JP6306974B2 - 塗布膜除去装置 - Google Patents
塗布膜除去装置 Download PDFInfo
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- JP6306974B2 JP6306974B2 JP2014163434A JP2014163434A JP6306974B2 JP 6306974 B2 JP6306974 B2 JP 6306974B2 JP 2014163434 A JP2014163434 A JP 2014163434A JP 2014163434 A JP2014163434 A JP 2014163434A JP 6306974 B2 JP6306974 B2 JP 6306974B2
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- wafer
- substrate
- processed
- coating film
- removal
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- 239000011248 coating agent Substances 0.000 title claims description 59
- 238000000576 coating method Methods 0.000 title claims description 57
- 230000007246 mechanism Effects 0.000 claims description 105
- 239000000758 substrate Substances 0.000 claims description 75
- 238000001514 detection method Methods 0.000 claims description 35
- 239000000126 substance Substances 0.000 claims description 26
- 238000001035 drying Methods 0.000 claims description 25
- 239000007788 liquid Substances 0.000 claims description 7
- 238000007599 discharging Methods 0.000 claims description 5
- 235000012431 wafers Nutrition 0.000 description 277
- 238000012545 processing Methods 0.000 description 69
- 239000000853 adhesive Substances 0.000 description 68
- 230000001070 adhesive effect Effects 0.000 description 64
- 239000007789 gas Substances 0.000 description 51
- 239000002904 solvent Substances 0.000 description 28
- 238000012546 transfer Methods 0.000 description 28
- 239000000243 solution Substances 0.000 description 25
- 239000011261 inert gas Substances 0.000 description 19
- 238000010438 heat treatment Methods 0.000 description 16
- 238000000034 method Methods 0.000 description 16
- 238000005304 joining Methods 0.000 description 14
- 230000008569 process Effects 0.000 description 12
- 230000002093 peripheral effect Effects 0.000 description 6
- 238000003780 insertion Methods 0.000 description 5
- 230000037431 insertion Effects 0.000 description 5
- 230000007704 transition Effects 0.000 description 4
- 238000003860 storage Methods 0.000 description 3
- 230000002950 deficient Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000008155 medical solution Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000006116 polymerization reaction Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012442 inert solvent Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/6708—Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
Landscapes
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Coating Apparatus (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
Description
に前記基板保持機構を直線状に移動させる構成としていてもよい。
<第1の実施形態>
図14に示したように、端部除去機構460の基板回転方向下流側には、端部乾燥機構480を配置してもよい。被処理ウェハWの端部乾燥機構480は、端部乾燥ベース481の上に固定されている。また、端部乾燥ベース481は、ベースプレート444に固定されている。端部除去機構460にて接着剤Gを除去した端部にさらに不活性ガスを吐出することで被処理ウェハW端部の追加乾燥が可能となっている。
30〜33 接合装置
40 塗布装置
41 塗布膜除去装置
42〜46 熱処理装置
280 スピンチャック
292 接着剤ノズル
302 溶剤ノズル
370 制御部
450 端面検出機構
460 端部除去機構
480 端部乾燥機構
G 接着剤
GE 外側接着剤
P1 受渡位置
P2 検出位置
P3 除去位置
P4 待機位置
S 支持ウェハ
T 重合ウェハ
W 被処理ウェハ
Claims (6)
- 基板に塗布された塗布膜の端部を除去する塗布膜除去装置において、
前記基板を保持する基板保持機構と、
前記基板の端面を検出する端面検出機構と、
前記基板に塗布された塗布膜の端部を除去する端部除去機構と、
前記基板保持機構又は端部除去機構を移動させる移動機構と、
を具備し、
検出位置にて前記端面検出機構で基板の端面を検出し、前記移動機構で基板を前記検出位置から除去位置に移動させ、前記端面検出機構で検出した基板の端面に応じて前記移動機構によって前記基板保持機構と前記端部除去機構とを相対的に移動させながら、前記端部除去機構で基板に塗布された塗布膜の端部を除去することを特徴とする塗布膜除去装置。 - 前記移動機構は、
前記基板保持機構で基板の受渡しを行う受渡位置と、
前記端面検出機構で基板の端面を検出する検出位置と、
前記端部除去機構で塗布膜の端部を除去する除去位置と、
に前記基板保持機構を直線状に移動させる構成としたことを特徴とする請求項1に記載の塗布膜除去装置。 - 前記端部除去機構の基板回転方向下流側には、前記基板の端部の乾燥を行う端部乾燥機構が配置されていることを特徴とする、請求項1又は請求項2に記載の塗布膜除去装置。
- 前記端部除去機構は、
基板端部の上面及び下面に向けて除去液を吐出するノズル形状の薬液吐出部と
前記基板端部の上面及び下面に向けて乾燥ガスを吐出する第1気体吐出部と
吐出された前記除去液と乾燥ガスを吸引する為の第1吸引部を有し
前記薬液吐出部よりも基板中心方向側に前記第1気体吐出部が配置されていることを特徴とする請求項1又は請求項2に記載の塗布膜除去装置。 - 前記第1気体吐出部は、スリット状の吐出口を有することを特徴とする請求項4に記載の塗布膜除去装置。
- 前記端部乾燥機構は、
前記基板端部の上面及び下面に向けて乾燥ガスを吐出する第2気体吐出部と、
吐出された乾燥ガスを吸引する為の第2吸引部を有し、
前記第2気体吐出部は、スリット状の吐出口であることを特徴とする請求項3に記載の塗布膜除去装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014163434A JP6306974B2 (ja) | 2013-12-20 | 2014-08-11 | 塗布膜除去装置 |
US14/551,290 US10186417B2 (en) | 2013-12-20 | 2014-11-24 | Coating film removing apparatus |
TW103143485A TWI599409B (zh) | 2013-12-20 | 2014-12-12 | Coating film removal apparatus |
KR1020140184582A KR102329197B1 (ko) | 2013-12-20 | 2014-12-19 | 도포막 제거 장치 |
Applications Claiming Priority (3)
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---|---|---|---|
JP2013263233 | 2013-12-20 | ||
JP2013263233 | 2013-12-20 | ||
JP2014163434A JP6306974B2 (ja) | 2013-12-20 | 2014-08-11 | 塗布膜除去装置 |
Publications (2)
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---|---|
JP2015135941A JP2015135941A (ja) | 2015-07-27 |
JP6306974B2 true JP6306974B2 (ja) | 2018-04-04 |
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JP2014163434A Active JP6306974B2 (ja) | 2013-12-20 | 2014-08-11 | 塗布膜除去装置 |
Country Status (4)
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---|---|
US (1) | US10186417B2 (ja) |
JP (1) | JP6306974B2 (ja) |
KR (1) | KR102329197B1 (ja) |
TW (1) | TWI599409B (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6306974B2 (ja) * | 2013-12-20 | 2018-04-04 | 東京エレクトロン株式会社 | 塗布膜除去装置 |
US10692738B2 (en) * | 2015-03-30 | 2020-06-23 | Fuji Corporation | Information management device and information management method |
JP2022002255A (ja) * | 2020-06-19 | 2022-01-06 | 東京エレクトロン株式会社 | 収納モジュール、基板処理システムおよび消耗部材の搬送方法 |
CN114582780B (zh) * | 2022-03-01 | 2022-12-23 | 江苏京创先进电子科技有限公司 | 太鼓晶圆去环方法及太鼓晶圆去环装置 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
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US5028955A (en) * | 1989-02-16 | 1991-07-02 | Tokyo Electron Limited | Exposure apparatus |
JPH0810686B2 (ja) * | 1990-09-14 | 1996-01-31 | 株式会社東芝 | 半導体基板エッチング処理装置 |
JP2821286B2 (ja) * | 1991-08-06 | 1998-11-05 | 山形日本電気株式会社 | 半導体装置の製造装置 |
JP3752420B2 (ja) * | 1999-11-11 | 2006-03-08 | 東京エレクトロン株式会社 | 薄膜除去装置 |
US6827814B2 (en) * | 2000-05-08 | 2004-12-07 | Tokyo Electron Limited | Processing apparatus, processing system and processing method |
JP4132762B2 (ja) | 2001-09-27 | 2008-08-13 | 東京エレクトロン株式会社 | 基板の処理方法及び基板の処理装置 |
JP4043382B2 (ja) * | 2003-02-28 | 2008-02-06 | 東京エレクトロン株式会社 | 塗布膜除去方法及びその装置 |
US7547181B2 (en) * | 2004-11-15 | 2009-06-16 | Dainippon Screen Mfg. Co., Ltd. | Substrate position correcting method and apparatus using either substrate radius or center of rotation correction adjustment sum |
JP4601452B2 (ja) * | 2005-02-22 | 2010-12-22 | 大日本スクリーン製造株式会社 | 基板処理装置 |
JP2008060302A (ja) * | 2006-08-31 | 2008-03-13 | Sokudo:Kk | 基板処理装置 |
JP2008182016A (ja) | 2007-01-24 | 2008-08-07 | Tokyo Electron Ltd | 貼り合わせ装置、貼り合わせ方法 |
US7972969B2 (en) * | 2008-03-06 | 2011-07-05 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method and apparatus for thinning a substrate |
JP6306974B2 (ja) * | 2013-12-20 | 2018-04-04 | 東京エレクトロン株式会社 | 塗布膜除去装置 |
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2014
- 2014-08-11 JP JP2014163434A patent/JP6306974B2/ja active Active
- 2014-11-24 US US14/551,290 patent/US10186417B2/en active Active
- 2014-12-12 TW TW103143485A patent/TWI599409B/zh active
- 2014-12-19 KR KR1020140184582A patent/KR102329197B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
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KR20150073117A (ko) | 2015-06-30 |
US20150176139A1 (en) | 2015-06-25 |
TW201544198A (zh) | 2015-12-01 |
JP2015135941A (ja) | 2015-07-27 |
TWI599409B (zh) | 2017-09-21 |
US10186417B2 (en) | 2019-01-22 |
KR102329197B1 (ko) | 2021-11-19 |
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