JP5490124B2 - 真空バルブ - Google Patents
真空バルブ Download PDFInfo
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- JP5490124B2 JP5490124B2 JP2011528138A JP2011528138A JP5490124B2 JP 5490124 B2 JP5490124 B2 JP 5490124B2 JP 2011528138 A JP2011528138 A JP 2011528138A JP 2011528138 A JP2011528138 A JP 2011528138A JP 5490124 B2 JP5490124 B2 JP 5490124B2
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- 230000005540 biological transmission Effects 0.000 claims description 21
- 238000006073 displacement reaction Methods 0.000 claims description 7
- 230000004308 accommodation Effects 0.000 claims description 6
- 238000012986 modification Methods 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 238000007789 sealing Methods 0.000 description 4
- 240000004050 Pentaglottis sempervirens Species 0.000 description 3
- 235000004522 Pentaglottis sempervirens Nutrition 0.000 description 3
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000007689 inspection Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
- F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
- F16K3/182—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of toggle links
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- Details Of Valves (AREA)
- Sliding Valves (AREA)
- Fluid-Driven Valves (AREA)
Description
Claims (14)
- 真空バルブであって、
バルブシート(4)により囲まれているバルブ開口部(2)が設けられている壁部(1)と、
前記真空バルブの真空領域に配置され、縦方向(6)について前記バルブ開口部(2)を開放する開位置から、前記バルブ開口部(2)を覆う一方で前記バルブシート(4)から離れている中間位置に変位可能であり、かつ、前記縦方向(6)に対して垂直な横方向(7)について当該中間位置から前記バルブシート(4)に密着して前記バルブ開口部(2)を閉塞する閉位置に変位可能である少なくとも1つのバルブプレート(5)と、
前記バルブプレート(5)を支持するバルブロッド(12)であって、前記真空バルブの前記真空領域から導出され、前記バルブロッド(12)の縦軸(14)に平行な前記縦方向(6)について前記壁部(1)に対して変位可能であり、かつ、前記壁部(1)に対して前記横方向(7)に平行移動可能な少なくとも1つのバルブロッド(12)と、
前記真空バルブの前記真空領域外に配置され、前記バルブプレート(5)を前記開位置及び前記中間位置の区間で動かすために前記バルブロッド(12)を前記縦方向(6)に変位させる縦駆動装置(15)(15’)と、
前記真空バルブの前記真空領域外に配置され、前記バルブプレート(5)を前記中間位置と前記閉位置との区間で動かすために前記バルブロッド(12)を前記横方向(7)に対して平行に変位させる横駆動装置(16)(16’)とを備え、
前記真空バルブの前記真空領域外に配置されているベアリングユニット(17)(17’)が前記壁部(1)に対して固定され、前記ベアリングユニット(17)(17’)によって前記バルブロッド(12)を前記縦方向(6)に案内するガイドユニット(20)(20’)が前記横方向(7)に案内され、
前記バルブロッド(12)を前記横方向(7)に駆動するための前記横駆動装置(16)(16’)による力が前記ガイドユニット(20)(20’)を通じて前記バルブロッド(12)に作用し、前記ガイドユニット(20)(20’)が、前記バルブロッド(12)を前記ベアリングユニット(17)(17’)に対して前記横方向(7)に連動させながら変位し、
前記バルブプレート(5)の前記閉位置において、前記バルブロッド(12)のうち前記バルブプレート(5)の反対側にあって前記ガイドユニット(20)(20’)から突出している部分が横ストッパ(38)に当接することを特徴とする真空バルブ。 - 請求項1記載の真空バルブにおいて、
前記ベアリングユニット(17)(17’)が、前記ガイドユニット(20)(20’)の両側において、前記縦方向(6)に配置されている部分を有することを特徴とする真空バルブ。 - 請求項2記載の真空バルブにおいて、
前記ガイドユニット(20)(20’)が、前記ベアリングユニット(17)(17’)の収容空間(19)(19’)に少なくとも部分的に配置され、かつ、前記収容空間(19)(19’)において前記横方向(7)に案内されて動かされることを特徴とする真空バルブ。 - 請求項1〜3のうちいずれか1つに記載の真空バルブにおいて、
前記縦駆動装置(15)(15’)が、前記バルブロッド(12)に連結されるとともに筒状収容部(26)(26’)に配置されている少なくとも1つのピストン(25)(25’)を備えていることを特徴とする真空バルブ。 - 請求項1〜4のうちいずれか1つに記載の真空バルブにおいて、
前記バルブロッド(12)を前記横方向(7)に駆動するための前記横駆動装置(16)(16’)による力が前記ガイドユニット(20)(20’)を通じて前記バルブロッド(12)に作用し、前記ガイドユニット(20)(20’)が、前記バルブロッド(12)を前記ベアリングユニット(17)(17’)に対して前記横方向(7)に連動させながら変位することを特徴とする真空バルブ。 - 請求項1記載の真空バルブにおいて、
前記横駆動装置(16’)が、前記縦方向(6)に変位可能であり、かつ、少なくとも1つの伝動要素(54)(55)を介して前記ガイドユニット(20’)に連結されている少なくとも1つの駆動部材(51)を備えていることを特徴とする真空バルブ。 - 請求項6記載の真空バルブにおいて、
前記ガイドユニット(20)を前記横方向(7)に平行移動させるため、前記少なくとも1つの駆動部材(51)が、前記縦方向(6)について前記駆動部材(51)の反対側において、対応する前記伝動要素(54)(55)を介して前記ガイドユニット(20’)に連結されていることを特徴とする真空バルブ。 - 請求項4記載の真空バルブにおいて、
前記バルブロッド(12)が前記ガイドユニット(20’)により、前記縦駆動装置(15’)の前記ピストン(25’)の両側に案内されて動くことを特徴とする真空バルブ。 - 真空バルブであって、
バルブシート(4)により囲まれているバルブ開口部(2)が設けられている壁部(1)と、
前記真空バルブの真空領域に配置され、縦方向(6)について前記バルブ開口部(2)を開放する開位置から、前記バルブ開口部(2)を覆う一方で前記バルブシート(4)から離れている中間位置に変位可能であり、かつ、前記縦方向(6)に対して垂直な横方向(7)について当該中間位置から前記バルブシート(4)に密着して前記バルブ開口部(2)を閉塞する閉位置に変位可能である少なくとも1つのバルブプレート(5)と、
前記バルブプレート(5)を支持するバルブロッド(12)であって、前記真空バルブの前記真空領域から導出され、前記バルブロッド(12)の縦軸(14)に平行な前記縦方向(6)について前記壁部(1)に対して変位可能であり、かつ、前記壁部(1)に対して前記横方向(7)に平行移動可能な少なくとも1つのバルブロッド(12)と、
前記真空バルブの前記真空領域外に配置され、前記バルブプレート(5)を前記開位置及び前記中間位置の区間で動かすために前記バルブロッド(12)を前記縦方向(6)に変位させる縦駆動装置(15)(15’)と、
前記真空バルブの前記真空領域外に配置され、前記バルブプレート(5)を前記中間位置と前記閉位置との区間で動かすために前記バルブロッド(12)を前記横方向(7)に対して平行に変位させる横駆動装置(16)(16’)とを備え、
前記真空バルブの前記真空領域外に配置されているベアリングユニット(17)(17’)が前記壁部(1)に対して固定され、前記ベアリングユニット(17)(17’)によって前記バルブロッド(12)を前記縦方向(6)に案内するガイドユニット(20)(20’)が前記横方向(7)に案内され、
前記縦駆動装置(15)(15’)が、前記バルブロッド(12)に連結されるとともに筒状収容部(26)(26’)に配置されている少なくとも1つのピストン(25)(25’)を備え、
前記筒状収容部(26)(26’)が前記ガイドユニット(20)(20’)に形成されていることを特徴とする真空バルブ。 - 真空バルブであって、
