JP5506523B2 - 切削装置 - Google Patents
切削装置 Download PDFInfo
- Publication number
- JP5506523B2 JP5506523B2 JP2010096819A JP2010096819A JP5506523B2 JP 5506523 B2 JP5506523 B2 JP 5506523B2 JP 2010096819 A JP2010096819 A JP 2010096819A JP 2010096819 A JP2010096819 A JP 2010096819A JP 5506523 B2 JP5506523 B2 JP 5506523B2
- Authority
- JP
- Japan
- Prior art keywords
- blade
- cutting
- cutting blade
- chuck table
- pressure sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000005520 cutting process Methods 0.000 title claims description 130
- 238000001514 detection method Methods 0.000 claims description 50
- 235000012431 wafers Nutrition 0.000 description 15
- 239000004065 semiconductor Substances 0.000 description 8
- 230000003287 optical effect Effects 0.000 description 7
- 239000000919 ceramic Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 239000002390 adhesive tape Substances 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Images
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Dicing (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Description
8 X軸移動ブロック
20 チャックテーブル
23 枠体
24 吸引保持部
50 切削ブレード
62 圧力センサー
68 センサー素子
72 ブレード検出手段(ブレード検出機構)
78 カバー
Claims (1)
- 被加工物を保持する保持面を有するチャックテーブルと、該チャックテーブルに保持された被加工物を切削する切削ブレードを回転可能に支持するスピンドルを有する切削手段と、該切削ブレードの下端部の高さ位置を検出するブレード検出手段とを備えた切削装置であって、
該ブレード検出手段は、回転する該切削ブレード周囲の気流によって発生する風圧を検出し、風圧に応じて電圧を出力する圧力センサーを具備し、
該ブレード検出手段は、前記チャックテーブルの前記保持面の領域外に埋設され、該ブレード検出手段の上端と該保持面とは面一に形成されていることを特徴とする切削装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010096819A JP5506523B2 (ja) | 2010-04-20 | 2010-04-20 | 切削装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010096819A JP5506523B2 (ja) | 2010-04-20 | 2010-04-20 | 切削装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011224720A JP2011224720A (ja) | 2011-11-10 |
JP5506523B2 true JP5506523B2 (ja) | 2014-05-28 |
Family
ID=45040731
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010096819A Active JP5506523B2 (ja) | 2010-04-20 | 2010-04-20 | 切削装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5506523B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6081529B2 (ja) * | 2015-06-23 | 2017-02-15 | レノボ・シンガポール・プライベート・リミテッド | 放熱ファンを搭載する電子機器、コンピュータ、プロセッサの制御方法およびコンピュータ・プログラム |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09123160A (ja) * | 1995-10-30 | 1997-05-13 | Hitachi Cable Ltd | ダイシング方法及びその装置 |
JPH11214334A (ja) * | 1998-01-29 | 1999-08-06 | Disco Abrasive Syst Ltd | ブレードのセットアップ装置 |
JP2000326224A (ja) * | 1999-05-21 | 2000-11-28 | Okamoto Machine Tool Works Ltd | 研削装置 |
-
2010
- 2010-04-20 JP JP2010096819A patent/JP5506523B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JP2011224720A (ja) | 2011-11-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5730048B2 (ja) | 加工装置 | |
JP5248339B2 (ja) | 切削ブレードの管理方法 | |
JP6983026B2 (ja) | 切削装置 | |
JP2013041972A (ja) | 切削方法 | |
JP5318517B2 (ja) | チャックテーブル機構 | |
KR20200140725A (ko) | 레이저 발진기 지지 테이블, 레이저 가공 장치 및 레이저 발진기 지지 테이블의 조정 방법 | |
JP5922342B2 (ja) | ウエーハの面取り部除去装置 | |
KR102644406B1 (ko) | 가공 장치 | |
JP2015020240A (ja) | 切削装置 | |
JP5389604B2 (ja) | 切削装置における切削ブレードの消耗量管理方法 | |
JP5415219B2 (ja) | 切削装置 | |
JP5506523B2 (ja) | 切削装置 | |
JP7145643B2 (ja) | 検査治具及び検査方法 | |
JP5936923B2 (ja) | 切削ブレードの刃先位置検出方法 | |
JP2011104731A (ja) | 切削装置 | |
JPH0852733A (ja) | ダイシング装置 | |
JP5389613B2 (ja) | 切削装置における切削ブレードの消耗量管理方法 | |
JP5611012B2 (ja) | 切削ブレード検出機構 | |
JP5389603B2 (ja) | 切削装置における切削ブレードの消耗量管理方法 | |
CN114147607A (zh) | 加工装置 | |
KR102427972B1 (ko) | 높이 측정용 지그 | |
JP5248341B2 (ja) | 切削ブレードの管理方法 | |
JP7222636B2 (ja) | エッジトリミング装置 | |
JP2011218477A (ja) | 加工装置 | |
TWI779194B (zh) | 工件加工方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20130315 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20140131 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140204 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140221 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20140318 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20140318 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5506523 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |