JP5840932B2 - 樹脂膜形成装置 - Google Patents
樹脂膜形成装置 Download PDFInfo
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- JP5840932B2 JP5840932B2 JP2011248254A JP2011248254A JP5840932B2 JP 5840932 B2 JP5840932 B2 JP 5840932B2 JP 2011248254 A JP2011248254 A JP 2011248254A JP 2011248254 A JP2011248254 A JP 2011248254A JP 5840932 B2 JP5840932 B2 JP 5840932B2
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- wafer
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- resin
- resin film
- film forming
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- 239000011347 resin Substances 0.000 title claims description 136
- 229920005989 resin Polymers 0.000 title claims description 136
- 239000007788 liquid Substances 0.000 claims description 57
- 239000011248 coating agent Substances 0.000 claims description 24
- 238000000576 coating method Methods 0.000 claims description 24
- 230000002093 peripheral effect Effects 0.000 claims description 17
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 description 29
- 238000004140 cleaning Methods 0.000 description 19
- 230000007246 mechanism Effects 0.000 description 18
- 238000000034 method Methods 0.000 description 11
- 239000004065 semiconductor Substances 0.000 description 6
- 230000008569 process Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000005871 repellent Substances 0.000 description 4
- 238000001179 sorption measurement Methods 0.000 description 4
- 238000004528 spin coating Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000007723 transport mechanism Effects 0.000 description 3
- 239000002202 Polyethylene glycol Substances 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 229920001223 polyethylene glycol Polymers 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 230000002940 repellent Effects 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000002679 ablation Methods 0.000 description 1
- 230000002745 absorbent Effects 0.000 description 1
- 239000002250 absorbent Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Coating Apparatus (AREA)
- Casting Or Compression Moulding Of Plastics Or The Like (AREA)
- Dicing (AREA)
Description
2 樹脂膜形成装置
21 筐体
22 成膜用テーブル(保持手段)
23 塗布部(塗布手段)
24 洗浄ノズル
61 吸着面(吸着部)
65 環状凸部(外周囲繞部)
68 ゴム部材
71 定盤
73 対峙面
74 供給口
75 樹脂供給源
76 吸引溝(吸引口)
77 吸引源
78 移動機構(移動手段)
81 液状樹脂
Claims (1)
- ウェーハの表面に所定厚みの樹脂膜を形成する樹脂膜形成装置であって、
ウェーハを上面に吸引保持する保持手段と、
前記保持手段に対峙して配設され前記保持手段に保持されたウェーハ表面に液状樹脂を塗布する塗布手段と、
前記保持手段と前記塗布手段とを相対的に平行にスライドさせる移動手段とを備え、
前記保持手段は、ウェーハの外径と同等の径の水平面からなりウェーハを吸引保持する吸着部と、前記吸着部の外周を囲繞して立設しウェーハの外径よりも大径の外周囲繞部と、前記外周囲繞部に積層して配設されたリング形状のゴム部材と、から構成され、
前記塗布手段は、前記リング形状のゴム部材の外径と同等の外径を有し前記保持手段に対峙する対峙面が水平面で且つ撥水性の高い材質で形成された定盤と、前記定盤中央に形成され且つ液状樹脂を供給する樹脂供給源に連通した供給口と、前記定盤の中心にウェーハ中心を位置づけた際のウェーハの外径と同等位置を囲繞するように形成され且つ吸引源に連通した吸引口と、から構成され、
前記保持手段の前記外周囲繞部と前記ゴム部材とは、前記保持手段の前記吸着部にウェーハを吸引保持し前記保持手段の前記ゴム部材に前記塗布手段の対峙面を当接した際に、ウェーハの表面と前記定盤の前記対峙面との隙間が、塗布する樹脂膜の所定厚みに相当するように設定されており、
ウェーハに液状樹脂を塗布する際には、前記保持手段の前記吸着部にウェーハが吸引保持され、前記保持手段の中心に前記塗布手段の中心を位置付け且つ前記保持手段の前記ゴム部材に前記塗布手段の前記対峙面における前記吸引口よりも径方向外側を当接させ、前記供給口から液状樹脂を供給するとともに前記吸引口から吸引しウェーハの表面に液状樹脂を塗布し、
液状樹脂塗布後に前記塗布手段を前記保持手段から剥離する際には、前記保持手段の前記定盤の前記対峙面に前記保持手段の前記ゴム部材を当接させた状態で、前記移動手段により前記保持手段と前記塗布手段とを相対的に平行にスライドさせること
を特徴とする樹脂膜形成装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011248254A JP5840932B2 (ja) | 2011-11-14 | 2011-11-14 | 樹脂膜形成装置 |
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JP2011248254A JP5840932B2 (ja) | 2011-11-14 | 2011-11-14 | 樹脂膜形成装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013103396A JP2013103396A (ja) | 2013-05-30 |
JP5840932B2 true JP5840932B2 (ja) | 2016-01-06 |
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JP2011248254A Active JP5840932B2 (ja) | 2011-11-14 | 2011-11-14 | 樹脂膜形成装置 |
Country Status (1)
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JP (1) | JP5840932B2 (ja) |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001269610A (ja) * | 2000-01-17 | 2001-10-02 | Canon Inc | 塗布方法、塗布装置および被膜の作製方法 |
JP3815267B2 (ja) * | 2001-06-28 | 2006-08-30 | 株式会社デンソー | マスキング剤塗布方法と装置及びマスク方法と装置 |
JP2006148004A (ja) * | 2004-11-24 | 2006-06-08 | Toshiba Corp | 薬液塗布方法及び薬液塗布装置 |
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2011
- 2011-11-14 JP JP2011248254A patent/JP5840932B2/ja active Active
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