JP6762220B2 - 加工装置の搬送機構 - Google Patents
加工装置の搬送機構 Download PDFInfo
- Publication number
- JP6762220B2 JP6762220B2 JP2016243760A JP2016243760A JP6762220B2 JP 6762220 B2 JP6762220 B2 JP 6762220B2 JP 2016243760 A JP2016243760 A JP 2016243760A JP 2016243760 A JP2016243760 A JP 2016243760A JP 6762220 B2 JP6762220 B2 JP 6762220B2
- Authority
- JP
- Japan
- Prior art keywords
- unit
- workpiece
- spacer
- unload
- work piece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000012545 processing Methods 0.000 title claims description 82
- 230000007246 mechanism Effects 0.000 title description 19
- 238000012546 transfer Methods 0.000 title description 16
- 125000006850 spacer group Chemical group 0.000 claims description 76
- 238000003754 machining Methods 0.000 claims description 44
- 230000007723 transport mechanism Effects 0.000 claims description 36
- 239000002390 adhesive tape Substances 0.000 claims description 19
- 238000010030 laminating Methods 0.000 claims description 3
- 230000032258 transport Effects 0.000 claims 3
- 238000005520 cutting process Methods 0.000 description 24
- 239000000463 material Substances 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 101000911772 Homo sapiens Hsc70-interacting protein Proteins 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000002173 cutting fluid Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Dicing (AREA)
Description
2 装置本体
3 柱部
4 加工領域
5 搬出入領域
6 直上領域
7 ロード領域
8 アンロード領域
10 チャックテーブル
10a 保持面
20 加工ユニット
21 切削ブレード
22 スピンドル
23 ハウジング
31 加工送りユニット
311 移動テーブル
32 割り出し送りユニット
33 切削送りユニット
35 蛇腹状カバー
40、40A 搬送機構
41 ロードテーブル
41a、42a 載置面
41b、42b 突き当て部
42 アンロードテーブル
50 搬送ユニット
51a エアシリンダ
51 ロードテーブル移動ユニット
52 アンロードテーブル移動ユニット
53 ガイドレール
60 載せ替えユニット
61 ブラケット
62 被加工物保持部
63 スペーサ保持部
70 エアーノズル
F 環状フレーム
F1 開口
FU フレームユニット
S,SA スペーサ
S1 段差部
T 粘着テープ
W 被加工物
Claims (3)
- 被加工物を保持するチャックテーブルと、該チャックテーブルに保持された該被加工物を加工する加工ユニットと、該被加工物を加工する加工領域と該被加工物を搬出入する搬出入領域との間で該チャックテーブルを加工送り方向へ移動する加工送りユニットと、を備える加工装置に設置され、該被加工物を該搬出入領域の該チャックテーブルに搬出入する加工装置の搬送機構であって、
該搬出入領域に隣接し、該加工送りユニットの側方の領域で、スペーサを介して被加工物を積層して支持するロードテーブルと、
該搬出入領域に隣接し、該加工送りユニットを挟んで該ロードテーブルと反対側の領域で、該スペーサを介して加工後の該被加工物を積層して支持するアンロードテーブルと、
被加工物保持部とスペーサ保持部とを備え、該ロードテーブルから該被加工物と該スペーサとを搬出して該チャックテーブルに該被加工物のみ搬入し、該ロードテーブルから搬出して支持したままの該スペーサを加工後の該被加工物に重ねて該チャックテーブルから該アンロードテーブルに搬入する搬送ユニットと、を備えることを特徴とする加工装置の搬送機構。 - 該搬送ユニットは、
該ロードテーブルを、該搬出入領域に位置付けられた該チャックテーブルの直上の直上領域に移動させるロードテーブル移動ユニットと、
該アンロードテーブルを該直上領域に移動させるアンロードテーブル移動ユニットと、
鉛直方向に移動し、該搬出入領域に位置付けられた該チャックテーブルと、該直上領域に位置付けられた該ロードテーブル又は該アンロードテーブルとの間で該被加工物と該スペーサとを搬送する載せ替えユニットと、を備えることを特徴とする請求項1記載の加工装置の搬送機構。 - 該被加工物は、環状フレームの開口に被加工物が粘着テープで支持されたフレームユニットであり、
該ロードテーブル又は該アンロードテーブルは、該フレームユニットが面方向に移動するのを規制する突き当て部を備えることを特徴とする請求項1又は2記載の加工装置の搬送機構。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016243760A JP6762220B2 (ja) | 2016-12-15 | 2016-12-15 | 加工装置の搬送機構 |
TW106138567A TWI737848B (zh) | 2016-12-15 | 2017-11-08 | 加工裝置的搬運機構 |
