JP5628167B2 - 真空ポンプ - Google Patents
真空ポンプ Download PDFInfo
- Publication number
- JP5628167B2 JP5628167B2 JP2011520397A JP2011520397A JP5628167B2 JP 5628167 B2 JP5628167 B2 JP 5628167B2 JP 2011520397 A JP2011520397 A JP 2011520397A JP 2011520397 A JP2011520397 A JP 2011520397A JP 5628167 B2 JP5628167 B2 JP 5628167B2
- Authority
- JP
- Japan
- Prior art keywords
- bearing
- vacuum pump
- rotor
- pressure
- electromagnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/04—Shafts or bearings, or assemblies thereof
- F04D29/046—Bearings
- F04D29/048—Bearings magnetic; electromagnetic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
- F04D29/056—Bearings
- F04D29/058—Bearings magnetic; electromagnetic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/06—Lubrication
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/047—Details of housings; Mounting of active magnetic bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0474—Active magnetic bearings for rotary movement
- F16C32/0489—Active magnetic bearings for rotary movement with active support of five degrees of freedom, e.g. two radial magnetic bearings combined with an axial bearing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2360/00—Engines or pumps
- F16C2360/44—Centrifugal pumps
- F16C2360/45—Turbo-molecular pumps
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Description
Claims (14)
- 少なくとも1つのロータ手段を支持するロータ軸と、
該ロータ軸を軸受支持するための、圧力側に設けられた軸受手段、及び吸込み側に設けられた軸受手段と
を備えた真空ポンプにおいて、
前記吸込み側の軸受手段は、高真空領域に配置されてあり、電磁軸受を有しており、
前記電磁軸受のコイルが、圧力封止された凹部に配置されており、
該凹部から前記吸込み側への前記コイルによるガス放出を防止するように、前記凹部の開口が閉鎖要素によって密に閉じられていることを特徴とする真空ポンプ。 - 10-5mbar未満の圧力が、前記高真空領域に存在していることを特徴とする請求項1に記載の真空ポンプ。
- 前記圧力は、10-10 mbar未満であることを特徴とする請求項2に記載の真空ポンプ。
- 前記凹部は、ハウジング要素内に設けられてあることを特徴とする請求項1に記載の真空ポンプ。
- 前記凹部は、前記ロータ軸の方向に開いていることを特徴とする請求項4に記載の真空ポンプ。
- 前記閉鎖要素は、管状であることを特徴とする請求項1乃至5のいずれかに記載の真空ポンプ。
- 前記吸込み側の軸受手段は、ラジアル軸受として、又はラジアル軸受及びアキシャル軸受として構成されていることを特徴とする請求項1乃至6のいずれかに記載の真空ポンプ。
- 少なくとも1つの軸受センサが、前記圧力封止された凹部内に配置されていることを特徴とする請求項1乃至7のいずれかに記載の真空ポンプ。
- 前記圧力側の軸受手段は、ラジアル軸受及びアキシャル軸受として構成されていることを特徴とする請求項1乃至8のいずれかに記載の真空ポンプ。
- 前記圧力側の軸受手段は、電磁軸受を有していることを特徴とする請求項9に記載の真空ポンプ。
- 前記電磁軸受は、前記ロータ軸に接続された軸受要素を有していることを特徴とする請求項1乃至10のいずれかに記載の真空ポンプ。
- 前記吸込み側の軸受手段は、前記ロータ手段の吸込み側の領域に配置されていることを特徴とする請求項1乃至11のいずれかに記載の真空ポンプ。
- 前記ロータ手段は、前記2つの軸受手段の間に配置されていることを特徴とする請求項1乃至12のいずれかに記載の真空ポンプ。
- 前記吸込み側の軸受手段は、前記ロータ手段の2つのロータの間に配置されていることを特徴とする請求項1乃至11のいずれかに記載の真空ポンプ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102008035891.6 | 2008-07-31 | ||
DE102008035891A DE102008035891A1 (de) | 2008-07-31 | 2008-07-31 | Vakuumpumpe |
PCT/EP2009/056645 WO2010012526A1 (de) | 2008-07-31 | 2009-05-29 | Vakuumpumpe |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011529542A JP2011529542A (ja) | 2011-12-08 |
JP5628167B2 true JP5628167B2 (ja) | 2014-11-19 |
Family
ID=40935030
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011520397A Active JP5628167B2 (ja) | 2008-07-31 | 2009-05-29 | 真空ポンプ |
Country Status (7)
Country | Link |
---|---|
US (1) | US8814542B2 (ja) |
EP (1) | EP2310687B1 (ja) |
JP (1) | JP5628167B2 (ja) |
KR (1) | KR20110043728A (ja) |
DE (1) | DE102008035891A1 (ja) |
TW (1) | TW201013053A (ja) |
WO (1) | WO2010012526A1 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102009055888A1 (de) * | 2009-11-26 | 2011-06-01 | Oerlikon Leybold Vacuum Gmbh | Vakuumpumpe |
TWI494514B (zh) * | 2012-05-04 | 2015-08-01 | 中原大學 | 軸向被動式磁浮軸承系統 |
DE102012219982A1 (de) * | 2012-10-31 | 2014-04-30 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
EP2770222A1 (en) * | 2013-02-20 | 2014-08-27 | Sulzer Pump Solutions AB | A machine provided with safety bearing |
