JP6745458B2 - 半導体素子 - Google Patents
半導体素子 Download PDFInfo
- Publication number
- JP6745458B2 JP6745458B2 JP2016059482A JP2016059482A JP6745458B2 JP 6745458 B2 JP6745458 B2 JP 6745458B2 JP 2016059482 A JP2016059482 A JP 2016059482A JP 2016059482 A JP2016059482 A JP 2016059482A JP 6745458 B2 JP6745458 B2 JP 6745458B2
- Authority
- JP
- Japan
- Prior art keywords
- region
- concentration
- guard ring
- electrode
- silicon carbide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000004065 semiconductor Substances 0.000 title claims description 191
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 69
- 230000004888 barrier function Effects 0.000 claims description 61
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 61
- 239000000758 substrate Substances 0.000 claims description 44
- 239000012535 impurity Substances 0.000 claims description 41
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 229910052759 nickel Inorganic materials 0.000 claims description 5
- 229910052719 titanium Inorganic materials 0.000 claims description 5
- 239000007769 metal material Substances 0.000 claims description 4
- 238000002513 implantation Methods 0.000 description 41
- 230000015556 catabolic process Effects 0.000 description 39
- 238000004519 manufacturing process Methods 0.000 description 23
- 238000005468 ion implantation Methods 0.000 description 19
- 230000005684 electric field Effects 0.000 description 15
- 238000000034 method Methods 0.000 description 12
- 230000007547 defect Effects 0.000 description 11
- 238000002161 passivation Methods 0.000 description 10
- 150000002500 ions Chemical class 0.000 description 9
- 230000004048 modification Effects 0.000 description 7
- 238000012986 modification Methods 0.000 description 7
- 230000001133 acceleration Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000005530 etching Methods 0.000 description 5
- 238000011156 evaluation Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000009826 distribution Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 230000005669 field effect Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000001186 cumulative effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
- H01L29/872—Schottky diodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
- H01L29/1608—Silicon carbide
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66053—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide
- H01L29/6606—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide the devices being controllable only by variation of the electric current supplied or the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. two-terminal devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/0212—Auxiliary members for bonding areas, e.g. spacers
- H01L2224/02122—Auxiliary members for bonding areas, e.g. spacers being formed on the semiconductor or solid-state body
- H01L2224/02163—Auxiliary members for bonding areas, e.g. spacers being formed on the semiconductor or solid-state body on the bonding area
- H01L2224/02165—Reinforcing structures
- H01L2224/02166—Collar structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
