JP5426890B2 - Levitation conveyance device and levitation conveyance method - Google Patents

Levitation conveyance device and levitation conveyance method Download PDF

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JP5426890B2
JP5426890B2 JP2009023062A JP2009023062A JP5426890B2 JP 5426890 B2 JP5426890 B2 JP 5426890B2 JP 2009023062 A JP2009023062 A JP 2009023062A JP 2009023062 A JP2009023062 A JP 2009023062A JP 5426890 B2 JP5426890 B2 JP 5426890B2
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suction
plate
levitation
conveyance
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優 梅田
昌之 都田
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Watanabe Shoko KK
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Description

本発明は、板状基体の搬送に関して、気体を噴射することによって、板状基体を浮上させながら搬送し、板状基体を搬送すると同時に吸引ノズルの吸引孔からの気流の吸引によって搬送を安定化する浮上搬送装置および浮上搬送方法に関する。 The present invention relates to the transport of a plate-like substrate, by jetting a gas to carry the plate-like substrate while floating, and at the same time, the plate-like substrate is transported, and at the same time, the conveyance is stabilized by suction of an air flow from the suction hole of the suction nozzle. levitation transportation device and floating conveyance method for relating.

従来の浮上搬送装置については、例えば、特許文献１に記載されている。図７は、従来の浮上搬送装置の斜視図であり、特許文献１にて開示された図である。
図７の浮上搬送装置は、其台１００の上に囲い板２００が設置され、其台１００の表面には、噴出ノズル７、７a、７ｂ、８、８a、８ｂ、他（図示していないが、其台１００の前面にある）が配置されている。 A conventional levitation conveyance device is described in, for example, Patent Document 1. FIG. 7 is a perspective view of a conventional levitation transport apparatus, which is disclosed in Patent Document 1. In FIG.
In the levitation transfer apparatus of FIG. 7, a surrounding plate 200 is installed on the stand 100, and the ejection nozzles 7, 7 a, 7 b, 8, 8 a, 8 b, and others (not shown) In the front of the stand 100).

前記噴出ノズル７、７a、７ｂ、８、８a、８ｂ、他からは、位置方向（図中矢印）のごとく気流が流れており、板状其体３００を、矢印の方向へ搬送する。   From the ejection nozzles 7, 7 a, 7 b, 8, 8 a, 8 b, etc., an air flow flows in the position direction (arrow in the figure), and the plate-like body 300 is conveyed in the direction of the arrow.

特開２０００−６２９５３号公報JP 2000-62953 A

従来の浮上搬送装置における問題点は以下のごとくである。第１に、板状基体を搬送する場合の搬送方向のずれの補正について、従来の浮上搬送装置は、噴出ノズルだけによる板状基体の搬送であるため、板状基体用のガードレールを設置せざるを得なかった。これによって、板状其体の周辺部には、前記板状基体用のガードレールによって、きずが生ずることがあった。第２に、気流噴射にて、被搬送体に気流が当たると、摩擦による静電気が発生するという問題点があった。前記の発生した静電気が、浮上搬送装置に悪影響を起こす場合があった。第３に、気流噴射にて、板状基体周辺からのパーテイクルが周囲に飛散するという問題点があった。 The problems in the conventional levitation transport apparatus are as follows. First, regarding the correction of the shift in the transport direction when transporting the plate-shaped substrate, since the conventional floating transport device transports the plate-shaped substrate only by the ejection nozzle, it is not necessary to install a guard rail for the plate-shaped substrate. Did not get. As a result, flaws may occur in the periphery of the plate-like body due to the guard rail for the plate-like substrate. Second, there is a problem in that static electricity is generated due to friction when an air current strikes the conveyed object in the air current jet. The generated static electricity may adversely affect the levitating and conveying apparatus. Thirdly, there has been a problem that particles from the periphery of the plate-like substrate are scattered around by airflow injection.

