為3個以上的案例，本發明中的「固有頻率的差」，乃是相異的2個模式的固有頻率的差，用於產生行進波的駐波的數值與振動模式的數值未必一致。 Furthermore, the present invention is not limited to the above-mentioned embodiments. For example, even if three or more standing waves having a spatial phase difference at the same frequency are generated on the conveying surface, the vibration mode is two of the first vibration mode and the second vibration mode whose natural frequencies are different from each other. That is, when the object is vibrated, there are two vibration modes with phase difference in space, and there is no case where there are more than three vibration modes. The "difference in natural frequency" in the present invention is different. The difference between the natural frequencies of the two modes, the value of the standing wave used to generate the traveling wave and the value of the vibration mode may not be the same.

在上述的實施方式，例示了把構成驅動手段的壓電元件1片1片個別地貼附在搬運部的樣態，但如圖13表示，也可以是把壓電元件41的陶瓷部42予以一體化，僅分別做出電極43之構成。同一圖(a)、(b)乃是把陶瓷部42予以一體化之壓電元件41的平面示意圖、側面示意圖。同一圖(b)中，為了可以從以箭頭表示的各電極43的極化方向來掌握，即便陶瓷部42一體化，也可以部分變更電極43。在把這樣的陶瓷部一體化型式的壓電元件41貼附到搬運部1的時點下，陶瓷部42的其中一方的面側(例如朝上面側)的各電極43係接觸到導體的搬運部1成為共有(共通電極)，陶瓷部42的另一方 的面側(例如下方向面側)的各電極43係不接觸到導體的搬運部1的緣故，藉由適宜的手段沒有必要共有。若為這樣的陶瓷部一體化型式的壓電元件41，與在上述的實施方式例示的型式的壓電元件41比較，可以減輕把壓電元件41貼附到搬運部1之作業負擔，以及圖求貼附精度的提升。尚且，在把陶瓷部42的其中一方的面側(例如朝上面側)的各電極43貼附到導體的搬運部1的情況下，在各電極43與導體的搬運部1之間形成接著層，藉由電極43與搬運部1的表面粗糙度而導通。 In the above-mentioned embodiment, the piezoelectric element constituting the driving means is individually attached to the conveying part. However, as shown in FIG. 13, the ceramic part 42 of the piezoelectric element 41 may be applied. Integration, only the structure of the electrode 43 is made separately. The same figures (a) and (b) are a schematic plan view and a schematic side view of the piezoelectric element 41 in which the ceramic part 42 is integrated. In the same figure (b), in order to be able to grasp the polarization direction of each electrode 43 indicated by the arrow, even if the ceramic part 42 is integrated, the electrode 43 may be partially changed. When the piezoelectric element 41 of the integrated ceramic part is attached to the conveying part 1, the electrodes 43 on one of the surfaces (for example, the upper side) of the ceramic part 42 are in contact with the conveying part of the conductor. 1 becomes a common electrode (common electrode). Since each electrode 43 on the other surface side (for example, the downward surface side) of the ceramic portion 42 is not in contact with the conveying portion 1 of the conductor, it is not necessary to share it by appropriate means. In the case of such a piezoelectric element 41 of an integrated ceramic part, compared with the piezoelectric element 41 of the type exemplified in the above-mentioned embodiment, the work load of attaching the piezoelectric element 41 to the conveying unit 1 can be reduced, and the figure Seeking to improve the accuracy of attachment. Furthermore, when the electrodes 43 on one of the surfaces (for example, the upper side) of the ceramic portion 42 are attached to the conductor conveying section 1, an adhesive layer is formed between each electrode 43 and the conductor conveying section 1. , The electrode 43 and the conveying unit 1 are electrically connected due to the surface roughness.

