TW202421550A - Chute and vibration conveying apparatus - Google Patents

Abstract

A chute and a vibration conveying apparatus that can prevent and suppress fluctuations caused by amplitude in units of parts of a conveying surface, prevent and suppress stagnation and posture disorder of workpieces that have reached a transfer portion to the next process equipment, and can achieve quantitative supply of workpieces while preventing and suppressing posture changes of the workpieces when transferring to the workpiece transfer surface of the next process equipment. The chute includes: a conveying path having a conveying surface; and a conveying part that transmits vibration generated by elastic deformation to the conveying surface. The vibration mode that elastically deforms the conveying part by the driving part is an elliptical vibration combining a horizontal vibration mode and a vertical vibration mode. The entire conveying surface is located in the antinode of the horizontal vibration mode, and the same elliptical vibration is generated on the entire conveying surface.

Description

滑槽、振動輸送裝置Chute, vibrating conveyor

本發明涉及能夠應用於通過振動來輸送工件的裝置（零件供料器）的滑槽以及振動輸送裝置。The present invention relates to a chute that can be applied to a device (parts feeder) for conveying workpieces by vibration and a vibration conveying device.

作為一邊通過振動輸送電子晶片部件等小型的工件一邊使其排列並供給到下一工序的振動輸送裝置（零件供料器），已知有包括沿著呈直線狀延伸的輸送路輸送工件的線性供料器和與線性供料器的上游側連接的振動盤供料器的裝置。在這樣的零件供料器中，採用從線性供料器的振動的輸送路（滑槽）的前端排出工件並供給到例如定速旋轉的圓板台上的結構，大多與對供給到圓板台上的工件實施外觀檢查等檢查、處理的外觀檢查裝置組合使用。為了能夠適當地進行外觀檢查等檢查、處理，優選從滑槽的前端排出的工件以等間距排列在圓板台上。As a vibrating conveying device (parts feeder) that conveys small workpieces such as electronic chip components by vibration while arranging and supplying them to the next process, there is known a device including a linear feeder that conveys the workpieces along a conveying path extending in a straight line and a vibrating plate feeder connected to the upstream side of the linear feeder. In such a parts feeder, a structure is adopted in which the workpieces are discharged from the front end of the vibrating conveying path (chute) of the linear feeder and supplied to, for example, a circular plate table that rotates at a constant speed. Most of them are used in combination with an appearance inspection device that performs inspections and processes such as appearance inspections on the workpieces supplied to the circular plate table. In order to be able to properly perform inspections and processes such as appearance inspections, it is preferred that the workpieces discharged from the front end of the chute be arranged on the circular plate table at equal intervals.

但是，在通常的線性供料器中，由於滑槽前端的位置因振動而時時刻刻變動，因此根據工件被排出的時刻，向圓板台的轉接位置變動，工件彼此的間隔容易產生偏差。因此，難以將排出的工件等間距地排列在圓板台上。However, in a conventional linear feeder, the position of the front end of the chute changes moment by moment due to vibration, so the transition position to the circular plate table changes according to the time when the workpiece is discharged, and the intervals between the workpieces are easily deviated. Therefore, it is difficult to arrange the discharged workpieces on the circular plate table at equal intervals.

為了解決這樣的問題，在日本特開2011-133458號公報（專利文獻1）中公開了一種工件外觀檢查裝置，在線性供料器與旋轉自如的圓形輸送台之間配置有以無振動狀態移送工件的無振動部。具體而言，公開了在朝向輸送台具有微小的傾斜而下降的線性供料器的下游端連接有具有與線性供料器同等的傾斜且不振動的無振動部的結構。如果是在這樣的線性供料器的下游端與輸送台之間設置有不振動的無振動部的結構，則無振動部上的工件被後續的工件推壓而前進，朝向輸送台一點一點地下降，若到達無振動部的下游端，則被後續的工件推壓而移載到輸送台上。In order to solve such a problem, a workpiece appearance inspection device is disclosed in Japanese Patent Gazette No. 2011-133458 (Patent Document 1), in which a vibration-free portion for transferring workpieces in a vibration-free state is arranged between a linear feeder and a rotatable circular conveyor table. Specifically, a structure is disclosed in which a vibration-free portion having the same inclination as the linear feeder and not vibrating is connected to the downstream end of a linear feeder that descends with a slight inclination toward the conveyor table. If a structure in which a vibration-free portion that does not vibrate is provided between the downstream end of such a linear feeder and the conveyor table, the workpiece on the vibration-free portion is pushed forward by the subsequent workpiece, and descends little by little toward the conveyor table. When it reaches the downstream end of the vibration-free portion, it is pushed by the subsequent workpiece and transferred to the conveyor table.

另外，在本申請人的專利申請公開公報，日本特開2021-195202號公報 （專利文獻2）中，公開了利用超聲波振動來輸送工件的滑槽。通過利用超聲波振動，能夠在降低工件與滑槽的輸送面的摩擦的同時防止、抑制在輸送面的部位單位產生振幅差的情況，並且降低輸送面與下一工序設備的工件移載面的落差，在向下一工序設備的工件移載面轉接時不易產生工件的姿勢變換，在該狀況下能夠實現工件的定量供給。In addition, in the patent application publication of the present applicant, Japanese Patent Publication No. 2021-195202 (Patent Document 2), a chute for conveying workpieces using ultrasonic vibration is disclosed. By using ultrasonic vibration, it is possible to reduce the friction between the workpiece and the conveying surface of the chute while preventing and suppressing the amplitude difference in the unit of the conveying surface, and reduce the height difference between the conveying surface and the workpiece transfer surface of the next process equipment, so that the posture change of the workpiece is not easy to occur when transferring to the workpiece transfer surface of the next process equipment, and quantitative supply of the workpiece can be achieved under this condition.

然而，如果是在無振動的輸送面上使工件滑動的結構，則工件因與輸送面的摩擦力而在工件輸送路上停滯，或者無法承受後續的工件的按壓力的工件在工件輸送路的下游端停止，可能引起工件堵塞或工件的姿勢的紊亂。這樣的問題即使是與以無振動使工件滑動的方式相比能夠降低摩擦的超聲波振動，也同樣有產生的可能性，若工件的輸送所需的推進力不充分，則例如在將工件輸送速度設定得較快而工件供給量變多的情況下，在轉接滑槽中工件減速而容易產生由工件堵塞、按壓壓力引起的姿勢的紊亂。However, if the structure is such that the workpiece slides on a non-vibration conveying surface, the workpiece may stop on the workpiece conveying path due to the friction between the workpiece and the conveying surface, or the workpiece may stop at the downstream end of the workpiece conveying path because it cannot withstand the pressure of the subsequent workpiece. This may cause workpiece blockage or disorder of the workpiece's posture. Such problems may also occur even with ultrasonic vibration, which can reduce friction compared to the method of sliding the workpiece without vibration. If the thrust required for conveying the workpiece is insufficient, for example, when the workpiece conveying speed is set faster and the workpiece supply amount increases, the workpiece decelerates in the transfer chute, which may easily cause workpiece blockage and disorder of the posture caused by the pressure.

另外，作為利用超聲波振動進行工件輸送的方法，還提出了利用行波的部件輸送裝置。但是，為了生成行波，需要在輸送部設置行波循環的路徑，行波產生時特有的起伏（凹凸）的變化在輸送面的部位單位不同，受到這樣的制約，因此難以直接向下一工序供給工件。In addition, as a method of transporting workpieces using ultrasonic vibration, a component transport device using traveling waves has been proposed. However, in order to generate traveling waves, a path for the traveling waves to circulate must be set up in the transport section. The changes in the undulations (concavities and convexities) that are unique to the generation of traveling waves vary in different locations on the transport surface. This makes it difficult to directly supply workpieces to the next process.

本發明是著眼於這樣的點而完成的，主要目的在於提供一種滑槽以及包括滑槽的振動輸送裝置，該滑槽能夠防止、抑制輸送面的部位單位由振幅引起的起伏變化，並且即使在將工件輸送速度設定得較快的情況下，也能夠防止、抑制到達向下一工序設備的轉接部分的工件在該部分停滯、姿勢紊亂的情況的發生而實現工件的定量供給。The present invention is completed with an eye on such points, and its main purpose is to provide a chute and a vibrating conveying device including the chute, wherein the chute can prevent and suppress fluctuations in the unit position of the conveying surface caused by the amplitude, and even when the workpiece conveying speed is set faster, it can prevent and suppress the workpiece reaching the transfer part of the next process equipment from stagnating in the part and having a disordered posture, thereby realizing quantitative supply of the workpiece.

另外，本發明人為了實現與以無振動使工件滑動的方式相比能夠降低摩擦的振動模式而反覆進行了深入研究，結果發現，利用具有沿與工件輸送方向平行的方向撓曲的振動即水平振動模式的振動模式來輸送輸送面上的工件的結構是有利的。In addition, the inventors of the present invention have repeatedly conducted in-depth research to achieve a vibration mode that can reduce friction compared to a method of sliding the workpiece without vibration. As a result, it was found that it is advantageous to use a structure that transports the workpiece on the conveying surface using a vibration mode that has vibrations that are bent in a direction parallel to the workpiece conveying direction, that is, a horizontal vibration mode.

然而，若在具有水平振動模式的振動模式下實施工件輸送處理，則不僅具有輸送面的輸送路向與工件輸送方向平行的方向撓曲，還產生輸送路向斜向傾斜的方向的位移（向垂直方向撓曲的振動），這樣的向垂直方向的撓曲現象有時會妨礙順暢的工件輸送處理。However, if the workpiece conveying process is carried out in a vibration mode having a horizontal vibration mode, not only will the conveying path of the conveying surface bend in a direction parallel to the workpiece conveying direction, but displacement in a direction oblique to the conveying path (vibration with bending in the vertical direction) will also occur. Such bending in the vertical direction may sometimes hinder smooth workpiece conveying process.

本發明的主要目的在於解決在這樣的與工件輸送相關的開發過程中出現的新的問題，提供能夠實現到達向下一工序設備的轉接部分的工件的定量供給的滑槽以及包括滑槽的振動輸送裝置。The main purpose of the present invention is to solve new problems arising in the development process related to workpiece conveying, and to provide a chute capable of realizing quantitative supply of workpieces to the transfer part of the next process equipment and a vibrating conveying device including the chute.

即，本發明涉及一種能夠一邊使作為輸送對象物的工件沿著輸送面朝向輸送方向下游端（終端）移動一邊向預定的下一工序設備的工件移載面輸送的滑槽。That is, the present invention relates to a chute that can transport a workpiece as a transport object toward a predetermined workpiece transfer surface of a next process device while moving the workpiece along a transport surface toward a downstream end (terminal end) in the transport direction.

本發明的一個實施方式所涉及的滑槽的特徵在於，包括：輸送路，其在向上表面具有輸送面；輸送部，其配置於與輸送路相鄰的位置，且將由彈性變形產生的振動向輸送面傳遞；以及驅動部，其使輸送部彈性變形，通過驅動部使輸送部彈性變形的狀態即振動模式是合成了水平振動模式和垂直振動模式合成的橢圓振動，該水平振動模式是在與輸送路中的工件的輸送方向（以下，稱為“工件輸送方向”）平行的方向上撓曲的振動，該垂直振動模式是與輸送面垂直的正交方向的振動，在該振動模式中，構成為輸送面整體至少相當於水平振動模式的波腹的位置或其附近位置，從而在輸送面整體生成相同的橢圓振動。在此，振動的波腹是振幅最大且位移最搖擺的點。另外，本發明的一個實施方式中的水平振動模式只要是至少滿足振動方向（撓曲的方向）是與工件輸送方向平行的方向這樣的條件的振動模式即可，另一方面，本發明的一個實施方式中的垂直振動模式只要是至少滿足振動方向（撓曲的方向）是具有鉛垂方向的成分的方向（與輸送面垂直的正交方向）這樣的條件的振動模式即可。另外，作為本發明的一個實施方式中的工件，例如能夠舉出電子部件等微小部件，但也可以是電子部件以外的物品。The slideway involved in one embodiment of the present invention is characterized in that it includes: a conveying path, which has a conveying surface on the upward surface; a conveying part, which is arranged at a position adjacent to the conveying path and transmits the vibration generated by elastic deformation to the conveying surface; and a driving part, which elastically deforms the conveying part, and the state in which the conveying part is elastically deformed by the driving part, that is, the vibration mode is an elliptical vibration synthesized by a horizontal vibration mode and a vertical vibration mode. The horizontal vibration mode is a vibration that is bent in a direction parallel to the conveying direction of the workpiece in the conveying path (hereinafter referred to as the "workpiece conveying direction"), and the vertical vibration mode is a vibration in an orthogonal direction perpendicular to the conveying surface. In this vibration mode, the conveying surface as a whole is configured to be at least equivalent to the position of the antinode of the horizontal vibration mode or its vicinity, thereby generating the same elliptical vibration on the conveying surface as a whole. Here, the antinode of vibration is the point where the amplitude is the largest and the displacement is the most volatile. In addition, the horizontal vibration mode in one embodiment of the present invention can be a vibration mode that at least satisfies the condition that the vibration direction (direction of deflection) is parallel to the workpiece conveying direction, and on the other hand, the vertical vibration mode in one embodiment of the present invention can be a vibration mode that at least satisfies the condition that the vibration direction (direction of deflection) is a direction having a component in the vertical direction (orthogonal direction perpendicular to the conveying surface). In addition, as a workpiece in one embodiment of the present invention, for example, micro components such as electronic components can be cited, but it can also be an object other than electronic components.

根據這樣的本發明的一個實施方式的滑槽，振動馬達是合成了水平振動模式和垂直振動模式的橢圓振動，通過構成為在通過驅動部使輸送部彈性變形的振動模式下輸送面整體位於相當於水平振動模式的波腹的位置（振動的波腹部分）或其附近部分，從而在輸送面整體生成相同的橢圓振動，因此能夠得到在輸送面整體沒有振動模式的波節（振幅最小的點）的相同的橢圓振動狀態。而且，通過使輸送面進行橢圓振動，在輸送面與工件之間產生摩擦力，該摩擦力能夠作為推進力而發揮作用來輸送工件，通過輸送面整體無波節地在相同的方向上進行橢圓振動，能夠在輸送面整個區域得到推進力，能夠避免在該滑槽的輸送面上工件彼此堵塞、在輸送方向上相對地被上游側的工件按壓引起的姿勢的紊亂（由按壓壓力引起的姿勢的紊亂）的情況。此外，根據本發明的一實施方式的滑槽，由於幾乎沒有從輸送面的終端（工件輸送方向下游端）向預定的下一工序設備的工件移載面排出工件的位置（工件排出位置）的變動，因此能夠以等間距將工件向下一工序設備的工件移載面供給。另外，根據本發明的一實施方式的滑槽，振動振幅非常小，能夠使與下一工序設備之間的間隙極小，因此轉接時的工件的姿勢穩定，並且在向下一工序設備的連接、位置調整中，幾乎不需要考慮振動振幅，調整變得容易。這些優點即使將工件輸送速度設定為高速也能夠得到，通過應用本發明的一個實施方式的滑槽，也有助於每單位時間的工件輸送量的提高。According to the slideway of one embodiment of the present invention, the vibration motor is an elliptical vibration synthesized from the horizontal vibration mode and the vertical vibration mode, and the entire conveying surface is located at a position corresponding to the antinode of the horizontal vibration mode (antinode portion of the vibration) or its vicinity in the vibration mode in which the conveying portion is elastically deformed by the driving portion, thereby generating the same elliptical vibration on the entire conveying surface, thereby being able to obtain the same elliptical vibration state in which there are no nodes (points with the smallest amplitude) of the vibration mode on the entire conveying surface. Moreover, by causing the conveying surface to vibrate elliptically, friction is generated between the conveying surface and the workpiece, and this friction can act as a propulsion force to convey the workpiece. By causing the conveying surface to vibrate elliptically in the same direction without any nodes as a whole, propulsion can be obtained in the entire area of the conveying surface, and it is possible to avoid the workpieces on the conveying surface of the slide being blocked by each other and the workpiece being pressed by the upstream side relatively in the conveying direction, causing posture disturbance (posture disturbance caused by pressing pressure). In addition, according to the chute of one embodiment of the present invention, since there is almost no change in the position (workpiece discharge position) of discharging the workpiece from the end of the conveying surface (downstream end in the workpiece conveying direction) to the predetermined workpiece transfer surface of the next process equipment, the workpiece can be supplied to the workpiece transfer surface of the next process equipment at equal intervals. In addition, according to the chute of one embodiment of the present invention, the vibration amplitude is very small, and the gap with the next process equipment can be made extremely small, so the posture of the workpiece during the transfer is stable, and in the connection and position adjustment to the next process equipment, there is almost no need to consider the vibration amplitude, and the adjustment becomes easy. These advantages can be obtained even if the workpiece conveying speed is set to a high speed. By applying the chute of one embodiment of the present invention, it also helps to increase the workpiece conveying amount per unit time.

另外，本發明的一個實施方式的振動輸送裝置的特徵在於，能夠一邊通過振動使作為輸送對象物的工件朝向主輸送路的終端移動一邊向輸送方向下游側輸送，在與主輸送路的終端相鄰的位置配置有具有上述結構的滑槽。根據這樣的本發明的一個實施方式所涉及的振動輸送裝置，能夠得到上述的滑槽所起到的作用效果，整體相同地進行橢圓振動的輸送面與工件之間產生的摩擦力能夠作為推進力而發揮作用來輸送工件，能夠在不產生工件堵塞或按壓力引起的姿勢的紊亂的狀態下從滑槽的輸送面的終端朝向下一工序設備的工件移載面恒定地供給工件。In addition, a vibration conveying device of one embodiment of the present invention is characterized in that it can transport a workpiece as a transport object toward the terminal end of the main transport path by vibration while transporting it downstream in the transport direction, and a chute having the above-mentioned structure is arranged at a position adjacent to the terminal end of the main transport path. According to the vibration conveying device involved in such an embodiment of the present invention, the effect of the above-mentioned chute can be obtained, and the friction force generated between the transport surface that vibrates elliptically in the same manner as a whole and the workpiece can function as a thrust force to transport the workpiece, and the workpiece can be constantly supplied from the terminal end of the transport surface of the chute toward the workpiece transfer surface of the next process equipment without causing workpiece blockage or disorder of posture caused by pressure.