バルブシート(4)により囲まれているバルブ開口部(2)が設けられている壁部(1)と、
前記真空バルブの真空領域に配置され、縦方向(6)について前記バルブ開口部(2)を開放する開位置から、前記バルブ開口部(2)を覆う一方で前記バルブシート(4)から離れている中間位置に変位可能であり、かつ、前記縦方向(6)に対して垂直な横方向(7)について当該中間位置から前記バルブシート(4)に密着して前記バルブ開口部(2)を閉塞する閉位置に変位可能である少なくとも1つのバルブプレート(5)と、
前記バルブプレート(5)を支持するバルブロッド(12)であって、前記真空バルブの前記真空領域から導出され、前記バルブロッド(12)の縦軸(14)に平行な前記縦方向(6)について前記壁部(1)に対して変位可能であり、かつ、前記壁部(1)に対して前記横方向(7)に平行移動可能な少なくとも1つのバルブロッド(12)と、
前記真空バルブの前記真空領域外に配置され、前記バルブプレート(5)を前記開位置及び前記中間位置の区間で動かすために前記バルブロッド(12)を前記縦方向(6)に変位させる縦駆動装置(15)(15’)と、
前記真空バルブの前記真空領域外に配置され、前記バルブプレート(5)を前記中間位置と前記閉位置との区間で動かすために前記バルブロッド(12)を前記横方向(7)に対して平行に変位させる横駆動装置(16)(16’)とを備え、
前記真空バルブの前記真空領域外に配置されているベアリングユニット(17)(17’)が前記壁部(1)に対して固定され、前記ベアリングユニット(17)(17’)によって前記バルブロッド(12)を前記縦方向(6)に案内するガイドユニット(20)(20’)が前記横方向(7)に案内され、
前記バルブロッド(12)を前記横方向(7)に駆動するための前記横駆動装置(16)(16’)による力が前記ガイドユニット(20)(20’)を通じて前記バルブロッド(12)に作用し、前記ガイドユニット(20)(20’)が、前記バルブロッド(12)を前記ベアリングユニット(17)(17’)に対して前記横方向(7)に連動させながら変位し、
前記横駆動装置(16’)が、前記縦方向(6)に変位可能であり、かつ、少なくとも1つの伝動要素(54)(55)を介して前記ガイドユニット(20’)に連結されている少なくとも1つの駆動部材(51)を備え、
前記ガイドユニット(20)を前記横方向(7)に平行移動させるため、前記少なくとも1つの駆動部材(51)が、前記縦方向(6)について前記駆動部材(51)の反対側において、対応する前記伝動要素(54)(55)を介して前記ガイドユニット(20’)に連結され、
前記伝動要素(54)(55)が、前記ガイドユニット(20’)に対して軸回りに旋回可能に連結されているロッドと、前記駆動部材(51)又は前記駆動部材(51)に固定されている部材に対して軸回りに旋回可能に連結されているロッドとから構成されていることを特徴とする真空バルブ。 - 真空バルブであって、
バルブシート(4)により囲まれているバルブ開口部(2)が設けられている壁部(1)と、
前記真空バルブの真空領域に配置され、縦方向(6)について前記バルブ開口部(2)を開放する開位置から、前記バルブ開口部(2)を覆う一方で前記バルブシート(4)から離れている中間位置に変位可能であり、かつ、前記縦方向(6)に対して垂直な横方向(7)について当該中間位置から前記バルブシート(4)に密着して前記バルブ開口部(2)を閉塞する閉位置に変位可能である少なくとも1つのバルブプレート(5)と、
前記バルブプレート(5)を支持するバルブロッド(12)であって、前記真空バルブの前記真空領域から導出され、前記バルブロッド(12)の縦軸(14)に平行な前記縦方向(6)について前記壁部(1)に対して変位可能であり、かつ、前記壁部(1)に対して前記横方向(7)に平行移動可能な少なくとも1つのバルブロッド(12)と、
前記真空バルブの前記真空領域外に配置され、前記バルブプレート(5)を前記開位置及び前記中間位置の区間で動かすために前記バルブロッド(12)を前記縦方向(6)に変位させる縦駆動装置(15)(15’)と、
前記真空バルブの前記真空領域外に配置され、前記バルブプレート(5)を前記中間位置と前記閉位置との区間で動かすために前記バルブロッド(12)を前記横方向(7)に対して平行に変位させる横駆動装置(16)(16’)とを備え、
前記真空バルブの前記真空領域外に配置されているベアリングユニット(17)(17’)が前記壁部(1)に対して固定され、前記ベアリングユニット(17)(17’)によって前記バルブロッド(12)を前記縦方向(6)に案内するガイドユニット(20)(20’)が前記横方向(7)に案内され、