- H01L29/0619—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE] with a supplementary region doped oppositely to or in rectifying contact with the semiconductor containing or contacting region, e.g. guard rings with PN or Schottky junction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0684—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape, relative sizes or dispositions of the semiconductor regions or junctions between the regions
- H01L29/0692—Surface layout
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/36—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the concentration or distribution of impurities in the bulk material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/402—Field plates
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Electrodes Of Semiconductors (AREA)
Description
以下、図面を参照しながら、本開示の第1の実施形態について説明する。本実施形態では、第1導電型がn型、第2導電型がp型である例について示すが、これに限定されない。本開示の実施形態において、第1導電型がp型、第2導電型がn型であってもよい。
図1から図13を参照して、第1の実施形態に係る半導体素子1000を説明する。
金属と半導体からなるショットキー接合、及び半導体のpn接合に対して逆バイアスを印加すると、接合界面において空乏層が延びる。接合界面での電界強度がある値に到達すると、空乏層にアバランシェ電流が流れ、それ以上逆バイアスを印加できなくなる。本願ではこのアバランシェ電流が流れる電圧を単に「耐圧」と称する。
半導体素子1000における終端領域151およびバリア領域152は、例えばイオン注入により同時に形成されてもよい。これにより、プロセスを簡便化でき、製造コストを低減できる。終端領域151およびバリア領域152は、例えば、ドリフト層102に対してAlイオンを注入することにより形成される。このとき、異なるエネルギーにてAlイオンを複数回注入することで、高濃度領域121と低濃度領域122とを有する終端領域151およびバリア領域152を同時に形成できる。なお、以下の説明では、ガードリング領域153およびFLR領域154を含む終端領域151とバリア領域152とを「p型注入領域」と総称する。
次に、本実施形態に係る半導体素子1000の製造方法について図5から図13を用いて説明する。図5から図13は、本実施形態に係る半導体素子1000の製造方法の一部を示す断面図である。
膜111の厚さは例えば300nmである。次にフォトレジストによるマスクを形成して例えばウェットエッチングによりガードリング領域153の一部、および、ガードリング領域153の内側のドリフト層102を露出させる。その後マスクを除去する。このようにして、図9に示すように、開口を有する絶縁膜111が得られる。
以下、本実施形態の半導体素子の変形例を説明する。
101 半導体基板
102 ドリフト層
103 バッファ層
110 第2電極
111 絶縁膜
112 上部電極
113 裏面電極
114 パッシベーション膜
121 高濃度領域
122 低濃度領域
151 終端領域
152 バリア領域
153 ガードリング領域
154 FLR領域
159 第1電極
160 マスク
201 主面
202 表面
Claims (7)
- 主面及び裏面を有する第1導電型の半導体基板と、
前記半導体基板の前記主面上に配置された第1導電型の炭化珪素半導体層と、
前記炭化珪素半導体層内に配置された第2導電型のガードリング領域と、
前記炭化珪素半導体層内に配置された第2導電型のフローティング領域と、
前記炭化珪素半導体層上に配置され、前記炭化珪素半導体層とショットキー接合を形成する第1電極と、
前記半導体基板の前記裏面上に配置され、前記半導体基板とオーミック接合を形成する第2電極と、
前記主面の法線方向から見て、前記ガードリング領域に囲まれた前記炭化珪素半導体層内に配置された複数の第2導電型のバリア領域と、を備え、
前記ガードリング領域は、前記主面の法線方向から見て前記炭化珪素半導体層表面の一部を囲むように配置されており、
前記第1電極は、前記炭化珪素半導体層と接する面を有し、
前記第1電極は、前記炭化珪素半導体層と接する前記面の縁部において、前記ガードリング領域と接し、
前記フローティング領域は、前記主面の法線方向から見て前記ガードリング領域を囲み、かつ前記ガードリング領域と接触しておらず、
前記ガードリング領域、前記フローティング領域および前記複数の第2導電型のバリア領域の各々は、前記炭化珪素半導体層の表面に接する第2導電型の高濃度領域と、前記高濃度領域より下方に位置する第2導電型の低濃度領域とを含み、
前記高濃度領域の不純物濃度は、前記低濃度領域の不純物濃度よりも高く、
前記主面の法線方向から見て、前記高濃度領域と前記低濃度領域とは同一の輪郭を有しており、
前記高濃度領域の前記不純物濃度は、1×1020cm−3以上であり、前記低濃度領域の前記不純物濃度は、1×1020cm−3未満であり、
前記主面の法線方向から見て、前記複数の第2導電型のバリア領域のそれぞれは、第1の方向に延びる形状を有し、
前記複数の第2導電型のバリア領域は、前記第1の方向に直交する第2の方向に第1間隔を空けて配列されており、
前記複数の第2導電型のバリア領域のそれぞれにおける前記第1の方向の両端は、前記ガードリング領域と接続されており、
前記主面の法線方向から見て、前記複数の第2導電型のバリア領域のうち前記ガードリング領域に最も近いバリア領域と、前記ガードリング領域との間隔である第2間隔の、前記第2の方向における最大幅は、前記第1間隔より小さい、半導体素子。 - 前記低濃度領域の深さ方向の前記不純物濃度のプロファイルは、上に凸である形状を含む、請求項1に記載の半導体素子。
- 前記ガードリング領域と接する金属材料は前記第1電極のみである、請求項1または2に記載の半導体素子。
- 前記ガードリング領域は、前記第1電極とはオーミック接合を形成しない、請求項1から3のいずれかに記載の半導体素子。
- 前記第1電極はTi、Ni及びMoからなる群から選択される金属を含む、請求項1から4のいずれかに記載の半導体素子。
- 前記主面の法線方向から見て、前記第2の方向における、前記ガードリング領域と前記フローティング領域との間隔である第3間隔は、前記最大幅より小さい、請求項1から5のいずれかに記載の半導体素子。
- 前記ガードリング領域の少なくとも一部を覆う絶縁膜と、
前記第1電極の上面に配置された上部電極と