CN201711294061.3A CN108231641B (zh) | 2016-12-15 | 2017-12-08 | 加工装置的搬送机构 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016243760A JP6762220B2 (ja) | 2016-12-15 | 2016-12-15 | 加工装置の搬送機構 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018098425A JP2018098425A (ja) | 2018-06-21 |
JP6762220B2 true JP6762220B2 (ja) | 2020-09-30 |
Family
ID=62631428
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016243760A Active JP6762220B2 (ja) | 2016-12-15 | 2016-12-15 | 加工装置の搬送機構 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP6762220B2 (ja) |
CN (1) | CN108231641B (ja) |
TW (1) | TWI737848B (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7294777B2 (ja) * | 2018-07-09 | 2023-06-20 | 株式会社ディスコ | 被加工物の乾燥方法及び切削装置 |
JP7184620B2 (ja) * | 2018-12-11 | 2022-12-06 | 株式会社ディスコ | 切削装置 |
CN116329975B (zh) * | 2023-04-03 | 2023-09-05 | 东莞市腾信精密仪器有限公司 | 一种工业零组件精密机加工数控设备 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5248987B2 (ja) * | 2008-11-11 | 2013-07-31 | 株式会社ディスコ | 搬送機構 |
JP5773841B2 (ja) * | 2011-10-27 | 2015-09-02 | 株式会社ディスコ | ユニット搬出入装置 |
JP2014135333A (ja) * | 2013-01-09 | 2014-07-24 | Mitsuboshi Diamond Industrial Co Ltd | 吸着昇降装置 |
JP2015233065A (ja) * | 2014-06-09 | 2015-12-24 | 株式会社ディスコ | 搬送装置 |
JP6456177B2 (ja) * | 2015-02-12 | 2019-01-23 | 株式会社ディスコ | ウェーハ処理システム |
JP6491017B2 (ja) * | 2015-04-08 | 2019-03-27 | 株式会社ディスコ | 被加工物の搬送トレー |
JP6441737B2 (ja) * | 2015-04-28 | 2018-12-19 | 株式会社ディスコ | 切削装置 |
-
2016
- 2016-12-15 JP JP2016243760A patent/JP6762220B2/ja active Active
-
2017
- 2017-11-08 TW TW106138567A patent/TWI737848B/zh active
- 2017-12-08 CN CN201711294061.3A patent/CN108231641B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
CN108231641A (zh) | 2018-06-29 |
TW201830559A (zh) | 2018-08-16 |
TWI737848B (zh) | 2021-09-01 |
CN108231641B (zh) | 2023-04-07 |
JP2018098425A (ja) | 2018-06-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI719055B (zh) | 加工裝置的搬運機構 | |
JP6218600B2 (ja) | 加工装置 | |
JP6491017B2 (ja) | 被加工物の搬送トレー | |
JP6762220B2 (ja) | 加工装置の搬送機構 | |
CN107030902B (zh) | 切削装置 | |
JP2015115418A (ja) | 真空チャック装置および同真空チャック装置を備えた立形精密加工機並びにダイシング装置 | |
KR102227406B1 (ko) | 웨이퍼 가공 시스템 | |
JP2017112227A (ja) | 加工装置 | |
JP6579930B2 (ja) | 加工装置 | |
JP6579929B2 (ja) | 加工装置 | |
JP2011124419A (ja) | 加工装置 | |
JP4856593B2 (ja) | マウント装置及びマウント方法 | |
JP6804146B2 (ja) | 搬送装置、加工装置及び搬送方法 | |
JP2017112228A (ja) | 加工装置 | |
JP2012156418A (ja) | 板状部材の支持装置 | |
JP2017079284A (ja) | レーザー加工装置 | |
JP7002260B2 (ja) | 分離装置および分離方法 | |
JP6448456B2 (ja) | 加工装置 | |
JP2020116719A (ja) | 搬送機構、被加工物の搬送方法及び加工装置 | |
JP6061529B2 (ja) | 搬送機構 | |
JP2020092166A (ja) | 搬送装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20191018 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20200806 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20200811 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20200908 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6762220 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |