JP5992966B2 - 3次元ホットスポット位置特定 - Google Patents
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Description
本出願は、2010年6月8日出願の米国仮特許出願第61/352,738号明細書の利益を請求し、そのすべての内容がここに参考文献として援用される。
本発明は、電子デバイスに埋没した抵抗熱源(ホットスポット)の位置特定技術に関する。開示した発明によると、ホットスポットの位置を見つけることができ、ロックイン増幅した赤外線画像を利用して欠陥被膜層における熱波伝搬を解析することにより3次元ですべて正確に位置を特定することができる。特に、本発明は、システムインパッケージデバイスにおける垂直積層の集積回路および相互接続層における熱活性構造体または欠陥の3次元位置を非破壊で特定可能にする。
2.関連技術
ロックインサーモグラフィ
均質熱特性を持つ材料層の内部または下部におけるホットスポットの深度
熱スコープ
熱パルス吸収解析
本発明の実施形態に係る方法は、ロックインサーモグラフィを用いて試料に埋没した熱源の位置を特定する方法であって、前記試料を検査システム上に配置し、複数のさまざまなロックイン周波数で前記試料に検査信号を印加し、前記試料に前記検査信号を印加しながら赤外線センサを用いて前記試料を撮影し、前記撮影した画像から前記試料の表面の横断的な温度分布を検出し、前記検査信号と前記画像から得られる熱応答との間で生じる位相ずれを前記試料内の熱波搬と相関させて検出および解析し、前記横断的な温度分布を解析して前記熱源の横断的な位置を取得し、各熱源位置における前記位相ずれを解析して前記試料内のその深度位置を特定する。また、本発明の実施形態に係る方法は、さらに、さまざまなロックイン周波数での前記位相ずれをプロットし、定量位相値に加えて前記プロットした位相対周波数曲線の傾きを解析して分解能および測定値の信頼性を改善する。熱波伝搬の解析解により周波数挙動に対する深度関連の位相ずれを算出し、前記算出した周波数挙動に対する深度関連の位相ずれを前記検出した位相ずれに関連付けて前記熱源の深度を特定する解析を行ってもよい。また、熱波伝搬の有限要素モデリングにより周波数挙動に対する深度関連の位相ずれを算出し、前記算出した周波数挙動に対する深度関連の位相ずれを前記検出した位相ずれに関連付けて前記熱源の深度を特定する解析を行ってもよい。
また、本発明の実施形態に係る方法は、さらに、さまざまなロックイン周波数での前記位相ずれをプロットし、定量位相値に加えて位相対周波数曲線の傾きを解析してZ分解能および測定値の信頼性を改善する。
例I:単一チップデバイスにおけるホットスポットの深度特定
例II:ダイ積層デバイスにおける欠陥の深度特定
例III:時間分解熱応答
Claims (13)
- ロックインサーモグラフィを用いて試料に埋没した熱源の位置を特定する方法であって、
前記試料を検査システム上に配置し、
複数のさまざまなロックイン周波数で前記試料に検査信号を印加し、
前記試料に前記検査信号を印加しながら赤外線センサを用いて前記試料を撮影し、
前記撮影した画像から前記試料の表面の横断的な温度分布を検出し、
前記検査信号と前記画像から得られる熱応答との間で生じる位相ずれを前記試料内の熱伝搬と相関させて検出および解析し、
前記横断的な温度分布を解析して前記熱源の横断的な位置を取得し、
各熱源位置における前記位相ずれを解析して前記試料内の前記熱源の深度位置を特定し、
さまざまなロックイン周波数での前記位相ずれをプロットして位相対周波数曲線を取得し、前記位相対周波数曲線の傾きを解析して深度分解能を改善する、
ことを特徴とする方法。 - 熱波伝搬の解析解により周波数挙動に対する深度関連の位相ずれを算出し、
前記算出した周波数挙動に対する深度関連の位相ずれを前記検出した位相ずれに関連付けて前記熱源の深度を特定する、請求項1に記載の方法。 - 熱波伝搬の有限要素モデリングにより周波数挙動に対する深度関連の位相ずれを算出し、
前記算出した周波数挙動に対する深度関連の位相ずれを前記検出した位相ずれに関連付けて前記熱源の深度を特定する、請求項1に記載の方法。 - 前記赤外線センサからの画素の一部のみからのデータを読むことで前記試料の表面の視野を制限する、請求項1に記載の方法。
- 隣接画素の値を加算して加算データ点を生成し、前記加算データ点のみを読むことで前記視野を制限する、請求項4に記載の方法。
- 前記時間分解熱波形をモニタに表示し、
前記時間分解熱波形を解析して電気励振信号と関連熱波形との間の位相ずれを特定する、ことをさらに含む、請求項1に記載の方法。 - 相関関数を用いて前記時間分解熱波形を解析する、請求項6に記載の方法。
- ロックイン周波数と同じ周波数の正弦関数との自己相関を用いて前記時間分解熱波形の前記位相ずれを測定する、請求項6に記載の方法。
- 熱波伝搬の解析解により周波数挙動に対する深度関連の位相ずれを算出し、
前記算出した周波数挙動に対する深度関連の位相ずれを前記測定した位相ずれに関連付けて前記熱源の深度を特定する、請求項6に記載の方法。 - 熱波伝搬の有限要素モデリングにより周波数挙動に対する深度関連の位相ずれを算出し、
前記算出した周波数挙動に対する深度関連の位相ずれを前記測定した位相ずれに関連付けて前記熱源の深度を特定する、請求項6に記載の方法。 - 少なくとも一つの相関関数を用いて前記時間分解熱波形の形状を定量的に解析し、それにより得られる相関係数対ロックイン周波数のマトリクスを生成する、請求項6に記載の方法。
- 正弦、余弦、方形、シャークフィン、指数関数的充放電曲線の少なくとも一つを含む所定の波形との自己相関または相互相関の少なくとも一つを用いることで前記少なくとも一つの相関関数を用いる、請求項11に記載の方法。
- 熱波伝搬の有限要素モデリングにより周波数挙動に対する深度関連の位相ずれに基づいて理論的相関係数を算出し、
前記算出した相関係数を前記相関係数に関連付けて前記熱源の深度を特定する、請求項12に記載の方法。
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US35273810P | 2010-06-08 | 2010-06-08 | |
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