本発明の課題は、板状基体の搬送方向からの位置ずれの補正が可能であり、安定した高精度の搬送が可能であって、かつ静電気の発生、パーテイクルの発生を低減することができる浮上搬送装置および浮上搬送方法を提供することである。   The object of the present invention is to make it possible to correct the displacement of the plate-like substrate from the conveying direction, to enable stable and highly accurate conveyance, and to reduce the generation of static electricity and particles. It is to provide a transport device and a floating transport method.

本発明の浮上搬送装置は、板状基体の搬送路を形成する基台と、前記基台を覆う囲い板と、前記基台に配置された複数の噴出ノズルおよび複数の吸引ノズルと、前記板状基体の搬送時のずれを検出する手段とで構成される浮上搬送装置であって、前記複数の噴出ノズルは、板状基体を前記基台の面に沿って浮上搬送させ、前記複数の吸引ノズルは、前記噴出ノズルの列の外側に配置されて、板状基体の搬送時のずれを検出する手段からの信号によって、前記複数の吸引ノズルのいずれかの吸引力が調整されて、前記板状基体の搬送のずれが補正されることを特徴とする浮上搬送装置である。 Levitation transportation device of the present invention includes a base which forms a conveying path of the plate-shaped substrate, a shroud covering the base, a plurality of injection out nozzles and a plurality of suction nozzles arranged in the base, wherein a levitation transportation device consists of a means for detecting a shift during transportation of the plate-shaped substrate, wherein the plurality of injection out nozzle floated conveyed along the plate substrate to said base surface, said plurality the suction nozzle is located outside of the column of the injection output nozzle, by a signal from the means for detecting the displacement during transportation of the plate-like substrate, it is adjusted either suction force of the plurality of suction nozzles The levitation conveyance apparatus is characterized in that a deviation in conveyance of the plate-like substrate is corrected.

ここで、前記噴出ノズルの噴出パイプ部の方向は、基台の面の垂直方向となす角度が、搬送順方向側に３０°以上から４５°以下の範囲であり、かつ吸引ノズルの吸引パイプ部の方向は、搬送垂直方向となす角度が、搬送逆方向側に３５°以上から６０°以下の範囲であることを特徴とする浮上搬送装置である。   Here, the direction of the ejection pipe portion of the ejection nozzle is such that the angle formed with the direction perpendicular to the surface of the base is in the range of 30 ° to 45 ° on the transport forward direction side, and the suction pipe portion of the suction nozzle The floating transport apparatus is characterized in that the angle formed with the transport vertical direction is in the range of 35 ° to 60 ° on the transport reverse direction side.

また、前記吸引ノズルの吸引パイプの垂直方向の断面形状は、一方の側が、円弧状をなして基台の平面部に合流するように形成することを特徴とする浮上搬送装置である。 Further, the vertical cross-sectional shape of the suction pipe of the suction nozzle is a levitation transport apparatus in which one side is formed in an arc shape so as to join the flat portion of the base.

本発明の浮上搬送方法は、板状基体の搬送路を形成する基台と、前記基台を覆う囲い板と、前記基台に配置された複数の噴出ノズルおよび複数の吸引ノズルとを用いて、板状基体を気流により搬送する浮上搬送方法であって、前記複数の噴出ノズルからの気流の噴出によって、板状基体を前記基台の平面に沿って浮上搬送させ、板状基体の搬送方向のずれを検出する手段が、前記複数の吸引ノズルの気流の吸引力を制御して、前記板状基体の搬送のずれを補正することを特徴とする浮上搬送方法である。 Levitation transportation method of the present invention uses a base which forms a conveying path of the plate-shaped substrate, a shroud covering the base, and a plurality of injection out nozzles and a plurality of suction nozzles arranged in the base Te, the plate substrate to a levitation transportation method for transporting a gas stream, the jet stream of air from said plurality of injection out nozzle, floated conveyed along the plate substrate to the base plane, the plate substrate The floating transport method is characterized in that the means for detecting the shift in the transport direction controls the suction force of the air flow of the plurality of suction nozzles to correct the transport shift of the plate-like substrate.

ここで、前記噴出ノズルによって、前記被搬送体を浮上させ、前記噴出ノズルの方向は、搬送垂直方向となす角度が、搬送順方向側に３０°以上から４５°以下の範囲とし、かつ吸引ノズルの吸引方向は、搬送垂直方向となす角度が、搬送逆方向側に３０°以上から６０°以下の範囲とする浮上搬送方法である。
また、前記吸引ノズルの吸引パイプの垂直方向の断面形状を、一方の側が、円弧Ｒをなして基台の平面部に合流するように形成することを特徴とする浮上搬送方法である。 Here, the object to be transported is levitated by the ejection nozzle, and the direction of the ejection nozzle is such that the angle formed with the transport vertical direction is in the range of 30 ° to 45 ° on the transport forward direction side, and the suction nozzle The suction direction is a levitation conveyance method in which the angle formed with the vertical direction of conveyance is in the range of 30 ° to 60 ° on the reverse direction side of the conveyance.
Further, the present invention is a levitating and conveying method characterized in that the vertical cross-sectional shape of the suction pipe of the suction nozzle is formed so that one side joins the flat portion of the base with an arc R.

本発明によれば、板状基体の搬送方向からの位置ずれの補正が可能であり、安定した高精度の搬送が可能であって、かつ静電気の発生、およびパーテイクルの発生を低減する浮上搬送装置および浮上搬送方法を提供することができる。 According to the present invention, a levitating conveyance apparatus capable of correcting a positional deviation from the conveyance direction of a plate-like substrate, capable of stable and highly accurate conveyance, and reducing the generation of static electricity and particles. And a floating transportation method.

請求項１に係る発明によれば、基台に配置された吸引ノズルの吸引力を調整することによって、板状基体の搬送方向のずれを補正することができる浮上搬送装置を提供することができる。 According to the first aspect of the present invention, it is possible to provide a levitation transport apparatus capable of correcting a shift in the transport direction of the plate-like substrate by adjusting the suction force of the suction nozzle disposed on the base. .

請求項２に係る発明によれば、噴出ノズルの噴出パイプ部の方向を、基台の面の垂直方向となす角度が、搬送順方向側に３０°以上から４５°以下の範囲とし、かつ吸引ノズルの吸引パイプ部の方向を、基台の面の垂直方向となす角度が、搬送逆方向側に３５°以上から６０°以下の範囲とするので、安定して板状基体を搬送する力を得ると共に、板状基体を安定して吸引して搬送方向のずれを補正する浮上搬送装置を提供することができる。 According to the second aspect of the present invention, the angle between the direction of the ejection pipe portion of the ejection nozzle and the direction perpendicular to the surface of the base is in the range of 30 ° to 45 ° on the transport forward direction side, and suction is performed. Since the angle between the direction of the suction pipe portion of the nozzle and the direction perpendicular to the surface of the base is in the range of 35 ° to 60 ° on the opposite side of the conveyance, the force to convey the plate-like substrate stably In addition, it is possible to provide a levitating conveyance device that stably sucks a plate-like substrate and corrects a deviation in the conveyance direction.

請求項３に係る発明によれば、前記吸引ノズルの吸引パイプ部の垂直方向の断面形状は、基台表面に通じる一方の側が、円弧状をなして基台の表面部に通じていることを特徴とす浮上搬送装置を提供できるので、より安定した板状其体の搬送ができる。 According to the invention of claim 3, the vertical cross-sectional shape of the suction pipe portion of the suction nozzle is such that one side leading to the base surface forms an arc and communicates with the surface portion of the base. Since the levitation conveyance device which is the feature can be provided, the plate-like body can be more stably conveyed.

請求項４に係る発明によれば、板状基体の搬送路を形成する基台と、前記基台を覆う囲い板と、前記基台に配置された複数の噴出ノズルおよび複数の吸引ノズルとを用いて、板状基体を気流により搬送する浮上搬送方法であって、前記複数の噴出ノズルからの気流の噴出によって、板状基体を前記基台の平面に沿って浮上搬送させ、板状基体の搬送方向のずれを検出する手段が、前記複数の吸引ノズルの気流の吸引力を制御して、前記板状基体の搬送のずれを補正することを特徴とする浮上搬送方法を提供できる。
According to the invention of claim 4, a base which forms a conveying path of the plate-shaped substrate, a shroud covering the base, a plurality of injection out nozzles and a plurality of suction nozzles arranged in the base using a plate substrate a levitation transportation method for transporting a gas stream, the jet stream of air from said plurality of injection out nozzle, floated conveyed along the plate substrate to the base plane, plate-shaped It is possible to provide a levitation conveyance method characterized in that the means for detecting a deviation in the conveyance direction of the substrate corrects the deviation in conveyance of the plate substrate by controlling the suction force of the air flow of the plurality of suction nozzles.

本発明の実施の形態１による浮上搬送装置の斜視図。The perspective view of the levitation conveyance apparatus by Embodiment 1 of this invention. 図１の浮上搬送装置のＡＡ断面図。FIG. 2 is a cross-sectional view of the levitation transport device of FIG. 1 taken along AA. 図１の浮上搬送装置のＢＢ断面図。BB sectional drawing of the levitation conveyance apparatus of FIG. 図１の浮上搬送装置のＣＣ断面図。CC sectional drawing of the levitation conveyance apparatus of FIG. 図１の浮上搬送装置の基台における、噴出孔、吸引孔の配置を示す平面図。The top view which shows arrangement | positioning of the ejection hole and suction hole in the base of the levitation conveyance apparatus of FIG. 本発明の実施の形態２の浮上搬送装置に使用される吸引ノズルの断面図。Sectional drawing of the suction nozzle used for the levitation conveyance apparatus of Embodiment 2 of this invention. 従来の浮上搬送装置の斜視図である。It is a perspective view of the conventional levitation conveyance apparatus.

（実施の形態１）
図１は、本発明の実施の形態１による浮上搬送装置の斜視図である。図１にて、浮上搬送装置１００は、基台１０と囲い板２０とで構成されている。前記基台１０の平面部分に、被搬送体が搬送されるための搬送路が形成される。貴台１０の平面部分には、複数の噴出孔と、複数の吸引孔が配置されており、図１では、噴出孔２Ａ、２Ｂ、２Ｃ、吸引孔１Ａ、１Ｂが露出している。前記噴出孔２Ａ、２Ｂ、２Ｃからは、気体が噴出して、前記噴出した気体が、板状基体３０を浮上させ、かつ搬送方向へ前進させる。また、吸引孔１Ａ、１Ｂには、周辺の気体が吸引されていき、浮上搬送装置１００の周辺部の気体を吸引し、浮上搬送装置１００の搬送方向を安定化させる。ここで、前記気体は、空気でも良いし、その他の不活性ガス、窒素ガス、他でも良い。 (Embodiment 1)
FIG. 1 is a perspective view of a levitation transport apparatus according to Embodiment 1 of the present invention. In FIG. 1, the levitating and conveying apparatus 100 includes a base 10 and a surrounding plate 20. A conveyance path for conveying the object to be conveyed is formed on the planar portion of the base 10. A plurality of ejection holes and a plurality of suction holes are arranged in the plane portion of the noble stand 10, and in FIG. 1, the ejection holes 2A, 2B, 2C and the suction holes 1A, 1B are exposed. A gas is ejected from the ejection holes 2A, 2B, and 2C, and the ejected gas causes the plate-like substrate 30 to float and advance in the transport direction. Further, the surrounding gas is sucked into the suction holes 1 </ b> A and 1 </ b> B, the gas in the peripheral portion of the levitation transport device 100 is sucked, and the transport direction of the levitation transport device 100 is stabilized. Here, the gas may be air, other inert gas, nitrogen gas, or the like.

図２は、図１の浮上搬送装置のＡＡ断面図である。図２において、噴出孔２Ａ、２Ｂ、２Ｃは、それぞれ噴出ノズル２１Ａ、噴出ノズル２１Ｂ、噴出ノズル２１Ｃから噴出パイプ部２１０Ａ，２１０Ｂ，２１０Ｃを経由して、基台１０の平面部に露出している。前記噴出孔２Ａ、２Ｂ、２Ｃからは、基台１０の側面にある供給管４０に供給された気体が噴出し、前記噴出した気体が、被搬送体３０を浮上させると同時に前進させる機能を有する。搬送垂直方向とのなす角度は、ほぼ０°となっている。 FIG. 2 is a cross-sectional view of the levitation transport apparatus of FIG. In FIG. 2, the ejection holes 2A, 2B, and 2C are exposed to the plane portion of the base 10 from the ejection nozzle 21A, the ejection nozzle 21B, and the ejection nozzle 21C through the ejection pipe portions 210A, 210B, and 210C, respectively. . From the ejection holes 2A, 2B, and 2C, the gas supplied to the supply pipe 40 on the side surface of the base 10 is ejected, and the ejected gas has a function of causing the transported body 30 to float and advance at the same time. . The angle formed with the conveyance vertical direction is approximately 0 °.

また、吸引孔１Ａ、１Ｂは、それぞれ吸引ノズル１１Ａ、吸引ノズル１１Ｂと吸引パイプ部１１０Ａ，１１０Ｂを介して繋がっており、基台１０の平面部に露出している。
吸引孔１Ａ、１Ｂは、浮上搬送装置１００の周辺部の気体を吸引し、図２に示したごとく、導入パイプの軸方向と、搬送垂直方向とのなす角度は、角度θをつけており、浮上搬送装置１００の搬送方向のずれを安定化させる働きを行う。
ここで、角度θは、搬送逆方向側に３５°以上から６０°以下の範囲が選択される。 Further, the suction holes 1A and 1B are connected to the suction nozzle 11A and the suction nozzle 11B via the suction pipe portions 110A and 110B, respectively, and are exposed to the flat portion of the base 10.
The suction holes 1A and 1B suck the gas around the levitation transport device 100, and as shown in FIG. 2, the angle formed between the axial direction of the introduction pipe and the transport vertical direction is an angle θ. The function of stabilizing the deviation in the conveying direction of the levitation conveying apparatus 100 is performed.
Here, the angle θ is selected in the range of 35 ° to 60 ° on the reverse side of the conveyance.

図３は、図１の浮上搬送装置のＢＢ断面図である。図３では、合計６個の噴出ノズルが配列されており、それずれ噴出ノズル２１Ｃ、３１Ｃ、４１Ｃ、５１Ｃ、６１Ｃ、７１Ｃ、および噴出孔２Ｃ、３Ｃ、４Ｃ、５Ｃ、６Ｃ、７Ｃ、噴出ノズル２１Ｃ、３１Ｃ、４１Ｃ、５１Ｃ、６１Ｃ、７１Ｃが示されている。ここで、各噴出ノズルについて、噴出パイプ部２１０Ｃ、３１０Ｃ、４１０Ｃ、５１０Ｃ、６１０Ｃ、７１０Ｃの角度は、搬送方向に傾いた角度βを持っている。ここで、角度βは、噴出パイプ部の長手方向が、基台の面の垂直方向となす角度であって、板状其体の搬送順方向側に３０°以上から４５°以下の範囲に設定される。このように噴出ノズルは、板状其体を浮上させると共に、一定方向へ搬送する作用を行う。 FIG. 3 is a BB cross-sectional view of the levitation transfer apparatus of FIG. In FIG. 3, a total of six ejection nozzles are arranged, and the offset ejection nozzles 21C, 31C, 41C, 51C, 61C, 71C, and the ejection holes 2C, 3C, 4C, 5C, 6C, 7C, the ejection nozzle 21C. , 31C, 41C, 51C, 61C, 71C. Here, for each ejection nozzle, the angles of the ejection pipe portions 210C, 310C, 410C, 510C, 610C, and 710C have an angle β that is inclined in the transport direction. Here, the angle β is an angle formed by the longitudinal direction of the ejection pipe portion being perpendicular to the surface of the base, and is set in a range of 30 ° to 45 ° on the plate-like body in the conveyance forward direction side. Is done. In this way, the ejection nozzle floats the plate-like body and performs an action of conveying it in a certain direction.

図４は、図１の浮上搬送装置のＣＣ断面図である。図４では、６個の吸引ノズルが示されており、吸引ノズル１１Ｂ、１２Ｂ，１３Ｂ，１４Ｂ，１５Ｂ，１６Ｂ、吸引孔１Ｂ、１０Ｂ、２０Ｂ、３０Ｂ、４０Ｂ、５０Ｂ、吸引ノズル１Ｂ、１０Ｂ、２０Ｂ、３０Ｂ、４０Ｂ、５０Ｂが示されている。ここで、各吸引ノズルについて、吸引パイプ部の角度αは、被搬送体３０の搬送方向（図中の矢印）とは、逆方向に傾いている。ここで、角度αは、
基台の面の垂直方向となす角度が、搬送逆方向側に３５°以上から６０°以下の範囲が設定される。 FIG. 4 is a CC cross-sectional view of the levitation transport apparatus of FIG. In FIG. 4, six suction nozzles are shown, suction nozzles 11B, 12B, 13B, 14B, 15B, 16B, suction holes 1B, 10B, 20B, 30B, 40B, 50B, suction nozzles 1B, 10B, 20B. , 30B, 40B, 50B are shown. Here, for each suction nozzle, the angle α of the suction pipe portion is inclined in the direction opposite to the transport direction of the transport target 30 (the arrow in the figure). Where the angle α is
The angle formed with the vertical direction of the surface of the base is set in the range of 35 ° to 60 ° on the reverse side of the conveyance.

ここで、図示はしていないが、図１の浮上搬送装置では、板状其体３０の搬送方向からの位置ずれを検知する画像センサーが、配置されている。前記画像センサーが、あらかじめ設定された板状其体の設定した位置とのずれを検出して、各吸引ノズルの吸引能力を調節することとなる。 Here, although not illustrated, in the levitation conveyance apparatus of FIG. 1, an image sensor that detects a positional deviation of the plate-like body 30 from the conveyance direction is disposed. The image sensor detects a shift from a preset position of the plate-like body set in advance, and adjusts the suction capability of each suction nozzle.

図５は、図１の浮上搬送装置における、基台１０に露出した各噴出ノズルの噴出孔、各吸引ノズルの吸引孔を示す平面図である。ここで、前記噴出ノズルによって、前記被搬送体を浮上させ、前記噴出ノズルの方向は、搬送垂直方向となす角度が、搬送順方向側に３０°以上から４５°以下の範囲であり、かつ吸引ノズルの吸引方向は、搬送垂直方向となす角度が、搬送逆方向側に３５°以上から６０°以下の範囲であることを特徴とする。 FIG. 5 is a plan view showing the ejection holes of the ejection nozzles exposed to the base 10 and the suction holes of the suction nozzles in the levitation transport apparatus of FIG. Here, the object to be transported is floated by the ejection nozzle, and the direction of the ejection nozzle is such that the angle formed with the transport vertical direction is in the range of 30 ° to 45 ° on the transport forward direction side, and suction The suction direction of the nozzle is characterized in that the angle formed with the transport vertical direction is in the range of 35 ° to 60 ° on the transport reverse direction side.

（実施の形態２）
図６は、本発明の実施の形態２の浮上搬送装置に使用される吸引ノズルの断面図である。
図６にて、円弧状部分を有する吸引ノズル６１にて、吸引パイプ部６００の垂直方向の断面形状は、基台表面に通じる一方の側が、円弧状部分９をなして基台１０の表面部に通じている。これによって、気流のコアンダ効果が生じ、其台の表面近傍に流れる気流の流れ９０が生じ、より安定した板状其体の搬送が可能となる。この図６の吸引ノズルを使用することによって、板状其体へあたる気流の総量に関して衝突が軽減され、静電気の発生を、従来よりも抑制できる。 (Embodiment 2)
FIG. 6 is a cross-sectional view of a suction nozzle used in the levitation transport apparatus according to Embodiment 2 of the present invention.
In FIG. 6, in the suction nozzle 61 having an arc-shaped portion, the vertical cross-sectional shape of the suction pipe portion 600 is such that one side leading to the base surface forms an arc-shaped portion 9 and the surface portion of the base 10. Leads to. As a result, the Coanda effect of the airflow is generated, and the airflow 90 flowing near the surface of the base is generated, and the plate-like body can be more stably conveyed. By using the suction nozzle of FIG. 6, the collision is reduced with respect to the total amount of the airflow hitting the plate-like body, and the generation of static electricity can be suppressed more than before.

