JP5916077B2 - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- JP5916077B2 JP5916077B2 JP2011264735A JP2011264735A JP5916077B2 JP 5916077 B2 JP5916077 B2 JP 5916077B2 JP 2011264735 A JP2011264735 A JP 2011264735A JP 2011264735 A JP2011264735 A JP 2011264735A JP 5916077 B2 JP5916077 B2 JP 5916077B2
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- 239000004065 semiconductor Substances 0.000 title claims description 90
- 238000004519 manufacturing process Methods 0.000 title claims description 64
- 239000000758 substrate Substances 0.000 claims description 78
- 238000000034 method Methods 0.000 claims description 71
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- 125000006850 spacer group Chemical group 0.000 claims description 18
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- 238000007517 polishing process Methods 0.000 description 4
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- 229910052782 aluminium Inorganic materials 0.000 description 3
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- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
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- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
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- UPSOBXZLFLJAKK-UHFFFAOYSA-N ozone;tetraethyl silicate Chemical compound [O-][O+]=O.CCO[Si](OCC)(OCC)OCC UPSOBXZLFLJAKK-UHFFFAOYSA-N 0.000 description 1
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- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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Description
また、従来の貫通電極は、貫通電極の金属と基板との間の熱膨張係数の差による熱的ストレスが発生するため、望む深さの貫通電極を形成するのに制約が発生するという問題点がある。さらに、貫通電極のための開口部を形成する時の上部配線層とのミスアライメント問題があり、開口部を形成する写真工程でもミスアライメント問題が発生しやすい。
また、本発明の目的は、貫通電極のための開口部を形成する写真工程でのミスアライメント問題を回避することができる半導体装置を製造する方法を提供することにある。
また、本発明の目的は、バックエンドプロセスの高い温度による熱的ストレスによる影響を減少させることができる半導体装置を製造する方法を提供することにある。
また、本発明の目的は、貫通電極の導電物質による基板の汚染を防止することができる半導体装置を製造する方法を提供することにある。
また、本発明に係る半導体装置の製造方法によれば、貫通電極のための開口部を形成する写真工程でミスアラインメント問題を回避することができるという効果がある。
また、本明細書で、「含む」又は「有する」等の用語は、明細書上に記載された特徴、数字、段階、動作、構成要素、部品又は、これを組み合わせたものが存在するということを示すものであって、一つ又はそれ以上の他の特徴や数字、段階、動作、構成要素、部品又は、これを組み合わせたものなどの存在又は、付加の可能性を、予め排除するものではない。