をさらに備え、
前記上部電極は前記第1電極の上面および端面を覆い、
前記上部電極の端面は前記絶縁膜上にある、請求項1から6のいずれかに記載の半導体素子。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015083369 | 2015-04-15 | ||
JP2015083369 | 2015-04-15 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016208016A JP2016208016A (ja) | 2016-12-08 |
JP6745458B2 true JP6745458B2 (ja) | 2020-08-26 |
Family
ID=57129320
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016059482A Active JP6745458B2 (ja) | 2015-04-15 | 2016-03-24 | 半導体素子 |
Country Status (2)
Country | Link |
---|---|
US (1) | US20160308072A1 (ja) |
JP (1) | JP6745458B2 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102016104968B3 (de) * | 2016-03-17 | 2017-07-27 | Infineon Technologies Ag | Verfahren zum herstellen von halbleitervorrichtungen mit transistorzellen, halbleitervorrichtung und mikroelektromechanische vorrichtung |
JP6719090B2 (ja) * | 2016-12-19 | 2020-07-08 | パナソニックIpマネジメント株式会社 | 半導体素子 |
CN106887470B (zh) * | 2017-01-23 | 2019-07-16 | 西安电子科技大学 | Ga2O3肖特基二极管器件结构及其制作方法 |
JP7113220B2 (ja) * | 2018-02-06 | 2022-08-05 | パナソニックIpマネジメント株式会社 | 半導体素子およびその製造方法 |
JP7259609B2 (ja) * | 2019-07-17 | 2023-04-18 | 株式会社デンソー | 半導体装置 |
CN112233981A (zh) * | 2020-10-13 | 2021-01-15 | 长江存储科技有限责任公司 | 半导体器件及其制备方法 |
CN114927535B (zh) * | 2022-05-20 | 2023-09-22 | 无锡鉴微华芯科技有限公司 | 具有双三维全包围保护环的x射线检测器及制备方法 |
Family Cites Families (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100342798B1 (ko) * | 1998-03-19 | 2002-07-03 | 가나이 쓰토무 | 탄화 규소 반도체 스위칭 장치 |
JP4892787B2 (ja) * | 2001-04-09 | 2012-03-07 | 株式会社デンソー | ショットキーダイオード及びその製造方法 |
US8901699B2 (en) * | 2005-05-11 | 2014-12-02 | Cree, Inc. | Silicon carbide junction barrier Schottky diodes with suppressed minority carrier injection |
US20070138482A1 (en) * | 2005-12-08 | 2007-06-21 | Nissan Motor Co., Ltd. | Silicon carbide semiconductor device and method for producing the same |
JP2007235064A (ja) * | 2006-03-03 | 2007-09-13 | Matsushita Electric Ind Co Ltd | ショットキーバリア半導体装置及びその製造方法 |
JP4356767B2 (ja) * | 2007-05-10 | 2009-11-04 | 株式会社デンソー | ジャンクションバリアショットキーダイオードを備えた炭化珪素半導体装置 |
JP4420062B2 (ja) * | 2007-05-10 | 2010-02-24 | 株式会社デンソー | ジャンクションバリアショットキーダイオードを備えた炭化珪素半導体装置 |
JP4375439B2 (ja) * | 2007-05-30 | 2009-12-02 | 株式会社デンソー | ジャンクションバリアショットキーダイオードを備えた炭化珪素半導体装置 |
JP4333782B2 (ja) * | 2007-07-05 | 2009-09-16 | 株式会社デンソー | ジャンクションバリアショットキーダイオードを備えた炭化珪素半導体装置 |
JP2009059764A (ja) * | 2007-08-30 | 2009-03-19 | Panasonic Corp | ショットキーバリアダイオードおよびその製造方法 |
JP2009130266A (ja) * | 2007-11-27 | 2009-06-11 | Toshiba Corp | 半導体基板および半導体装置、半導体装置の製造方法 |
JP2010087195A (ja) * | 2008-09-30 | 2010-04-15 | Panasonic Corp | 半導体装置 |
CN102217070B (zh) * | 2009-09-03 | 2013-09-25 | 松下电器产业株式会社 | 半导体装置及其制造方法 |
JP5172916B2 (ja) * | 2010-09-08 | 2013-03-27 | 株式会社東芝 | 半導体整流装置 |
WO2012056704A1 (ja) * | 2010-10-29 | 2012-05-03 | パナソニック株式会社 | 半導体素子および半導体装置 |
JP5644536B2 (ja) * | 2011-01-21 | 2014-12-24 | 三菱電機株式会社 | 電力用半導体装置 |
WO2013121532A1 (ja) * | 2012-02-15 | 2013-08-22 | 富士電機株式会社 | ワイドバンドギャップ半導体装置 |
WO2013136550A1 (ja) * | 2012-03-16 | 2013-09-19 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
US9496344B2 (en) * | 2012-03-30 | 2016-11-15 | Mitsubishi Electric Corporation | Semiconductor device including well regions with different impurity densities |