吸引ノズルの吸引パイプ部が、通常の円形断面のストレート形状であって、噴出ノズルの角度を４０°、吸引ノズルの角度を５０°とした場合のデータを表１に示す。
比較例は、従来の図７の装置を使用した。
表１より、実施例１、実施例２ともに、比較例よりも搬送の精度が優れており、また静電気の発生、およびパーテイクルの発生を軽減している。 Table 1 shows data when the suction pipe portion of the suction nozzle has a straight shape with a normal circular cross section, the angle of the ejection nozzle is 40 °, and the angle of the suction nozzle is 50 °.
The comparative example used the conventional apparatus of FIG.
From Table 1, both Example 1 and Example 2 have better transport accuracy than the comparative example, and reduce the generation of static electricity and particles.

Figure 0005426890
（備考） 噴出ノズルの角度 ４０°
吸引ノズルの角度 ５０°
Figure 0005426890
 (Remarks) Angle of jet nozzle 40 °
Suction nozzle angle 50 °

１００ 浮上搬送装置
１０、１００ 基台
２０、２００ 囲い板
３０、３００ 板状基体
２１Ａ、２１Ｂ、２１Ｃ 噴出ノズル
２Ａ、２Ｂ、２Ｃ 噴出孔
２１０Ａ、２１０Ｂ、２１０Ｃ 噴出パイプ部
１１Ａ、１１Ｂ 吸引ノズル
１Ａ、１Ｂ 吸引孔
１１０Ａ、１１０Ｂ 吸引パイプ部
４０、４００ 気体供給管
５０ 気体吸収管
６１ 円弧状部分を有する吸引ノズル
６００ 吸引パイプ部
６ 吸引孔
９ 円弧状部分
９０ 其台の表面近傍に流れる気流の流れ
６２ 配管パイプ DESCRIPTION OF SYMBOLS 100 Floating conveyance apparatus 10, 100 Base 20, 200 Enclosure board 30, 300 Plate base | substrate 21A, 21B, 21C Ejection nozzle 2A, 2B, 2C Ejection hole 210A, 210B, 210C Ejection pipe part 11A, 11B Suction nozzle 1A, 1B Suction holes 110A, 110B Suction pipe sections 40, 400 Gas supply pipe 50 Gas absorption pipe 61 Suction nozzle 600 having an arc-shaped portion Suction pipe section 6 Suction hole 9 Arc-shaped section 90 Flow of airflow flowing in the vicinity of the surface of the base 62 Piping pipe

Claims (6)