而且，作為圖13表示的陶瓷一體化型式的壓電元件41的更進一步改良版本，可以舉例有分別做出圖14表示般的陶瓷部42的其中一方的面側(例如朝上面側)的電極43，把另一方的面側(例如下方向面側)的電極44予以一體化。圖14(a)、(b)、(c)乃是把陶瓷部42與一方的面側的電極44分別予以一體化之壓電元件41的平面示意圖、側面示意圖、底面示意圖。如此，在把分別把陶瓷部42與一方的面側的電極44予以一體化之壓電元件41貼附到搬運部1的時點下，陶瓷部42的其中一方的面側(例如朝上面側)的各電極43係接觸到導體的搬運部1而成為共有(共通電極)，陶瓷部42的另一方的面側(例如下方向面側)的電極44被一體化的緣故，共有作業為非必要。 Moreover, as a further improved version of the ceramic integrated type piezoelectric element 41 shown in FIG. 13, there can be exemplified an electrode made on one of the surface sides (for example, the upper side) of the ceramic portion 42 as shown in FIG. 14. 43. The electrode 44 on the other surface side (for example, the downward surface side) is integrated. 14(a), (b), and (c) are a schematic plan view, a schematic side view, and a schematic bottom view of the piezoelectric element 41 in which the ceramic portion 42 and the electrode 44 on one surface side are respectively integrated. In this way, when the piezoelectric element 41 in which the ceramic portion 42 and the electrode 44 on one surface side are respectively integrated is attached to the conveying portion 1, one surface side (for example, toward the upper side) of the ceramic portion 42 Each electrode 43 of the ceramic part 42 is in contact with the conveying part 1 of the conductor and becomes a common electrode (common electrode). Because the electrode 44 on the other surface side (for example, the downward surface side) of the ceramic part 42 is integrated, the sharing operation is unnecessary .

而且，在上述的實施方式，作為電性的相位差設定步驟的具體例子，例示了為了電性的相位差與機械 的相位差的和成為90°而設定決定電性的相位差之樣態，但也可以為了成為「機械的相位差的和為90±180n(n為正的整數)」而設定決定電性的相位差。亦即，在滿足「電性的相位差=90±180n(n為正的整數)-機械的相位差」的條件的情況下，行進波比也為「1」。 In addition, in the above-mentioned embodiment, as a specific example of the electrical phase difference setting step, the configuration in which the electrical phase difference is set so that the sum of the electrical phase difference and the mechanical phase difference becomes 90° is exemplified. However, it is also possible to set a phase difference that determines the electrical properties so that "the sum of the mechanical phase differences is 90±180n (n is a positive integer)". That is, when the condition of “electrical phase difference=90±180n (n is a positive integer)-mechanical phase difference” is satisfied, the traveling wave ratio is also “1”.

在上述的實施方式，作為給予到2個區域的驅動手段之波的振動，例示了正弦波振動，但也可以是矩形波振動。 In the above-mentioned embodiment, the sine wave vibration is exemplified as the vibration of the wave applied to the driving means of the two regions, but rectangular wave vibration may also be used.

在本發明，作為驅動手段，取代壓電元件，可以適用磁致伸縮體。 In the present invention, instead of piezoelectric elements, magnetostrictors can be applied as driving means.

更進一步，在上述實施方式經由循環方式使行進波發生，但也可以用不是循環方式的方式(分別對搬運面的兩端改變相位差而進行激振之兩端激振方式等)使行進波發生。 Furthermore, in the above-mentioned embodiment, the traveling wave is generated through a cyclic method, but it is also possible to use a method other than the cyclic method (a two-end excitation method in which the two ends of the conveying surface are separately excited by changing the phase difference). occur.

作為工件，係可以舉例例如電子零件等的微小零件，但也可以是電子零件以外的物品。 As the workpiece, for example, a minute part such as an electronic part can be used, but it may be an article other than an electronic part.

其他，也就有關各部之具體的構成並不限於上述實施方式，可以在不逸脫本發明的主旨的範圍下做種種變形。 In addition, the specific configuration of each part is not limited to the above-mentioned embodiment, and various modifications can be made without departing from the scope of the present invention.