本發明的另一實施方式的滑槽的特徵在於，包括：輸送路，其具有輸送面；輸送部，其將由彈性變形產生的振動傳遞至輸送面；以及驅動部，其使輸送部彈性變形，作為輸送部，應用具有配置於與輸送路相鄰的位置的第一振動部（主振動部）和以相對於第一振動部中的與工件的輸送方向（以下，稱為“工件輸送方向”）正交的方向這2個面分別向法線方向突出的姿勢配置的能夠彈性變形的第二振動部（副振動部）的滑槽，具有通過驅動部使輸送部彈性變形的狀態即振動模式至少具有作為在與工件輸送方向平行的方向上撓曲的振動的水平振動模式，在該振動模式下，第一振動部和第二振動部相互以反相位振動。在此，本發明的其他實施方式中的振動模式只要是至少包括滿足振動方向（撓曲的方向）是與工件輸送方向平行的方向這樣的條件的水平振動模式的振動模式即可。另外，作為本發明的其他實施方式中的工件，例如能夠舉出電子部件等微小部件，但也可以是電子部件以外的物品。The chute of another embodiment of the present invention is characterized in that it includes: a conveying path having a conveying surface; a conveying part that transmits vibration generated by elastic deformation to the conveying surface; and a driving part that elastically deforms the conveying part, and as the conveying part, a first vibrating part (main vibrating part) arranged at a position adjacent to the conveying path and a main vibrating part arranged in a direction opposite to the conveying direction of the workpiece (hereinafter referred to as "workpiece"). The guide groove of the second vibrating part (sub-vibrating part) capable of elastic deformation is arranged in a posture that the two surfaces protrude in the normal direction respectively in the direction orthogonal to the "conveying direction"; the conveying part has a state in which the conveying part is elastically deformed by the driving part, that is, the vibration mode has at least a horizontal vibration mode as a vibration that is bent in a direction parallel to the workpiece conveying direction, and in this vibration mode, the first vibrating part and the second vibrating part vibrate in opposite phases to each other. Here, the vibration mode in other embodiments of the present invention only needs to be a vibration mode that at least includes a horizontal vibration mode that satisfies the condition that the vibration direction (bending direction) is a direction parallel to the workpiece conveying direction. In addition, as the workpiece in other embodiments of the present invention, for example, micro components such as electronic components can be lifted, but it can also be an object other than electronic components.

若是這樣的本發明的另一實施方式的滑槽，則即使振動馬達為僅水平振動模式的振動、或合成了水平振動模式與其他振動模式的振動、這些任意的振動，也能夠通過在振動模式中向與工件輸送方向平行的方向撓曲的振動而在輸送面與工件之間產生摩擦力，該摩擦力作為推進力發揮作用而輸送工件，能夠防止、抑制在該滑槽的輸送面上工件彼此堵塞、在輸送方向上相對地被上游側的工件按壓引起的姿勢的紊亂（由按壓壓力引起的姿勢的紊亂）的情況。此外，如果是本發明的其他實施方式所涉及的滑槽，則輸送部至少具有第一振動部（主振動部）和第二振動部（副振動部），在振動模式中，這些第一振動部和第二振動部相互以反相位振動，因此通過利用第二振動部（副振動部）的振動，抑制第一振動部（主振動部）向垂直方向的撓曲變形，第一振動部整體以同相振動。由此，在與第一振動部相鄰的輸送路中也產生向水平方向的相同的振動，能夠防止、抑制輸送路向傾斜的方向的位移。其結果，從輸送面的終端（工件輸送方向下游端）向預定的下一工序設備的工件移載面排出工件的位置（工件排出位置）的變動為零或大致無，能夠將工件等間距穩定地供給到下一工序設備的工件移載面。In the case of such a slideway in another embodiment of the present invention, even if the vibration motor is vibrating in only a horizontal vibration mode, or a vibration synthesized from a horizontal vibration mode and other vibration modes, or any of these vibrations, it is possible to generate friction between the conveying surface and the workpiece by vibrating in a direction parallel to the workpiece conveying direction in the vibration mode, and this friction force acts as a thrust force to convey the workpiece, thereby preventing and suppressing the workpieces from being blocked on the conveying surface of the slideway, or causing a posture disturbance (posture disturbance caused by the pressing pressure) caused by being pressed by the workpiece on the upstream side relatively in the conveying direction. In addition, if it is a chute involved in other embodiments of the present invention, the conveying part has at least a first vibrating part (main vibrating part) and a second vibrating part (secondary vibrating part). In the vibration mode, these first vibrating part and the second vibrating part vibrate in opposite phases to each other. Therefore, by utilizing the vibration of the second vibrating part (secondary vibrating part), the bending deformation of the first vibrating part (main vibrating part) in the vertical direction is suppressed, and the first vibrating part vibrates in the same phase as a whole. As a result, the same vibration in the horizontal direction is also generated in the conveying path adjacent to the first vibrating part, which can prevent and suppress the displacement of the conveying path in the tilting direction. As a result, the change of the position (workpiece discharge position) where the workpiece is discharged from the end of the conveying surface (downstream end in the workpiece conveying direction) to the predetermined workpiece transfer surface of the next process equipment is zero or substantially zero, and the workpieces can be stably supplied to the workpiece transfer surface of the next process equipment at equal intervals.

特別是，在採用了在本發明的其他實施方式的滑槽中在輸送部的重心或重心附近配置有第二振動部的結構的情況下，能夠在包含第一振動部和第二振動部的輸送部整體中平衡良好地抵消第一振動部向垂直方向的撓曲變形的影響。In particular, when a structure in which a second vibrating part is arranged at the center of gravity or near the center of gravity of the conveying part in a slide trough of other embodiments of the present invention is adopted, the influence of the bending deformation of the first vibrating part in the vertical direction can be offset in a well-balanced manner in the entire conveying part including the first vibrating part and the second vibrating part.

另外，本發明的其他實施方式的振動輸送裝置的特徵在於，能夠一邊通過振動使作為輸送對象物的工件朝向主輸送路的終端移動一邊向輸送方向下游側輸送，在與主輸送路的終端相鄰的位置配置有具有上述結構的滑槽。根據這樣的本發明的其他實施方式所涉及的振動輸送裝置，能夠得到上述的滑槽所起到的作用效果，抑制向垂直方向的撓曲振動而使整體相同地振動的輸送面與工件之間產生的摩擦力作為推進力發揮作用而輸送工件，能夠在不產生工件堵塞或按壓力引起的姿勢的紊亂的狀態下從滑槽的輸送面的終端朝向下一工序設備的工件移載面恒定地供給工件。In addition, the vibration conveying device of other embodiments of the present invention is characterized in that it can transport the workpiece as the transport object toward the terminal end of the main transport path by vibration while transporting it to the downstream side of the transport direction, and a chute having the above-mentioned structure is arranged at a position adjacent to the terminal end of the main transport path. According to the vibration conveying device involved in such other embodiments of the present invention, the effect of the above-mentioned chute can be obtained, and the friction force generated between the transport surface that vibrates in the same way as a whole and the workpiece can be used as a propulsion force to transport the workpiece by suppressing the bending vibration in the vertical direction, and the workpiece can be transported, and the workpiece can be constantly supplied from the terminal end of the transport surface of the chute toward the workpiece transfer surface of the next process equipment without causing workpiece blockage or disorder of posture caused by pressure.

本發明的效果如下。The effects of the present invention are as follows.

根據本發明，能夠提供一種滑槽以及包括滑槽的振動輸送裝置，其基於構成為在輸送面整體上相同地生成合成了水平振動模式和垂直振動模式的橢圓振動的嶄新的技術思想，來防止、抑制輸送面的部位單位由振幅引起的起伏變化，並且賦予基於在到達向下一工序設備的轉接部分的工件與輸送面之間產生的摩擦力的推進力，由此，即使在將工件輸送速度設定得較快的情況下，也能夠防止、抑制工件在該轉接部分停滯、姿勢紊亂的情況的發生，實現針對下一工序設備的工件的定量供給、高速供給。According to the present invention, a chute and a vibrating conveying device including the chute can be provided, which are based on a novel technical concept of generating an elliptical vibration that synthesizes a horizontal vibration mode and a vertical vibration mode in the same manner on the entire conveying surface, so as to prevent and suppress fluctuations in the conveying surface caused by amplitude in the unit position, and to impart a thrust force based on the friction force generated between the workpiece and the conveying surface at the transition portion reaching the next process equipment. Thus, even when the workpiece conveying speed is set faster, it is possible to prevent and suppress the workpiece from stagnating or becoming disordered in the transition portion, thereby achieving quantitative supply and high-speed supply of the workpiece to the next process equipment.

另外，根據本發明，能夠提供一種滑槽以及包括滑槽的振動輸送裝置，該滑槽構成為應用包含水平振動模式的振動作為振動模式，在該振動模式下使第一振動部和第二振動部相互以反相位振動，基於這樣的嶄新的技術思想，有效地消除第一振動部向垂直方向的撓曲變形，並且對到達向下一工序設備的轉接部分的工件賦予基於與輸送面之間產生的摩擦力的推進力，由此能夠防止、抑制工件在轉接部分停滯、姿勢紊亂的情況的發生，實現針對下一工序設備的工件的定量供給。In addition, according to the present invention, a chute and a vibrating conveying device including the chute can be provided, wherein the chute is configured to apply a vibration including a horizontal vibration mode as a vibration mode, and in this vibration mode, the first vibrating part and the second vibrating part vibrate in opposite phases to each other. Based on such a novel technical concept, the bending deformation of the first vibrating part in the vertical direction is effectively eliminated, and a propulsion force based on the friction generated between the conveying surface is given to the workpiece reaching the transition part of the next process equipment, thereby preventing and suppressing the workpiece from stagnating or becoming disordered in the transition part, thereby achieving quantitative supply of the workpiece to the next process equipment.

[第一實施方式][First implementation method]

以下，參照附圖對本發明的第一實施方式進行說明。Hereinafter, the first embodiment of the present invention will be described with reference to the accompanying drawings.

如圖1以及圖2所示，本第一實施方式的滑槽1應用於振動輸送裝置X，該振動輸送裝置X能夠一邊通過振動使作為輸送對象物的工件W朝向主輸送路（線性主輸送路L1）的終端L11移動一邊向輸送方向D1下游側輸送，能夠與主輸送路L1的終端L11連接。在圖1及圖2中，作為主輸送路L1的一例，示出了線性供料器L的線性輸送路L1，並且示出了在與線性主輸送路L1的終端L11相鄰的位置配置有第一實施方式的滑槽1的方式。As shown in Fig. 1 and Fig. 2, the chute 1 of the first embodiment is applied to a vibration conveying device X, which can convey a workpiece W as a conveying object toward the terminal L11 of the main conveying path (linear main conveying path L1) by vibration while conveying it to the downstream side of the conveying direction D1, and can be connected to the terminal L11 of the main conveying path L1. In Fig. 1 and Fig. 2, as an example of the main conveying path L1, the linear conveying path L1 of the linear feeder L is shown, and the chute 1 of the first embodiment is arranged at a position adjacent to the terminal L11 of the linear main conveying path L1.

如圖2所示，線性供料器L通過對具有作為直線狀的輸送路的線性主輸送路L1的線性輸送部L2施加振動，能夠沿著線性主輸送路L1向輸送方向下游側輸送工件W。在第一實施方式的線性供料器L中，對使線性輸送部L2振動而將線性主輸送路L1上的工件W向輸送方向下游側輸送的具體結構沒有特別限定，例如可以舉出如下結構：通過從加振源施加的激振力，使將連接有線性輸送部L2的可動部與預定的固定部相互連結的板簧（驅動用彈簧）直接或間接地起振，由此可動部及固定部向彼此相反的方向振動，由此與可動部連接的線性輸送部L2在長度方向上振動，將工件W沿著輸送方向向下游側輸送。另外，作為其他例子，也可以是利用在線性輸送部L2產生的行波沿著線性主輸送路L1輸送工件W的線性供料器L。As shown in FIG. 2 , the linear feeder L can convey the workpiece W toward the downstream side in the conveying direction along the linear main conveying path L1 by applying vibration to the linear conveying portion L2 having a linear main conveying path L1 as a straight conveying path. In the linear feeder L of the first embodiment, there is no particular limitation on the specific structure of vibrating the linear conveying section L2 to convey the workpiece W on the linear main conveying path L1 to the downstream side of the conveying direction. For example, the following structure can be cited: the plate spring (driving spring) connecting the movable part connected to the linear conveying section L2 and the predetermined fixed part is directly or indirectly vibrated by the exciting force applied from the vibration source, thereby the movable part and the fixed part vibrate in opposite directions to each other, thereby the linear conveying section L2 connected to the movable part vibrates in the longitudinal direction, and the workpiece W is conveyed to the downstream side along the conveying direction. In addition, as another example, it is also possible to be a linear feeder L that conveys the workpiece W along the linear main conveying path L1 by using the traveling wave generated in the linear conveying section L2.

線性主輸送路L1的始端和終端L11到達線性輸送部L2的外緣，設定為適當的截面形狀。線性主輸送路L1作為輸送工件W的輸送面（線性輸送面）發揮功能。另外，線性主輸送面的截面形狀能夠選擇向上コ字狀、U字狀、V字狀等適當的形狀。線性供料器L能夠使從線性主輸送路L1的始端輸送來的工件W在輸送中排列成一列並從線性主輸送路L1的終端L11向下一工序裝置供給。The starting end and the terminal end L11 of the linear main conveying path L1 reach the outer edge of the linear conveying section L2 and are set to an appropriate cross-sectional shape. The linear main conveying path L1 functions as a conveying surface (linear conveying surface) for conveying the workpiece W. In addition, the cross-sectional shape of the linear main conveying surface can be selected to be an appropriate shape such as an upward U-shape, a U-shape, a V-shape, etc. The linear feeder L can arrange the workpieces W conveyed from the starting end of the linear main conveying path L1 in a row during conveyance and supply them to the next process device from the terminal end L11 of the linear main conveying path L1.

在圖1中，例示了在線性輸送部L2的上游側具有振動盤供料器B的振動輸送裝置X。振動盤供料器B通過對內周面具有螺旋狀的輸送路B1（螺旋輸送路）的盤狀的輸送部B2（振動盤輸送部）施加振動，能夠沿著螺旋輸送路B1向輸送方向下游側輸送工件W。在振動盤供料器B中，使振動盤輸送部B2振動而將螺旋輸送路B1上的工件W向輸送方向下游側輸送的具體結構沒有特別限定，能夠適當採用基於上述線性供料器L的結構（使用板簧的結構、產生行波的結構等）。當對振動盤輸送部B2施加振動時，工件W在螺旋輸送路B1上爬坡，直接從螺旋輸送路B1的終端（出口部分）輸送到線性供料器L的線性主輸送路L1的始端。FIG. 1 illustrates a vibrating conveying device X having a vibrating plate feeder B on the upstream side of a linear conveying portion L2. The vibrating plate feeder B can convey the workpiece W along the spiral conveying path B1 to the downstream side of the conveying direction by applying vibration to a plate-shaped conveying portion B2 (vibrating plate conveying portion) having a spiral conveying path B1 (spiral conveying path) on the inner circumference. In the vibrating plate feeder B, the specific structure for vibrating the vibrating plate conveying portion B2 to convey the workpiece W on the spiral conveying path B1 to the downstream side of the conveying direction is not particularly limited, and the structure based on the above-mentioned linear feeder L (a structure using a leaf spring, a structure generating a traveling wave, etc.) can be appropriately adopted. When vibration is applied to the vibration plate conveyor B2, the workpiece W climbs the slope on the spiral conveyor path B1 and is directly conveyed from the terminal end (exit portion) of the spiral conveyor path B1 to the starting end of the linear main conveyor path L1 of the linear feeder L.

到達線性主輸送路L1的始端（上游端）的工件W朝向線性主輸送路L1的終端L11（下游端）輸送，直接乘上滑槽1，供給到下一工序設備Y的工件移載面Y1。在圖1和圖2中，示出了下一工序設備Y為旋轉台T的方式。旋轉台T的朝上面中的沿著外周緣附近規定的預定的環繞區域是工件移載面Y1。另外，旋轉台T構成例如檢查工件的外觀的外觀檢查裝置的一部分，在這樣的外觀檢查裝置中，通過在圓板狀的旋轉台T上以一定的姿勢等間距排列工件W，檢查效率提高。The workpiece W that reaches the starting end (upstream end) of the linear main conveying path L1 is conveyed toward the terminal end L11 (downstream end) of the linear main conveying path L1, directly rides on the chute 1, and is supplied to the workpiece transfer surface Y1 of the next process equipment Y. In Figures 1 and 2, the next process equipment Y is a turntable T. The predetermined surrounding area defined near the outer periphery on the upper surface of the turntable T is the workpiece transfer surface Y1. In addition, the turntable T constitutes a part of an appearance inspection device for inspecting the appearance of the workpiece, for example. In such an appearance inspection device, the inspection efficiency is improved by arranging the workpieces W at equal intervals in a certain posture on the circular plate-shaped turntable T.

滑槽1在將從線性供料器L轉乘的工件W輸送一定區間之後，向下一工序設備Y供給工件W。如圖3及圖4所示，滑槽1包括：輸送路（工件輸送路2），其在朝上的面具有輸送面（輸送面21）且下方空間敞開；輸送部3，其配置於與工件輸送路2相鄰的位置，且將因彈性變形而產生的振動傳遞至輸送面21；以及驅動部4，其對輸送部3進行激振而使其彈性變形。在此，圖3是滑槽1的整體外觀立體圖，在該圖（a）、（b）中觀察的方向不同。另外，圖4（a）是滑槽1的俯視圖，該圖（b）、（c）、（d）分別是該圖（a）的F1方向向視圖、F2方向向視圖、F3方向向視圖。After the chute 1 conveys the workpiece W transferred from the linear feeder L for a certain interval, it supplies the workpiece W to the next process equipment Y. As shown in Figures 3 and 4, the chute 1 includes: a conveying path (workpiece conveying path 2), which has a conveying surface (conveying surface 21) on the upward surface and an open space below; a conveying part 3, which is arranged at a position adjacent to the workpiece conveying path 2 and transmits the vibration generated by elastic deformation to the conveying surface 21; and a driving part 4, which excites the conveying part 3 to elastically deform it. Here, Figure 3 is a three-dimensional view of the overall appearance of the chute 1, and the viewing directions in Figures (a) and (b) are different. In addition, Figure 4 (a) is a top view of the chute 1, and Figures (b), (c), and (d) are views in the F1 direction, F2 direction, and F3 direction of Figure (a), respectively.