CN103267024B (zh) * | 2013-05-15 | 2015-07-22 | 北京化工大学 | 一种带电磁控制器的离心式压缩机 |
CN105720732B (zh) * | 2016-03-31 | 2018-05-04 | 苏州工业园区职业技术学院 | 一种适于多种翻转运动的磁悬浮电机 |
GB2578899B (en) * | 2018-11-13 | 2021-05-26 | Edwards Ltd | Vacuum pump |
EP3693610B1 (de) * | 2020-01-27 | 2021-12-22 | Pfeiffer Vacuum Technology AG | Molekularvakuumpumpe |
FR3112172B1 (fr) * | 2020-11-30 | 2023-03-17 | Pfeiffer Vacuum | Pompe à vide sèche |
GB2615365B (en) * | 2022-02-08 | 2024-04-24 | Edwards Ltd | Bearing assembly and vacuum pump |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3536418A (en) * | 1969-02-13 | 1970-10-27 | Onezime P Breaux | Cryogenic turbo-molecular vacuum pump |
DE2337226A1 (de) | 1973-07-21 | 1975-02-06 | Maschf Augsburg Nuernberg Ag | Vakuumpumpe mit einem im innenraum ihres gehaeuses gelagerten laeufer |
DE2349033C3 (de) * | 1973-09-29 | 1984-08-30 | Leybold-Heraeus Gmbh, 5000 Koeln | Turbomolekularpumpe |
JPS59101596A (ja) | 1982-12-01 | 1984-06-12 | Ntn Toyo Bearing Co Ltd | タ−ボ分子ポンプ |
JPS62183246A (ja) | 1986-02-06 | 1987-08-11 | Nec Corp | 双方向再生中継装置 |
JP2528672B2 (ja) | 1987-09-29 | 1996-08-28 | 高砂工業株式会社 | 台車式トンネル炉 |
JPH0188094U (ja) * | 1987-11-30 | 1989-06-09 | ||
DE3818556A1 (de) * | 1988-06-01 | 1989-12-07 | Pfeiffer Vakuumtechnik | Magnetlager fuer eine schnell rotierende vakuumpumpe |
JPH0278793A (ja) | 1988-09-14 | 1990-03-19 | Ebara Corp | 多段渦流型真空ポンプ |
US5501583A (en) | 1992-08-19 | 1996-03-26 | Hitachi, Ltd. | Turbo vacuum pump |
DE4410656A1 (de) * | 1994-03-26 | 1995-09-28 | Balzers Pfeiffer Gmbh | Reibungspumpe |
JPH08219086A (ja) * | 1995-02-14 | 1996-08-27 | Daikin Ind Ltd | 回転体の支持構造 |
JPH11190294A (ja) | 1997-12-26 | 1999-07-13 | Shimadzu Corp | ターボ分子ポンプ |
ITTO980453A1 (it) | 1998-05-27 | 1999-11-29 | Varian Spa | Pompa da vuoto compatta |
JP2000161284A (ja) | 1998-11-26 | 2000-06-13 | Hitachi Ltd | ターボ真空ポンプ |
JP3349679B2 (ja) | 1999-03-31 | 2002-11-25 | ビーオーシーエドワーズテクノロジーズ株式会社 | 磁気軸受装置及びこれを備えた真空ポンプ |
DE10022061A1 (de) * | 2000-05-06 | 2001-11-08 | Leybold Vakuum Gmbh | Magnetlagerung mit Dämpfung |
GB0229356D0 (en) * | 2002-12-17 | 2003-01-22 | Boc Group Plc | Vacuum pumping arrangement |
JP4571786B2 (ja) | 2003-06-10 | 2010-10-27 | 則夫 清水 | 標的核酸の検出法 |
JP2005042709A (ja) * | 2003-07-10 | 2005-02-17 | Ebara Corp | 真空ポンプ |
US20050186099A1 (en) * | 2004-02-19 | 2005-08-25 | Graeme Huntley | Active vibration reduction |
DE202005019644U1 (de) | 2005-12-16 | 2007-04-26 | Leybold Vacuum Gmbh | Turbomolekularpumpe |
DE102006037187A1 (de) * | 2006-08-09 | 2008-02-21 | Pfeiffer Vacuum Gmbh | Anordnung zur Lagerung einer Welle einer Vakuumpumpe |
-
2008
- 2008-07-31 DE DE102008035891A patent/DE102008035891A1/de not_active Ceased
-
2009
- 2009-05-29 US US13/055,977 patent/US8814542B2/en active Active
- 2009-05-29 WO PCT/EP2009/056645 patent/WO2010012526A1/de active Application Filing
- 2009-05-29 KR KR1020117004868A patent/KR20110043728A/ko not_active Application Discontinuation
- 2009-05-29 JP JP2011520397A patent/JP5628167B2/ja active Active
- 2009-05-29 EP EP09779588.4A patent/EP2310687B1/de active Active
- 2009-07-27 TW TW098125166A patent/TW201013053A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
EP2310687B1 (de) | 2019-07-10 |
US8814542B2 (en) | 2014-08-26 |
JP2011529542A (ja) | 2011-12-08 |
WO2010012526A1 (de) | 2010-02-04 |
TW201013053A (en) | 2010-04-01 |
US20110123358A1 (en) | 2011-05-26 |
DE102008035891A1 (de) | 2010-02-04 |
KR20110043728A (ko) | 2011-04-27 |
EP2310687A1 (de) | 2011-04-20 |
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