JP6652684B1 - レーザ装置 - Google Patents
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- H01S3/22—Gases
- H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
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- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
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- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
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- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
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- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
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- H01S3/081—Construction or shape of optical resonators or components thereof comprising three or more reflectors
- H01S3/0811—Construction or shape of optical resonators or components thereof comprising three or more reflectors incorporating a dispersive element, e.g. a prism for wavelength selection
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- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
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- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/081—Construction or shape of optical resonators or components thereof comprising three or more reflectors
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- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
- H01S3/1123—Q-switching
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Abstract
Description
図1は、本発明の実施の形態1にかかるレーザ装置10の概略構成を示す図である。レーザ装置10は、レーザ媒質である気体中での放電によって気体分子を励起させ、レーザ光を発振させるガスレーザである。レーザ装置10は、二酸化炭素(CO2)を含むレーザ媒質を用いてレーザ発振を行うCO2レーザである。
(1−An)2=(1−A1)2exp{2(g1−gn)L} ・・・(1)
An=exp(−2φn 2/ωn 2) ・・・(2)
rn=r1exp{2(g1−gn)L} ・・・(3)
図10は、本発明の実施の形態2にかかるレーザ装置20の概略構成を示す図である。レーザ装置20は、平板形状をなすいわゆるスラブ状の収容部8を有する。実施の形態2では、上記の実施の形態1と同一の構成要素には同一の符号を付し、実施の形態1とは異なる構成について主に説明する。
d2/(4λL)<1 ・・・(4)
図16は、本発明の実施の形態3にかかるレーザ装置30の概略構成を示す図である。レーザ装置30は、電気光学(Electro-Optic:EO)結晶31と偏光ビームスプリッタ32とを有する。電気光学結晶31と偏光ビームスプリッタ32とは、パルス発振機構を構成する。パルス発振機構は、複数のビームをパルス化する。実施の形態3では、上記の実施の形態1および2と同一の構成要素には同一の符号を付し、実施の形態1および2とは異なる構成について主に説明する。
図20は、本発明の実施の形態4にかかるレーザ装置40の概略構成を示す図である。レーザ装置40は、少なくとも1つの増幅器41と、増幅器41へ向けてビームが伝搬する光学系42とを有する。実施の形態4では、上記の実施の形態1から3と同一の構成要素には同一の符号を付し、実施の形態1から3とは異なる構成について主に説明する。
Claims (9)
- 互いに波長が異なる複数のビームを共振させる第1のミラーおよび第2のミラーと、
ビーム中心軸の向きが互いに異なる状態で前記第1のミラーから入射する前記複数のビームを、互いにビーム中心軸を一致させて前記第2のミラーへ進行させ、かつ、ビーム中心軸が互いに一致する状態で前記第2のミラーから入射する前記複数のビームを、ビーム中心軸の向きを互いに異なる状態にして前記第1のミラーへ進行させる回折格子と、
前記第1のミラーと前記回折格子との間を進行する前記複数のビームが通過するレーザ媒質であって前記複数のビームの各波長においてピークが現れる離散的な利得スペクトルを有する二酸化炭素レーザガスを収容する収容部と、
前記回折格子と前記第1のミラーとの間に設けられ、前記複数のビームに対する損失をビームごとに調整する調整部と、
を備え、
互いにビーム中心軸が一致した状態で前記複数のビームを出力し、かつ前記複数のビームのビーム強度を均一化することを特徴とするレーザ装置。 - 互いに波長が異なる複数のビームを共振させる第1のミラーおよび第2のミラーと、
ビーム中心軸の向きが互いに異なる状態で前記第1のミラーから入射する前記複数のビームを、互いにビーム中心軸を一致させて前記第2のミラーへ進行させ、かつ、ビーム中心軸が互いに一致する状態で前記第2のミラーから入射する前記複数のビームを、ビーム中心軸の向きを互いに異なる状態にして前記第1のミラーへ進行させる回折格子と、
前記第1のミラーと前記回折格子との間を進行する前記複数のビームが通過するレーザ媒質であって前記複数のビームの各波長においてピークが現れる離散的な利得スペクトルを有する二酸化炭素レーザガスを収容する収容部と、
を備え、
互いにビーム中心軸が一致した状態で前記複数のビームを出力し、
前記第1のミラーは、前記複数のビームの各々が入射する領域ごとに異なる反射率を持たせた反射面を有し、前記複数のビームのビーム強度を均一化することを特徴とするレーザ装置。 - 前記回折格子と前記第2のミラーとの間にパルス発振機構が設けられ、前記複数のビームをQスイッチ発振およびQスイッチキャビティダンプ発振の少なくとも一方によりパルス化することを特徴とする請求項1または2に記載のレーザ装置。
- 前記パルス発振機構によってパルス化された前記複数のビームを増幅する増幅器を備えることを特徴とする請求項3に記載のレーザ装置。
- 前記第1のミラーは、凹面である反射面を有し、前記第1のミラーの断面における前記凹面の曲率半径が、前記回折格子と前記第1のミラーとの間の距離と等しいことを特徴とする請求項1から4のいずれか1つに記載のレーザ装置。
- 前記回折格子と前記収容部との間に設けられ、前記回折格子から伝搬する前記複数のビームを平行化するとともに前記収容部から伝搬する前記複数のビームを収束させる光学素子を備えることを特徴とする請求項1から5のいずれか1つに記載のレーザ装置。
- 前記収容部は、平板形状をなすことを特徴とする請求項1から6のいずれか1つに記載のレーザ装置。
- 前記第1のミラーと前記レーザ媒質との間を光学的に結合する光学素子を備えることを特徴とする請求項7に記載のレーザ装置。
- 前記第2のミラーと前記レーザ媒質との間を光学的に結合する光学素子を備えることを特徴とする請求項7に記載のレーザ装置。
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CN115128821B (zh) * | 2022-08-30 | 2022-12-06 | 中国科学院长春光学精密机械与物理研究所 | 基于偏振分离外腔反馈的光谱合束装置及方法 |
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CN112805886B (zh) | 2023-12-22 |
US20210391683A1 (en) | 2021-12-16 |
WO2020075246A1 (ja) | 2020-04-16 |
JPWO2020075246A1 (ja) | 2021-02-15 |
CN112805886A (zh) | 2021-05-14 |
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