JP6457546B2 - 解析装置及び解析方法 - Google Patents
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- 238000004458 analytical method Methods 0.000 title claims description 60
- 238000005259 measurement Methods 0.000 claims description 83
- 238000001514 detection method Methods 0.000 claims description 59
- 230000004044 response Effects 0.000 claims description 9
- 230000005855 radiation Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 description 67
- 238000007405 data analysis Methods 0.000 description 19
- 238000012545 processing Methods 0.000 description 18
- 230000010354 integration Effects 0.000 description 13
- 230000005679 Peltier effect Effects 0.000 description 12
- 230000003287 optical effect Effects 0.000 description 11
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 150000002739 metals Chemical class 0.000 description 6
- 230000020169 heat generation Effects 0.000 description 4
- 238000012546 transfer Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- 229910018098 Ni-Si Inorganic materials 0.000 description 2
- 229910018529 Ni—Si Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- PEUPIGGLJVUNEU-UHFFFAOYSA-N nickel silicon Chemical compound [Si].[Ni] PEUPIGGLJVUNEU-UHFFFAOYSA-N 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 230000002123 temporal effect Effects 0.000 description 2
- 230000005457 Black-body radiation Effects 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000005055 memory storage Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
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- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/0066—Radiation pyrometry, e.g. infrared or optical thermometry for hot spots detection
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- G01K17/00—Measuring quantity of heat
- G01K17/06—Measuring quantity of heat conveyed by flowing media, e.g. in heating systems e.g. the quantity of heat in a transporting medium, delivered to or consumed in an expenditure device
- G01K17/08—Measuring quantity of heat conveyed by flowing media, e.g. in heating systems e.g. the quantity of heat in a transporting medium, delivered to or consumed in an expenditure device based upon measurement of temperature difference or of a temperature
- G01K17/10—Measuring quantity of heat conveyed by flowing media, e.g. in heating systems e.g. the quantity of heat in a transporting medium, delivered to or consumed in an expenditure device based upon measurement of temperature difference or of a temperature between an inlet and an outlet point, combined with measurement of rate of flow of the medium if such, by integration during a certain time-interval
- G01K17/12—Indicating product of flow and temperature difference directly or temperature
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
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- G01N21/88—Investigating the presence of flaws or contamination
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- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/72—Investigating presence of flaws
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- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
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Description
