JP5498655B2 - クラスタ源を使用する荷電粒子ビーム処理 - Google Patents
クラスタ源を使用する荷電粒子ビーム処理 Download PDFInfo
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- JP5498655B2 JP5498655B2 JP2007280016A JP2007280016A JP5498655B2 JP 5498655 B2 JP5498655 B2 JP 5498655B2 JP 2007280016 A JP2007280016 A JP 2007280016A JP 2007280016 A JP2007280016 A JP 2007280016A JP 5498655 B2 JP5498655 B2 JP 5498655B2
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- 239000002245 particle Substances 0.000 title claims description 67
- 239000007789 gas Substances 0.000 claims description 82
- 238000000034 method Methods 0.000 claims description 70
- 150000002500 ions Chemical class 0.000 claims description 53
- 239000000463 material Substances 0.000 claims description 45
- 239000011241 protective layer Substances 0.000 claims description 31
- 239000002243 precursor Substances 0.000 claims description 23
- 239000010410 layer Substances 0.000 claims description 22
- XMWRBQBLMFGWIX-UHFFFAOYSA-N C60 fullerene Chemical class C12=C3C(C4=C56)=C7C8=C5C5=C9C%10=C6C6=C4C1=C1C4=C6C6=C%10C%10=C9C9=C%11C5=C8C5=C8C7=C3C3=C7C2=C1C1=C2C4=C6C4=C%10C6=C9C9=C%11C5=C5C8=C3C3=C7C1=C1C2=C4C6=C2C9=C5C3=C12 XMWRBQBLMFGWIX-UHFFFAOYSA-N 0.000 claims description 16
- 229910003472 fullerene Inorganic materials 0.000 claims description 15
- 229910052799 carbon Inorganic materials 0.000 claims description 11
- 238000002347 injection Methods 0.000 claims description 11
- 239000007924 injection Substances 0.000 claims description 11
- 239000010931 gold Substances 0.000 claims description 10
- -1 silane compound Chemical class 0.000 claims description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 9
- 230000001678 irradiating effect Effects 0.000 claims description 7
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 7
- 229910052724 xenon Inorganic materials 0.000 claims description 7
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 claims description 7
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 6
- DTQVDTLACAAQTR-UHFFFAOYSA-N Trifluoroacetic acid Chemical compound OC(=O)C(F)(F)F DTQVDTLACAAQTR-UHFFFAOYSA-N 0.000 claims description 6
- 238000006243 chemical reaction Methods 0.000 claims description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 6
- 229910052737 gold Inorganic materials 0.000 claims description 6
- 238000009616 inductively coupled plasma Methods 0.000 claims description 6
- 229910052797 bismuth Inorganic materials 0.000 claims description 5
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 4
- FQNHWXHRAUXLFU-UHFFFAOYSA-N carbon monoxide;tungsten Chemical group [W].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-] FQNHWXHRAUXLFU-UHFFFAOYSA-N 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims description 4
- 239000001301 oxygen Substances 0.000 claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims description 4
- POILWHVDKZOXJZ-ARJAWSKDSA-M (z)-4-oxopent-2-en-2-olate Chemical compound C\C([O-])=C\C(C)=O POILWHVDKZOXJZ-ARJAWSKDSA-M 0.000 claims description 3
- DQEYHSVSMPJXLJ-UHFFFAOYSA-N C1(C=CC=C1)[Pt](CC)(C)C Chemical compound C1(C=CC=C1)[Pt](CC)(C)C DQEYHSVSMPJXLJ-UHFFFAOYSA-N 0.000 claims description 3
- AUFHQOUHGKXFEM-UHFFFAOYSA-N C[Au]C Chemical compound C[Au]C AUFHQOUHGKXFEM-UHFFFAOYSA-N 0.000 claims description 3
- 229910021529 ammonia Inorganic materials 0.000 claims description 3
- 150000002902 organometallic compounds Chemical class 0.000 claims description 3
- UQMOLLPKNHFRAC-UHFFFAOYSA-N tetrabutyl silicate Chemical compound CCCCO[Si](OCCCC)(OCCCC)OCCCC UQMOLLPKNHFRAC-UHFFFAOYSA-N 0.000 claims description 3
- YNJBWRMUSHSURL-UHFFFAOYSA-N trichloroacetic acid Chemical compound OC(=O)C(Cl)(Cl)Cl YNJBWRMUSHSURL-UHFFFAOYSA-N 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 229910001868 water Inorganic materials 0.000 claims description 3
- NRKYWOKHZRQRJR-UHFFFAOYSA-N 2,2,2-trifluoroacetamide Chemical compound NC(=O)C(F)(F)F NRKYWOKHZRQRJR-UHFFFAOYSA-N 0.000 claims description 2
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 claims description 2
- 229910000077 silane Inorganic materials 0.000 claims description 2
- VCZQFJFZMMALHB-UHFFFAOYSA-N tetraethylsilane Chemical compound CC[Si](CC)(CC)CC VCZQFJFZMMALHB-UHFFFAOYSA-N 0.000 claims 1
- 238000010884 ion-beam technique Methods 0.000 description 35
- 238000000151 deposition Methods 0.000 description 27
- 125000004429 atom Chemical group 0.000 description 23
- 230000008021 deposition Effects 0.000 description 21
- 238000010894 electron beam technology Methods 0.000 description 12
- 230000008569 process Effects 0.000 description 8
- 238000005530 etching Methods 0.000 description 7
- 239000000919 ceramic Substances 0.000 description 6
- 230000008859 change Effects 0.000 description 6
- 229910052733 gallium Inorganic materials 0.000 description 5
- 230000001681 protective effect Effects 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000001133 acceleration Effects 0.000 description 3
- 230000004075 alteration Effects 0.000 description 3
- 125000004432 carbon atom Chemical group C* 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- BLIQUJLAJXRXSG-UHFFFAOYSA-N 1-benzyl-3-(trifluoromethyl)pyrrolidin-1-ium-3-carboxylate Chemical compound C1C(C(=O)O)(C(F)(F)F)CCN1CC1=CC=CC=C1 BLIQUJLAJXRXSG-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 230000002708 enhancing effect Effects 0.000 description 2
- CKHJYUSOUQDYEN-UHFFFAOYSA-N gallium(3+) Chemical compound [Ga+3] CKHJYUSOUQDYEN-UHFFFAOYSA-N 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 238000002513 implantation Methods 0.000 description 2
- 229910001338 liquidmetal Inorganic materials 0.000 description 2
- 238000003801 milling Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 239000011253 protective coating Substances 0.000 description 2
- 239000011163 secondary particle Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- YGBYJRVGNBVTCQ-UHFFFAOYSA-N C[Pt](C)C.[CH]1C=CC=C1 Chemical compound C[Pt](C)C.[CH]1C=CC=C1 YGBYJRVGNBVTCQ-UHFFFAOYSA-N 0.000 description 1
- 229920000265 Polyparaphenylene Polymers 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000003466 anti-cipated effect Effects 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
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- 230000005684 electric field Effects 0.000 description 1
- 230000005686 electrostatic field Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000001616 ion spectroscopy Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 150000002910 rare earth metals Chemical group 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching
- H01J37/3056—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching for microworking, e.g. etching of gratings, trimming of electrical components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3178—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for applying thin layers on objects
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67069—Apparatus for fluid treatment for etching for drying etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/006—Details of gas supplies, e.g. in an ion source, to a beam line, to a specimen or to a workpiece
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/08—Ion sources
- H01J2237/0812—Ionized cluster beam [ICB] sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/08—Ion sources
- H01J2237/0815—Methods of ionisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/31—Processing objects on a macro-scale
- H01J2237/3142—Ion plating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/317—Processing objects on a microscale
- H01J2237/31732—Depositing thin layers on selected microareas