図1〜図14は、本発明の第1の実施形態に係る半導体装置の製造方法を示す断面図である。
図1を参照すると、基板10に回路パターン12を形成する。
まず、回路パターン12を形成するための基板10を準備する。
基板10は、第1面及び第1面の反対側に第2面を有し、例えば、単結晶シリコン基板である。
次に、基板10の第1面上に回路パターン12を覆う層間絶縁膜14を形成する。層間絶縁膜14上にはエッチング阻止膜(図示せず)を形成することができる。
また、回路パターン12は、回路素子を構成することができる。従って、第1の実施形態における半導体装置は、内部に多数個の回路素子を形成した半導体チップであってもよい。
揮発性半導体メモリ素子の例としては、DRAM、SRAMなどを挙げることができ、非揮発性半導体メモリ素子の例としては、EPROM、EEPROM、Flash EEPROMなどを挙げることができる。
基板10上の層間絶縁膜14上に、フォトレジスト膜(図示せず)を形成した後、フォトレジスト膜をパターニングして貫通電極が形成される領域を露出させるフォトレジストパターン(図示せず)を形成する。
第1開口部20は、例えば、乾燥式エッチング工程や湿式エッチング工程によって形成する。
第1開口部20の深さは、この後形成する貫通電極の長さ、積層パッケージの厚さなどを考慮して選択することができる。
続いて、フォトレジストパターンを基板10から除去する。
本実施形態において、先ず、第1開口部20を充填する第1絶縁膜22及び犠牲膜24を順次形成する。
また、第1絶縁膜22は、低誘電率を有するシリコン酸化物又は炭素ドーピングされたシリコン酸化物を用いて形成することができる。例えば、第1絶縁膜22は、プラズマ酸化工程、又は、化学気相蒸着工程によって形成し、ステップカバレッジ特性に優れたTEOS膜、オゾンTEOS膜、USG膜などを用いて形成する。
犠牲膜24は、第1絶縁膜22に対してエッチング選択比を有する絶縁物質を用いて形成することができ、例えば、SOD(Spin−On Dielectric)物質を用いて形成する。
また、犠牲膜24は、第1絶縁膜22のエッチング率より少なくとも3倍のエッチング率を有することが好ましく、例えば、同じ湿式エッチング条件において、犠牲膜24と第1絶縁膜22のエッチング選択比は約3:1〜約20:1である。
例えば、犠牲膜24は、化学機械的研磨工程、エッチング工程、又は、これらの組合せによって除去する。
図4に示すように、犠牲膜24の一部だけを除去して犠牲膜パターン26を形成することが好ましいが、層間絶縁膜14上の犠牲膜24及び第1絶縁膜22の一部、又は、全部を除去して犠牲膜パターン26を形成してもよい。
上部配線層は、バックエンド(BEOL(back−end−of−line))プロセスと呼ばれる配線工程を遂行して形成することができる。
また、上部配線層は、基板10上の回路パターン12とこの後に形成する貫通電極とを電気的に接続する上部配線32、36を含む。
次に、第1金属間絶縁膜30及び第1絶縁膜22の一部をエッチングして下部配線16及び犠牲膜パターン26の上部面を露出する開口部を形成する。
次に、開口部内部を導電物質で充填して第1上部配線32を形成する。
第1上部配線32は、犠牲膜パターン26及び下部配線16上に各々形成する。
次に、第2金属間絶縁膜34の一部を除去して、最上部の第2上部配線36を露出させた開口部を形成し、第2金属間絶縁膜34上に開口部を通じて最上部の第2上部配線36と接触する接続パッド40を形成する。
保護膜は、例えば、ポリイミド物質を含み、この時、接続パッドは保護膜によって露出され、以後の工程によって接続パッド上にバンプなどの連結部材を形成して他の半導体装置と電気的に接続することができる。
ハンドリング基板50は、貫通電極を形成した後に基板10から除去する。
先ず、基板10の第2面を部分的に除去して犠牲膜パターン26及び犠牲膜パターン26上の第1絶縁膜22の一部を露出させる。
例えば、基板10の第2面は、化学機械的研磨工程、エッチング工程、又はこれらの組合せによって除去する
基板10の第2面を部分的に除去することにより、基板10の厚さを調節することができる。
第2絶縁膜60は、犠牲膜パターン26に対してエッチング選択比を有する絶縁物質を用いて形成し、例えば、犠牲膜パターン26は、第2絶縁膜60のエッチング率よりも少なくとも3倍のエッチング率を有するようにする。
また、第2絶縁膜60は、第1絶縁膜22と同じ絶縁物質を用いて形成することができ、第1絶縁膜22と同じエッチング率を有するようにすることができる。
犠牲膜パターン26は、湿式エッチング工程、乾燥式エッチング工程、又は、これらの組合せによって除去することができ、犠牲膜パターン26のみを基板10から除去することにより、第1絶縁膜22は、第1開口部22の側壁上に存在するようになる。