1:搬運部 1: Handling Department

2:相交流訊號發訊器 2: Phase AC signal transmitter

4:驅動手段 4: Driving means

6:波形選擇手段 6: Waveform selection method

7:電性的相位差調整手段 7: Electrical phase difference adjustment method

8:激振頻率調整手段 8: Excitation frequency adjustment means

11:板彈性體 11: Plate elastomer

13:搬運軌 13: Transport rail

41:壓電元件 41: Piezoelectric element

51:第1放大器 51: The first amplifier

52:第2放大器 52: 2nd amplifier

91:第1振幅調整手段 91: The first amplitude adjustment method

92:第2振幅調整手段 92: The second amplitude adjustment method

L:長軸 L: long axis

LF:線型供料器 LF: Linear feeder

Claims (5)

一種工件搬運裝置，係具備使以相同頻率具有空間上的相位差之複數個駐波產生在搬運面之複數個驅動手段，把具有時間上的相位差之驅動訊號給予到這些複數個驅動手段，來使行進波發生在前述搬運面而搬運工件；其特徵為具備：搬運部，係具有前述搬運面，相對於任意的軸具有非對稱的形狀；機械的相位差取得手段，係取得起因於與前述搬運部所具有之各個相異的固有頻率對應之2個振動模式的固有頻率的差所致之機械的相位差，作為包含到前述時間上的相位差之要件；以及電性的相位差調整手段，係調整對前述複數個驅動手段之前述驅動訊號的時間上的相位差，相對於前述機械的相位差來賦予；前述機械的相位差，乃是從前述搬運部的非對稱的形狀派生的相位差。 A workpiece conveying device is provided with a plurality of driving means for generating a plurality of standing waves with a spatial phase difference at the same frequency on a conveying surface, and a driving signal with a temporal phase difference is given to these plural driving means, To cause the traveling wave to be generated on the conveying surface to convey the workpiece; it is characterized by: a conveying section with the conveying surface and an asymmetrical shape with respect to an arbitrary axis; a mechanical phase difference acquisition means that is caused by and The mechanical phase difference caused by the difference in the natural frequencies of the two vibration modes corresponding to the different natural frequencies of the aforementioned conveying unit is included as a requirement for the phase difference in the aforementioned time; and the electrical phase difference adjustment The means is to adjust the temporal phase difference of the driving signals of the plurality of driving means to impart relative to the mechanical phase difference; the mechanical phase difference is derived from the asymmetrical shape of the conveying part Phase difference. 如請求項第1項的工件搬運裝置，其中，前述機械的相位差取得手段，乃是取得起因於前述驅動訊號的激振頻率所致之機械的相位差者；前述驅動手段中，把前述激振頻率，設定在前述2個振動模式中其中一方的振動模式的固有頻率與另一方的振 動模式的固有頻率之間。 Such as the workpiece conveying device of claim 1, wherein the aforementioned mechanical phase difference obtaining means is to obtain the mechanical phase difference caused by the excitation frequency of the aforementioned driving signal; in the aforementioned driving means, the aforementioned excitation The vibration frequency is set to the natural frequency of one of the two vibration modes and the other vibration mode. Between the natural frequencies of the dynamic mode. 如請求項第1或是2項的工件搬運裝置，其中，前述機械的相位差取得手段，乃是取得起因於前述搬運部的衰減特性所致之機械的相位差者。 The workpiece conveying device according to claim 1 or 2, wherein the mechanical phase difference obtaining means is one that obtains the mechanical phase difference caused by the attenuation characteristic of the conveying part. 如請求項第1或是2項的工件搬運裝置，其中，更具備振幅調整手段，其係調整成全部的前述駐波的振幅為相等。 For example, the workpiece conveying device of claim 1 or 2 further includes an amplitude adjustment means, which is adjusted so that the amplitudes of all the aforementioned standing waves are equal. 如請求項第1或是2項的工件搬運裝置，其中，前述驅動手段所致之驅動訊號，乃是把超音波範圍的頻率作為激振頻率者。 Such as the workpiece conveying device of claim 1 or 2, wherein the driving signal caused by the aforementioned driving means uses the frequency in the ultrasonic range as the excitation frequency.
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