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/317—Processing objects on a microscale
- H01J2237/3174—Etching microareas
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/317—Processing objects on a microscale
- H01J2237/3174—Etching microareas
- H01J2237/31742—Etching microareas for repairing masks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/317—Processing objects on a microscale
- H01J2237/3174—Etching microareas
- H01J2237/31742—Etching microareas for repairing masks
- H01J2237/31744—Etching microareas for repairing masks introducing gas in vicinity of workpiece
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- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Plasma & Fusion (AREA)
- Chemical Vapour Deposition (AREA)
- Electron Sources, Ion Sources (AREA)
- Drying Of Semiconductors (AREA)
- Physical Vapour Deposition (AREA)
Description
加工物を真空チャンバ内で位置決めするステップと、
加工物を処理するために加工物の表面を荷電粒子の集束ビームで照射するステップとを含む。本発明は、さらにその方法を実行するために装備された装置に関する。
真空チャンバと、
前記真空チャンバ内で加工物を加工物位置に支持するための加工物支持体と、
荷電粒子のビームを生成するための荷電粒子源と、
前記荷電粒子のビームを加工物位置に集束するための少なくとも1つの集束レンズと
を含む装置であり、
この装置が荷電クラスタのビームを加工物位置に導くように備えられることを
特徴とする。
102 クラスタ・イオン源
104 ガス注入システム
106 電子ビーム・カラム
107 荷電粒子ビーム
108 クラスタのビーム
110 注目する領域
112 加工物
114 真空チャンバ
116 ステージ
300 セラミック・プラズマ・イオン・チャンバ
301 RF励起型プラズマ・イオン源
302 コイル
304 開口電極
306 イオン・ビーム集束カラム
308 集束イオン・ビーム
309 バルブ
310、312、314 供給源
400 クラスタ源
402 るつぼ
404 供給源材料
408 電源
410 加熱コイル
420 ノズル
422 クラスタ
430 イオナイザ
432 電子源
434 電子
436 電極
440 マス・フィルタ
442 クラスタのビーム
450 加工物
Claims (24)
- 加工物(112)を荷電粒子のビームで処理する方法であって、
前記加工物(112)を真空チャンバ(114)内で位置決めするステップと、
前記加工物の表面にガスを誘導するステップであって、前記ガスが前駆物質ガスまたはエッチング増強ガスを含むステップと、
前記加工物を処理するために前記加工物の表面を、前記加工物にエネルギーを供給して前記加工物の表面において前記ガスの化学反応を誘起させる荷電粒子の集束ビームで照射するステップと、
を含み、
前記荷電粒子の集束ビームは、非反応性の原子または分子の荷電クラスタの集束ビーム(108)であることを特徴とする方法。 - 前記荷電クラスタが、炭素、金、ビスマス、またはキセノンを含む、請求項1に記載の方法。
- 前記荷電クラスタの集束ビーム(108)が、C60、C70、C80、C84、Au3、Bi3、またはXe40を含むクラスタを含む、請求項2に記載の方法。
- 前記荷電クラスタの集束ビーム(108)がフラーレンを含む、請求項3に記載の方法。
- 前記化学反応が、前記前駆物質ガスを分解して前記加工物上に材料を堆積させることを含む、請求項1から4のいずれかに記載の方法。
- 前記化学反応が、前記エッチング増強ガスを分解して前記加工物の表面をエッチングすることを含む、請求項1から5に記載の方法。
- 前記ガスが、XeF2、F2、Cl2、Br2、I2、過フッ化炭化水素、トリフルオロアセトアミド、トリフルオロ酢酸、トリクロロ酢酸、水、アンモニア、または酸素を含む、請求項6に記載の方法。
- 前記ガスが、シラン化合物または有機金属化合物を含む前駆物質ガスを含み、前記加工物における前記化学反応が、前記前駆物質ガスを分解して前記加工物(112)上に堆積層を形成することを含む、請求項5に記載の方法。
- 前記ガスが、テトラメチルオルトシラン(TMOS)、テトラエチルオルトシラン(TEOS)、テトラブトキシシラン(Si(OC4H9))、ジメチル金アセチルアセトネート、タングステンヘキサカルボニル(W(CO)6)、またはメチルシクロペンタジエニルトリメチル白金(C9H16Pt)を含む、請求項8に記載の方法。
- 前記荷電クラスタの集束ビームで前記加工物を照射するステップが、プラズマ・イオン源(301)からの荷電クラスタの集束ビームで前記加工物を照射するステップを含む、請求項1から9のいずれかに記載の方法。
- 前記プラズマ・イオン源が誘導結合プラズマ・イオン源である、請求項10に記載の方法。
- 前記荷電クラスタの集束ビームで前記加工物を照射するステップが、蒸発クラスタ源(400)からの荷電クラスタの集束ビームで前記加工物を照射するステップを含む、請求項1から9のいずれかに記載の方法。
- 前記堆積層が、前記荷電クラスタが形成される材料を含む、請求項5、8、9のいずれかに記載の方法。
- 前記荷電クラスタのビーム(108)を形成するクラスタが0.1未満の原子当たりの電荷比を有する、請求項1から13のいずれかに記載の方法。
- 前記原子当たりの電荷比が0.01未満である、請求項14に記載の方法。
- 加工物(112)を荷電粒子のビームで処理する方法であって、
前記加工物(112)を真空チャンバ(114)内で位置決めするステップと、
前記加工物の表面を非反応性の荷電クラスタの集束ビームで照射するステップであって、前記クラスタ中の材料が前記加工物の表面に堆積し保護層を形成するステップと、
前記保護層によって覆われた前記加工物の表面の一部分に荷電粒子の集束ビームを誘導して前記加工物をエッチングするステップであって、前記荷電粒子の集束ビームはイオン化された原子または電子を含んでいるステップと、
を含むことを特徴とする方法。 - 前記クラスタ中の材料が、炭素を含むことを特徴とする、請求項16に記載の方法。
- 加工物(112)を処理するための荷電粒子装置であって、
真空チャンバ(114)と、
前記真空チャンバ内で前記加工物を加工物位置(110)に支持するための加工物支持体(116)と、
非反応性の原子または分子の荷電クラスタの集束ビームを生成するための第1の荷電粒子源と、
イオンまたは電子の集束ビームを生成するための第2の荷電粒子源と、
を備え、前記第1の荷電粒子源からのビームおよび前記第2の荷電粒子源からのビームによって前記加工物を処理することを特徴とする装置。 - 前記荷電クラスタのビームによって活性化して材料を堆積する前駆物質ガスを前記加工物位置(110)に導くためのガス注入システム(104)をさらに備える、請求項18に記載の装置。
- 前記荷電クラスタのビームによって活性化して材料をエッチングするエッチング増強ガスを前記加工物位置(110)に導くためのガス注入システム(104)をさらに備える、請求項18に記載の装置。
- 前記第1の荷電粒子源がプラズマ・イオン源(301)を含む、請求項18から20のいずれかに記載の装置。
- 前記プラズマ・イオン源が誘導結合プラズマ・イオン源(301)である、請求項21に記載の装置。
- 前記第1の荷電粒子源が蒸発クラスタ・イオン源(400)を含む、請求項18から20のいずれかに記載の装置。
- 前記第1の荷電粒子源が、フラーレン、ビスマス、金、またはキセノンを含むクラスタを生成する、請求項18から23のいずれかに記載の装置。
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