JP6169500B2 - 無電解めっき方法、無電解めっき装置および記憶媒体 - Google Patents
無電解めっき方法、無電解めっき装置および記憶媒体 Download PDFInfo
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- JP6169500B2 JP6169500B2 JP2014017694A JP2014017694A JP6169500B2 JP 6169500 B2 JP6169500 B2 JP 6169500B2 JP 2014017694 A JP2014017694 A JP 2014017694A JP 2014017694 A JP2014017694 A JP 2014017694A JP 6169500 B2 JP6169500 B2 JP 6169500B2
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1603—Process or apparatus coating on selected surface areas
- C23C18/1607—Process or apparatus coating on selected surface areas by direct patterning
- C23C18/1608—Process or apparatus coating on selected surface areas by direct patterning from pretreatment step, i.e. selective pre-treatment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1619—Apparatus for electroless plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1646—Characteristics of the product obtained
- C23C18/165—Multilayered product
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1646—Characteristics of the product obtained
- C23C18/165—Multilayered product
- C23C18/1651—Two or more layers only obtained by electroless plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/1803—Pretreatment of the material to be coated of metallic material surfaces or of a non-specific material surfaces
- C23C18/1824—Pretreatment of the material to be coated of metallic material surfaces or of a non-specific material surfaces by chemical pretreatment
- C23C18/1827—Pretreatment of the material to be coated of metallic material surfaces or of a non-specific material surfaces by chemical pretreatment only one step pretreatment
- C23C18/1831—Use of metal, e.g. activation, sensitisation with noble metals
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/32—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/54—Contact plating, i.e. electroless electrochemical plating
Description
12 第1金属層
13 レジストパターン
15 金属犠牲層
16 触媒層
18 第2金属層
23 レジストパターン
30 無電解めっき装置
31 第1金属層形成部
32 金属犠牲層形成部
33 触媒層形成部
34 第2金属層形成部
35 エッチング部
40 制御装置
41 記憶媒体
Claims (6)
- 第1金属層と、置換可能金属層とが順次形成され、前記第1金属層と前記置可能金属層がパターニングされた基板に対して無電解めっきを施す無電解めっき方法において、
前記基板上に前記第1金属層を形成する工程と、
前記第1金属層上に前記置換可能金属層を形成する工程と、
前記置換可能金属層上にレジストパターンを形成する工程と、
前記第1金属層と前記置換可能金属層をレジストパターンを介してエッチングする工程と、
前記置換可能金属層上からレジストパターンを除去する工程と、
前記置換可能金属層の金属と置換可能なイオン化された金属を含む水溶液を前記置換可能金属層上に塗布することにより、パターニングされた前記第1金属層および前記置換可能金属層上のみに触媒層を形成する工程と、
前記触媒層上に無電解めっきを施すことにより第2金属層を形成する工程を備え、
前記第1金属層は、前記第2金属層に対して触媒性をもたない金属化合物であり、
前記置換可能金属層は、前記水溶液中のイオン化された金属と置換反応し、前記置換可能金属層上に前記イオン化された金属を折出させるための金属層であり、かつ、前記第1金属層より薄く形成され、
前記触媒層は、前記水溶液中のイオン化された金属が折出した金属である、ことを特徴とする無電解めっき方法。 - 前記第1金属層の金属化合物は、TiN又はTaNからなることを特徴とする請求項1記載の無電解めっき方法。
- 前記置換可能金属層の金属はTi、W、Cu、Ni、又はCoからなることを特徴とする請求項1または2記載の無電解めっき方法。
- 前記触媒層の金属はPd、Au、Ptからなることを特徴とする請求項1乃至3のいずれか記載の無電解めっき方法。
- 前記第2金属層はNiの無電解めっき層からなることを特徴とする請求項1乃至4のいずれか記載の無電解めっき方法。
- コンピュータに無電解めっき方法を実行させるためのプログラムを格納した記憶媒体において、
無電解めっき方法は、第1金属層と、置換可能金属層とが順次形成され、前記第1金属層と前記置換可能金属層がパターニングされた基板に対して無電解めっきを施す無電解めっき方法において、
前記基板上に前記第1金属層を形成する工程と、
前記第1金属層上に前記置換可能金属層を形成する工程と、
前記置換可能金属層上にレジストパターンを形成する工程と、
前記第1金属層と前記置換可能金属層をレジストパターンを介してエッチングする工程と、
前記置換可能金属層上からレジストパターンを除去する工程と、
前記置換可能金属層の金属と置換可能なイオン化された金属を含む水溶液を前記置換可能金属層上に塗布することにより、パターニングされた前記第1金属層および前記置換可能金属層上のみに触媒層を形成する工程と、
前記触媒層上に無電解めっきを施すことにより第2金属層を形成する工程を備え、
