JP6275989B2 - セラミック配線基板 - Google Patents
セラミック配線基板 Download PDFInfo
- Publication number
- JP6275989B2 JP6275989B2 JP2013213545A JP2013213545A JP6275989B2 JP 6275989 B2 JP6275989 B2 JP 6275989B2 JP 2013213545 A JP2013213545 A JP 2013213545A JP 2013213545 A JP2013213545 A JP 2013213545A JP 6275989 B2 JP6275989 B2 JP 6275989B2
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- Japan
- Prior art keywords
- via conductors
- virtual
- side direction
- ceramic
- conductors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000919 ceramic Substances 0.000 title claims description 112
- 239000004020 conductor Substances 0.000 claims description 319
- 239000000758 substrate Substances 0.000 claims description 51
- 239000004065 semiconductor Substances 0.000 claims description 39
- 229910010293 ceramic material Inorganic materials 0.000 claims description 5
- 230000035882 stress Effects 0.000 description 35
- 238000003491 array Methods 0.000 description 9
- 239000011295 pitch Substances 0.000 description 8
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 7
- 239000010949 copper Substances 0.000 description 7
- 230000008646 thermal stress Effects 0.000 description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- 238000010030 laminating Methods 0.000 description 6
- 238000004088 simulation Methods 0.000 description 6
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 6
- 229910052721 tungsten Inorganic materials 0.000 description 6
- 239000010937 tungsten Substances 0.000 description 6
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 5
- 229910052750 molybdenum Inorganic materials 0.000 description 5
- 239000011733 molybdenum Substances 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000005388 borosilicate glass Substances 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 239000002241 glass-ceramic Substances 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 239000011572 manganese Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000002040 relaxant effect Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
Images
Landscapes
- Production Of Multi-Layered Print Wiring Board (AREA)
- Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
Description
以下、本発明を具体化した第1の実施の形態を図面に基づき詳細に説明する。
[第2の実施の形態]
12…電力用半導体素子
21…第1面
22…第2面
23…基板本体
24…第1面側電極パッド
25…第2面側電極パッド
27,42,44,46,48…ビア導体
28,41,43,45,47…ビア導体群としてのビアアレイ
L1…線分
P1…仮想図形
D1,D2…ビア導体同士の距離
Claims (3)
- セラミック材料を用いて第1面及び第2面を有する板状に形成される基板本体と、前記第1面上に配置される第1面側電極パッドと、前記第2面上に配置される第2面側電極パッドと、前記第1面側電極パッドと前記第2面側電極パッドとを接続する複数のビア導体からなるビア導体群とを備え、前記第1面側電極パッド、前記第2面側電極パッド及び前記複数のビア導体に電気的に接続される電力用半導体素子が前記第1面側に搭載可能なセラミック配線基板であって、
前記ビア導体群の最外周を構成する前記ビア導体を線分で繋ぐことによって得られる仮想図形は、少なくとも1つの辺の長さが他の辺と異なる多角形状をなし、
前記仮想図形を構成する辺のうち、相対的に長い辺上に存在する前記ビア導体の数は、相対的に短い辺上に存在する前記ビア導体の数よりも多く、
前記相対的に長い辺において隣接する前記ビア導体同士の距離は、前記相対的に短い辺において隣接する前記ビア導体同士の距離よりも長い
ことを特徴とするセラミック配線基板。 - 前記仮想図形は長方形状をなし、前記仮想図形の長辺方向に沿って存在する前記ビア導体の数が、前記仮想図形の短辺方向に沿って存在するビア導体の数よりも多く、前記長辺方向において隣接する前記ビア導体同士の距離が、前記短辺方向において隣接する前記ビア導体同士の距離より長いことを特徴とする請求項1に記載のセラミック配線基板。
- 前記複数のビア導体の断面形状は、それぞれ前記長辺方向よりも前記短辺方向に長い扁平形状をなすことを特徴とする請求項2に記載のセラミック配線基板。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013213545A JP6275989B2 (ja) | 2013-10-11 | 2013-10-11 | セラミック配線基板 |
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---|---|---|---|
JP2013213545A JP6275989B2 (ja) | 2013-10-11 | 2013-10-11 | セラミック配線基板 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015076565A JP2015076565A (ja) | 2015-04-20 |
JP6275989B2 true JP6275989B2 (ja) | 2018-02-07 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013213545A Active JP6275989B2 (ja) | 2013-10-11 | 2013-10-11 | セラミック配線基板 |
Country Status (1)
Country | Link |
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JP (1) | JP6275989B2 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102109569B1 (ko) | 2015-12-08 | 2020-05-12 | 삼성전자주식회사 | 전자부품 패키지 및 이를 포함하는 전자기기 |
JP2017157693A (ja) * | 2016-03-02 | 2017-09-07 | 日本特殊陶業株式会社 | 配線基板 |
JP2018107307A (ja) * | 2016-12-27 | 2018-07-05 | 富士通株式会社 | プリント基板及び電子装置 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3377928B2 (ja) * | 1997-05-28 | 2003-02-17 | 京セラ株式会社 | 回路基板 |
JPH11274350A (ja) * | 1998-03-23 | 1999-10-08 | Murata Mfg Co Ltd | セラミック電子部品 |
JP2003124408A (ja) * | 2001-10-11 | 2003-04-25 | Tokuyama Corp | 放熱性基板 |
JP2012151188A (ja) * | 2011-01-17 | 2012-08-09 | Alps Electric Co Ltd | 多層配線基板 |
JP2013065793A (ja) * | 2011-09-20 | 2013-04-11 | Ngk Spark Plug Co Ltd | 配線基板 |
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2013
- 2013-10-11 JP JP2013213545A patent/JP6275989B2/ja active Active
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JP2015076565A (ja) | 2015-04-20 |
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