JP5711662B2 - 高精度位置測定用の一体化マイクロアクチュエータおよび線形可変差動変圧器 - Google Patents
高精度位置測定用の一体化マイクロアクチュエータおよび線形可変差動変圧器 Download PDFInfo
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- JP5711662B2 JP5711662B2 JP2011532082A JP2011532082A JP5711662B2 JP 5711662 B2 JP5711662 B2 JP 5711662B2 JP 2011532082 A JP2011532082 A JP 2011532082A JP 2011532082 A JP2011532082 A JP 2011532082A JP 5711662 B2 JP5711662 B2 JP 5711662B2
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- groove
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- coil
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/22—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils
- G01D5/2291—Linear or rotary variable differential transformers (LVDTs/RVDTs) having a single primary coil and two secondary coils
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/14—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring distance or clearance between spaced objects or spaced apertures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
- G01Q10/04—Fine scanning or positioning
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F21/00—Variable inductances or transformers of the signal type
- H01F21/02—Variable inductances or transformers of the signal type continuously variable, e.g. variometers
- H01F21/04—Variable inductances or transformers of the signal type continuously variable, e.g. variometers by relative movement of turns or parts of windings
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Description
A sin ωt
B sin(ωt+φ)
A sin(ωt)xB sin(ωt+φ)=(AxB)/2(sin(2ωt+φ)+sinφ)
302 上ボールベアリング
303 下ボールベアリング
304 屈曲部
305,306 ディスクインサート
307 支持プレート
Claims (4)
- スリーブ(311)であって、該スリーブに一体化された一対の第二の溝(310)を有するスリーブ(311)と、
前記スリーブ(311)内に収容されている非強磁性の屈曲部(304)であって、圧電体(301)により駆動される非強磁性の屈曲部(304)と、を含む装置であって、
前記屈曲部(304)は、その中に一体化された第一の溝(309)を有しており、前記第一及び第二の溝は、前記第一の溝が前記第二の溝の内側に在るように同軸に配置されていて、前記第一の溝(309)は、それに一次コイルを巻き付けることを可能にするように構成され、前記第二の溝(310)は、それに二次コイルの2つの部分を巻き付けることを可能にするように構成され、前記スリーブ(311)及び前記屈曲部(304)は、前記第一の溝が、前記コイルの中心軸線に略平行に前記第二の溝に対して移動可能であるように、互いに固定されており、
該装置は、さらに、
前記第一の溝(309)及び前記第二の溝(310)の各々への電気接続を可能にする少なくとも1つの構造要素と、
前記一次及び二次コイルの中心軸の方向において前記二次コイルの前記部分に対する前記一次コイルの移動を高精度で分別検出するデジタル励磁・信号処理エレクトロニクスと、
を含む装置。 - 前記屈曲部(304)は、前記圧電体(301)が伸縮するときに移動する第一部分と、前記圧電体(301)が伸縮するときに移動しない第二部分とを有しており、前記第一の溝(309)は前記屈曲部(304)の前記第一部分に配置されており、前記スリーブ(311)は前記屈曲部(304)の前記第二部分に取り付けられている、請求項1に記載された装置。
- 前記屈曲部の凹所(308)が、前記圧電体(301)の伸縮を、前記屈曲部(304)の前記第二部分に対する前記屈曲部(304)の前記第一部分の移動に変換する、請求項2に記載の装置。
- 前記スリーブ(311)及び前記屈曲部(304)が非強磁性材料から形成される、請求項1〜3のいずれか一項に記載の装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US19598308P | 2008-10-14 | 2008-10-14 | |
US61/195,983 | 2008-10-14 | ||
PCT/US2009/005635 WO2010044871A1 (en) | 2008-10-14 | 2009-10-14 | Integrated micro actuator and linear variable defferential transformer for high precision position measurements |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012506050A JP2012506050A (ja) | 2012-03-08 |
JP5711662B2 true JP5711662B2 (ja) | 2015-05-07 |
Family
ID=42106794
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011532082A Active JP5711662B2 (ja) | 2008-10-14 | 2009-10-14 | 高精度位置測定用の一体化マイクロアクチュエータおよび線形可変差動変圧器 |
Country Status (4)
Country | Link |
---|---|
US (3) | US8502525B2 (ja) |
EP (1) | EP2335254A4 (ja) |
JP (1) | JP5711662B2 (ja) |
WO (1) | WO2010044871A1 (ja) |
Families Citing this family (8)
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EP2335254A4 (en) * | 2008-10-14 | 2013-01-30 | Roger Proksch | INTEGRATED MICROACTUATOR AND LINEAR VARIABLE DIFFERENTIAL TRANSFORMER FOR HIGHLY PRECISE POSITION MEASUREMENTS |
US8434214B2 (en) * | 2010-08-04 | 2013-05-07 | Utica Enterprises, Inc. | Vehicle body assembly apparatus having triaxial position sensing |
US9097737B2 (en) | 2013-11-25 | 2015-08-04 | Oxford Instruments Asylum Research, Inc. | Modular atomic force microscope with environmental controls |
US10345357B2 (en) * | 2016-02-29 | 2019-07-09 | The Boeing Company | Fault detection in variable differential transformer sensors based on zero-crossings of signals |
US20180038714A1 (en) * | 2016-08-02 | 2018-02-08 | Honeywell International Inc. | System and method for determining a position of a moveable device |
US11496034B2 (en) | 2019-06-14 | 2022-11-08 | Apple Inc. | Haptic actuator having a double-wound driving coil for temperature-independent velocity sensing |
US11527946B2 (en) * | 2019-06-14 | 2022-12-13 | Apple Inc. | Haptic actuator having a double-wound driving coil for temperature- and driving current-independent velocity sensing |
US11644478B2 (en) | 2021-02-03 | 2023-05-09 | Oxford Instruments Asylum Research, Inc. | Automated optimization of AFM light source positioning |
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-
2009
- 2009-10-14 EP EP09820902A patent/EP2335254A4/en not_active Withdrawn
- 2009-10-14 US US12/587,947 patent/US8502525B2/en active Active
- 2009-10-14 JP JP2011532082A patent/JP5711662B2/ja active Active
- 2009-10-14 WO PCT/US2009/005635 patent/WO2010044871A1/en active Application Filing
-
2013
- 2013-08-06 US US13/959,943 patent/US9518814B2/en active Active
-
2016
- 2016-12-13 US US15/377,458 patent/US10337890B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US20100213930A1 (en) | 2010-08-26 |
JP2012506050A (ja) | 2012-03-08 |
US10337890B2 (en) | 2019-07-02 |
US9518814B2 (en) | 2016-12-13 |
EP2335254A4 (en) | 2013-01-30 |
WO2010044871A1 (en) | 2010-04-22 |
EP2335254A1 (en) | 2011-06-22 |
US20170089733A1 (en) | 2017-03-30 |
US20130314078A1 (en) | 2013-11-28 |
US8502525B2 (en) | 2013-08-06 |
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