図1に示すように、第1実施形態に係る解析装置1は、被検査デバイス(DUT:Device Under Test)である半導体デバイスSD(計測対象物)などの内部の熱源位置を特定する解析装置である。熱源とは半導体デバイスSD内部の発熱箇所である。半導体デバイスSDに信号が印加された際に半導体デバイスSD内部に例えば短絡(ショート)箇所などがあると、当該ショート箇所が発熱し熱源となる。すなわち、解析装置1は、熱源位置を特定することにより半導体デバイスSD内部のショート箇所などの異常を解析する故障解析装置である。
次に、図7を参照して、第2実施形態に係る解析装置1Aについて説明する。なお、本実施形態の説明では上述した第1実施形態と異なる点について主に説明する。
Claims (12)
- 計測対象物の内部の熱源位置を特定する解析装置であって、
前記計測対象物に交流信号を印加する印加部と、
前記交流信号に応じた前記計測対象物からの光を検出し、検出信号を出力する光検出部と、
前記検出信号に基づいて前記熱源位置を特定する解析部と、を備え、
前記印加部は、所定のロックイン周期のトリガ信号に応じて前記交流信号を印加し、前記ロックイン周期のオフ期間には前記ロックイン周期のオン期間よりも小さい振幅の前記交流信号を印加する、解析装置。 - 前記印加部は、前記ロックイン周期のオフ期間において、前記交流信号の振幅を0とする、請求項1記載の解析装置。
- 前記印加部は、複数の前記ロックイン周期の前記交流信号が積算された際に、前記交流信号の振幅が相殺されるように、前記ロックイン周期毎に前記交流信号の位相を変動させる、請求項1又は2記載の解析装置。
- 前記印加部は、前記交流信号の周波数を前記トリガ信号の周波数よりも高くする、請求項1〜3のいずれか一項記載の解析装置。
- 前記解析部は、前記トリガ信号に対する前記検出信号の位相遅延量を導出することにより前記熱源位置を特定する、請求項1〜4のいずれか一項記載の解析装置。
- 前記光検出部は、前記計測対象物からの光として前記熱源からの赤外線を検出する赤外線カメラである、請求項1〜5のいずれか一項記載の解析装置。
- 前記計測対象物に対して計測点を設定する設定部と、
前記計測対象物に光を照射する光照射部と、を更に備え、
前記光検出部は、前記計測対象物からの光として、前記光照射部からの光の照射に応じて前記計測点で反射された光を検出する光検出器である、請求項1〜5のいずれか一項記載の解析装置。 - 計測対象物の内部の熱源位置を特定する解析方法であって、
前記計測対象物に交流信号を印加する工程と、
前記交流信号に応じた前記計測対象物からの光を検出し、検出信号を出力する工程と、
前記検出信号に基づいて前記熱源位置を特定する工程と、を含み、
前記印加する工程では、所定のロックイン周期のトリガ信号に応じて前記交流信号を印加し、前記ロックイン周期のオフ期間には前記ロックイン周期のオン期間よりも小さい振幅の前記交流信号を印加する、解析方法。 - 前記印加する工程では、前記ロックイン周期のオフ期間において、前記交流信号の振幅を0とする、請求項8記載の解析方法。
- 前記印加する工程では、複数の前記ロックイン周期の前記交流信号が積算された際に、前記交流信号の振幅が相殺されるように、前記ロックイン周期毎に前記交流信号の位相を変動させる、請求項8又は9記載の解析方法。
- 前記印加する工程では、前記交流信号の周波数を前記トリガ信号の周波数よりも高くする、請求項8〜10のいずれか一項記載の解析方法。
- 前記特定する工程では、前記トリガ信号に対する前記検出信号の位相遅延量を導出することにより前記熱源位置を特定する、請求項8〜11のいずれか一項記載の解析方法。
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JP6954775B2 (ja) * | 2017-06-29 | 2021-10-27 | 浜松ホトニクス株式会社 | デバイス解析装置及びデバイス解析方法 |
CN108051093A (zh) * | 2017-12-02 | 2018-05-18 | 北京工业大学 | 用于探测功率循环实验中igbt模块温度场的红外热成像测温方法 |
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AU538602B2 (en) | 1980-07-04 | 1984-08-23 | Abc Appliances Pty. Ltd. | Infra-red fault detection system |
JPS63134943A (ja) | 1986-11-26 | 1988-06-07 | Nec Corp | 半導体素子の試験装置 |
US5089700A (en) * | 1990-01-30 | 1992-02-18 | Amdata, Inc. | Apparatus for infrared imaging inspections |
JPH04249336A (ja) | 1991-02-05 | 1992-09-04 | Nec Corp | 半導体装置の故障解析装置 |
JPH09266238A (ja) | 1996-03-29 | 1997-10-07 | Sony Corp | 電子回路の欠陥検査装置 |
US6146014A (en) * | 1998-11-04 | 2000-11-14 | Advanced Micro Devices, Inc. | Method for laser scanning flip-chip integrated circuits |
EP1905108A2 (en) * | 2005-06-30 | 2008-04-02 | Koninklijke Philips Electronics N.V. | Method for reducing occurrence of short-circuit failure in an organic functional device |
WO2009141472A1 (es) * | 2008-05-20 | 2009-11-26 | Antonio Miravete De Marco | Sistemay método de monitorización del daño en estructuras |
EP2580583B1 (en) * | 2010-06-08 | 2018-11-07 | DCG Systems, Inc. | Three-dimensional hot spot localization |
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- 2014-10-09 KR KR1020177011285A patent/KR102231509B1/ko active IP Right Grant
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US10365324B2 (en) | 2019-07-30 |
KR102231509B1 (ko) | 2021-03-23 |
EP3206226A4 (en) | 2018-04-25 |
EP3206226A1 (en) | 2017-08-16 |
EP3206226B1 (en) | 2020-01-15 |
WO2016056109A1 (ja) | 2016-04-14 |
KR20170066472A (ko) | 2017-06-14 |
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