また、第1上部配線32は、第2開口部21の底面で露出する。
先ず、第2開口部21の底面、側壁及び第2絶縁膜パターン62上に、シード膜70を形成する。
シード膜70は、後続の導電膜を形成するためのメッキ工程で電極として用いることができる。
導電膜は、低抵抗の金属物質を用いて形成することができ、例えば、電解メッキ法、無電解メッキ法、エレクトログラフティング(Electrografting)等によって形成する。
また、導電膜は、銅(Cu)、アルミニウム(Al)、金(Au)、チタン(Ti)、タンタル(Ta)、タングステン(W)等を含むことができ、これらは単独、又は、2つ以上を含むことができる。
続いて、基板10の第2面から犠牲膜パターン26を除去した後、上部配線層の第1上部配線32と電気的に接続する貫通電極を形成する。
また、貫通電極は、バックエンド(BEOL)プロセス以後に形成されるので、バックエンドプロセスにおける高い温度(例えば、400℃)での熱的ストレスによる影響を減少させることができる。
また、貫通電極は、熱的ストレスによる影響を回避するとともに、望む深さに形成することができる。
第1半導体チップは、第1バンプ80を媒介として第2半導体チップ上に積層する。
第1バンプ80は、第2半導体チップの接続パッド140上に形成され、第1半導体チップの貫通電極72に取り付ける。
同様に、第2半導体チップを、第2バンプ82を媒介として実装基板200の接続パッド220に取り付けて、第1半導体チップを実装基板200上に実装して積層パッケージ300を形成する。
続いて、実装基板200の上部面上に密封部材250を形成して、第1及び第2半導体チップを外部から保護する。
次に、実装基板200の下部面上の複数個の外部接続パッド230上に、はんだボール240を配置させた後、はんだボール240を媒介として積層パッケージ300をモジュール基板(図示せず)に実装して、メモリモジュール(図示せず)を完成させる。
図15〜図17は本発明の第2の実施形態に係る半導体装置を製造する方法を示す断面図である。
図15〜図17を参照して説明する半導体装置の製造方法は、貫通電極を形成するための工程を除いては図1〜図14を参照して説明した方法と実質的に同一であり、同じ構成要素に対しては同じ参照符号で表し、同じ構成要素の説明は省略する。
上部配線層の第1上部配線32は、第2開口部21の底面で露出する。
第3絶縁膜は、ステップ カバレッジ特性に優れた絶縁物質を用いて形成することができ、例えば、シリコン酸化物又はシリコン窒化物を用いて形成する。
続いて、第3絶縁膜64を異方性エッチングすることによって、第2開口部21の側壁上にスペーサー66を形成する。
先ず、第2開口部21の底面、スペーサー66及び第2絶縁膜パターン62上にシード膜70を形成する。
次に、シード膜70上に第2開口部21を充填する導電膜を形成する。
導電膜は、低抵抗の金属物質を用いて形成することができ、銅(Cu)、アルミニウム(Al)、金(Au)、インジウム(In)、ニッケル(Ni)等を含むことができる。これらは単独で形成又は2つ以上を含むことができる。
続いて、導電膜をパターニングして、第2開口部21内に第1上部配線32と電気的に接続する貫通電極72を形成する。
次に、スペーサー66が形成された第2開口部21上に、第1上部配線32と電気的に接続する貫通電極72を形成する。
第2開口部21は、犠牲膜パターン26を除去することによって形成する。
第2開口部21の側壁上にスペーサー66を形成することによって、第2開口部21のプロファイルを改善することができる。
図18及び図19は本発明の第3の実施形態に係る半導体装置を製造する方法を示す断面図である。
図18及び図19を参照して説明する半導体装置の製造方法は、犠牲膜パターンを形成するための工程を除いては、図1〜図14を参照して説明した方法と実質的に同一であり、同じ構成要素に対しては同じ参照符号で表し、同じ構成要素の説明は省略する。
次に、図18及び図19を参照すると、第1開口部20を充填する犠牲膜パターン26を形成する。
先ず、第1開口部20の側壁、底面及び層間絶縁膜14の上部面のプロファイルに沿って第1絶縁膜22を形成する。
次に、第1絶縁膜22上に第1開口部20を充填する犠牲膜24を形成する。犠牲膜24は、第1絶縁膜22に対してエッチング選択比を有する絶縁物質を用いて形成することができる。
続いて、犠牲膜24の上部を除去して第1開口部20内にボイド25を有する犠牲膜パターン26を形成する。
例えば、犠牲膜24は、化学機械的研磨工程、エッチング工程、又はこれらの組合せによって除去する。
本実施形態においては、ボイド25を有する犠牲膜パターン26を形成した後に、バックエンド(BEOL)プロセスを遂行して、基板10の第1面上に上部配線層を形成する。