第一實施方式的滑槽1由以立起姿勢設置的能夠彈性變形的板體構成輸送部3。第一實施方式的滑槽1被支撐於支撐部5，該支撐部5以從輸送部3的高度方向H中央部沿輸送部3的厚度方向E延伸的姿勢配置於滑槽1的與形成有輸送路2的面34相反的一側的面33（參照圖3）。在第一實施方式中，構成為利用支撐部5支撐輸送部3中的沿著工件W的輸送方向D1分開預定距離的兩個部位。各支撐部5呈由剛性低的材料構成的棒狀，將一端安裝於輸送部3，將另一端安裝於共用的固定部6。通過在輸送部3與固定部6之間設置低剛性的支撐部5，從而不會對輸送部3的振動狀態產生不良影響。另外，在圖4中省略了支撐部5和固定部6。The chute 1 of the first embodiment is composed of a plate body that is elastically deformable and arranged in an upright position to form a conveying portion 3. The chute 1 of the first embodiment is supported by a support portion 5, which is arranged on a surface 33 of the chute 1 on the opposite side of the surface 34 on which the conveying path 2 is formed, in a posture extending from the center of the height direction H of the conveying portion 3 along the thickness direction E of the conveying portion 3 (refer to FIG. 3). In the first embodiment, the support portion 5 is used to support two portions of the conveying portion 3 separated by a predetermined distance along the conveying direction D1 of the workpiece W. Each support portion 5 is in the shape of a rod made of a material with low rigidity, one end of which is mounted on the conveying portion 3, and the other end of which is mounted on a common fixing portion 6. By providing the low-rigidity support portion 5 between the conveying portion 3 and the fixing portion 6, there is no adverse effect on the vibration state of the conveying portion 3. In addition, the support portion 5 and the fixing portion 6 are omitted in FIG.

在此，滑槽1中的工件W的輸送方向D1能夠確定為從輸送部3的背面31朝向前表面32的方向。另外，能夠將在平面中與滑槽或者輸送部3的前後方向Z正交的方向確定為“滑槽1或者輸送部3的厚度方向E”，能夠將與滑槽1的前後方向Z垂直的正交方向確定為“滑槽1或者輸送部3的高度方向H”。Here, the conveying direction D1 of the workpiece W in the chute 1 can be determined as the direction from the back surface 31 toward the front surface 32 of the conveying part 3. In addition, the direction orthogonal to the front-rear direction Z of the chute or conveying part 3 in the plane can be determined as the "thickness direction E of the chute 1 or conveying part 3", and the orthogonal direction perpendicular to the front-rear direction Z of the chute 1 can be determined as the "height direction H of the chute 1 or conveying part 3".

第一實施方式的滑槽1在輸送部3的兩個側面33、34（相對於輸送部3中的工件W的輸送方向D1在俯視下正交的兩個面）中的一個側面33設置有驅動部4。在第一實施方式中，如圖3以及圖4所示，應用壓電元件4a、4b作為驅動部4，通過黏貼處理等適當的處理或者固定機構將合計四個壓電元件4a、4b固定於輸送部3的一個側面33的高度方向H中央部周邊。具體而言，如圖3（b）及圖4（d）所示，在前後方向Z上夾著安裝支撐部5的區域（支撐部安裝區域）的位置設置後述的水平振動模式驅動用的壓電元件4a，在高度方向H上夾著支撐部安裝區域的位置設置後述的垂直振動模式驅動用的壓電元件4b。壓電元件4a、4b為呈矩形狀的薄板狀，以縱長的姿勢設置水平振動模式驅動用的壓電元件4a，以橫長的姿勢設置垂直振動模式用的壓電元件4b。The chute 1 of the first embodiment is provided with a driving portion 4 on one of the two side surfaces 33 and 34 of the conveying portion 3 (two surfaces orthogonal to the conveying direction D1 of the workpiece W in the conveying portion 3 in a plan view). In the first embodiment, as shown in FIG. 3 and FIG. 4 , piezoelectric elements 4a and 4b are used as the driving portion 4, and a total of four piezoelectric elements 4a and 4b are fixed to the periphery of the central portion in the height direction H of one side surface 33 of the conveying portion 3 by appropriate processing such as gluing processing or a fixing mechanism. Specifically, as shown in FIG. 3 (b) and FIG. 4 (d), a piezoelectric element 4a for driving a horizontal vibration mode described later is provided at a position sandwiching the region (support portion mounting region) where the support portion 5 is mounted in the front-rear direction Z, and a piezoelectric element 4b for driving a vertical vibration mode described later is provided at a position sandwiching the support portion mounting region in the height direction H. The piezoelectric elements 4a and 4b are in the form of rectangular thin plates, and the piezoelectric element 4a for driving a horizontal vibration mode is provided in a longitudinally long posture, and the piezoelectric element 4b for driving a vertical vibration mode is provided in a transversely long posture.

工件輸送路2在輸送部3的高度方向H中央部以向該輸送部3的厚度方向E（寬度方向E）突出的姿勢設置。在第一實施方式中，在輸送部3的高度方向H中央部以從輸送部3的一個側面34向側方突出的姿勢設置工件輸送路2。在工件輸送路2的朝上面形成有槽狀的輸送面21。輸送面21的槽形狀没有特别限定，在圖5等中，作為一個例子，示出了截面向上コ字狀的輸送面21。工件輸送路2的始端22及終端23分別到達工件輸送路2中的工件輸送方向D1上游側的外緣及工件輸送方向D1下游側的外緣。工件輸送路2的沿著前後方向Z的尺寸與輸送部3的沿著前後方向Z的尺寸相同。即，第一實施方式的滑槽1包括從輸送部3的高度方向H中央部向側方伸出的工件輸送路2。在第一實施方式中，一體地形成輸送部3和工件輸送路2。The workpiece conveying path 2 is provided at the central portion in the height direction H of the conveying portion 3 in a posture protruding in the thickness direction E (width direction E) of the conveying portion 3. In the first embodiment, the workpiece conveying path 2 is provided at the central portion in the height direction H of the conveying portion 3 in a posture protruding laterally from a side surface 34 of the conveying portion 3. A groove-shaped conveying surface 21 is formed on the upper surface of the workpiece conveying path 2. The groove shape of the conveying surface 21 is not particularly limited, and as an example, a conveying surface 21 with a U-shaped cross section facing upward is shown. The starting end 22 and the terminal end 23 of the workpiece conveying path 2 reach the outer edge of the upstream side of the workpiece conveying direction D1 and the outer edge of the downstream side of the workpiece conveying direction D1 in the workpiece conveying path 2, respectively. The dimension of the workpiece conveying path 2 along the front-rear direction Z is the same as the dimension of the conveying portion 3 along the front-rear direction Z. That is, the chute 1 of the first embodiment includes the workpiece conveying path 2 extending laterally from the center portion in the height direction H of the conveying portion 3. In the first embodiment, the conveying portion 3 and the workpiece conveying path 2 are integrally formed.

第一實施方式的滑槽1在工件輸送路2的朝下面未設置其他部件，因此工件輸送路2的下方空間成為自由的空間（參照圖3（a）、圖4（b）、（c））。在第一實施方式中，將工件輸送路2的朝下面中的工件輸送方向D1下游側部分設定為高度尺寸朝向工件輸送路2的終端23逐漸變小的錐面24（參照圖4（b））。The chute 1 of the first embodiment has no other components disposed on the lower side of the workpiece conveying path 2, so the space below the workpiece conveying path 2 becomes a free space (see FIG. 3 (a), FIG. 4 (b), (c)). In the first embodiment, the downstream side portion of the lower side of the workpiece conveying path 2 in the workpiece conveying direction D1 is set as a tapered surface 24 whose height dimension gradually decreases toward the terminal 23 of the workpiece conveying path 2 (see FIG. 4 (b)).

如圖1及圖2所示，將具有以上結構的滑槽1配置在與線性供料器L的終端L11相鄰的位置的振動輸送裝置X能夠在使工件輸送路2中的下游端側的朝下面（錐面24）接近作為下一工序設備Y的旋轉台T的工件移載面Y1的狀態下，將固定部5以適當的機構固定於與滑槽1分體的部件（省略圖示）的狀態設置。在該設置狀態下，使工件輸送路2中的設定於錐面24的下游端側的朝下面接近旋轉台T的工件移載面Y1，因此輸送面21成為從工件輸送方向D1的上游朝向下游逐漸向斜下方傾斜的下坡。重要的是，下坡的傾斜角度是工件W因重力而滑落的程度，且是不破壞工件W的姿勢的角度，在第一實施方式中，將輸送面21設定為5°至15°左右的下坡。As shown in Fig. 1 and Fig. 2, the vibrating conveying device X which arranges the chute 1 having the above structure at a position adjacent to the terminal L11 of the linear feeder L can be set in a state where the fixing part 5 is fixed to a component (not shown) separated from the chute 1 by an appropriate mechanism in a state where the downward direction (conical surface 24) of the downstream end side in the workpiece conveying path 2 is close to the workpiece transfer surface Y1 of the rotary table T as the next process equipment Y. In this setting state, the downward direction set on the downstream end side of the conical surface 24 in the workpiece conveying path 2 is close to the workpiece transfer surface Y1 of the rotary table T, so that the conveying surface 21 becomes a downward slope that gradually inclines obliquely downward from the upstream to the downstream in the workpiece conveying direction D1. It is important that the downhill inclination angle is an angle that allows the workpiece W to slide due to gravity and does not damage the posture of the workpiece W. In the first embodiment, the conveying surface 21 is set to a downhill slope of about 5° to 15°.

並且，第一實施方式所涉及的振動輸送裝置X能夠通過設置於線性供料器L與作為下一工序設備Y的旋轉台T之間的滑槽1，將從線性供料器L的線性主輸送路L1轉乘至輸送面21的工件W輸送到一定區間（輸送面21輸送工件W的輸送區間）後，向作為下一工序設備Y的旋轉台T供給工件W。在第一實施方式的振動輸送裝置X中，構成為通過驅動部4使輸送部3彈性變形的狀態即振動模式成為將圖5和圖6所示的水平振動模式與圖7和圖8所示的垂直振動模式合成後的橢圓振動。Furthermore, the vibration conveying device X involved in the first embodiment can convey the workpiece W transferred from the linear main conveying path L1 of the linear feeder L to the conveying surface 21 to a certain section (a conveying section where the conveying surface 21 conveys the workpiece W), through the chute 1 provided between the linear feeder L and the turntable T as the next process equipment Y, and then supply the workpiece W to the turntable T as the next process equipment Y. In the vibration conveying device X of the first embodiment, the state in which the conveying part 3 is elastically deformed by the driving part 4, that is, the vibration mode becomes an elliptical vibration synthesized by the horizontal vibration mode shown in Figures 5 and 6 and the vertical vibration mode shown in Figures 7 and 8.

如圖5所示，水平振動模式是沿著與輸送面21垂直的正交方向出現波腹和波節，並且在與工件輸送方向D1平行的方向Z上撓曲的振動。在第一實施方式中，若通過僅對設置於輸送部3的高度方向H中央部附近的壓電元件4a、4b中的、在前後方向Z上分離預定距離而配置的兩個壓電元件4a施加交流電壓來對輸送部3進行激振，則如圖6所示，構成為產生輸送部3整體向與工件輸送方向D1平行的方向撓曲的振動（水平振動）。在圖6中，用箭頭表示水平振動模式的振動方向（位移方向）。第一實施方式的振動輸送裝置X在出現在水平振動模式的多個波腹中的在高度方向H中央部出現的波腹的位置或其附近位置設置有工件輸送路2。As shown in FIG5 , the horizontal vibration mode is a vibration that has antinodes and nodes along the orthogonal direction perpendicular to the conveying surface 21 and is bent in the direction Z parallel to the workpiece conveying direction D1. In the first embodiment, if the conveying section 3 is excited by applying an AC voltage to only two piezoelectric elements 4a disposed at a predetermined distance in the front-rear direction Z among the piezoelectric elements 4a and 4b disposed near the center of the height direction H of the conveying section 3, as shown in FIG6 , a vibration (horizontal vibration) is generated in which the entire conveying section 3 is bent in the direction parallel to the workpiece conveying direction D1. In FIG6 , the vibration direction (displacement direction) of the horizontal vibration mode is indicated by an arrow. The vibration conveying device X of the first embodiment is provided with a workpiece conveying path 2 at the position of an antinode appearing in the center of the height direction H among a plurality of antinodes appearing in the horizontal vibration mode or at a position in the vicinity thereof.

如圖7和圖8所示，垂直振動模式是與工件輸送方向D1垂直的正交方向H的振動。在第一實施方式中，構成為，當通過僅對在輸送部3的高度方向H中央部附近設置的壓電元件4a、4b中的、在高度方向H上隔開預定距離而配置的兩個驅動部4b施加交流電壓而對輸送部3進行加振時，則沿著與輸送面21垂直的正交方向H（包含鉛直方向分量的方向）而出現波腹和波節，並且輸送部3整體在俯視觀察時產生向與工件輸送方向D1正交的方向E（與波腹和波節的分佈方向正交的方向E）撓曲的振動（垂直振動）。在圖7中，用箭頭表示垂直振動模式的振動方向（位移方向）。另外，圖8（a）與圖6同樣，是表示從正對形成輸送路2的面34的方向（圖4（a）的F1方向）觀察的垂直振動模式的圖，圖8（b）是表示從圖4（a）的F2方向觀察的垂直振動模式的圖。圖5至圖8以及接下來說明的圖9是通過解析動畫顯示振動模式的圖，為了易於掌握振動模式的振動狀況，將無振動狀態的滑槽作為比較對象而省略一部分而示出。As shown in FIG. 7 and FIG. 8 , the vertical vibration mode is a vibration in the orthogonal direction H perpendicular to the workpiece conveying direction D1. In the first embodiment, when the conveying section 3 is vibrated by applying an AC voltage only to the two driving sections 4b disposed at a predetermined distance in the height direction H among the piezoelectric elements 4a and 4b disposed near the center of the height direction H of the conveying section 3, antinodes and nodes appear along the orthogonal direction H perpendicular to the conveying surface 21 (a direction including a vertical component), and the conveying section 3 as a whole generates vibration (vertical vibration) that is bent in a direction E perpendicular to the workpiece conveying direction D1 (a direction E perpendicular to the distribution direction of the antinodes and nodes) when viewed from above. In FIG. 7 , the vibration direction (displacement direction) of the vertical vibration mode is indicated by an arrow. In addition, FIG8 (a) is a diagram showing the vertical vibration mode observed from the direction facing the surface 34 forming the conveying path 2 (the F1 direction of FIG4 (a)) as in FIG6, and FIG8 (b) is a diagram showing the vertical vibration mode observed from the F2 direction of FIG4 (a). FIG5 to FIG8 and FIG9 described next are diagrams showing the vibration mode through analytical animation, and in order to easily understand the vibration state of the vibration mode, the chute in a non-vibration state is omitted as a comparison object and shown.

第一實施方式的滑槽1通過以相同的頻率施加預定的相位差來激勵這樣的水平振動模式和垂直振動模式這兩個不同的振動模式，從而在輸送面21生成圖9所示的橢圓振動。圖9是示出按照（i）→（ii）→（iii）→（iv）→（i）…的順序反覆進行的橢圓振動的經時變化的圖。另外，壓電元件4a設置於輸送部3中的水平振動模式的波腹的位置，壓電元件4b設置於輸送部3中的垂直振動模式的波腹的位置，通過施加交流電壓來進行激振。並且壓電元件4a、4b的激振時的頻率設定為水平振動模式和垂直振動模式的固有頻率附近的頻率。第一實施方式的滑槽1在振動模式中，能夠使輸送面21在頻率20kHz以上的超聲波區域振動（駐波）。The chute 1 of the first embodiment excites two different vibration modes, namely the horizontal vibration mode and the vertical vibration mode, by applying a predetermined phase difference at the same frequency, thereby generating an elliptical vibration as shown in FIG9 on the conveying surface 21. FIG9 is a diagram showing the time-dependent change of the elliptical vibration that is repeated in the order of (i) → (ii) → (iii) → (iv) → (i) ... In addition, the piezoelectric element 4a is set at the position of the antinode of the horizontal vibration mode in the conveying section 3, and the piezoelectric element 4b is set at the position of the antinode of the vertical vibration mode in the conveying section 3, and excitation is performed by applying an alternating voltage. And the frequency of the excitation of the piezoelectric elements 4a and 4b is set to a frequency near the natural frequency of the horizontal vibration mode and the vertical vibration mode. The chute 1 of the first embodiment can make the conveying surface 21 vibrate (stationary wave) in the ultrasonic wave region with a frequency of 20 kHz or more in the vibration mode.

在第一實施方式的滑槽1中，通過驅動部4（壓電元件4a、4b）使輸送部3彈性變形的狀態即振動模式是合成了水平振動模式和垂直振動模式的橢圓振動，通過構成為在振動模式下整個輸送面21成為相當於水平振動模式的波腹的位置或其附近位置，如圖9和圖10所示，在整個輸送路2生成均勻的橢圓振動。其結果，在輸送路2的輸送面21整體也生成同樣的橢圓振動，輸送面21上的工件W如圖10所示，以預定的週期反覆與輸送面2接觸的狀態（該圖（ii））和相對於輸送面2分離的狀態（該圖（iii）、（iv）、（i）），沿著工件輸送方向D1輸送。即，在工件W與輸送面21接觸的時刻，在工件W與輸送面21之間產生摩擦力，該摩擦力作為推進力發揮作用，能夠將工件W向工件輸送方向D1輸送，能夠在輸送面21整個區域得到推進力。需要說明的是，在輸送路2的整個輸送面21生成同樣的橢圓振動是指，無論切取振動模式中的哪個時刻，各時刻的輸送面21上的任意的點（作為一個例子，圖10中的點P、Q）的相對位置關係是恒定的，例如在輸送面21上不會局部出現由振動引起的起伏。圖10的（i）、（ii）、（iii）、（iv）分別與圖9的（i）、（ii）、（iii）、（iv）對應。另外，圖9以及圖10的（i）、（ii）、（iii）、（iv）所示的橢圓和橢圓上的黑圓示意性地表示各圖是橢圓振動中的哪個時刻的振動狀態。另外，在圖10中，分別用虛線表示無振動狀態的輸送面21A。In the chute 1 of the first embodiment, the state in which the conveying portion 3 is elastically deformed by the driving portion 4 (piezoelectric elements 4a, 4b), that is, the vibration mode is an elliptical vibration synthesized from the horizontal vibration mode and the vertical vibration mode, and the entire conveying surface 21 is configured to be at a position corresponding to the antinode of the horizontal vibration mode or a position in the vicinity thereof in the vibration mode, so that uniform elliptical vibration is generated in the entire conveying path 2 as shown in Figures 9 and 10. As a result, the same elliptical vibration is also generated in the entire conveying surface 21 of the conveying path 2, and the workpiece W on the conveying surface 21 is repeatedly conveyed in the workpiece conveying direction D1 in a state of contact with the conveying surface 2 (Figure (ii)) and a state of separation from the conveying surface 2 (Figures (iii), (iv), (i)) at a predetermined cycle as shown in Figure 10. That is, when the workpiece W contacts the conveying surface 21, frictional force is generated between the workpiece W and the conveying surface 21, and the frictional force acts as a propulsion force, and the workpiece W can be transported in the workpiece transport direction D1, and the propulsion force can be obtained in the entire area of the conveying surface 21. It should be noted that generating the same elliptical vibration on the entire conveying surface 21 of the conveying path 2 means that no matter which moment in the cut vibration mode, the relative position relationship of any point on the conveying surface 21 at each moment (as an example, points P and Q in Figure 10) is constant, for example, there will be no undulation caused by vibration locally on the conveying surface 21. (i), (ii), (iii), and (iv) of Figure 10 correspond to (i), (ii), (iii), and (iv) of Figure 9, respectively. 9 and 10 (i), (ii), (iii), (iv) and the black circle on the ellipse schematically indicate the vibration state at which time of the ellipse vibration in each figure. In addition, in FIG10, the conveying surface 21A in the non-vibration state is indicated by a dotted line.

如上所述，第一實施方式的滑槽1的通過驅動部4（壓電元件4a、4b）使輸送部3彈性變形的狀態即振動模式是將水平振動模式和垂直振動模式合成而得到的橢圓振動，該水平振動模式是沿著與輸送面21垂直的正交方向H出現波腹和波節且在與輸送路2中的工件輸送方向D1平行的方向上撓曲的振動，該垂直振動模式是與輸送面21垂直的正交方向H的振動，通過構成為在振動模式中輸送面21整體至少成為與水平振動模式的波腹相當的位置或其附近位置，從而在整個輸送面21上生成均勻的橢圓振動，因此能夠在輸送面21上得到沒有波節的振動狀態。而且，在振動模式中，通過輸送面21進行一樣的橢圓振動，在輸送面21與工件W之間產生摩擦力，該摩擦力作為推進力發揮作用而能夠輸送工件W，在輸送面21整個區域得到推進力，即使在將工件輸送速度設定得較快的情況下，也能夠避免在輸送面21上工件W彼此堵塞、在工件輸送方向D1上相對地被上游側的工件W按壓引起的姿勢的紊亂（由按壓壓力引起的姿勢的紊亂）的情況。詳細而言，根據第一實施方式所涉及的滑槽1，與水平振動模式合成而生成橢圓振動的垂直振動模式的振動方向是與工件輸送方向D1正交且具有鉛垂成分的成分的方向，因此能夠得到如下作用：反覆進行鉛垂向下受到重力的工件W與在鉛垂方向上振動的輸送面21在鉛垂方向上接觸的狀態和分離的狀態，在工件W與輸送面21接觸時，工件被重力按壓於輸送面21，產生作為推進力的摩擦力。As described above, the state in which the conveying portion 3 is elastically deformed by the driving portion 4 (piezoelectric elements 4a, 4b) of the chute 1 of the first embodiment, that is, the vibration mode is an elliptical vibration obtained by synthesizing the horizontal vibration mode and the vertical vibration mode. The horizontal vibration mode is a vibration that has antinodes and nodes along the orthogonal direction H perpendicular to the conveying surface 21 and is bent in a direction parallel to the workpiece conveying direction D1 in the conveying path 2. The vertical vibration mode is a vibration in the orthogonal direction H perpendicular to the conveying surface 21. By configuring the conveying surface 21 as a whole to be at least at a position equivalent to the antinode of the horizontal vibration mode or at a position near it in the vibration mode, a uniform elliptical vibration is generated on the entire conveying surface 21, so that a vibration state without nodes can be obtained on the conveying surface 21. Moreover, in the vibration mode, the conveying surface 21 is subjected to the same elliptical vibration, and friction is generated between the conveying surface 21 and the workpiece W. This friction acts as a propulsion force to convey the workpiece W. The propulsion force is obtained in the entire area of the conveying surface 21. Even when the workpiece conveying speed is set faster, it is possible to avoid the workpieces W on the conveying surface 21 being blocked by each other and the workpieces W being pressed by the upstream workpiece W relatively in the workpiece conveying direction D1. Disturbance in posture (disturbance in posture caused by pressing pressure) can be avoided. In detail, according to the slide 1 involved in the first embodiment, the vibration direction of the vertical vibration mode that is synthesized with the horizontal vibration mode to generate an elliptical vibration is a direction that is orthogonal to the workpiece conveying direction D1 and has a lead-vertical component, so the following effect can be obtained: the workpiece W subjected to gravity in the lead-vertical direction is repeatedly in contact and separated from the conveying surface 21 vibrating in the lead-vertical direction. When the workpiece W contacts the conveying surface 21, the workpiece is pressed against the conveying surface 21 by gravity, generating a friction force serving as a thrust force.

即，根據第一實施方式的滑槽1，由於是通過橢圓振動使在輸送面21與工件W之間產生的摩擦力作為推進力發揮作用的結構，因此，即使是非常小的振動振幅，也能夠在輸送路2整體順利地輸送工件W，在進行向下一工序設備Y的連接、位置調整時，幾乎不需要考慮輸送路2的振動振幅，能夠容易地進行。另外，與輸送路2的下方空間為自由空間的情況相互作用，能夠使輸送路2與下一工序設備Y之間的間隙接近零，能夠實現從輸送面21的下游端23向下一工序設備Y的工件移載面Y1轉接時的工件W的姿勢穩定化。That is, according to the chute 1 of the first embodiment, since the friction force generated between the conveying surface 21 and the workpiece W is used as a propulsion force by elliptical vibration, the workpiece W can be smoothly conveyed in the conveying path 2 as a whole even with a very small vibration amplitude, and when connecting to the next process equipment Y or adjusting the position, it is almost unnecessary to consider the vibration amplitude of the conveying path 2, and the process can be easily performed. In addition, by interacting with the situation that the space below the conveying path 2 is a free space, the gap between the conveying path 2 and the next process equipment Y can be made close to zero, and the posture of the workpiece W when transferring from the downstream end 23 of the conveying surface 21 to the workpiece transfer surface Y1 of the next process equipment Y can be stabilized.

而且，根據第一實施方式的滑槽1，由於利用了超聲波振動，因此振動模式下的振幅極小，幾乎沒有從輸送面21的終端23（工件輸送方向D1下游端）向預定的下一工序設備Y的工件移載面Y1排出工件W的位置（工件排出位置）的變動，因此能夠得到能夠以等間距將工件W向下一工序設備Y的工件移載面Y1供給這樣的優點、不聽到振動聲、不會對作業環境帶來不良影響的優點。Moreover, according to the chute 1 of the first embodiment, since ultrasonic vibration is utilized, the amplitude in the vibration mode is extremely small, and there is almost no change in the position (workpiece discharge position) at which the workpiece W is discharged from the end 23 of the conveying surface 21 (the downstream end in the workpiece conveying direction D1) to the predetermined workpiece transfer surface Y1 of the next process equipment Y. Therefore, the advantages of being able to supply the workpiece W to the workpiece transfer surface Y1 of the next process equipment Y at equal intervals can be obtained, without hearing the vibration sound, and without having an adverse effect on the working environment.

特別是，根據第一實施方式的滑槽1，能夠分別獨立地設定水平振動模式的振動振幅和垂直振動模式的振動振幅，並且也能夠自由地設定兩振動模式間的相位差，因此能夠容易地進行工件W的輸送速度的調整。另外，根據第一實施方式的滑槽1，當使橢圓振動的旋轉方向反轉時，能夠將輸送面21上的工件W向相反方向輸送。In particular, according to the chute 1 of the first embodiment, the vibration amplitude of the horizontal vibration mode and the vibration amplitude of the vertical vibration mode can be set independently, and the phase difference between the two vibration modes can also be freely set, so it is possible to easily adjust the conveying speed of the workpiece W. In addition, according to the chute 1 of the first embodiment, when the rotation direction of the elliptical vibration is reversed, the workpiece W on the conveying surface 21 can be conveyed in the opposite direction.

此外，根據第一實施方式的滑槽1，由於將輸送面21設定為朝向工件輸送方向D1下游端逐漸向下傾斜的傾斜面，因此從線性供料器L轉移到工件輸送路2的輸送面21的工件W以滑落的方式被輸送，能夠實施更順暢的輸送處理。另外，在將輸送面21上的工件W的輸送速度設定為比線性供料器L的線性主輸送路L1中的工件W的輸送速度慢的情況下，能夠在輸送面21上在輸送方向D1上無間隙的狀態或大致無間隙的狀態下輸送工件W，能夠防止輸送方向D1上的工件W彼此的距離變大（工件W的分離）現象的發生，並且能夠增大每單位時間的工件輸送量，能夠實現更穩定的工件W的恒定供給處理。In addition, according to the chute 1 of the first embodiment, since the conveying surface 21 is set as an inclined surface that gradually slopes downward toward the downstream end of the workpiece conveying direction D1, the workpiece W transferred from the linear feeder L to the conveying surface 21 of the workpiece conveying path 2 is conveyed in a sliding manner, which can implement smoother conveying processing. In addition, when the conveying speed of the workpiece W on the conveying surface 21 is set to be slower than the conveying speed of the workpiece W in the linear main conveying path L1 of the linear feeder L, the workpiece W can be conveyed on the conveying surface 21 in the conveying direction D1 without a gap or in a substantially gapless state, and the distance between the workpieces W in the conveying direction D1 can be prevented from becoming larger (separation of the workpieces W), and the workpiece conveying amount per unit time can be increased, thereby achieving more stable constant supply processing of the workpiece W.

另外，根據具有這樣的滑槽1的第一實施方式的振動輸送裝置X，起到上述滑槽1起到的作用效果，能夠從輸送面21的終端23朝向下一工序設備Y的工件移載面Y1以等間距且相同的姿勢恒定地供給工件W，並且能夠防止、抑制在從輸送面21的終端23向下一工序設備Y的工件移載面Y1轉接時工件W發生姿勢變更的不良情況。In addition, according to the vibration conveying device X of the first embodiment having such a chute 1, the effect of the above-mentioned chute 1 is achieved, and the workpiece W can be constantly supplied from the end 23 of the conveying surface 21 toward the workpiece transfer surface Y1 of the next process equipment Y at equal intervals and in the same posture, and the workpiece W can be prevented and suppressed from undergoing an undesirable posture change when transferring from the end 23 of the conveying surface 21 to the workpiece transfer surface Y1 of the next process equipment Y.

在著眼於第一實施方式中的驅動部4、輸送部3以及輸送路2的關係的情況下，輸送部3能夠理解為與驅動部4（壓電元件4a、4b）接合且與壓電元件4a、4b的伸縮位移相應地彈性變形而振動的振動部，輸送路2能夠理解為具有配置於與振動部相鄰的位置且通過從振動部傳遞的振動而從始端到終端的整個面振動的作用面（相當於上述的輸送面21的面，後述的二次側部件接觸的面）的作用部。並且，通過壓電元件使振動部彈性變形的狀態即振動模式如上所述是將水平振動模式和垂直振動模式合成而得的橢圓振動，通過構成為在振動模式中作用面整體成為相當於振動模式的波腹的位置或其附近位置，從而在整個作用面生成均勻的橢圓振動。若將一體或一體地具有這種作用面的振動部作為線性致動器的一次側部件，則能夠構成配置為與一次側部件的作用區域（作用面）接觸且能夠在一次側部件的作用面的長度方向上相對移動的二次側部件（省略圖示）的線性致動器。根據這種線性致動器，通過作用面整體一樣地進行橢圓振動，在作用面與二次側部件之間產生摩擦力，該摩擦力作為推進力發揮作用而產生相對移動，而且，作用面整體沒有波節地向相同方向進行橢圓振動，從而在作用面整個區域得到推進力。另外，由於作用面以直線狀延伸，因此由與二次側部件之間的摩擦產生的負荷被分散，還具有難以磨耗的優點。第一實施方式的滑槽1是這樣的線性致動器的一個有效利用例。With attention paid to the relationship among the driving portion 4, the conveying portion 3 and the conveying path 2 in the first embodiment, the conveying portion 3 can be understood as a vibrating portion that is coupled to the driving portion 4 (piezoelectric elements 4a, 4b) and vibrates by elastic deformation corresponding to the expansion and contraction displacement of the piezoelectric elements 4a, 4b, and the conveying path 2 can be understood as an acting portion having an acting surface (a surface equivalent to the above-mentioned conveying surface 21, a surface contacted by the secondary side component described later) that is arranged at a position adjacent to the vibrating portion and whose entire surface vibrates from the starting end to the end due to the vibration transmitted from the vibrating portion. Furthermore, the state in which the vibration part is elastically deformed by the piezoelectric element, i.e., the vibration mode, is an elliptical vibration synthesized from the horizontal vibration mode and the vertical vibration mode as described above, and by configuring the entire action surface to be at a position corresponding to the antinode of the vibration mode or a position in the vicinity thereof in the vibration mode, uniform elliptical vibration is generated on the entire action surface. If the vibration part having such an action surface integrally or integrally is used as the primary side member of the linear actuator, a linear actuator can be configured to have a secondary side member (not shown) that is arranged to contact the action area (action surface) of the primary side member and can move relatively in the longitudinal direction of the action surface of the primary side member. According to this linear actuator, the entire action surface performs elliptical vibrations uniformly, and frictional force is generated between the action surface and the secondary side member. This frictional force acts as a propulsive force to generate relative movement. Moreover, the entire action surface performs elliptical vibrations in the same direction without any nodes, so that the propulsive force is obtained in the entire area of the action surface. In addition, since the action surface extends in a straight line, the load generated by the friction with the secondary side member is dispersed, and there is also an advantage that it is difficult to wear. The chute 1 of the first embodiment is an effective use example of such a linear actuator.

另外，本發明並不限定於上述的各實施方式。例如，在上述的實施方式中，例示了將滑槽的輸送面沿著工件輸送方向設定為下坡的方式，但也可以採用不傾斜的平坦的輸送面。另外，根據能夠對輸送面上的工件賦予充分的推進力的本發明，也能夠將輸送面沿著工件輸送方向設定為上坡。In addition, the present invention is not limited to the above-mentioned embodiments. For example, in the above-mentioned embodiments, the conveying surface of the chute is set to be downslope along the workpiece conveying direction, but a flat conveying surface without inclination may also be adopted. In addition, according to the present invention that can give sufficient thrust to the workpiece on the conveying surface, the conveying surface can also be set to be upslope along the workpiece conveying direction.

配置於與工件輸送路相鄰的位置的輸送部只要滿足將由彈性變形產生的振動傳遞至輸送面這樣的條件，則也可以與工件輸送路分體。即，本發明的滑槽包括具有輸送路和輸送部作為分體的結構、以及一體地具有輸送路和輸送部的結構這兩者。另外，輸送路和輸送部為一體的結構（將輸送部的一部分形成、加工為輸送路的結構）也包含在本發明中。The conveying part arranged at a position adjacent to the workpiece conveying path may be separate from the workpiece conveying path as long as the condition that the vibration generated by elastic deformation is transmitted to the conveying surface is satisfied. That is, the chute of the present invention includes both a structure having the conveying path and the conveying part as separate parts and a structure having the conveying path and the conveying part as an integral part. In addition, a structure in which the conveying path and the conveying part are an integral part (a structure in which a part of the conveying part is formed and processed into the conveying path) is also included in the present invention.

另外，在本發明中，能夠適當選擇、變更輸送面的截面槽形狀、沿著工件輸送方向的工件輸送路的長度。作為輸送面的截面形狀，可以舉出向上コ字狀、U字狀、V字狀等形狀。也可以構成為，包括具有與輸送面在預定方向上面對的限制壁的限制部，限制在輸送面上輸送的工件向從輸送面脫離的方向移動的動作。In addition, in the present invention, the cross-sectional groove shape of the conveying surface and the length of the workpiece conveying path along the workpiece conveying direction can be appropriately selected and changed. As the cross-sectional shape of the conveying surface, there can be an upward U-shaped, U-shaped, V-shaped, etc. It can also be configured to include a limiting portion having a limiting wall facing the conveying surface in a predetermined direction to limit the movement of the workpiece conveyed on the conveying surface in the direction of leaving the conveying surface.