前記バルブロッド(12)を前記横方向(7)に駆動するための前記横駆動装置(16)(16’)による力が前記ガイドユニット(20)(20’)を通じて前記バルブロッド(12)に作用し、前記ガイドユニット(20)(20’)が、前記バルブロッド(12)を前記ベアリングユニット(17)(17’)に対して前記横方向(7)に連動させながら変位し、
前記横駆動装置(16)が、前記ガイドユニット(20)に形成されている筒状収容部(30)に配置されている少なくとも1つのピストンを有することを特徴とする真空バルブ。 - 請求項11記載の真空バルブにおいて、
圧力媒体によって前記ガイドユニット(20)を前記横方向(7)に対して押圧するための圧力空間(33)が、前記ガイドユニット(20)及び前記ベアリングユニット(17)の間に設けられていることを特徴とする真空バルブ。 - 請求項11または12記載の真空バルブにおいて、
前記横駆動装置は、前記ガイドユニット(20)(20’)及び前記ベアリングユニット(17)(17’)の間に、前記ガイドユニット(20)(20’)を前記横方向(7)に対して付勢するためのばね装置(32)を備えていることを特徴とする真空バルブ。 - 請求項1、9または10記載の真空バルブにおいて、
前記横駆動装置(16)が、前記ガイドユニット(20)に形成されている筒状収容部(30)に配置されている少なくとも1つのピストンを有し、
前記横駆動装置は、前記ガイドユニット(20)(20’)及び前記ベアリングユニット(17)(17’)の間に、前記ガイドユニット(20)(20’)を前記横方向(7)に対して付勢するためのばね装置(32)を備えていることを特徴とする真空バルブ。
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Application Number | Priority Date | Filing Date | Title |
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DE102008049353.8 | 2008-09-29 | ||
DE102008049353A DE102008049353A1 (de) | 2008-09-29 | 2008-09-29 | Vakuumventil |
PCT/AT2009/000366 WO2010034046A1 (de) | 2008-09-29 | 2009-09-21 | Vakuumventil |
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JP2012504212A JP2012504212A (ja) | 2012-02-16 |
JP5490124B2 true JP5490124B2 (ja) | 2014-05-14 |
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US (1) | US8672293B2 (ja) |
JP (1) | JP5490124B2 (ja) |
KR (1) | KR101726452B1 (ja) |
CN (1) | CN102165232B (ja) |
DE (1) | DE102008049353A1 (ja) |
TW (1) | TWI479097B (ja) |
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- 2009-09-21 WO PCT/AT2009/000366 patent/WO2010034046A1/de active Application Filing
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Also Published As
Publication number | Publication date |
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WO2010034046A1 (de) | 2010-04-01 |
KR101726452B1 (ko) | 2017-04-12 |
TW201020437A (en) | 2010-06-01 |
DE102008049353A1 (de) | 2010-04-08 |
US8672293B2 (en) | 2014-03-18 |
JP2012504212A (ja) | 2012-02-16 |
US20110175011A1 (en) | 2011-07-21 |
TWI479097B (zh) | 2015-04-01 |
CN102165232A (zh) | 2011-08-24 |
CN102165232B (zh) | 2014-06-25 |
KR20110073476A (ko) | 2011-06-29 |
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