JP6333889B2 - 有機電界発光表示装置の製造方法 - Google Patents
有機電界発光表示装置の製造方法 Download PDFInfo
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- JP6333889B2 JP6333889B2 JP2016114399A JP2016114399A JP6333889B2 JP 6333889 B2 JP6333889 B2 JP 6333889B2 JP 2016114399 A JP2016114399 A JP 2016114399A JP 2016114399 A JP2016114399 A JP 2016114399A JP 6333889 B2 JP6333889 B2 JP 6333889B2
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- light emitting
- organic light
- vapor deposition
- hexagonal
- emitting layer
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- 238000000034 method Methods 0.000 title claims description 21
- 238000004519 manufacturing process Methods 0.000 title claims description 20
- 238000007740 vapor deposition Methods 0.000 claims description 92
- 239000010409 thin film Substances 0.000 claims description 54
- 239000011368 organic material Substances 0.000 claims description 50
- 230000008021 deposition Effects 0.000 claims description 45
- 239000002313 adhesive film Substances 0.000 claims description 19
- 238000001259 photo etching Methods 0.000 claims description 7
- 239000005416 organic matter Substances 0.000 claims description 5
- 230000008020 evaporation Effects 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims description 4
- 238000000151 deposition Methods 0.000 description 40
- 238000010586 diagram Methods 0.000 description 22
- 239000000126 substance Substances 0.000 description 19
- 230000000903 blocking effect Effects 0.000 description 7
- 239000007921 spray Substances 0.000 description 4
- 238000005507 spraying Methods 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- QNRATNLHPGXHMA-XZHTYLCXSA-N (r)-(6-ethoxyquinolin-4-yl)-[(2s,4s,5r)-5-ethyl-1-azabicyclo[2.2.2]octan-2-yl]methanol;hydrochloride Chemical compound Cl.C([C@H]([C@H](C1)CC)C2)CN1[C@@H]2[C@H](O)C1=CC=NC2=CC=C(OCC)C=C21 QNRATNLHPGXHMA-XZHTYLCXSA-N 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/11—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers
- H10K50/125—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers specially adapted for multicolour light emission, e.g. for emitting white light
- H10K50/13—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers specially adapted for multicolour light emission, e.g. for emitting white light comprising stacked EL layers within one EL unit
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/19—Tandem OLEDs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/30—Devices specially adapted for multicolour light emission
- H10K59/35—Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels
- H10K59/352—Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels the areas of the RGB subpixels being different
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/30—Devices specially adapted for multicolour light emission
- H10K59/35—Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels
- H10K59/353—Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels characterised by the geometrical arrangement of the RGB subpixels
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/20—Changing the shape of the active layer in the devices, e.g. patterning
- H10K71/221—Changing the shape of the active layer in the devices, e.g. patterning by lift-off techniques
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electroluminescent Light Sources (AREA)
- Physical Vapour Deposition (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Description
210:第1色有機発光層30
220:第2色有機発光層
230:第3色有機発光層
400:蒸着マスク
410:蒸着壁
500:線状蒸着源
600:接着フィルム
Claims (5)
- 薄膜トランジスタパネルを形成する段階、
前記薄膜トランジスタパネル上にフォトエッチング工程によって蒸着マスクを形成する段階、
線状蒸着源から前記蒸着マスクに有機物を傾斜して噴射して前記薄膜トランジスタパネル上に有機発光層を形成する段階、
接着フィルムを利用して前記蒸着マスクを除去する段階、
を含み、
前記蒸着マスクは遮断角以下に噴射される前記有機物を遮断する複数の蒸着壁を含み、
前記蒸着マスクは、複数の蒸着壁が互いに連結して六角形状をなす六角形状蒸着壁であって、前記有機発光層は1つの前記六角形状で一画素を形成し、画素間は前記六角形状蒸着壁の厚みを隔てて、画素を構成する副画素が隣接し、
1つの前記六角形状内に配置される複数の副画素は、平面視において、前記六角形状を構成する、有機発光表示装置の製造方法。 - 前記蒸着マスクは、2つの前記蒸着壁が互いに平行に離隔した平行蒸着壁を含む、請求項1に記載の有機発光表示装置の製造方法。
- 前記有機発光層を形成する段階は、
第1六角方向から第1有機物を噴射して前記六角蒸着壁内部に菱形状の第1色有機発光層を形成する段階、
前記第1六角方向から120度回転した第2六角方向から第2有機物を噴射して前記六角蒸着壁内部に菱形状の第2色有機発光層を形成する段階、