在本發明中，作為驅動部，能夠代替壓電元件或者在其基礎上應用磁致伸縮元件、其他元件。另外，也能夠採用在沿厚度方向夾著輸送部的位置分別配置有驅動部的結構。各驅動部並不限定於配置於振動的波節或波節附近，根據振動模式，有時配置部位配置於振動的波腹或波腹附近。即，為了在振動模式下更高效地振動，優選在由彈性變形引起的變形大的位置配置驅動部（黏貼壓電元件）。In the present invention, as a driving part, a magnetostrictive element or other element can be used instead of a piezoelectric element or on the basis of the piezoelectric element. In addition, a structure in which driving parts are respectively arranged at positions sandwiching the conveying part in the thickness direction can also be adopted. Each driving part is not limited to being arranged at or near a node of vibration, and sometimes the arrangement position is arranged at or near an antinode of vibration according to the vibration mode. That is, in order to vibrate more efficiently in the vibration mode, it is preferred to arrange the driving part (pasted piezoelectric element) at a position where the deformation caused by elastic deformation is large.

另外，也可以將輸送路設置在輸送部的下端附近的水平振動模式的波腹。在該情況下，成為在比輸送路靠下方的空間不配置輸送部的結構，輸送路相對於下一工序設備的相對位置的設計自由度提高，能夠選擇能夠容易地向下一工序設備的工件移載面上供給工件的佈局。另外，將輸送路設置在輸送部的上端附近的水平振動模式的波腹的結構也包含在本發明中。In addition, the conveying path may be arranged at the antinode of the horizontal vibration mode near the lower end of the conveying section. In this case, the conveying section is not arranged in the space below the conveying path, the degree of freedom in designing the relative position of the conveying path with respect to the next process equipment is improved, and a layout that can easily supply the workpiece to the workpiece transfer surface of the next process equipment can be selected. In addition, the structure of setting the conveying path at the antinode of the horizontal vibration mode near the upper end of the conveying section is also included in the present invention.

作為垂直振動模式，也可以採用通過輸送部整體在高度方向（鉛垂方向）上進行伸縮運動的彈性變形而產生的縱向振動。As a vertical vibration mode, longitudinal vibration generated by elastic deformation of the entire conveyor unit in the height direction (vertical direction) can also be used.

另外，本發明的振動輸送裝置並不限定於包括振動盤供料器、線性供料器和滑槽的結構，也可以是在與振動盤供料器的主輸送路（螺旋輸送路）的終端相鄰的位置配置滑槽的結構、不具有振動盤供料器而在與線性供料器的主輸送路（線性主輸送路）的終端相鄰的位置配置滑槽的結構。另外，線性供料器也可以在線性輸送部的朝上表面形成有線性主輸送路和使從線性主輸送路排除的工件返回到上游側（例如振動盤供料器的貯存部）的返回軌道。In addition, the vibration conveying device of the present invention is not limited to a structure including a vibration plate feeder, a linear feeder and a chute, and may also be a structure in which a chute is arranged at a position adjacent to the terminal of the main conveying path (spiral conveying path) of the vibration plate feeder, or a structure in which a chute is arranged at a position adjacent to the terminal of the main conveying path (linear main conveying path) of the linear feeder without a vibration plate feeder. In addition, the linear feeder may also have a linear main conveying path and a return track formed on the upward surface of the linear conveying portion for returning the workpieces removed from the linear main conveying path to the upstream side (e.g., the storage portion of the vibration plate feeder).

而且，還能夠實現如下結構：在振動盤供料器與線性供料器之間設置本發明所涉及的滑槽，將從螺旋輸送路的終端到達工件輸送路的始端的工件輸送至工件輸送路的終端並換乘至線性供料器的線性主輸送路的始端。在該情況下，振動輸送裝置包括振動盤供料器和滑槽，能夠將本發明中的“下一工序設備的工件移載面”理解為線性主輸送路的始端。也可以是從料斗直接向滑槽供給工件的結構。Furthermore, the following structure can be realized: the chute involved in the present invention is provided between the vibrating plate feeder and the linear feeder, and the workpiece from the end of the spiral conveying path to the beginning of the workpiece conveying path is conveyed to the end of the workpiece conveying path and transferred to the beginning of the linear main conveying path of the linear feeder. In this case, the vibrating conveying device includes the vibrating plate feeder and the chute, and the "workpiece transfer surface of the next process equipment" in the present invention can be understood as the beginning of the linear main conveying path. It can also be a structure in which the workpiece is directly fed from the hopper to the chute.

也可以採用主輸送路和滑槽的輸送路的一部分彼此在高度方向上重疊的配置，使得滑槽的輸送路的始端附近區域位於與主輸送路的終端相鄰的位置且主輸送路的終端附近區域的下方，使工件從設定為下降梯度的主輸送路的終端通過自重下落到滑槽的輸送路的始端附近。在該情況下，輸送路的振幅的限制消失，能夠以高振幅振動，能夠增加工件供給量。Alternatively, the main conveyor path and a portion of the chute conveyor path may overlap each other in the height direction, so that the area near the beginning of the chute conveyor path is located adjacent to the end of the main conveyor path and below the area near the end of the main conveyor path, so that the workpiece falls from the end of the main conveyor path set as a descending gradient to the vicinity of the beginning of the chute conveyor path by its own weight. In this case, the amplitude of the conveyor path is no longer limited, and it can vibrate with a high amplitude, which can increase the amount of workpiece supply.

另外，本發明中的下一工序設備不限於外觀檢查裝置的旋轉台，只要是構成適當的檢查裝置或處理裝置的一部分且具有工件移載面的設備即可。In addition, the next process equipment in the present invention is not limited to the rotating table of the appearance inspection device, as long as it is a device that constitutes a part of an appropriate inspection device or processing device and has a workpiece transfer surface.

作為輸送對象物即工件的一例，可以舉出電子部件等微小零件，但工件也可以是電子部件以外的物品。As an example of the workpiece to be transported, micro parts such as electronic components can be cited, but the workpiece may be an object other than electronic components.

[第二實施方式][Second implementation method]

以下，參照附圖對本發明的第二實施方式進行說明。另外，在與該第二實施方式相關的說明書以及附圖中，對與上述的第一實施方式實質上相同的結構標注相同的附圖標記，從而省略重複的說明。Hereinafter, the second embodiment of the present invention will be described with reference to the accompanying drawings. In addition, in the specification and accompanying drawings related to the second embodiment, the same drawing reference numerals are used for the substantially same structures as those of the first embodiment, thereby omitting repeated descriptions.

如圖11和圖12所示，第二實施方式的滑槽1應用於振動輸送裝置X，該振動輸送裝置X能夠一邊通過振動使作為輸送對象物的工件W朝向主輸送路（線性主輸送路L1）的終端L11移動一邊向輸送方向D1下游側輸送，能夠與主輸送路L1的終端L11連接。在圖11及圖12中，作為主輸送路L1的一例，示出了線性供料器L的線性輸送路L1，並且示出了在與線性主輸送路L1的終端L11相鄰的位置配置有第二實施方式的滑槽1的方式。As shown in Fig. 11 and Fig. 12, the chute 1 of the second embodiment is applied to a vibration conveying device X, which can convey the workpiece W as a conveying object toward the terminal L11 of the main conveying path (linear main conveying path L1) by vibration while conveying it to the downstream side of the conveying direction D1, and can be connected to the terminal L11 of the main conveying path L1. In Fig. 11 and Fig. 12, as an example of the main conveying path L1, the linear conveying path L1 of the linear feeder L is shown, and the chute 1 of the second embodiment is arranged at a position adjacent to the terminal L11 of the linear main conveying path L1.

如圖12所示，線性供料器L通過對具有作為直線狀的輸送路的線性主輸送路L1的線性輸送部L2施加振動，能夠沿著線性主輸送路L1向輸送方向下游側輸送工件W。在第二實施方式的線性供料器L中，對使線性輸送部L2振動而將線性主輸送路L1上的工件W向輸送方向下游側輸送的具體結構沒有特別限定，例如可以舉出如下結構：通過從加振源施加的激振力，使將連接有線性輸送部L2的可動部與預定的固定部相互連結的板簧（驅動用彈簧）直接或間接地起振，由此可動部及固定部向彼此相反的方向振動，由此與可動部連接的線性輸送部L2在長度方向上振動，將工件W沿著輸送方向向下游側輸送。另外，作為其他例子，也可以是利用在線性輸送部L2產生的行波沿著線性主輸送路L1輸送工件W的線性供料器L。As shown in FIG. 12 , the linear feeder L can convey the workpiece W toward the downstream side in the conveying direction along the linear main conveying path L1 by applying vibration to the linear conveying portion L2 having the linear main conveying path L1 as a straight conveying path. In the linear feeder L of the second embodiment, the specific structure for vibrating the linear conveying part L2 to convey the workpiece W on the linear main conveying path L1 to the downstream side of the conveying direction is not particularly limited. For example, the following structure can be cited: the plate spring (driving spring) connecting the movable part connected to the linear conveying part L2 and the predetermined fixed part to each other is directly or indirectly vibrated by the exciting force applied from the vibration source, thereby the movable part and the fixed part vibrate in opposite directions to each other, thereby the linear conveying part L2 connected to the movable part vibrates in the longitudinal direction, and the workpiece W is conveyed to the downstream side along the conveying direction. In addition, as another example, it is also possible to be a linear feeder L that conveys the workpiece W along the linear main conveying path L1 by using the traveling wave generated in the linear conveying part L2.

線性主輸送路L1的始端和終端L11到達線性輸送部L2的外緣，設定為適當的截面形狀。線性主輸送路L1作為輸送工件W的輸送面（線性輸送面）發揮功能。另外，線性主輸送面的截面形狀能夠選擇向上コ字狀、U字狀、V字狀等適當的形狀。線性供料器L能夠使從線性主輸送路L1的始端輸送來的工件W在輸送中排列成一列並從線性主輸送路L1的終端L11向下一工序裝置供給。The starting end and the terminal end L11 of the linear main conveying path L1 reach the outer edge of the linear conveying section L2 and are set to an appropriate cross-sectional shape. The linear main conveying path L1 functions as a conveying surface (linear conveying surface) for conveying the workpiece W. In addition, the cross-sectional shape of the linear main conveying surface can be selected to be an appropriate shape such as an upward U-shape, a U-shape, a V-shape, etc. The linear feeder L can arrange the workpieces W conveyed from the starting end of the linear main conveying path L1 in a row during conveyance and supply them to the next process device from the terminal end L11 of the linear main conveying path L1.

在圖11中，例示了在線性輸送部L2的上游側具有振動盤供料器B的振動輸送裝置X。振動盤供料器B通過對內周面具有螺旋狀的輸送路B1（螺旋輸送路）的振動盤狀的輸送部B2（振動盤輸送部）施加振動，能夠沿著螺旋輸送路B1向輸送方向下游側輸送工件W。在振動盤供料器B中，使振動盤輸送部B2振動而將螺旋輸送路B1上的工件W向輸送方向下游側輸送的具體結構沒有特別限定，能夠適當採用基於上述線性供料器L的結構（使用板簧的結構、產生行波的結構等）。當對振動盤輸送部B2施加振動時，工件W在螺旋輸送路B1上爬坡，直接從螺旋輸送路B1的終端（出口部分）輸送到線性供料器L的線性主輸送路L1的始端。FIG. 11 illustrates a vibrating conveying device X having a vibrating plate feeder B on the upstream side of a linear conveying portion L2. The vibrating plate feeder B can convey the workpiece W along the spiral conveying path B1 to the downstream side of the conveying direction by applying vibration to a vibrating plate-shaped conveying portion B2 (vibrating plate conveying portion) having a spiral conveying path B1 (spiral conveying path) on the inner circumference. In the vibrating plate feeder B, the specific structure for vibrating the vibrating plate conveying portion B2 to convey the workpiece W on the spiral conveying path B1 to the downstream side of the conveying direction is not particularly limited, and the structure based on the above-mentioned linear feeder L (a structure using a leaf spring, a structure generating a traveling wave, etc.) can be appropriately adopted. When vibration is applied to the vibration plate conveyor B2, the workpiece W climbs the slope on the spiral conveyor path B1 and is directly conveyed from the terminal end (exit portion) of the spiral conveyor path B1 to the starting end of the linear main conveyor path L1 of the linear feeder L.

到達線性主輸送路L1的始端（上游端）的工件W朝向線性主輸送路L1的終端L11（下游端）輸送，直接乘上滑槽1，供給到下一工序設備Y的工件移載面Y1。在圖11和圖12中，示出了下一工序設備Y為旋轉台T的方式。旋轉台T的朝上面中的沿著外周緣附近規定的預定的環繞區域是工件移載面Y1。另外，旋轉台T構成例如檢查工件的外觀的外觀檢查裝置的一部分，在這樣的外觀檢查裝置中，通過在圓板狀的旋轉台T上以一定的姿勢等間距排列工件W，檢查效率提高。The workpiece W that reaches the starting end (upstream end) of the linear main conveying path L1 is conveyed toward the terminal end L11 (downstream end) of the linear main conveying path L1, directly rides on the chute 1, and is supplied to the workpiece transfer surface Y1 of the next process equipment Y. In Figures 11 and 12, a mode in which the next process equipment Y is a turntable T is shown. The predetermined surrounding area defined near the outer periphery on the upper surface of the turntable T is the workpiece transfer surface Y1. In addition, the turntable T constitutes a part of an appearance inspection device for inspecting the appearance of the workpiece, for example. In such an appearance inspection device, the inspection efficiency is improved by arranging the workpieces W at equal intervals in a certain posture on the circular plate-shaped turntable T.

滑槽1在將從線性供料器L轉乘的工件W輸送一定區間之後，向下一工序設備Y供給工件W。如圖13和圖14所示，滑槽1包括：輸送路（工件輸送路2），其具有輸送面21且下方空間敞開；輸送部3，其將由彈性變形產生的振動傳遞至輸送面21；以及驅動部4，其對輸送部3進行激振而使其彈性變形。在此，圖13是滑槽1的整體外觀圖，在該圖（a）、（b）中觀察的方向不同。另外，圖14（a）是圖13（a）的F1方向向視圖，圖14（b）是該圖（a）的F2方向向視圖。After the chute 1 transports the workpiece W transferred from the linear feeder L for a certain distance, it supplies the workpiece W to the next process equipment Y. As shown in Figures 13 and 14, the chute 1 includes: a conveying path (workpiece conveying path 2), which has a conveying surface 21 and an open space below; a conveying part 3, which transmits the vibration generated by elastic deformation to the conveying surface 21; and a driving part 4, which excites the conveying part 3 to elastically deform it. Here, Figure 13 is an overall appearance view of the chute 1, and the viewing directions in Figures (a) and (b) are different. In addition, Figure 14 (a) is a view in the F1 direction of Figure 13 (a), and Figure 14 (b) is a view in the F2 direction of Figure (a).

第二實施方式中的輸送部3具有：第一振動部31（主振動部），其配置於與工件輸送路2相鄰的位置；以及第二振動部32（副振動部），其以相對於第一振動部31中的與工件輸送方向D1正交的方向的兩個面在法線方向上突出的姿勢配置。The conveying part 3 in the second embodiment comprises: a first vibrating part 31 (main vibrating part) which is arranged at a position adjacent to the workpiece conveying path 2; and a second vibrating part 32 (auxiliary vibrating part) which is arranged in a posture of protruding in the normal direction with respect to two surfaces in the direction orthogonal to the workpiece conveying direction D1 in the first vibrating part 31.

第一振動部31由能夠彈性變形的板體構成，在下端部設置有工件輸送路2。在此，工件輸送路2中的工件W的輸送方向D1能夠確定為從第一振動部31的背面311朝向前表面312的方向。另外，能夠將在平面中與滑槽1或第一振動部31的前後方向Z正交的方向確定為“滑槽1或第一振動部31的厚度方向E”，能夠將與滑槽1的前後方向Z垂直的正交方向確定為“滑槽1或第一振動部31的高度方向H”。在第二實施方式中，在第一振動部1的厚度方向E上對置的兩個面（兩個側面）中的一個面313的下端部設置有輸送路2。以下，將該面313作為輸送路設定面313，將相反側的面（側面）作為輸送路非設定面314。The first vibration part 31 is composed of a plate body capable of elastic deformation, and a workpiece conveying path 2 is provided at the lower end. Here, the conveying direction D1 of the workpiece W in the workpiece conveying path 2 can be determined as a direction from the back surface 311 of the first vibration part 31 toward the front surface 312. In addition, the direction orthogonal to the front-rear direction Z of the chute 1 or the first vibration part 31 in the plane can be determined as "the thickness direction E of the chute 1 or the first vibration part 31", and the orthogonal direction perpendicular to the front-rear direction Z of the chute 1 can be determined as "the height direction H of the chute 1 or the first vibration part 31". In the second embodiment, the conveying path 2 is provided at the lower end of one of the two surfaces (two side surfaces) facing each other in the thickness direction E of the first vibration part 1. Hereinafter, this surface 313 is referred to as a conveyance path setting surface 313 , and the surface on the opposite side (side surface) is referred to as a conveyance path non-setting surface 314 .

第二振動部32由能夠彈性變形的板體構成，從第一振動部31的輸送路設定面313以及輸送路非設定面314的中央附近相對於這些各面（輸送路設定面313、輸送路非設定面314）在法線方向上分別以突出姿勢配置。第二振動部32中的從第一振動部31的輸送路設定面313突出的部分32A和從輸送路非設定面314突出的部分32B為相互相同的形狀，將這樣的第二振動部32配置在第一振動部31的重心或重心附近。輸送路設定面313以及輸送路非設定面314的法線方向（第二振動部32的突出方向）與第一振動部31的厚度方向E大致一致。第二振動部32將與第一振動部31的輸送路設定面313以及輸送路非設定面314的各表面平行的截面形狀設定為在工件輸送方向D1上延伸的橫長的截面形狀。另外，在第二實施方式中，將第二振動部32中的工件輸送方向D1上的尺寸設定為小於第一振動部31的同一方向D1上的尺寸。將這樣的第二振動部32配置為關於通過第一振動部31的厚度方向E中心且與輸送路設定面313的表面平行的假想平面（對象面）對稱。The second vibration part 32 is composed of a plate body capable of elastic deformation, and is arranged in a protruding posture relative to each surface (transmission path setting surface 313, transmission path non-setting surface 314) from the center of the transmission path setting surface 313 and the transmission path non-setting surface 314 of the first vibration part 31 in the normal direction. The portion 32A protruding from the transmission path setting surface 313 of the first vibration part 31 and the portion 32B protruding from the transmission path non-setting surface 314 of the second vibration part 32 are of the same shape, and such a second vibration part 32 is arranged at the center of gravity of the first vibration part 31 or near the center of gravity. The normal direction of the transmission path setting surface 313 and the transmission path non-setting surface 314 (the protruding direction of the second vibration part 32) is roughly consistent with the thickness direction E of the first vibration part 31. The second oscillating portion 32 is configured to have a cross-sectional shape parallel to each surface of the conveying path setting surface 313 and the conveying path non-setting surface 314 of the first oscillating portion 31 as a cross-sectional shape extending in the workpiece conveying direction D1. In addition, in the second embodiment, the dimension of the second oscillating portion 32 in the workpiece conveying direction D1 is set to be smaller than the dimension of the first oscillating portion 31 in the same direction D1. Such a second oscillating portion 32 is configured to be symmetrical with respect to an imaginary plane (object plane) that passes through the center of the thickness direction E of the first oscillating portion 31 and is parallel to the surface of the conveying path setting surface 313.

第二實施方式的滑槽1在第一振動部31的高度方向H中央部包括以從輸送路非設定面314向輸送部3的厚度方向E延伸的姿勢配置的支撐部5（參照圖13）。在第二實施方式中，在第一振動部31中的沿著工件W的輸送方向D1分開預定距離的兩個部位（第二振動部32中的在工件輸送方向D1上隔著從輸送路非設定面314突出的部分32B的部位）配置有支撐部5。各支撐部5呈由剛性低的材料構成的棒狀，將一端安裝於第一振動部31，將另一端安裝於共用的固定部6。通過在第一振動部31與固定部6之間設置低剛性的支撐部5，從而不會對第一振動部31的振動狀態造成不良影響。支撐部5也能夠與第一振動部31和第二振動部32一起作為構成輸送部3的零件來捕捉。第二振動部32配置在這樣的輸送部3的重心或重心附近。在第二實施方式中，一體地形成第一振動部31以及第二振動部32。另外，在圖14中省略了支撐部5和固定部6。The chute 1 of the second embodiment includes a support portion 5 (see FIG. 13 ) arranged in a posture extending from the conveying path non-setting surface 314 to the thickness direction E of the conveying portion 3 at the center of the height direction H of the first vibrating portion 31. In the second embodiment, the support portion 5 is arranged at two locations separated by a predetermined distance along the conveying direction D1 of the workpiece W in the first vibrating portion 31 (locations of the second vibrating portion 32 separated by a portion 32B protruding from the conveying path non-setting surface 314 in the workpiece conveying direction D1). Each support portion 5 is in the shape of a rod made of a material with low rigidity, one end of which is mounted on the first vibrating portion 31, and the other end of which is mounted on a common fixing portion 6. By providing the low-rigidity support portion 5 between the first vibrating portion 31 and the fixing portion 6, the vibration state of the first vibrating portion 31 will not be adversely affected. The support part 5 can also be captured as a component constituting the conveying part 3 together with the first vibrating part 31 and the second vibrating part 32. The second vibrating part 32 is arranged at or near the center of gravity of such a conveying part 3. In the second embodiment, the first vibrating part 31 and the second vibrating part 32 are formed integrally. In addition, the support part 5 and the fixing part 6 are omitted in FIG. 14.

第二實施方式的滑槽1在第一振動部31的預定部位設置有驅動部4。在第二實施方式中，如圖13以及圖14所示，作為驅動部4而應用壓電元件4a、4b，將兩個壓電元件4a分別通過黏貼處理等適當的處理或者固定機構而固定於第一振動部31的背面311以及前表面312的高度方向H中央部，並通過黏貼處理等適當的處理或者固定機構而將一個壓電元件4b固定於第一振動部31的輸送路設定面313中的高度方向H中央部周邊。壓電元件4a、4b為呈矩形狀的薄板狀，以縱長的姿勢設置水平振動模式驅動用的壓電元件4a，以橫長的姿勢設置垂直振動模式用的壓電元件4b。壓電元件4a、4b設置於在各振動模式中產生大的應變的位置（振動的波腹的位置）。而且，在第二實施方式的滑槽1中，如圖12及圖14所示，第一振動部31及第二振動部以相對於水平面以大致45度的傾斜角度交叉的姿勢配置輸送部3，設於第一振動部31的下端部的輸送路2與線性輸送路L的終端L11連續。The chute 1 of the second embodiment is provided with a driving part 4 at a predetermined position of the first vibrating part 31. In the second embodiment, as shown in FIG. 13 and FIG. 14, piezoelectric elements 4a and 4b are applied as the driving part 4, and two piezoelectric elements 4a are fixed to the center of the height direction H of the back surface 311 and the front surface 312 of the first vibrating part 31 respectively by appropriate processing such as gluing processing or a fixing mechanism, and one piezoelectric element 4b is fixed to the periphery of the center of the height direction H in the conveying path setting surface 313 of the first vibrating part 31 by appropriate processing such as gluing processing or a fixing mechanism. The piezoelectric elements 4a and 4b are in the shape of rectangular thin plates. The piezoelectric element 4a for driving the horizontal vibration mode is arranged in a longitudinal posture, and the piezoelectric element 4b for driving the vertical vibration mode is arranged in a transverse posture. The piezoelectric elements 4a and 4b are arranged at positions where large strains are generated in each vibration mode (positions of antinodes of vibration). In addition, in the chute 1 of the second embodiment, as shown in Figures 12 and 14, the first vibration part 31 and the second vibration part are arranged in a posture of crossing the conveying part 3 at an angle of approximately 45 degrees relative to the horizontal plane, and the conveying path 2 provided at the lower end of the first vibration part 31 is continuous with the terminal L11 of the linear conveying path L.

工件輸送路2在第一振動部31的下端部以向該第一振動部31的厚度方向E（寬度方向E）突出的姿勢設置。在第二實施方式中，以從輸送路形成面313向側方突出的姿勢設置工件輸送路2。在工件輸送路2的朝上面形成有槽狀的輸送面21。輸送面21的槽形狀没有特别限定，在圖13等中，作為一個例子，示出了截面向上コ字狀的輸送面21。工件輸送路2的始端22及終端23分別到達工件輸送路2中的工件輸送方向D1上游側的外緣及工件輸送方向D1下游側的外緣。工件輸送路2的沿著前後方向Z的尺寸與第一振動部31的沿著前後方向Z的尺寸相同。即，第二實施方式的滑槽1包括從第一振動部31的下端部向側方伸出的工件輸送路2。在第二實施方式中，一體地形成第一振動部31和工件輸送路2。The workpiece conveying path 2 is provided at the lower end of the first vibrating portion 31 in a posture protruding in the thickness direction E (width direction E) of the first vibrating portion 31. In the second embodiment, the workpiece conveying path 2 is provided in a posture protruding laterally from the conveying path forming surface 313. A groove-shaped conveying surface 21 is formed on the upper surface of the workpiece conveying path 2. The groove shape of the conveying surface 21 is not particularly limited, and as an example, in FIG. 13 and the like, a conveying surface 21 with a U-shaped cross section facing upward is shown. The starting end 22 and the terminal end 23 of the workpiece conveying path 2 reach the outer edge of the upstream side of the workpiece conveying direction D1 and the outer edge of the downstream side of the workpiece conveying direction D1 in the workpiece conveying path 2, respectively. The dimension of the workpiece conveying path 2 along the front-rear direction Z is the same as the dimension of the first vibrating portion 31 along the front-rear direction Z. That is, the chute 1 of the second embodiment includes the workpiece conveying path 2 extending laterally from the lower end of the first vibrating portion 31. In the second embodiment, the first vibrating portion 31 and the workpiece conveying path 2 are integrally formed.

第二實施方式的滑槽1在工件輸送路2的朝下面未設置其他部件，因此工件輸送路2的下方空間成為自由的空間。在第二實施方式中，構成為使第一振動部31如上所述以傾斜預定角度的姿勢配置，在該配置姿勢下，工件輸送路2的下表面設定為水平面（參照圖14（b））。The chute 1 of the second embodiment has no other components disposed below the workpiece conveying path 2, so that the space below the workpiece conveying path 2 becomes a free space. In the second embodiment, the first vibrating portion 31 is arranged in a posture tilted at a predetermined angle as described above, and in this arrangement posture, the lower surface of the workpiece conveying path 2 is set to a horizontal plane (see FIG. 14( b)).

將具有以上結構的滑槽1配置於與線性供料器L的終端L11相鄰的位置的振動輸送裝置X如圖11和圖12所示，能夠在使工件輸送路2中的下游端側的朝下面接近作為下一工序設備Y的旋轉台T的工件移載面Y1的狀態下，將固定部5以適當的方法固定於與滑槽1分體的部件（省略圖示）。在第二實施方式中，在該設置狀態下，輸送面21設定為從工件輸送方向D1的上游朝向下游逐漸向斜下方傾斜的下坡。下坡的傾斜角度是工件W因重力而滑落的程度，且是不破壞工件W的姿勢的角度是關鍵的，在第二實施方式中，將輸送面21設定為5°至15°左右的下降坡度。As shown in FIG. 11 and FIG. 12, the vibrating conveying device X that arranges the chute 1 having the above structure at a position adjacent to the terminal L11 of the linear feeder L can fix the fixing portion 5 to a component (not shown) separated from the chute 1 by an appropriate method in a state where the downstream end side of the workpiece conveying path 2 is close to the workpiece transfer surface Y1 of the rotary table T as the next process equipment Y. In the second embodiment, in this setting state, the conveying surface 21 is set to a downward slope that gradually tilts downward from the upstream to the downstream of the workpiece conveying direction D1. The tilt angle of the downward slope is the degree to which the workpiece W slides down due to gravity, and it is critical that the posture of the workpiece W is not destroyed. In the second embodiment, the conveying surface 21 is set to a downward slope of about 5° to 15°.

並且，第二實施方式所涉及的振動輸送裝置X通過設置於線性供料器L與作為下一工序設備Y的旋轉台T之間的滑槽1，將從線性供料器L的線性主輸送路L1轉乘至輸送面21的工件W輸送一定區間（輸送面21輸送工件W的輸送區間）後，能夠向作為下一工序設備Y的旋轉台T供給工件W。在第二實施方式的振動輸送裝置X中，通過驅動部4使輸送部3彈性變形的狀態即振動模式構成為將圖15所示的水平振動模式與圖16及圖17所示的垂直振動模式合成而得到的橢圓振動。Furthermore, the vibration conveying device X according to the second embodiment can supply the workpiece W to the turntable T as the next process equipment Y after transferring the workpiece W from the linear main conveying path L1 of the linear feeder L to the conveying surface 21 for a certain section (a conveying section in which the conveying surface 21 conveys the workpiece W), through the chute 1 provided between the linear feeder L and the turntable T as the next process equipment Y. In the vibration conveying device X according to the second embodiment, the state in which the conveying portion 3 is elastically deformed by the driving portion 4, i.e., the vibration mode, is constituted as an elliptical vibration obtained by synthesizing the horizontal vibration mode shown in FIG. 15 and the vertical vibration mode shown in FIG. 16 and FIG. 17.

如圖15所示，水平振動模式是輸送面21向與工件輸送方向D1平行的方向Z撓曲的振動。在第二實施方式中，構成為若通過僅對壓電元件4a施加交流電壓而對第一振動部31進行激振，則產生第一振動部31整體向與工件輸送方向D1平行的方向撓曲的振動（水平振動）。而且，如圖15所明示的那樣，該水平振動模式是設置有輸送路2的第一振動部31和第二振動部32在輸送路2的延伸方向D上相互以反相位振動的振動模式。第二實施方式的振動輸送裝置X在水平振動模式下在第一振動部31出現的多個波腹中的在下端部出現的波腹的位置或其附近位置設置工件輸送路2。As shown in FIG. 15 , the horizontal vibration mode is a vibration in which the conveying surface 21 is bent in a direction Z parallel to the workpiece conveying direction D1. In the second embodiment, if the first vibrating portion 31 is excited by applying an AC voltage only to the piezoelectric element 4a, a vibration (horizontal vibration) is generated in which the first vibrating portion 31 as a whole is bent in a direction parallel to the workpiece conveying direction D1. Moreover, as shown in FIG. 15 , the horizontal vibration mode is a vibration mode in which the first vibrating portion 31 and the second vibrating portion 32 provided with the conveying path 2 vibrate in opposite phases to each other in the extension direction D of the conveying path 2. The vibrating conveying device X of the second embodiment is provided with the workpiece conveying path 2 at the position of the antinode appearing at the lower end among the plurality of antinodes appearing in the first vibrating portion 31 in the horizontal vibration mode or at a position near the antinode appearing at the lower end.

如圖16和圖17所示，垂直振動模式是輸送面21在與工件輸送方向D1垂直的正交方向H上撓曲的振動。在第二實施方式中，構成為若通過僅對壓電元件4b施加交流電壓來對第一振動部31進行激振，則產生第一振動部31整體在與工件輸送方向D1垂直的正交方向E上撓曲的振動（垂直振動）。而且，該垂直振動模式是伴隨輸送路2整體向與工件輸送方向D1垂直的正交方向撓曲而在第二振動部32也產生撓曲的振動模式。此外，圖16是示出與圖15同樣地從輸送路設定面313側觀察到的垂直振動模式的圖，圖17是示出從圖14的（a）的F2方向觀察到的垂直振動模式的圖。圖15至圖18是通過解析動畫顯示振動模式的圖，為了易於掌握振動模式的振動狀況，將無振動狀態的滑槽作為比較對象而省略一部分而用黑線表示。As shown in FIG. 16 and FIG. 17 , the vertical vibration mode is a vibration in which the conveying surface 21 is bent in the orthogonal direction H perpendicular to the workpiece conveying direction D1. In the second embodiment, if the first vibrating portion 31 is excited by applying an AC voltage only to the piezoelectric element 4b, a vibration (vertical vibration) is generated in which the first vibrating portion 31 as a whole is bent in the orthogonal direction E perpendicular to the workpiece conveying direction D1. Moreover, this vertical vibration mode is a vibration mode in which bending is also generated in the second vibrating portion 32 as the conveying path 2 as a whole is bent in the orthogonal direction perpendicular to the workpiece conveying direction D1. In addition, FIG. 16 is a diagram showing the vertical vibration mode observed from the conveying path setting surface 313 side in the same manner as FIG. 15 , and FIG. 17 is a diagram showing the vertical vibration mode observed from the F2 direction of FIG. 14 (a). FIG. 15 to FIG. 18 are diagrams showing the vibration mode by means of analytical animation. In order to facilitate understanding of the vibration state of the vibration mode, the chute in a non-vibrating state is omitted as a comparison object and represented by a black line.

本第二實施方式的滑槽1通過以相同的頻率施加預定的相位差來激勵這樣的水平振動模式和垂直振動模式這兩個不同的振動模式，從而在輸送面21生成圖18所示的橢圓振動。圖18是表示按照（i）→（ii）→（iii）→（iv）→（i）…的順序反覆進行的橢圓振動的經時變化的圖，壓電元件4a、4b設置在第一振動部31中的各振動模式（水平振動模式、垂直振動模式）中產生大的應變的位置，通過施加交流電壓而進行激振，並且，壓電元件4a、4b的激振時的頻率設定為水平振動模式及垂直振動模式的固有頻率附近的頻率，第二實施方式的滑槽1能夠在振動模式中使輸送面21在頻率20kHz以上的超聲波區域振動（駐波）。The chute 1 of the second embodiment excites two different vibration modes, namely the horizontal vibration mode and the vertical vibration mode, by applying a predetermined phase difference at the same frequency, thereby generating an elliptical vibration as shown in FIG. 18 on the conveying surface 21. FIG18 is a diagram showing the time-dependent change of the elliptical vibration repeatedly performed in the order of (i) → (ii) → (iii) → (iv) → (i) ..., wherein the piezoelectric elements 4a, 4b are arranged at positions where large strains are generated in each vibration mode (horizontal vibration mode, vertical vibration mode) in the first vibration portion 31, and are excited by applying an alternating voltage, and the frequency of the piezoelectric elements 4a, 4b during the excitation is set to a frequency near the natural frequency of the horizontal vibration mode and the vertical vibration mode. The chute 1 of the second embodiment can cause the conveying surface 21 to vibrate (stationary wave) in the ultrasonic region with a frequency of more than 20 kHz in the vibration mode.

在本第二實施方式的滑槽1中，通過驅動部4（壓電元件4a、4b）使輸送部3彈性變形的狀態即振動模式是合成了水平振動模式和垂直振動模式的橢圓振動，通過構成為在振動模式下整個輸送面21成為相當於水平振動模式的波腹的位置或其附近位置，從而如圖18和圖19所示，在整個輸送路2生成均勻的橢圓振動。其結果，在輸送路2的輸送面21整體也生成同樣的橢圓振動，輸送面21上的工件W如圖19所示，以預定的週期反覆進行與輸送面2接觸的狀態（該圖（ii））和相對於輸送面2分離的狀態（該圖（iii）、（iv）、（i）），沿工件輸送方向D1輸送。即，在工件W與輸送面21接觸的時刻，在工件W與輸送面21之間產生摩擦力，該摩擦力作為推進力而發揮作用，能夠將工件W向工件輸送方向D1輸送，能夠在輸送面21整個區域得到推進力。另外，在輸送路2的輸送面21整體上生成一樣的橢圓振動是指，無論切取振動模式中的哪個時刻，各時刻的輸送面21上的任意的點（作為一例，圖19中的點P、Q）的相對位置關係都是一定的，例如在輸送面21上不會局部地出現由振動引起的起伏。圖19的（i）、（ii）、（iii）、（iv）分別與圖18的（i）、（ii）、（iii）、（iv）對應。圖19的（i）、（ii）、（iii）、（iv）所示的橢圓和橢圓上的黑圓示意性地表示各圖是橢圓振動中的哪個時刻的振動狀態。另外，在圖19中，用虛線表示無振動狀態的輸送面21A。In the chute 1 of the second embodiment, the state in which the conveying portion 3 is elastically deformed by the driving portion 4 (piezoelectric elements 4a, 4b), that is, the vibration mode is an elliptical vibration that synthesizes the horizontal vibration mode and the vertical vibration mode. By configuring the entire conveying surface 21 to be at a position corresponding to the antinode of the horizontal vibration mode or a position in the vicinity thereof in the vibration mode, uniform elliptical vibration is generated in the entire conveying path 2 as shown in Figures 18 and 19. As a result, the same elliptical vibration is also generated on the entire conveying surface 21 of the conveying path 2, and the workpiece W on the conveying surface 21 is repeatedly transported along the workpiece transport direction D1 in a predetermined cycle in a state of contact with the conveying surface 2 ((ii) in the figure) and a state of separation from the conveying surface 2 ((iii), (iv), (i) in the figure) as shown in FIG19. That is, at the moment when the workpiece W contacts the conveying surface 21, a friction force is generated between the workpiece W and the conveying surface 21, and the friction force acts as a thrust force, so that the workpiece W can be transported in the workpiece transport direction D1, and the thrust force can be obtained in the entire area of the conveying surface 21. In addition, generating the same elliptical vibration on the entire conveying surface 21 of the conveying path 2 means that, regardless of the moment in the vibration pattern, the relative positional relationship of any point on the conveying surface 21 at each moment (for example, points P and Q in FIG. 19 ) is constant, for example, no undulation caused by vibration will appear locally on the conveying surface 21. (i), (ii), (iii), and (iv) of FIG. 19 correspond to (i), (ii), (iii), and (iv) of FIG. 18 , respectively. The ellipse shown in (i), (ii), (iii), and (iv) of FIG. 19 and the black circle on the ellipse schematically indicate the moment in the elliptical vibration at which each figure is the vibration state. In addition, in FIG. 19 , the conveying surface 21A in a non-vibrating state is indicated by a dotted line.