JP5812029B2 (ja) * | 2012-06-13 | 2015-11-11 | 株式会社デンソー | 炭化珪素半導体装置およびその製造方法 |
JP5811977B2 (ja) * | 2012-09-18 | 2015-11-11 | 株式会社デンソー | 炭化珪素半導体装置 |
JP5628462B1 (ja) * | 2012-12-03 | 2014-11-19 | パナソニック株式会社 | 半導体装置およびその製造方法 |
JP6028676B2 (ja) * | 2013-05-21 | 2016-11-16 | 住友電気工業株式会社 | 炭化珪素半導体装置 |
JP6244665B2 (ja) * | 2013-05-29 | 2017-12-13 | 住友電気工業株式会社 | 半導体装置 |
US20160254357A1 (en) * | 2013-10-24 | 2016-09-01 | Rohm Co., Ltd. | Semiconductor device and semiconductor package |
CN106256024B (zh) * | 2014-04-30 | 2019-11-26 | 三菱电机株式会社 | 碳化硅半导体装置 |
JP6356592B2 (ja) * | 2014-12-17 | 2018-07-11 | トヨタ自動車株式会社 | ショットキーバリアダイオードとその製造方法 |
JP6323570B2 (ja) * | 2014-12-25 | 2018-05-16 | 富士電機株式会社 | 半導体装置 |
JP2016201448A (ja) * | 2015-04-09 | 2016-12-01 | トヨタ自動車株式会社 | ダイオード及びダイオードの製造方法 |
US9773924B2 (en) * | 2015-04-22 | 2017-09-26 | Panasonic Intellectual Property Management Co., Ltd. | Semiconductor device having barrier region and edge termination region enclosing barrier region |
-
2016
- 2016-03-24 JP JP2016059482A patent/JP6745458B2/ja active Active
- 2016-04-01 US US15/089,383 patent/US20160308072A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
JP2016208016A (ja) | 2016-12-08 |
US20160308072A1 (en) | 2016-10-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6745458B2 (ja) | 半導体素子 | |
JP6624592B2 (ja) | 半導体素子及びその製造方法 | |
JP5101985B2 (ja) | ジャンクションバリアショットキーダイオード | |
JP6202944B2 (ja) | 炭化珪素半導体装置およびその製造方法 | |
JP5452718B2 (ja) | 半導体装置 | |
TWI596783B (zh) | Semiconductor device | |
JP6065154B2 (ja) | 炭化珪素半導体装置 | |
JP7113220B2 (ja) | 半導体素子およびその製造方法 | |
US8890169B2 (en) | Semiconductor device | |
US9178079B2 (en) | Semiconductor diode device | |
JP6010773B2 (ja) | 半導体素子及びその製造方法 | |
CN108735720B (zh) | 半导体元件 | |
US10096703B2 (en) | Semiconductor device and method of manufacturing semiconductor device | |
JP7113230B2 (ja) | 半導体素子 | |
KR101416361B1 (ko) | 쇼트키 배리어 다이오드 및 그 제조 방법 | |
JP6125748B2 (ja) | 半導体装置 | |
JP7030665B2 (ja) | 半導体装置 | |
US9947806B2 (en) | Semiconductor device | |
JP2017201683A (ja) | 半導体素子 | |
JP5755722B2 (ja) | 半導体装置 | |
JP5476439B2 (ja) | ジャンクションバリアショットキーダイオード | |
JP6651801B2 (ja) | 半導体装置および半導体装置の製造方法 | |
JP2017098578A (ja) | 炭化珪素半導体装置およびその製造方法 | |
EP4036986A1 (en) | Silicon carbide vertical conduction mosfet device and manufacturing process thereof | |
JP2024060452A (ja) | 半導体装置とその製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20181011 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20190614 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20190709 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20190808 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200107 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200122 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20200428 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200527 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20200605 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20200714 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20200716 |
|
R151 | Written notification of patent or utility model registration |
Ref document number: 6745458 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R151 |