板状基体の搬送路を形成する基台と、前記基台を覆う囲い板と、前記基台に配置された複数の噴出ノズルおよび複数の吸引ノズルと、前記板状基体の搬送時のずれを検出する手段とで構成される浮上搬送装置であって、前記複数の噴出ノズルは、板状基体を前記基台の面に沿って浮上搬送させ、前記複数の吸引ノズルは、前記噴出ノズルの列の外側に配置されて、板状基体の搬送時のずれを検出する手段からの信号によって、前記複数の吸引ノズルのいずれかの吸引力が調整されて、前記板状基体の搬送のずれが補正されることを特徴とする浮上搬送装置。 A base to form a conveying path of the plate-shaped substrate, a shroud covering the base, a plurality of injection out nozzles and a plurality of suction nozzles arranged in the base, the deviation at the time of conveyance of the plate-shaped base body a levitation transportation device consists of a means for detecting said plurality of injection out nozzle floated conveyed along the plate substrate to said base surface, said plurality of suction nozzles, exits the injection The suction force of any one of the plurality of suction nozzles is adjusted by a signal from a means that is arranged outside the row of nozzles and detects a shift during the transport of the plate-shaped substrate, so that the plate-shaped substrate is transported. A levitation transport apparatus characterized in that the deviation is corrected. 前記噴出ノズルの噴出パイプ部の方向は、基台の面の垂直方向となす角度が、搬送順方向側に３０°以上から４５°以下の範囲であり、かつ吸引ノズルの吸引パイプ部の方向は、基台の面の垂直方向となす角度が、搬送逆方向側に３５°以上から６０°以下の範囲であることを特徴とする請求項１記載の浮上搬送装置。 The direction of the ejection pipe portion of the ejection nozzle is such that the angle formed with the direction perpendicular to the surface of the base is in the range of 30 ° to 45 ° on the transport forward direction side, and the direction of the suction pipe portion of the suction nozzle is 2. The levitating and conveying apparatus according to claim 1, wherein an angle formed with the vertical direction of the surface of the base is in the range of 35 ° to 60 ° on the reverse direction side of the conveying. 前記吸引ノズルの吸引パイプ部の垂直方向の断面形状は、基台表面に通じる一方の側が、円弧状をなして基台の表面部に通じていることを特徴とする請求項１または２のいずれかに記載の浮上搬送装置。 The cross-sectional shape in the vertical direction of the suction pipe portion of the suction nozzle is such that one side communicating with the base surface forms an arc shape and communicates with the surface portion of the base. The levitation conveyance apparatus according to the above. 板状基体の搬送路を形成する基台と、前記基台を覆う囲い板と、前記基台に配置された複数の噴出ノズルおよび複数の吸引ノズルとを用いて、板状基体を気流により搬送する浮上搬送方法であって、前記複数の噴出ノズルからの気流の噴出によって、板状基体を前記基台の平面に沿って浮上搬送させ、板状基体の搬送方向のずれを検出する手段が、前記複数の吸引ノズルの気流の吸引力を制御して、前記板状基体の搬送のずれを補正することを特徴とする浮上搬送方法。 A base to form a conveying path of the plate-shaped substrate, a shroud covering the base, with a plurality of injection out nozzles and a plurality of suction nozzles arranged in the base, by a gas stream the plate substrate a levitation transportation method for transporting, by ejection of the air flow from the plurality of injection out nozzle, floated conveyed along the plate substrate in the plane of the base, means for detecting the conveying direction of the displacement of the plate substrate However, the levitation conveyance method is characterized by correcting the deviation of the conveyance of the plate-like substrate by controlling the suction force of the air flow of the plurality of suction nozzles. 前記噴出ノズルの噴出パイプ部の方向を、基台の面の垂直方向となす角度が、搬送順方向側に３０°以上から４５°以下の範囲とし、かつ吸引ノズルの吸引パイプ部の方向を、基台の面の（搬送）垂直方向となす角度が、搬送逆方向側に３５°以上から６０°以下の範囲とすることを特徴とする請求項４記載の浮上搬送方法。 The angle between the direction of the ejection pipe portion of the ejection nozzle and the direction perpendicular to the surface of the base is in the range of 30 ° to 45 ° on the transport forward direction side, and the direction of the suction pipe portion of the suction nozzle is The levitation conveyance method according to claim 4, wherein an angle between the base surface and the (conveyance) vertical direction is in a range of 35 ° to 60 ° on the reverse direction side of the conveyance. 前記吸引ノズルの吸引パイプ部の垂直方向の断面形状を、一方の側が、円弧状をなして基台の平面部に合流するように形成することを特徴とする請求項４または５のいずれかに記載の浮上搬送方法。 6. The vertical cross-sectional shape of the suction pipe portion of the suction nozzle is formed such that one side forms an arc shape and joins the flat portion of the base. The levitation conveyance method as described.
JP2009023062A 2009-02-03 2009-02-03 Levitation conveyance device and levitation conveyance method Expired - Fee Related JP5426890B2 (en)

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