如上所述，第二實施方式的滑槽1的通過驅動部4（壓電元件4a、4b）使輸送部3彈性變形的狀態即振動模式是將水平振動模式和垂直振動模式合成而得到的橢圓振動，該水平振動模式是沿著與輸送面21垂直的正交方向H出現波腹和波節且在與輸送路2中的工件輸送方向D1平行的方向上撓曲的振動，該垂直振動模式是與輸送面21垂直的正交方向H的振動，通過構成為在振動模式中輸送面21整體至少成為與水平振動模式的波腹相當的位置或其附近位置，從而在整個輸送面21上生成均勻的橢圓振動，因此能夠在輸送面21上得到沒有波節的振動狀態。而且，在振動模式中，通過輸送面21進行一樣的橢圓振動，在輸送面21與工件W之間產生摩擦力，該摩擦力作為推進力發揮作用而能夠輸送工件W，在輸送面21整個區域得到推進力，即使在將工件輸送速度設定得較快的情況下，也能夠避免在輸送面21上工件W彼此堵塞、在工件輸送方向D1上相對地被上游側的工件W按壓引起的姿勢的紊亂（由按壓壓力引起的姿勢的紊亂）的情況。詳細而言，根據第二實施方式所涉及的滑槽1，與水平振動模式合成而生成橢圓振動的垂直振動模式的振動方向是與工件輸送方向D1正交且具有鉛垂成分的成分的方向，因此能夠得到如下作用：反覆進行鉛垂向下受到重力的工件W與在鉛垂方向上振動的輸送面21在鉛垂方向上接觸的狀態和分離的狀態，在工件W與輸送面21接觸時，工件被重力按壓於輸送面21，產生作為推進力的摩擦力。As described above, the state in which the conveying portion 3 is elastically deformed by the driving portion 4 (piezoelectric elements 4a, 4b) of the chute 1 of the second embodiment, that is, the vibration mode is an elliptical vibration obtained by synthesizing the horizontal vibration mode and the vertical vibration mode. The horizontal vibration mode is a vibration that has antinodes and nodes along the orthogonal direction H perpendicular to the conveying surface 21 and is bent in a direction parallel to the workpiece conveying direction D1 in the conveying path 2. The vertical vibration mode is a vibration in the orthogonal direction H perpendicular to the conveying surface 21. By configuring the conveying surface 21 as a whole to be at least at a position equivalent to the antinode of the horizontal vibration mode or at a position near it in the vibration mode, a uniform elliptical vibration is generated on the entire conveying surface 21, so that a vibration state without nodes can be obtained on the conveying surface 21. Moreover, in the vibration mode, the conveying surface 21 is subjected to the same elliptical vibration, and friction is generated between the conveying surface 21 and the workpiece W. This friction acts as a propulsion force to convey the workpiece W. The propulsion force is obtained in the entire area of the conveying surface 21. Even when the workpiece conveying speed is set faster, it is possible to avoid the workpieces W on the conveying surface 21 being blocked by each other and the workpieces W being pressed by the upstream workpiece W relatively in the workpiece conveying direction D1. Disturbance in posture (disturbance in posture caused by pressing pressure) can be avoided. In detail, according to the slide 1 involved in the second embodiment, the vibration direction of the vertical vibration mode that is synthesized with the horizontal vibration mode to generate an elliptical vibration is a direction that is orthogonal to the workpiece conveying direction D1 and has a lead-vertical component, so the following effect can be obtained: the workpiece W subjected to gravity in the lead-vertical direction is repeatedly in contact and separated from the conveying surface 21 vibrating in the lead-vertical direction. When the workpiece W contacts the conveying surface 21, the workpiece is pressed against the conveying surface 21 by gravity, generating a friction force serving as a thrust force.

即，根據第二實施方式的滑槽1，由於是通過橢圓振動使在輸送面21與工件W之間產生的摩擦力作為推進力發揮作用的結構，因此，即使是非常小的振動振幅，也能夠在輸送路2整體順利地輸送工件W，在進行向下一工序設備Y的連接、位置調整時，幾乎不需要考慮輸送路2的振動振幅，能夠容易地進行。另外，與輸送路2的下方空間為自由空間的情況相互作用，能夠使輸送路2與下一工序設備Y之間的間隙接近零，能夠實現從輸送面21的下游端23向下一工序設備Y的工件移載面Y1轉接時的工件W的姿勢穩定化。That is, according to the chute 1 of the second embodiment, since the friction force generated between the conveying surface 21 and the workpiece W is used as a propulsion force by elliptical vibration, the workpiece W can be smoothly conveyed in the conveying path 2 as a whole even with a very small vibration amplitude, and when connecting to the next process equipment Y or adjusting the position, it is almost unnecessary to consider the vibration amplitude of the conveying path 2, and the process can be easily performed. In addition, by interacting with the situation that the space below the conveying path 2 is a free space, the gap between the conveying path 2 and the next process equipment Y can be made close to zero, and the posture of the workpiece W when transferring from the downstream end 23 of the conveying surface 21 to the workpiece transfer surface Y1 of the next process equipment Y can be stabilized.

特別是，根據第二實施方式的滑槽1，在水平振動模式下，第二振動部32（副振動部）與第一振動部31（主振動部）以反相位振動，第二振動部32受到來自第一振動部31的反作用力，第一振動部31內的撓曲變形量減少。由此，設置於第一振動部31的輸送路2整體容易均勻地振動（基於位置的振幅的偏差變小），而且，輸送路3的向與工件輸送方向D1平行的方向以外的方向的位移變小，因此能夠在輸送路2整個區域穩定地輸送工件W。特別是在第二實施方式中，利用通過水平振動模式和垂直振動模式的合成而生成的橢圓振動來輸送工件W，但在該情況下，水平方向的振動與垂直方向的振動的振幅之比、相位差對輸送速度以及穩定性有很大影響。因此，當在水平振動模式中產生局部較大的垂直方向的振動的成分時，產生水平方向的振動與垂直方向的振動的振幅之比、相位差局部變形、輸送變得不穩定這樣的不良情況。在這一點上，如果是第二實施方式，則能夠抑制水平振動模式中的向垂直方向的振動，即使在利用橢圓振動的情況下也能夠進行穩定的輸送。In particular, according to the chute 1 of the second embodiment, in the horizontal vibration mode, the second vibration part 32 (sub-vibration part) and the first vibration part 31 (main vibration part) vibrate in opposite phases, and the second vibration part 32 receives a reaction force from the first vibration part 31, and the amount of bending deformation in the first vibration part 31 is reduced. As a result, the entire conveying path 2 provided in the first vibration part 31 is easily and uniformly vibrated (the deviation of the amplitude based on the position is reduced), and the displacement of the conveying path 3 in directions other than the direction parallel to the workpiece conveying direction D1 is reduced, so that the workpiece W can be stably conveyed in the entire area of the conveying path 2. In particular, in the second embodiment, the workpiece W is transported by using the elliptical vibration generated by synthesizing the horizontal vibration mode and the vertical vibration mode, but in this case, the amplitude ratio and phase difference of the horizontal vibration to the vertical vibration have a great influence on the transport speed and stability. Therefore, when a locally large vertical vibration component is generated in the horizontal vibration mode, the amplitude ratio and phase difference of the horizontal vibration to the vertical vibration are locally deformed, and the transport becomes unstable. In this regard, in the second embodiment, the vertical vibration in the horizontal vibration mode can be suppressed, and stable transport can be performed even when the elliptical vibration is used.

在不具有副振動部32的情況下，如圖20所示，通過水平振動模式在第一振動部31的高度方向H的端部（上端部、下端部）周邊容易產生向傾斜方向的位移，若在這樣的部分設定輸送路2，則在振動模式中輸送路2也向傾斜方向位移，無法將輸送面21上的工件W順暢地輸送到輸送方向D1下游端。通過設為具有以與第一振動部31反相位的方式進行振動的第二振動部32的輸送部3，從而能夠消除這樣的問題。而且，通過將輸送路2設置於輸送部3的下端附近，成為在比輸送路2靠下方的空間不配置輸送部3的結構，輸送路2相對於下一工序設備Y的相對位置的設計自由度提高，能夠選擇能夠容易地向下一工序設備Y的工件移載面Y1上供給工件W的佈局。In the case where the auxiliary vibration part 32 is not provided, as shown in FIG20, the first vibration part 31 is easily displaced in the tilt direction around the ends (upper end and lower end) in the height direction H by the horizontal vibration mode. If the conveying path 2 is provided in such a portion, the conveying path 2 is also displaced in the tilt direction in the vibration mode, and the workpiece W on the conveying surface 21 cannot be smoothly conveyed to the downstream end in the conveying direction D1. By providing the conveying part 3 with the second vibration part 32 that vibrates in an anti-phase manner to the first vibration part 31, such a problem can be eliminated. Moreover, by setting the conveying path 2 near the lower end of the conveying part 3, a structure is formed in which the conveying part 3 is not arranged in the space below the conveying path 2, thereby improving the design freedom of the relative position of the conveying path 2 with respect to the next process equipment Y, and it is possible to select a layout that can easily supply the workpiece W to the workpiece transfer surface Y1 of the next process equipment Y.

而且，根據第二實施方式的滑槽1，由於利用了超聲波振動，因此振動模式下的振幅極小，幾乎沒有從輸送面21的終端23（工件輸送方向D1下游端）向預定的下一工序設備Y的工件移載面Y1排出工件W的位置（工件排出位置）的變動，因此還能夠得到能夠以等間距將工件W向下一工序設備Y的工件移載面Y1供給這樣的優點、不會聽到振動聲、不會對作業環境造成不良影響的優點。Moreover, according to the chute 1 of the second embodiment, since ultrasonic vibration is utilized, the amplitude in the vibration mode is extremely small, and there is almost no change in the position (workpiece discharge position) at which the workpiece W is discharged from the end 23 of the conveying surface 21 (the downstream end in the workpiece conveying direction D1) to the predetermined workpiece transfer surface Y1 of the next process equipment Y. Therefore, the advantages of being able to supply the workpiece W to the workpiece transfer surface Y1 of the next process equipment Y at equal intervals can be obtained, without audible vibration sound, and without causing adverse effects on the working environment.

此外，根據第二實施方式所涉及的滑槽1，由於是在輸送部3的重心或者重心附近配置有第二振動部32的結構，因此能夠在包括第一振動部31以及第二振動部32在內的輸送部3整體中平衡良好地通過第二振動部32的振動來抵消第一振動部31的向垂直方向的撓曲變形的影響。更具體而言，在第二振動部32受到第一振動部31的振動的反作用力時，為了使第一振動部31的姿勢穩定（取得平衡），優選在第一振動部31的重心附近受到反作用力，由於該位置是第一振動部31的中央附近，因此優選在第一振動部31的中央附近設置第二振動部32。Furthermore, according to the chute 1 involved in the second embodiment, since the second vibrating part 32 is arranged at the center of gravity or near the center of gravity of the conveying part 3, the influence of the bending deformation of the first vibrating part 31 in the vertical direction can be offset by the vibration of the second vibrating part 32 in a well-balanced manner in the entire conveying part 3 including the first vibrating part 31 and the second vibrating part 32. More specifically, when the second vibrating part 32 receives the reaction force of the vibration of the first vibrating part 31, in order to stabilize the posture of the first vibrating part 31 (obtain balance), it is preferred that the reaction force is received near the center of gravity of the first vibrating part 31. Since this position is near the center of the first vibrating part 31, it is preferred that the second vibrating part 32 is provided near the center of the first vibrating part 31.

另外，根據第二實施方式的滑槽1，以使第二振動部32向在厚度方向E上夾著第一振動部31的兩側突出的姿勢配置，因此能夠通過在第二振動部31的一對突出端產生相同大小的旋轉力矩來抵消因第二振動部32的振動而產生的第二振動部32自身的旋轉力矩，第一振動部31的姿勢穩定。在這樣的觀點中，為了抵消旋轉力矩，需要在兩側產生相同大小的旋轉力矩，在第二實施方式中，採用在沿厚度方向E夾著第一振動部31的兩個空間配置保持相互均衡的關係的第二振動部32的結構。具體而言，將通過第一振動部31的厚度方向E中心且在與第一振動部31的厚度方向E垂直的正交方向上延伸的假想中心面作為對稱面，將第二振動部32設定為對稱形狀。In addition, according to the slide groove 1 of the second embodiment, the second vibrating part 32 is configured to protrude on both sides of the first vibrating part 31 in the thickness direction E, so that the rotational moment of the second vibrating part 32 itself generated by the vibration of the second vibrating part 32 can be offset by generating the same magnitude of rotational moment at a pair of protruding ends of the second vibrating part 31, and the posture of the first vibrating part 31 is stable. From such a viewpoint, in order to offset the rotational moment, it is necessary to generate the same magnitude of rotational moment on both sides. In the second embodiment, a structure is adopted in which the second vibrating part 32 is configured to maintain a mutually balanced relationship in two spaces that sandwich the first vibrating part 31 in the thickness direction E. Specifically, the second vibrating portion 32 is set to a symmetrical shape with an imaginary center plane passing through the center of the first vibrating portion 31 in the thickness direction E and extending in a direction perpendicular to the thickness direction E of the first vibrating portion 31 as a symmetric plane.

特別是，根據第二實施方式的滑槽1，能夠分別獨立地設定水平振動模式的振動振幅和垂直振動模式的振動振幅，並且也能夠自由地設定兩振動模式間的相位差，因此能夠容易地進行工件W的輸送速度的調整。另外，根據第二實施方式的滑槽1，當使橢圓振動的旋轉方向反轉時，能夠將輸送面21上的工件W向相反方向輸送。In particular, according to the chute 1 of the second embodiment, the vibration amplitude of the horizontal vibration mode and the vibration amplitude of the vertical vibration mode can be set independently, and the phase difference between the two vibration modes can also be freely set, so it is possible to easily adjust the conveying speed of the workpiece W. In addition, according to the chute 1 of the second embodiment, when the rotation direction of the elliptical vibration is reversed, the workpiece W on the conveying surface 21 can be conveyed in the opposite direction.

此外，根據第二實施方式的滑槽1，由於將輸送面21設定為朝向工件輸送方向D1下游端逐漸向下傾斜的傾斜面，因此從線性供料器L轉移到工件輸送路2的輸送面21的工件W以滑落的方式被輸送，能夠實施更順暢的輸送處理。另外，在將輸送面21上的工件W的輸送速度設定為比線性送料器L的線性主輸送路L1中的工件W的輸送速度慢的情況下，能夠在輸送面21上在輸送方向D1上無間隙的狀態或大致無間隙的狀態下輸送工件W，能夠防止輸送方向D1上的工件W彼此的距離變大（工件W的分離）現象的發生，並且能夠增大每單位時間的工件輸送量，能夠實現更穩定的工件W的恒定供給處理。In addition, according to the chute 1 of the second embodiment, since the conveying surface 21 is set as an inclined surface that gradually slopes downward toward the downstream end of the workpiece conveying direction D1, the workpiece W transferred from the linear feeder L to the conveying surface 21 of the workpiece conveying path 2 is conveyed in a sliding manner, which can implement smoother conveying processing. In addition, when the conveying speed of the workpiece W on the conveying surface 21 is set to be slower than the conveying speed of the workpiece W in the linear main conveying path L1 of the linear feeder L, the workpiece W can be conveyed on the conveying surface 21 in the conveying direction D1 without a gap or in a substantially gapless state, and the distance between the workpieces W in the conveying direction D1 can be prevented from becoming larger (separation of the workpieces W), and the workpiece conveying amount per unit time can be increased, thereby achieving more stable constant supply processing of the workpiece W.

另外，根據具有這樣的滑槽1的第二實施方式的振動輸送裝置X，起到上述滑槽1起到的作用效果，能夠從輸送面21的終端23朝向下一工序設備Y的工件移載面Y1以等間距且相同的姿勢恒定地供給工件W，並且能夠防止、抑制在從輸送面21的終端23向下一工序設備Y的工件移載面Y1轉接時工件W發生姿勢變更的不良情況。In addition, according to the vibration conveying device X of the second embodiment having such a chute 1, the effect of the above-mentioned chute 1 is achieved, and the workpiece W can be constantly supplied from the end 23 of the conveying surface 21 toward the workpiece transfer surface Y1 of the next process equipment Y at equal intervals and in the same posture, and the workpiece W can be prevented and suppressed from undergoing an undesirable posture change when transferring from the end 23 of the conveying surface 21 to the workpiece transfer surface Y1 of the next process equipment Y.