前記第1金属層は、前記第2金属層に触媒性をもたない金属化合物であり、
前記置換可能金属層は、前記水溶液中のイオン化された金属と置換反応し、前記置換可能金属層上に前記イオン化された金属を折出させるための金属であり、かつ、前記第1金属層より薄く形成され、
前記触媒層は、前前記水溶液中のイオン化された金属が折出した金属である、ことを特徴とする記憶媒体。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014017694A JP6169500B2 (ja) | 2014-01-31 | 2014-01-31 | 無電解めっき方法、無電解めっき装置および記憶媒体 |
TW104101959A TWI618815B (zh) | 2014-01-31 | 2015-01-21 | Electroless plating method and memory medium |
KR1020150015371A KR20150091264A (ko) | 2014-01-31 | 2015-01-30 | 무전해 도금 방법, 무전해 도금 장치 및 기억 매체 |
US14/609,848 US20150218702A1 (en) | 2014-01-31 | 2015-01-30 | Electroless plating method, electroless plating apparatus and storage medium |
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JP2014017694A JP6169500B2 (ja) | 2014-01-31 | 2014-01-31 | 無電解めっき方法、無電解めっき装置および記憶媒体 |
Publications (2)
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JP2015145514A JP2015145514A (ja) | 2015-08-13 |
JP6169500B2 true JP6169500B2 (ja) | 2017-07-26 |
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JP2014017694A Active JP6169500B2 (ja) | 2014-01-31 | 2014-01-31 | 無電解めっき方法、無電解めっき装置および記憶媒体 |
Country Status (4)
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US (1) | US20150218702A1 (ja) |
JP (1) | JP6169500B2 (ja) |
KR (1) | KR20150091264A (ja) |
TW (1) | TWI618815B (ja) |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2881963B2 (ja) * | 1990-05-25 | 1999-04-12 | ソニー株式会社 | 配線基板及びその製造方法 |
US6261637B1 (en) * | 1995-12-15 | 2001-07-17 | Enthone-Omi, Inc. | Use of palladium immersion deposition to selectively initiate electroless plating on Ti and W alloys for wafer fabrication |
US6004839A (en) * | 1996-01-17 | 1999-12-21 | Nec Corporation | Semiconductor device with conductive plugs |
JPH11340228A (ja) * | 1998-05-28 | 1999-12-10 | Fujitsu Ltd | Al合金配線を有する半導体装置 |
US6436816B1 (en) * | 1998-07-31 | 2002-08-20 | Industrial Technology Research Institute | Method of electroless plating copper on nitride barrier |
JP4077987B2 (ja) * | 1999-07-12 | 2008-04-23 | ローム株式会社 | 半導体装置の製造方法 |
JP2005072139A (ja) * | 2003-08-21 | 2005-03-17 | Sony Corp | 磁気記憶装置及びその製造方法 |
US20050161338A1 (en) * | 2004-01-26 | 2005-07-28 | Applied Materials, Inc. | Electroless cobalt alloy deposition process |
JP2006063386A (ja) * | 2004-08-26 | 2006-03-09 | Tokyo Electron Ltd | 半導体装置の製造方法 |
JP4612534B2 (ja) * | 2005-12-01 | 2011-01-12 | 三菱電機株式会社 | 半導体装置の製造方法 |
JP4468469B2 (ja) * | 2008-07-25 | 2010-05-26 | 株式会社東芝 | 磁気記録媒体の製造方法 |
JP5651616B2 (ja) * | 2012-02-17 | 2015-01-14 | 株式会社東芝 | 磁気記録媒体、及びその製造方法 |
JP6054049B2 (ja) * | 2012-03-27 | 2016-12-27 | 東京エレクトロン株式会社 | めっき処理方法、めっき処理システムおよび記憶媒体 |
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2014
- 2014-01-31 JP JP2014017694A patent/JP6169500B2/ja active Active
-
2015
- 2015-01-21 TW TW104101959A patent/TWI618815B/zh active
- 2015-01-30 US US14/609,848 patent/US20150218702A1/en not_active Abandoned
- 2015-01-30 KR KR1020150015371A patent/KR20150091264A/ko not_active Application Discontinuation
Also Published As
Publication number | Publication date |
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US20150218702A1 (en) | 2015-08-06 |
JP2015145514A (ja) | 2015-08-13 |
TW201542872A (zh) | 2015-11-16 |
TWI618815B (zh) | 2018-03-21 |
KR20150091264A (ko) | 2015-08-10 |
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