JP7401305B2 - 真空ポンプ組立体 - Google Patents
真空ポンプ組立体 Download PDFInfo
- Publication number
- JP7401305B2 JP7401305B2 JP2019512812A JP2019512812A JP7401305B2 JP 7401305 B2 JP7401305 B2 JP 7401305B2 JP 2019512812 A JP2019512812 A JP 2019512812A JP 2019512812 A JP2019512812 A JP 2019512812A JP 7401305 B2 JP7401305 B2 JP 7401305B2
- Authority
- JP
- Japan
- Prior art keywords
- stator
- motor
- vacuum pump
- magnet
- motor rotor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000004323 axial length Effects 0.000 claims description 31
- 230000007246 mechanism Effects 0.000 claims description 19
- 238000004804 winding Methods 0.000 claims description 7
- 230000004907 flux Effects 0.000 claims description 6
- 238000003475 lamination Methods 0.000 description 6
- 238000005086 pumping Methods 0.000 description 5
- 230000000712 assembly Effects 0.000 description 3
- 238000000429 assembly Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000005672 electromagnetic field Effects 0.000 description 3
- 239000000696 magnetic material Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 230000000116 mitigating effect Effects 0.000 description 2
- 239000012256 powdered iron Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/02—Units comprising pumps and their driving means
- F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
- F04D25/0606—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump
- F04D25/0613—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump the electric motor being of the inside-out type, i.e. the rotor is arranged radially outside a central stator
- F04D25/0633—Details of the magnetic circuit
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K1/00—Details of the magnetic circuit
- H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
- H02K1/22—Rotating parts of the magnetic circuit
- H02K1/27—Rotor cores with permanent magnets
- H02K1/2706—Inner rotors
- H02K1/272—Inner rotors the magnetisation axis of the magnets being perpendicular to the rotor axis
- H02K1/2726—Inner rotors the magnetisation axis of the magnets being perpendicular to the rotor axis the rotor consisting of a single magnet or two or more axially juxtaposed single magnets
- H02K1/2733—Annular magnets
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/02—Units comprising pumps and their driving means
- F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K21/00—Synchronous motors having permanent magnets; Synchronous generators having permanent magnets
- H02K21/12—Synchronous motors having permanent magnets; Synchronous generators having permanent magnets with stationary armatures and rotating magnets
- H02K21/14—Synchronous motors having permanent magnets; Synchronous generators having permanent magnets with stationary armatures and rotating magnets with magnets rotating within the armatures
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
- H02K7/14—Structural association with mechanical loads, e.g. with hand-held machine tools or fans
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
- H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
- H02K11/21—Devices for sensing speed or position, or actuated thereby
- H02K11/215—Magnetic effect devices, e.g. Hall-effect or magneto-resistive elements
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
- H02K7/08—Structural association with bearings
- H02K7/083—Structural association with bearings radially supporting the rotary shaft at both ends of the rotor
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
Description
12 真空ポンプ機構
14 シャフト
16 ブラシレスモーター
18 ターボポンプ機構
20 分子ドラッグポンプ機構
22 軸受
24 (モーターの)永久磁石回転子
26 (モーターの)固定子
28 ポンプハウジング
30 モーター制御装置
Claims (6)
- モーターを備える真空ポンプ組立体であって、前記モーターは、
モーター回転子磁石及び固定子を備え、
前記モーター回転子磁石は、真空ポンプ機構を駆動するために軸線周りに前記固定子に対して回転可能であるように構成されており、
前記モーター回転子磁石の軸方向長さは、前記固定子の軸方向長さの2/3以下であり、
前記モーター回転子磁石は、真空ポンプシャフト上に設けられた凹部の中に取り付けられた円柱形磁石を備え、
所定の固定子に関して、前記モーター回転子磁石は、前記モーター回転子磁石の間の磁束と前記固定子の巻きターンとの積が、前記モーター回転子磁石が前記固定子に相当する軸方向長さを有する構成と実質的同一であるように選択された直径を有する、真空ポンプ組立体。 - 前記モーター回転子磁石の軸方向長さは、前記モーター回転子磁石及び固定子の回転に関連した可変磁界が前記固定子によって取り囲まれた容積部内に実質的に収容されるように選択される、請求項1に記載の真空ポンプ組立体。
- 前記モーター回転子磁石は、前記固定子の軸方向長さの1/3~2/3の軸方向長さを有する、請求項1又は2に記載の真空ポンプ組立体。
- 前記モーター回転子磁石は、前記固定子の軸方向長さの2/5~3/5の軸方向長さを有する、請求項1から3のいずれかに記載の真空ポンプ組立体。
- 前記モーター回転子磁石は、前記固定子の軸方向長さの半分の軸方向長さを有する、請求項1から4のいずれかに記載の真空ポンプ組立体。
- 前記モーター回転子磁石は、前記固定子の中で実質的に長手方向に対称的に配置される、請求項1から5のいずれかに記載の真空ポンプ組立体。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1615048.4A GB2553362A (en) | 2016-09-05 | 2016-09-05 | Vacuum pump assembly |
GB1615048.4 | 2016-09-05 | ||
PCT/GB2017/052528 WO2018042172A1 (en) | 2016-09-05 | 2017-08-30 | Vacuum pump assembly |
Publications (4)
Publication Number | Publication Date |
---|---|
JP2019526743A JP2019526743A (ja) | 2019-09-19 |
JP2019526743A5 JP2019526743A5 (ja) | 2021-11-11 |
JPWO2018042172A5 JPWO2018042172A5 (ja) | 2022-06-20 |
JP7401305B2 true JP7401305B2 (ja) | 2023-12-19 |
Family
ID=57139810
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019512812A Active JP7401305B2 (ja) | 2016-09-05 | 2017-08-30 | 真空ポンプ組立体 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20190207445A1 (ja) |
EP (1) | EP3507500B1 (ja) |
JP (1) | JP7401305B2 (ja) |
GB (1) | GB2553362A (ja) |
WO (1) | WO2018042172A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3966454B1 (en) * | 2019-05-10 | 2024-06-26 | Carrier Corporation | Compressor with thrust control |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009150398A (ja) | 2007-12-20 | 2009-07-09 | Edwards Ltd | 真空ポンプ |
JP2013145054A (ja) | 2013-02-15 | 2013-07-25 | Vacuum Products Kk | 回転部の軸受け装置及びそれを用いたポンプ |
WO2016017180A1 (ja) | 2014-07-31 | 2016-02-04 | 株式会社ナカニシ | 電気モータおよび歯科装置 |
JP2016154425A (ja) | 2015-02-20 | 2016-08-25 | 日立アプライアンス株式会社 | ロータ組立体、ロータ組立体を含む電動送風機、及び、ロータ組立体を含む電気掃除機 |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE795400A (fr) * | 1972-02-14 | 1973-08-14 | Xerox Corp | Moteur de haut-parleur sans flux de perte |
JPS5750142B2 (ja) * | 1973-02-20 | 1982-10-26 | ||
JPS55118105U (ja) * | 1979-02-13 | 1980-08-21 | ||
JPS5778332A (en) * | 1980-10-31 | 1982-05-17 | Hitachi Ltd | Armature |
NL8400164A (nl) * | 1983-01-28 | 1984-08-16 | Pfeiffer Vakuumtechnik | Turbomoleculairpomp met zelfinduktiearme gelijkstroommotor, reminrichting en werkwijze voor het bedrijven hiervan. |
DE4140379C1 (en) * | 1991-12-07 | 1992-12-24 | Papst-Minebea-Disc-Motor Gmbh, 7208 Spaichingen, De | Brushless DC motor for hard disc drive - has magnetically-conducting separating rings between magnetic discs mounted on drive hub coupled to rotor |
JPH11234931A (ja) * | 1998-02-19 | 1999-08-27 | Hitachi Ltd | 永久磁石式回転電機 |
DE10043235A1 (de) * | 2000-09-02 | 2002-03-14 | Leybold Vakuum Gmbh | Vakuumpumpe |
JP4240456B2 (ja) * | 2002-12-13 | 2009-03-18 | 株式会社ミツバ | ブラシレスモータ |
EP2072826B1 (de) * | 2007-12-17 | 2015-10-14 | Grundfos Management A/S | Rotor für einem Spaltrohrmotor |
US8692432B2 (en) * | 2010-12-07 | 2014-04-08 | Regal Beloit America, Inc. | Permanent magnet rotors and methods of assembling the same |
DE102011109929A1 (de) * | 2011-08-10 | 2013-02-14 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
US9882440B2 (en) * | 2012-10-15 | 2018-01-30 | Regal Beloit America, Inc. | Radially embedded permanent magnet rotor and methods thereof |
US9831727B2 (en) * | 2012-10-15 | 2017-11-28 | Regal Beloit America, Inc. | Permanent magnet rotor and methods thereof |
DE102013214662A1 (de) * | 2013-07-26 | 2015-01-29 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
JP6257212B2 (ja) * | 2013-08-05 | 2018-01-10 | 株式会社ミツバ | ブラシレスモータ |
EP2852031B1 (en) * | 2013-09-20 | 2021-01-13 | Bleckmann GmbH & Co. KG | Rotor for brushless DC motor and brushless DC motor |
JP6411833B2 (ja) * | 2014-09-22 | 2018-10-24 | 株式会社ミツバ | ブラシレスモータ |
GB2535163B (en) * | 2015-02-09 | 2017-04-05 | Edwards Ltd | Pump lubricant supply systems |
-
2016
- 2016-09-05 GB GB1615048.4A patent/GB2553362A/en not_active Withdrawn
-
2017
- 2017-08-30 JP JP2019512812A patent/JP7401305B2/ja active Active
- 2017-08-30 WO PCT/GB2017/052528 patent/WO2018042172A1/en active Application Filing
- 2017-08-30 US US16/330,300 patent/US20190207445A1/en not_active Abandoned
- 2017-08-30 EP EP17762176.0A patent/EP3507500B1/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009150398A (ja) | 2007-12-20 | 2009-07-09 | Edwards Ltd | 真空ポンプ |
JP2013145054A (ja) | 2013-02-15 | 2013-07-25 | Vacuum Products Kk | 回転部の軸受け装置及びそれを用いたポンプ |
WO2016017180A1 (ja) | 2014-07-31 | 2016-02-04 | 株式会社ナカニシ | 電気モータおよび歯科装置 |
JP2016154425A (ja) | 2015-02-20 | 2016-08-25 | 日立アプライアンス株式会社 | ロータ組立体、ロータ組立体を含む電動送風機、及び、ロータ組立体を含む電気掃除機 |
Also Published As
Publication number | Publication date |
---|---|
WO2018042172A1 (en) | 2018-03-08 |
EP3507500A1 (en) | 2019-07-10 |
GB201615048D0 (en) | 2016-10-19 |
JP2019526743A (ja) | 2019-09-19 |
GB2553362A (en) | 2018-03-07 |
US20190207445A1 (en) | 2019-07-04 |
EP3507500B1 (en) | 2024-06-05 |
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