另外，本發明並不限定於上述的各實施方式。例如，在上述的實施方式中，例示了配置於輸送路的第一振動部的下端部的結構，但在第一振動部的上端部配置有輸送路的結構等輸送路的配置部位能夠適當選擇、變更。另外，第二振動部的配置部位也可以根據輸送路的配置部位而變更為不與輸送路干涉的適當的部位。In addition, the present invention is not limited to the above-mentioned embodiments. For example, in the above-mentioned embodiments, a structure in which the lower end of the first oscillating part is arranged on the transmission path is exemplified, but the arrangement position of the transmission path can be appropriately selected and changed, such as a structure in which the transmission path is arranged on the upper end of the first oscillating part. In addition, the arrangement position of the second oscillating part can also be changed to an appropriate position that does not interfere with the transmission path according to the arrangement position of the transmission path.

第二振動部的突出尺寸、重量等也能夠根據第一振動部的形狀等而適當變更。The protruding size, weight, etc. of the second vibrating part can also be appropriately changed according to the shape, etc. of the first vibrating part.

在上述的實施方式中，例示了將滑槽的輸送面沿著工件輸送方向設定為下坡的方式，但也可以採用不傾斜的平坦的輸送面。另外，根據能夠對輸送面上的工件賦予充分的推進力的本發明，也能夠將輸送面沿著工件輸送方向設定為上坡。In the above-mentioned embodiment, the conveying surface of the chute is set to be downslope along the workpiece conveying direction, but a flat conveying surface without inclination can also be adopted. In addition, according to the present invention that can give sufficient thrust to the workpiece on the conveying surface, the conveying surface can also be set to be upslope along the workpiece conveying direction.

本發明也包含將第一振動部和第二振動部設為分體的結構、將輸送路和第一振動部設為分體的結構。The present invention also includes a structure in which the first vibrating portion and the second vibrating portion are provided as separate bodies, and a structure in which the conveying path and the first vibrating portion are provided as separate bodies.

另外，在本發明中，能夠適當選擇、變更輸送面的截面槽形狀、沿著工件輸送方向的工件輸送路的長度。作為輸送面的截面形狀，可以舉出向上コ字狀、U字狀、V字狀等形狀。也可以構成為，包括具有與輸送面在預定方向上對置的限制壁的限制部，限制在輸送面上輸送的工件向從輸送面脫離的方向移動的動作。In addition, in the present invention, the cross-sectional groove shape of the conveying surface and the length of the workpiece conveying path along the workpiece conveying direction can be appropriately selected and changed. As the cross-sectional shape of the conveying surface, there can be an upward U-shaped, U-shaped, V-shaped, etc. It can also be configured to include a restriction portion having a restriction wall facing the conveying surface in a predetermined direction to restrict the movement of the workpiece conveyed on the conveying surface in the direction of leaving the conveying surface.

在本發明中，作為驅動部，能夠代替壓電元件或者在其基礎上應用磁致伸縮元件、其他元件。另外，第一輸送部中的驅動部的配置部位也能夠適當選擇、變更，根據振動模式，有時驅動部的配置部位配置在振動的波腹或波腹附近。即，為了在振動模式下更高效地振動，優選在由彈性變形引起的變形大的位置配置驅動部（黏貼壓電元件）。In the present invention, a magnetostrictive element or other element can be used as a driving part instead of a piezoelectric element or on its basis. In addition, the location of the driving part in the first transport part can be appropriately selected and changed. Depending on the vibration mode, the location of the driving part is sometimes arranged at or near the antinode of the vibration. That is, in order to vibrate more efficiently in the vibration mode, it is preferred to arrange the driving part (pasting the piezoelectric element) at a position where the deformation caused by elastic deformation is large.

作為垂直振動模式，也可以採用通過輸送部整體在高度方向（鉛垂方向）上進行伸縮運動的彈性變形而產生的縱向振動。As a vertical vibration mode, longitudinal vibration generated by elastic deformation of the entire conveyor unit in the height direction (vertical direction) can also be used.

進而，本發明也包括構成為能夠以只由水平振動模式構成的振動模式輸送輸送面上的工件的方式。Furthermore, the present invention also includes an embodiment in which the workpiece on the conveying surface can be conveyed in a vibration mode consisting only of a horizontal vibration mode.

另外，本發明的振動輸送裝置並不限定於全部包括振動盤供料器、線性供料器和滑槽的結構，也可以是在與振動盤供料器的主輸送路（螺旋輸送路）的終端相鄰的位置配置滑槽的結構、不包括振動盤供料器而在與線性供料器的主輸送路（線性主輸送路）的終端相鄰的位置配置滑槽的結構。另外，線性供料器也可以在線性輸送部的朝上表面形成有線性主輸送路和使從線性主輸送路排除的工件返回到上游側（例如料斗供料器的貯存部）的返回軌道。In addition, the vibration conveying device of the present invention is not limited to a structure that includes a vibration plate feeder, a linear feeder, and a chute. It can also be a structure in which a chute is arranged at a position adjacent to the terminal of the main conveying path (spiral conveying path) of the vibration plate feeder, or a structure in which a chute is arranged at a position adjacent to the terminal of the main conveying path (linear main conveying path) of the linear feeder without including the vibration plate feeder. In addition, the linear feeder can also form a linear main conveying path and a return track on the upward surface of the linear conveying part to return the workpieces discharged from the linear main conveying path to the upstream side (for example, the storage part of the hopper feeder).

而且，還能夠實現如下結構：在振動盤供料器與線性供料器之間設置本發明所涉及的滑槽，將從螺旋輸送路的終端到達工件輸送路的始端的工件輸送至工件輸送路的終端並換乘至線性供料器的線性主輸送路的始端。在該情況下，振動輸送裝置包括振動盤供料器和滑槽，能夠將本發明中的“下一工序設備的工件移載面”理解為線性主輸送路的始端。也可以是從料斗直接向滑槽供給工件的結構。Furthermore, the following structure can be realized: the chute involved in the present invention is provided between the vibrating plate feeder and the linear feeder, and the workpiece from the end of the spiral conveying path to the beginning of the workpiece conveying path is conveyed to the end of the workpiece conveying path and transferred to the beginning of the linear main conveying path of the linear feeder. In this case, the vibrating conveying device includes the vibrating plate feeder and the chute, and the "workpiece transfer surface of the next process equipment" in the present invention can be understood as the beginning of the linear main conveying path. It can also be a structure in which the workpiece is directly fed from the hopper to the chute.

也可以採用主輸送路和滑槽的輸送路的一部分彼此在高度方向上重疊的配置，使得滑槽的輸送路的始端附近區域位於與主輸送路的終端相鄰的位置且主輸送路的終端附近區域的下方，使工件從設定為下降梯度的主輸送路的終端通過自重下落到滑槽的輸送路的始端附近。在該情況下，輸送路的振幅的限制消失，能夠以高振幅振動，能夠增加工件供給量。Alternatively, the main conveyor path and a portion of the chute conveyor path may overlap each other in the height direction, so that the area near the beginning of the chute conveyor path is located adjacent to the end of the main conveyor path and below the area near the end of the main conveyor path, so that the workpiece falls from the end of the main conveyor path set as a descending gradient to the vicinity of the beginning of the chute conveyor path by its own weight. In this case, the amplitude of the conveyor path is no longer limited, and it can vibrate with a high amplitude, which can increase the amount of workpiece supply.

另外，本發明中的下一工序設備不限於外觀檢查裝置的旋轉台，只要是構成適當的檢查裝置或處理裝置的一部分且具有工件移載面的設備即可。In addition, the next process equipment in the present invention is not limited to the rotating table of the appearance inspection device, as long as it is a device that constitutes a part of an appropriate inspection device or processing device and has a workpiece transfer surface.

作為輸送對象物即工件的一例，可以舉出電子部件等微小零件，但工件也可以是電子部件以外的物品。As an example of the workpiece to be transported, micro parts such as electronic components can be cited, but the workpiece may be an object other than electronic components.

根據涉及本發明的第二實施方式，提供了一種滑槽，其能夠一邊使作為輸送對象物的工件沿著輸送面朝向輸送方向下游端移動一邊向預定的下一工序設備的工件移載面輸送，該滑槽包括：輸送路，其具有所述輸送面；輸送部，其將由彈性變形產生的振動向所述輸送面傳遞；以及驅動部，其使所述輸送部彈性變形，所述輸送部具有：第一振動部，其配置於與所述輸送路相鄰的位置；以及第二振動部，其以在該第一振動部中的與所述工件的輸送方向正交的方向的兩個面的法線方向上分別突出的姿勢配置，且能夠彈性變形，通過所述驅動部使所述輸送部彈性變形的狀態即振動模式至少具有作為在與所述工件的輸送方向平行的方向上撓曲的振動的水平振動模式，在所述振動模式中，所述第一振動部與所述第二振動部相互以反相位振動。According to a second embodiment of the present invention, a chute is provided, which can transport a workpiece as a transport object to a predetermined workpiece transfer surface of a next process device while moving the workpiece along the transport surface toward the downstream end of the transport direction. The chute includes: a transport path, which has the transport surface; a transport part, which transmits vibration generated by elastic deformation to the transport surface; and a driving part, which elastically deforms the transport part, wherein the transport part has: a first vibration part, which is arranged at a position adjacent to the transport path; adjacent to the position; and a second vibrating portion, which is configured to protrude in the normal directions of two faces of the first vibrating portion in a direction orthogonal to the conveying direction of the workpiece, and is capable of elastic deformation, and the state in which the conveying portion is elastically deformed by the driving portion, i.e., the vibration mode, has at least a horizontal vibration mode as a vibration that is bent in a direction parallel to the conveying direction of the workpiece, and in the vibration mode, the first vibrating portion and the second vibrating portion vibrate in opposite phases to each other.

涉及本發明第二實施方式的第二振動部配置在所述輸送部的重心或重心附近。The second vibrating portion according to the second embodiment of the present invention is disposed at or near the center of gravity of the transport portion.

根據涉及本發明的第二實施方式，還提供了一種振動輸送裝置，其能夠一邊通過振動使作為輸送對象物的工件朝向主輸送路的終端移動一邊向輸送方向下游側輸送，在與所述主輸送路的終端相鄰的位置配置涉及本發明第二實施方式的滑槽。According to the second embodiment of the present invention, a vibrating conveying device is also provided, which can move the workpiece as the conveying object toward the end of the main conveying path by vibration while conveying it downstream in the conveying direction, and a chute related to the second embodiment of the present invention is arranged at a position adjacent to the end of the main conveying path.

此外，各部的具體結構也不限於上述實施方式，能夠在不脫離本發明的主旨的範圍內進行各種變形。In addition, the specific structure of each part is not limited to the above-mentioned embodiment, and various modifications can be made without departing from the scope of the present invention.

1:滑槽 2:工件輸送路 21、21A:輸送面 22:始端 23:終端 24:錐面 3:輸送部 31、311:背面 313:輸送路設定面 314:輸送路非設定面 32、312:前表面 32A:部分 32B:部分 33、34:側面 4:驅動部 4a、4b:壓電元件 5:支撐部 6:固定部 B1:輸送路 B2:輸送部 D1:輸送方向 L:線性供料器 L1:主輸送路 L11:終端 L2:線性輸送部 T:旋轉台 W:工件 X:振動輸送裝置 Y:下一工序設備 Y1:工件移載面 1: chute 2: workpiece conveying path 21, 21A: conveying surface 22: starting end 23: end end 24: tapered surface 3: conveying part 31, 311: back surface 313: conveying path setting surface 314: conveying path non-setting surface 32, 312: front surface 32A: part 32B: part 33, 34: side surface 4: driving part 4a, 4b: piezoelectric element 5: support part 6: fixing part B1: conveying path B2: conveying part D1: conveying direction L: linear feeder L1: main conveying path L11: end end L2: linear conveying part T: rotary table W: workpiece X: vibration conveying device Y: Next process equipment Y1: Workpiece transfer surface

圖1是具有本發明的第一實施方式的滑槽的振動輸送裝置的整體圖。 圖2是圖1的主要部分放大圖。 圖3是第一實施方式的滑槽的整體外觀圖。 圖4是表示第一實施方式的滑槽的圖。 圖5是以解析動畫表示第一實施方式中的水平振動模式的圖。 圖6是以解析動畫表示第一實施方式中的水平振動模式的圖。 圖7是以解析動畫表示第一實施方式中的垂直振動模式的圖。 圖8是以解析動畫表示第一實施方式中的垂直振動模式的圖。 圖9是以解析動畫表示第一實施方式中的振動模式的經時變化的圖。 圖10是示意性地表示第一實施方式的振動模式的工件輸送處理的圖。 圖11是具有本發明的第二實施方式的滑槽的振動輸送裝置的整體圖。 圖12是圖11的主要部分放大圖。 圖13是第二實施方式的滑槽的整體外觀圖。 圖14是表示第二實施方式的滑槽的圖。 圖15是以解析動畫表示第二實施方式中的水平振動模式的圖。 圖16是以解析動畫表示第二實施方式中的垂直振動模式的圖。 圖17是以解析動畫表示第二實施方式中的垂直振動模式的圖。 圖18是以解析動畫表示第二實施方式中的振動模式的經時變化的圖。 圖19是示意性地表示第二實施方式的振動模式的工件輸送處理的圖。 圖20是以解析動畫表示不具有第二振動部的輸送部的振動狀態的圖。 FIG. 1 is an overall view of a vibration conveying device having a chute of the first embodiment of the present invention. FIG. 2 is an enlarged view of the main part of FIG. 1 . FIG. 3 is an overall external view of the chute of the first embodiment. FIG. 4 is a view showing the chute of the first embodiment. FIG. 5 is a view showing the horizontal vibration mode in the first embodiment by analytical animation. FIG. 6 is a view showing the horizontal vibration mode in the first embodiment by analytical animation. FIG. 7 is a view showing the vertical vibration mode in the first embodiment by analytical animation. FIG. 8 is a view showing the vertical vibration mode in the first embodiment by analytical animation. FIG. 9 is a view showing the time change of the vibration mode in the first embodiment by analytical animation. FIG. 10 is a view schematically showing the workpiece conveying process of the vibration mode of the first embodiment. FIG. 11 is an overall view of a vibration conveying device having a chute of the second embodiment of the present invention. FIG. 12 is an enlarged view of the main part of FIG. 11. FIG. 13 is an overall appearance view of the chute of the second embodiment. FIG. 14 is a view showing the chute of the second embodiment. FIG. 15 is a view showing the horizontal vibration mode in the second embodiment by analytical animation. FIG. 16 is a view showing the vertical vibration mode in the second embodiment by analytical animation. FIG. 17 is a view showing the vertical vibration mode in the second embodiment by analytical animation. FIG. 18 is a view showing the time change of the vibration mode in the second embodiment by analytical animation. FIG. 19 is a view schematically showing the workpiece conveying process of the vibration mode of the second embodiment. FIG. 20 is a view showing the vibration state of the conveying part without the second vibration part by analytical animation.

1:滑槽 1: Chute

2:工件輸送路 2: Workpiece conveying path

21:輸送面 21: Conveyor surface

22:始端 22: Beginning

23:終端 23:Terminal

24:錐面 24: Cone

3:輸送部 3: Transport department

4:驅動部 4: Drive unit

4a:壓電元件 4a: Piezoelectric element

5:支撐部 5: Support part

6:固定部 6:Fixed part

D1:輸送方向 D1: Transport direction

L:線性供料器 L: Linear feeder

L1:主輸送路 L1: Main transmission line

L11:終端 L11: Terminal

L2:線性輸送部 L2: Linear transport section

T:旋轉台 T: Turntable

W:工件 W: Workpiece

X:振動輸送裝置 X: Vibrating conveyor device

Y:下一工序設備 Y: Equipment for the next process

Y1:工件移載面 Y1: Workpiece transfer surface

Claims (2)

一種滑槽，其能夠一邊使作為輸送對象物的工件沿著輸送面朝向輸送方向下游端移動一邊向預定的下一工序設備的工件移載面輸送，該滑槽包含： 輸送路，其在向上表面具有該輸送面； 輸送部，其配置於與該輸送路相鄰的位置，且將由彈性變形產生的振動向該輸送面傳遞；以及 驅動部，其使該輸送部彈性變形， 通過該驅動部使該輸送部彈性變形的狀態即振動模式是合成了水平振動模式和垂直振動模式的橢圓振動，該水平振動模式是在與該工件的輸送方向平行的方向上撓曲的振動，該垂直振動模式是與該工件的輸送方向垂直的正交方向的振動， 在該振動模式中，構成為該輸送面整體至少成為與該水平振動模式的波腹相當的位置或其附近位置，從而在該輸送面整體生成相同的橢圓振動。 A chute capable of transporting a workpiece as a transport object while moving it along a transport surface toward the downstream end of the transport direction and transporting it to a workpiece transfer surface of a predetermined next process device, the chute comprising: a transport path having the transport surface on an upward surface; a transport portion disposed adjacent to the transport path and transmitting vibrations generated by elastic deformation to the transport surface; and a driving portion that elastically deforms the transport portion, a state in which the transport portion is elastically deformed by the driving portion, i.e., a vibration mode, is an elliptical vibration synthesized from a horizontal vibration mode and a vertical vibration mode, the horizontal vibration mode being a vibration that is bent in a direction parallel to the transport direction of the workpiece, and the vertical vibration mode being a vibration in an orthogonal direction perpendicular to the transport direction of the workpiece, In this vibration mode, the entire conveying surface is configured to be at least at a position equivalent to or near the antinode of the horizontal vibration mode, thereby generating the same elliptical vibration on the entire conveying surface. 一種振動輸送裝置，其能夠一邊通過振動使作為輸送對象物的工件朝向主輸送路的終端移動一邊向輸送方向下游側輸送，該振動輸送裝置的特徵在於， 在與該主輸送路的終端相鄰的位置配置如請求項1所述的滑槽。 A vibrating conveying device capable of moving a workpiece as a conveying object toward the end of a main conveying path by vibration while conveying it downstream in the conveying direction, wherein the vibrating conveying device is characterized in that a chute as described in claim 1 is arranged at a position adjacent to the end of the main conveying path.