上述のように行うことにより、バックエンドプロセスが比較的高い温度で遂行されても、犠牲膜パターン26のボイド25は、バックエンドプロセスでの熱的ストレスによる影響を減少させる役割を果たすことができる。
図20〜図23は本発明の第4実施形態に係る半導体装置を製造する方法を示す断面図である。
図20〜図23を参照して説明する半導体装置の製造方法は、上部配線層を形成する前にキャッピング膜を形成するための工程を除いては、図1〜図14を参照して説明した方法と実質的に同一であり、同じ構成要素に対しては同じ参照符号で表し、同じ構成要素の説明は省略する。
図20を参照すれば、次に、犠牲膜パターン26上にキャッピング膜28を形成する。キャッピング膜28は、例えば、シリコン酸化物またはシリコン窒化物を用いて形成する。
先ず、キャッピング膜28上に第1金属間絶縁膜30を形成した後、第1金属間絶縁膜30に第1上部配線32を形成し、第1上部配線32と犠牲膜パターン26との間にキャッピング膜28が位置するようにする。
次に、図22を参照すれば、図8〜図11で説明した工程と同様の工程を遂行して犠牲膜パターン26を基板10から除去する。
この時、キャッピング膜28の一部も共に除去して、第2開口部21の底面を通じて第1上部配線32を露出させるキャッピング膜パターン29を形成する。
本実施形態においては、上部配線層を形成する前にキャッピング膜28を形成した後、犠牲膜パターン26を除去する時にキャッピング膜28を共に除去して、第1上部配線32を露出させた第2開口部21を形成する。
キャッピング膜28は、犠牲膜パターン26を除去する工程でエッチング終了点として使われて、第2開口部21のプロファイルを改善することができる。
図24及び図25は、本発明の第5の実施形態に係る半導体装置を製造する方法を示す断面図である。
図24及び図25を参照して説明される半導体装置の製造方法は、貫通電極を形成するための工程を除いては、第4の実施形態と実質的に同一であり、同じ構成要素に対しては同じ参照符号で表し同じ構成要素の説明は省略する。
具体的には、第2開口部21の側壁、底面及び第2絶縁膜パターン62の上部面のプロファイルに沿ってスペーサー形成用第3絶縁膜を形成し、第3絶縁膜を異方性エッチングすることによって第2開口部21の側壁上にスペーサー66を形成する。
例えば、スペーサー66が形成された第2開口部21上にシード膜70を形成し、シード膜70上に第2開口部21を充填する導電膜を形成する。
導電膜は、低抵抗の金属物質を利用して形成されることができる。
続いて、導電膜をパターニングして、第2開口部21内に第1上部配線32と電気的に接続された貫通電極72を形成する。
また、第2開口部21を形成した後、第2開口部21の側壁上にスペーサー66を形成し、スペーサー66が形成された第2開口部21上に第1上部配線32と電気的に接続された貫通電極72を形成する。
図26は、本発明の第6実施形態に係る半導体装置を製造する方法を示す断面図である。
図26を参照して説明する半導体装置の製造方法は、貫通電極を形成するための工程を除いては図1〜図14を参照して説明した方法と実質的に同一であり、同じ構成要素に対しては同じ参照符号で表し、同じ構成要素の説明は省略する。
貫通電極74を形成する方法は、例えば、第2開口部21上にシード膜70及びシード膜70上に第2開口部21を部分的に充填する導電膜を形成する。
導電膜は、開口部のプロファイルに沿って形成し、開口部の一部を充填することで形成する。
続いて、導電膜をパターニングして第2開口部21内に第1上部配線32と電気的に接続する貫通電極74を形成する。
また、貫通電極74上には、リセスを充填する充填パターン(図示せず)を形成することができる。充填パターンは、絶縁物質又は導電物質で形成することができる。
一例として、充填パターンはスピンオングラス(SOG)酸化物、流動性シリコン(Flowable− Si)、チタン、アルミニウム、多孔性物質(porous material)等を挙げることができる。
貫通電極は、カップ形状を有することができ、実質的に電気的信号を伝達するコンタクトプラグの役割を果たす。
図27は本発明の他の実施形態を図示したものである。
図27に示すように、本実施形態は、メモリコントローラ520と連結したメモリ510を有する。メモリ510は、本発明の各実施形態に係る構造の積層型メモリ素子を含む。メモリコントローラ520は、メモリ510の動作をコントロールするための入力信号を提供する。
本実施形態は、ホストシステム700に連結したメモリ510を有する。
メモリ510は、本発明の各実施形態に係る構造の積層型メモリ素子を含む。
ホストシステム700は、パーソナルコンピュータ、カメラ、モバイル機器、ゲーム機、通信機器などの電子製品を含む。
また、ホストシステム700は、メモリ510を制御して作動させるための入力信号を印加し、メモリ510は、データ保存媒体として使われる。
携帯用装置600は、MP3プレーヤー、ビデオ プレーヤー、ビデオとオーディオプレーヤーの複合機などである。
図に示すように、携帯用装置600は、メモリ510及びメモリコントローラ520を含む。メモリ510は、本発明の各実施形態に係る構造を有する積層型メモリ素子を含む。
また、携帯用装置600は、エンコーダ/デコーダ610、表示部材620、及びインターフェース670を有する。
データ(オーディオ、ビデオなど)は、エンコーダ/デコーダ610によってメモリコントローラ520を経由してメモリ510から入出力される。
12 回路パターン
14 層間絶縁膜
16 下部配線
20 第1開口部
21 第2開口部
22 第1絶縁膜
24 犠牲膜
25 ボイド
26 犠牲膜パターン
28 キャッピング膜
29 キャッピング膜パターン
30 第1金属間絶縁膜
32 第1上部配線
34 第2金属間絶縁膜
36 第2上部配線
38 上部配線
40、140、220 接続パッド
50 ハンドリング基板
60 第2絶縁膜
62 第2絶縁膜パターン
64 第3絶縁膜
66 スペーサー
70 シード膜
72、74、172 貫通電極
75 リセス
80 バンプ、第1バンプ
82 第2バンプ
200 実装基板
240 はんだボール
300 積層パッケージ
510 メモリ
520 メモリコントローラ
600 携帯用装置
610 コンコーダ/デコーダ
620 表示部材
670 インターフェース
700 ホストシステム
Claims (9)
- 第1面及び前記第1面の反対側に第2面を有する基板を準備する段階と、
前記基板の第1面から基板の厚さ方向に延長して貫通電極が形成される領域に、犠牲膜パターンを形成する段階と、
前記基板の第1面上に形成され、前記犠牲膜パターン上に位置する配線を有する上部配線層を形成する段階と、
前記基板の第2面を部分的に除去して、前記犠牲膜パターンを露出させる段階と、
前記犠牲膜パターンを前記基板の第2面から除去して前記配線を露出させる第2開口部を形成する段階と、
前記第2開口部内に前記配線と電気的に接続される貫通電極を形成する段階と、を有し、
前記配線を露出させる前記第2開口部を形成する段階以後に、前記第2開口部の側壁上に、前記基板の第2面近傍にテーパを有し前記第2開口部のプロファイルを改善するスペーサーを形成する段階をさらに含むことを特徴とする半導体装置の製造方法。 - 前記犠牲膜パターンを形成する段階は、
前記基板の第1面から基板の厚さ方向に延長する第1開口部を形成する段階と、
前記第1開口部の側壁及び底面上に第1絶縁膜を形成する段階と、
前記第1絶縁膜上に犠牲膜を形成する段階と、
前記犠牲膜の一部を除去して前記第1開口部を充填する犠牲膜パターンを形成する段階と、を有することを特徴とする請求項1に記載の半導体装置の製造方法。 - 前記犠牲膜は、前記第1絶縁膜に対してエッチング選択比を有する絶縁物質を用いて形成することを特徴とする請求項2に記載の半導体装置の製造方法。
- 前記犠牲膜は、前記第1絶縁膜のエッチング率の3倍以上のエッチング率を有することを特徴とする請求項3に記載の半導体装置の製造方法。
- 前記犠牲膜と前記第1絶縁膜のエッチング選択比は、3:1〜20:1であることを特徴とする請求項3に記載の半導体装置の製造方法。
- 前記犠牲膜パターンは、内部にボイドを有するように形成することを特徴とする請求項1に記載の半導体装置の製造方法。
- 前記犠牲膜パターン上にキャッピング膜を形成する段階をさらに含むことを特徴とする請求項1に記載の半導体装置の製造方法。
- 前記配線を露出させる前記第2開口部を形成する段階は、前記犠牲膜パターンと前記キャッピング膜をともに除去する段階を含むことを特徴とする請求項7に記載の半導体装置の製造方法。
- 前記基板の第1面上には回路パターンが形成され、前記配線は、前記回路パターンと電気的に接続することを特徴とする請求項1に記載の半導体装置の製造方法。
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KR101604607B1 (ko) * | 2009-10-26 | 2016-03-18 | 삼성전자주식회사 | 반도체 장치 및 반도체 장치의 제조 방법 |
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JP2012119689A (ja) | 2012-06-21 |
US8592310B2 (en) | 2013-11-26 |
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CN102569173B (zh) | 2015-07-01 |
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