前記第2六角方向から120度回転した第3六角方向から第3有機物を噴射して前記六角蒸着壁内部に菱形状の第3色有機発光層を形成する段階、
を含む、請求項1に記載の有機発光表示装置の製造方法。 - 前記第1六角方向、第2六角方向、および第3六角方向のうちのいずれか一方向は、前記六角蒸着壁の対向する角部を連結する方向と平行である、請求項4に記載の有機発光表示装置の製造方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2012-0042652 | 2012-04-24 | ||
KR1020120042652A KR101975020B1 (ko) | 2012-04-24 | 2012-04-24 | 유기 발광 표시 장치 및 그 제조 방법 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2012163991A Division JP2013229278A (ja) | 2012-04-24 | 2012-07-24 | 有機発光表示装置およびその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016186937A JP2016186937A (ja) | 2016-10-27 |
JP6333889B2 true JP6333889B2 (ja) | 2018-05-30 |
Family
ID=48142679
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
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JP2012163991A Pending JP2013229278A (ja) | 2012-04-24 | 2012-07-24 | 有機発光表示装置およびその製造方法 |
JP2016114399A Active JP6333889B2 (ja) | 2012-04-24 | 2016-06-08 | 有機電界発光表示装置の製造方法 |
Family Applications Before (1)
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JP2012163991A Pending JP2013229278A (ja) | 2012-04-24 | 2012-07-24 | 有機発光表示装置およびその製造方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US8617919B2 (ja) |
EP (1) | EP2658005A1 (ja) |
JP (2) | JP2013229278A (ja) |
KR (1) | KR101975020B1 (ja) |
CN (2) | CN103378126A (ja) |
TW (1) | TW201344898A (ja) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
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KR101975020B1 (ko) * | 2012-04-24 | 2019-05-07 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 그 제조 방법 |
CN104036700B (zh) * | 2014-05-30 | 2016-02-03 | 京东方科技集团股份有限公司 | 显示面板、显示方法和显示装置 |
CN104050889B (zh) * | 2014-05-30 | 2015-04-29 | 京东方科技集团股份有限公司 | 显示装置及其驱动方法 |
JP6450124B2 (ja) * | 2014-09-25 | 2019-01-09 | パイオニア株式会社 | 発光装置 |
US9991478B2 (en) | 2015-03-31 | 2018-06-05 | Industrial Technology Research Institute | Methods for fabricating an organic electro-luminescence device and flexible electric device |
KR102411542B1 (ko) * | 2015-05-19 | 2022-06-22 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치의 픽셀 패터닝 및 픽셀 위치 검사 방법과 그 패터닝에 사용되는 마스크 |
CN105097887B (zh) * | 2015-09-28 | 2018-03-09 | 深圳市华星光电技术有限公司 | Oled显示面板及其制作方法 |
TWI600347B (zh) * | 2015-11-30 | 2017-09-21 | 財團法人工業技術研究院 | 有機電激發光元件以及可撓性電子元件的製造方法 |
CN105870158B (zh) * | 2016-06-02 | 2019-04-26 | 京东方科技集团股份有限公司 | Oled面板、oled器件制作方法、用于oled的像素布图的掩膜结构 |
CN106373982B (zh) * | 2016-09-06 | 2017-11-24 | 京东方科技集团股份有限公司 | 显示基板及其制作方法、以及显示装置 |
CN109103100B (zh) * | 2017-06-21 | 2020-12-04 | 清华大学 | 薄膜晶体管的制备方法 |
CN107392171B (zh) | 2017-08-01 | 2020-08-07 | 京东方科技集团股份有限公司 | 显示基板、显示面板及显示装置 |
WO2019180154A1 (en) | 2018-03-21 | 2019-09-26 | The Provost, Fellows, Scholars And Other Members Of Board Of Trinity College Dublin | A stabiliser |
CN110098239B (zh) * | 2019-05-17 | 2021-11-02 | 京东方科技集团股份有限公司 | 像素结构、显示基板、掩模板及蒸镀方法 |
CN111261500B (zh) * | 2020-01-21 | 2023-11-17 | 淄博探微纳米科技有限责任公司 | 一种功率器件的制作方法及制作功率器件的装置 |
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-
2012
- 2012-04-24 KR KR1020120042652A patent/KR101975020B1/ko active IP Right Grant
- 2012-07-24 JP JP2012163991A patent/JP2013229278A/ja active Pending
- 2012-10-15 US US13/652,002 patent/US8617919B2/en active Active
-
2013
- 2013-03-11 TW TW102108523A patent/TW201344898A/zh unknown
- 2013-03-28 CN CN2013101046718A patent/CN103378126A/zh active Pending
- 2013-03-28 CN CN2013201472138U patent/CN203300651U/zh not_active Expired - Lifetime
- 2013-04-23 EP EP13164800.8A patent/EP2658005A1/en not_active Ceased
-
2016
- 2016-06-08 JP JP2016114399A patent/JP6333889B2/ja active Active
Also Published As
Publication number | Publication date |
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CN203300651U (zh) | 2013-11-20 |
EP2658005A1 (en) | 2013-10-30 |
JP2016186937A (ja) | 2016-10-27 |
CN103378126A (zh) | 2013-10-30 |
US20130277645A1 (en) | 2013-10-24 |
KR101975020B1 (ko) | 2019-05-07 |
TW201344898A (zh) | 2013-11-01 |
KR20130119671A (ko) | 2013-11-01 |
US8617919B2 (en) | 2013-12-31 |
JP2013229278A (ja) | 2013-11-07 |
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R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |