JP5406852B2 - Non-contact transfer device - Google Patents

Non-contact transfer device Download PDF

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JP5406852B2
JP5406852B2 JP2010539196A JP2010539196A JP5406852B2 JP 5406852 B2 JP5406852 B2 JP 5406852B2 JP 2010539196 A JP2010539196 A JP 2010539196A JP 2010539196 A JP2010539196 A JP 2010539196A JP 5406852 B2 JP5406852 B2 JP 5406852B2
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conveyance
fluid
rail
conveyed
contact
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JPWO2010058689A1 (en
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秀夫 小澤
耕一 角田
貴裕 安田
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Oiles Corp
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Description

本発明は、非接触搬送装置に関し、特に、大型のＦＰＤパネルや太陽電池パネル等の浮上搬送に用いる装置に関する。   The present invention relates to a non-contact conveyance device, and more particularly to a device used for floating conveyance of a large FPD panel, a solar cell panel, or the like.

従来、ＦＰＤパネルや太陽電池パネルの生産に際し、一枚のパネルを大型化することで生産効率を上げる方法が採用されている。例えば、液晶ガラスの場合には、第１０世代で２８５０×３０５０×０．７ｍｍの大きさとなる。そのため、従来のように、複数個並べられたローラの上に液晶パネルを乗せて転がり搬送すると、シャフトの撓みやローラ高さのばらつきによりガラスに局部的に強い力が働き、ガラスを傷付ける虞がある。さらに、プロセス工程では、非接触であることが求められているため、空気浮上搬送が採用され始めている。   Conventionally, in the production of FPD panels and solar cell panels, a method of increasing production efficiency by increasing the size of one panel has been adopted. For example, in the case of liquid crystal glass, the size is 2850 × 3050 × 0.7 mm in the tenth generation. Therefore, when a liquid crystal panel is placed on a plurality of rollers and rolled as in the past, a strong force acts locally on the glass due to the deflection of the shaft and variations in the roller height, which may damage the glass. is there. Furthermore, since the process steps are required to be non-contact, air floating conveyance is beginning to be adopted.

空気浮上搬送装置の一例として、液晶用のガラスを浮上させるにあたり、小径の孔を複数個設け、これらの小径の孔から空気が噴出する板状のレールを、ガラスの大きさに合わせて複数個繋ぎ合わせて搬送装置を構成することが行われている。また、多孔質カーボンをレール材に用い、その気孔から空気を噴出させる方法も存在する。   As an example of an air levitation transport device, a plurality of small-diameter holes are provided to float glass for liquid crystal, and a plurality of plate-like rails through which air is ejected from these small-diameter holes are matched to the size of the glass. It is practiced to form a transport device by connecting them together. There is also a method in which porous carbon is used as a rail material and air is ejected from the pores.

しかし、上記の方法においては、１０００×１０００ｍｍの面積あたりの空気流量として、多数孔タイプで２５０Ｌ／ｍｉｎ、カーボン多孔質タイプで１５０Ｌ／ｍｉｎを要し、極めて多くの空気流量が要求される。また、従来の非接触搬送装置は、真空吸着と空気の噴出の力のつりあい原理を利用して浮上高さの精度を保つが、その際、真空吸着用に常時ポンプを運転する必要があるため、多大なエネルギーを消費するという問題もある。   However, the above method requires 250 L / min for the multi-hole type and 150 L / min for the carbon porous type as the air flow rate per area of 1000 × 1000 mm, and a very large air flow rate is required. In addition, the conventional non-contact transfer device maintains the accuracy of the flying height using the balance principle of vacuum suction and air jet force, but at that time, it is necessary to always operate the pump for vacuum suction. There is also a problem of consuming a great deal of energy.

そこで、特願２００８−７５０６８号において、本出願人は、浮上高さ精度を高く維持しつつ、空気流量及びエネルギー消費量を低減するため、旋回流を利用した非接触搬送装置を提案した。この非接触搬送装置は、図１０に示すように、表面から裏面に貫通する横断面円形の貫通孔６１と、貫通孔６１内に空気を噴出して旋回流を生じさせる流体噴出口６２と、流体噴出口６２に空気を供給する円環状の給気溝６３とを有する旋回流形成体６４を備える。そして、給気溝６３に空気を供給する空気供給路６５が設けられた基体（搬送レール）６６の表面に、上記の旋回流形成体６４を配置して搬送装置を構成する。   Therefore, in Japanese Patent Application No. 2008-75068, the present applicant has proposed a non-contact conveyance device using swirl flow in order to reduce the air flow rate and energy consumption while maintaining high flying height accuracy. As shown in FIG. 10, the non-contact transfer device includes a through hole 61 having a circular cross section penetrating from the front surface to the back surface, a fluid jet port 62 for generating a swirling flow by jetting air into the through hole 61, A swirling flow forming body 64 having an annular air supply groove 63 for supplying air to the fluid ejection port 62 is provided. Then, the above-described swirl flow forming body 64 is arranged on the surface of a base body (conveying rail) 66 provided with an air supply path 65 for supplying air to the air supply groove 63 to constitute a conveying device.

上記非接触搬送装置によれば、旋回流形成体６４の表面側に上方へ向かう上昇旋回流を発生させることで被搬送物（ガラス）６７を浮上させ、それによって、従来の１／２程度の空気流量での搬送を可能とする。その一方で、貫通孔６１の開口部近傍に負圧による下方への空気流を生じさせ、浮上高さ精度を保つための真空吸着と同等の効果を発揮させる。これにより、真空吸着用のポンプを不要とし、エネルギー消費量を低減する。   According to the non-contact transfer device, the object to be transferred (glass) 67 is levitated by generating an upward swirl flow upward on the surface side of the swirl flow forming body 64, and thereby about 1/2 of the conventional one. Enables conveyance at an air flow rate. On the other hand, an air flow downward due to negative pressure is generated in the vicinity of the opening of the through hole 61, and the same effect as vacuum suction for maintaining the flying height accuracy is exhibited. This eliminates the need for a vacuum suction pump and reduces energy consumption.

上記非接触搬送装置を用いて、ＦＰＤパネルや太陽電池パネル等の大型パネルを搬送する場合、図１１に示すように、表面上に多数の旋回流形成体６４を設けた複数の搬送レール６６を並列に配置して搬送レーンを構成し、被搬送物６７を浮上させながら移動させていく。   When transporting a large panel such as an FPD panel or a solar battery panel using the non-contact transport device, as shown in FIG. 11, a plurality of transport rails 66 provided with a large number of swirl flow forming bodies 64 are provided on the surface. It arrange | positions in parallel and comprises a conveyance lane, and it moves while the to-be-conveyed object 67 floats.

ところで、上記搬送レーンにおいて、被搬送物６７の搬送距離を延ばす場合には、搬送レール６６を被搬送物６７の搬送方向に継ぎ足して距離を稼ぐことになるが、その際、図１２に示すように、搬送レール６６の継ぎ目に段差７１が生じたり、搬送レール６６間の間隙７２が大きくなると、被搬送物６７が搬送レール６６の継ぎ目を乗り越えられず、途中で引っ掛かって搬送不良が生じたり、被搬送物６７に傷が付く虞がある。   By the way, when the transport distance of the transported object 67 is extended in the transport lane, the transport rail 66 is added in the transport direction of the transported object 67 to increase the distance. In this case, as shown in FIG. In addition, when the step 71 occurs at the joint of the transport rail 66 or the gap 72 between the transport rails 66 increases, the transported object 67 cannot get over the joint of the transport rail 66 and is caught in the middle, resulting in a transport failure. There is a possibility that the transported object 67 may be damaged.

このため、搬送レール６６の設置にあたっては、レール間の継ぎ目に生じる段差７１及び間隙７２の各々を許容値内（例えば、１０００×１０００×０．７（厚さ）ｍｍのガラスで浮上量が３００μｍである場合には、段差７１を１００μｍ以内、間隙７２を３０ｍｍ以内）に収めることが求められる。しかし、この場合、搬送レール６６を高精度に加工する必要が生じるため、搬送装置の製造コストが増大する虞があり、また、設置場所の条件によっては、搬送レール６６の加工精度に関係なく、継ぎ目の段差等を許容値内に収めることができないことがある。   For this reason, when the transport rail 66 is installed, each of the step 71 and the gap 72 generated at the joint between the rails is within an allowable value (for example, glass of 1000 × 1000 × 0.7 (thickness) mm and the flying height is 300 μm. In this case, it is required that the step 71 is within 100 μm and the gap 72 is within 30 mm. However, in this case, since it is necessary to process the transport rail 66 with high accuracy, the manufacturing cost of the transport device may increase, and depending on the conditions of the installation location, regardless of the processing accuracy of the transport rail 66, In some cases, the level difference of the seam cannot be within the allowable value.

上記の問題を解決する方法の１つとして、旋回流形成体６４からの上昇旋回流を増大し、被搬送物６７全体の浮上量を大きくすることが考えられるが、この場合、旋回流形成体６４への空気供給量を増加する必要があるため、運転コストの高騰を招くという問題がある。   As one of the methods for solving the above problem, it is conceivable to increase the upward swirling flow from the swirling flow forming body 64 and increase the floating amount of the entire conveyed object 67. In this case, however, the swirling flow forming body Since it is necessary to increase the air supply amount to 64, there is a problem that the operating cost increases.

また、他の方法として、図１３に示すように、並列配置される搬送レール６６ａ〜６６ｃ間で継ぎ目の位置をずらし、被搬送物６７が両脇の搬送レール６６ａ、６６ｃの継ぎ目に位置する際に、中央の搬送レール６６ｂによって被搬送物６７の端部を浮上させる案があるが、設置場所や大型装置の分割設計の制約上、そのように搬送レール６６を配置できない場合があり、必ずしも万全とは言えない。   As another method, as shown in FIG. 13, the position of the joint is shifted between the transport rails 66a to 66c arranged in parallel, and the transported object 67 is positioned at the joint of the transport rails 66a and 66c on both sides. In addition, there is a plan that the end of the object to be transported 67 is levitated by the central transport rail 66b. However, the transport rail 66 may not be arranged in such a manner due to restrictions on the installation location and the divisional design of the large-sized device. It can not be said.

そこで、本発明は、上記の問題点に鑑みてなされたものであって、製造コストや運転コストが増大したり、装置の設置場所に制限を受けるのを回避しつつ、被搬送物が搬送レールの継ぎ目に引っ掛かって搬送不良が生じたり、被搬送物に傷が付くのを防止することが可能な非接触搬送装置を提供することを目的とする。   Therefore, the present invention has been made in view of the above-described problems, and the object to be conveyed is a conveyance rail while avoiding an increase in manufacturing cost and operation cost or being restricted by the installation location of the apparatus. It is an object of the present invention to provide a non-contact conveyance device capable of preventing a conveyance failure caused by being caught at the joint of the sheet, and damage to a conveyed object.

上記目的を達成するため、本発明は、複数の搬送レールを被搬送物の搬送方向に沿って配置し、該複数の搬送レール上で該被搬送物を浮上させながら搬送する非接触搬送装置であって、前記搬送レールの端部以外の搬送面に設けられ、上昇旋回流を生じさせて前記被搬送物を浮上させる第１の流体噴出手段と、前記搬送レールの端部の搬送面に設けられ、該搬送レール上を搬送される被搬送物の端部が、隣り合う前記搬送レール間の継ぎ目又はその近傍に達したときに、該被搬送物の端部に流体を吹き付け、該被搬送物の端部を浮上させる第２の流体噴出手段とを備えることを特徴とする。   In order to achieve the above object, the present invention provides a non-contact conveyance device that arranges a plurality of conveyance rails along a conveyance direction of a conveyance object and conveys the conveyance object while floating on the plurality of conveyance rails. A first fluid ejecting means that is provided on a conveying surface other than an end of the conveying rail and causes the ascending swirling flow to float the object to be conveyed; and a conveying surface at an end of the conveying rail. When the end of the object to be transported that is transported on the transport rail reaches the joint between adjacent transport rails or the vicinity thereof, a fluid is sprayed to the end of the transported object, and the transported object And a second fluid ejecting means for levitating the end of the object.

そして、本発明によれば、搬送レールの端部に第２の流体噴出手段を設けるため、搬送レール上を搬送される被搬送物の端部が搬送レール間の継ぎ目に近付いた際に、被搬送物の端部を浮上させることができ、被搬送物が搬送レール間の継ぎ目の段差や間隙を容易に乗り越えることが可能になる。このため、搬送レールを設置するに際しての継ぎ目の段差及び間隙の許容値を緩和することができ、非接触搬送装置の製造コストが増大したり、装置の設置場所に制限を受けるのを回避することが可能になる。また、被搬送物全体の浮上量を大きくするのではなく、搬送レールの継ぎ目に位置する部分のみに浮上力を付与することで、搬送レール間の乗り越えの改善を図るため、ポンプからの空気量を増大する必要がなく、運転コストの増大を招くこともない。   According to the present invention, since the second fluid ejecting means is provided at the end of the transport rail, the end of the transported object that is transported on the transport rail approaches the joint between the transport rails. The end of the conveyed product can be lifted, and the conveyed product can easily get over the step or gap of the joint between the conveying rails. For this reason, it is possible to relax the allowable values of the seam level difference and gap when installing the conveyance rail, and to avoid increasing the manufacturing cost of the non-contact conveyance device or being restricted by the installation location of the device. Is possible. In addition, the amount of air from the pump is not increased to increase the floating amount of the entire transported object, but by applying a floating force only to the part located at the joint of the transport rail to improve overcoming between the transport rails. It is not necessary to increase the operating cost, and the operating cost is not increased.

上記非接触搬送装置において、前記第２の流体噴出手段を、前記搬送レールの端部において、該搬送レールの搬送面から上方に向けて流体を噴出する上面視細長状の噴出スロットとすることができる。これによれば、第２の流体噴出手段に供給される流体を圧縮しながら噴出することができるため、被搬送物の端部に十分な浮上力を付与することができ、被搬送物の端部を適切に浮上させることが可能になる。   In the non-contact conveying apparatus, the second fluid ejecting means may be an elongated slot in a top view that ejects fluid upward from the conveying surface of the conveying rail at the end of the conveying rail. it can. According to this, since the fluid supplied to the second fluid ejecting means can be ejected while being compressed, a sufficient levitation force can be applied to the end of the object to be conveyed, and the end of the object to be conveyed It becomes possible to float the part appropriately.

上記非接触搬送装置において、前記第２の流体噴出手段を、前記被搬送物の端面に対して斜めに交差するように配置することができる。これによれば、第２の流体噴出手段からの流体を被搬送物の端部に吹き付けた際に、被搬送物の上方に渦気流が発生するのを抑制することができ、被搬送物が上下に振動するのを抑制することが可能になる。   In the non-contact transfer device, the second fluid ejecting means can be disposed so as to cross obliquely with respect to the end surface of the transferred object. According to this, when the fluid from the second fluid ejecting means is sprayed on the end of the object to be transported, it is possible to suppress the generation of a vortex flow above the object to be transported. It is possible to suppress vibrations up and down.

上記非接触搬送装置において、前記第２の流体噴出手段と前記被搬送物の端面とのなす角度を１０°以下とすることができる。かかる角度を１０°以上とすることで、発生する渦気流が弱くなり、被搬送物が振動するのを抑制することが可能になる。   In the non-contact conveyance device, an angle formed between the second fluid ejection unit and the end surface of the object to be conveyed can be 10 ° or less. By setting the angle to 10 ° or more, the generated vortex airflow becomes weak and it is possible to suppress the object to be vibrated.

上記非接触搬送装置において、前記第２の流体噴出手段と前記被搬送物の端面とのなす角度を１０°以上４５°以下とすることができる。かかる角度が１０°以上の場合には、上記のとおり、被搬送物の振動を抑制することができ、また、この効果は、角度が９０°近くになるまで継続する。しかし、この角度が大きければ大きいほど、長手方向への張り出し量が大きくなるため、配置、取付け上のスペースを必要とする欠点が生じる。この点を考慮すると、第２の流体噴出手段と被搬送物の端面とのなす角度は、４５°以下に抑えるのが好ましい。   In the non-contact conveyance device, an angle formed between the second fluid ejection unit and the end surface of the object to be conveyed can be 10 ° or more and 45 ° or less. When the angle is 10 ° or more, as described above, the vibration of the conveyed object can be suppressed, and this effect continues until the angle becomes close to 90 °. However, the larger this angle is, the larger the amount of protrusion in the longitudinal direction becomes, so that there is a disadvantage that a space for arrangement and mounting is required. Considering this point, it is preferable that the angle formed between the second fluid ejecting means and the end face of the conveyed object is suppressed to 45 ° or less.

上記非接触搬送装置において、前記第１の流体噴出手段が、表面から裏面に貫通する横断面円形の貫通孔を有するリング状部材の裏面に、流体噴出口を備え、該流体噴出口から流体を噴出することにより、該リング状部材の表面側に該表面から離れる方向へ向かう旋回流を生じさせるとともに、該リング状部材の表面側の前記貫通孔の開口部近傍に前記裏面方向への流体流れを生じさせるように構成することができる。   In the non-contact conveyance device, the first fluid ejection means includes a fluid ejection port on the back surface of a ring-shaped member having a circular cross-sectional through hole penetrating from the front surface to the back surface, and the fluid is ejected from the fluid ejection port. By ejecting, a swirling flow is generated on the surface side of the ring-shaped member in a direction away from the surface, and a fluid flow in the direction of the back surface in the vicinity of the opening of the through hole on the surface side of the ring-shaped member. Can be configured to generate.

上記構成によれば、流体噴出口から流体を噴出させ、リング状部材の表面側に、該表面から離れる方向への流体流れ及び旋回流を発生させて被搬送物を浮上させるため、従来の１／２程度の１００Ｌ／ｍｉｎ程度の少ない流体流量での搬送が可能となる。また、流体噴出口から流体を噴出することにより、リング状部材表面側の貫通孔の開口部近傍に裏面方向への流体流れを生じさせることで、浮上高さ精度を保つための真空吸着と同等の効果を奏するため、真空吸着用のポンプが不要となり、エネルギー消費量も低く抑えることができる。   According to the above configuration, since the fluid is ejected from the fluid ejection port, the fluid flow and the swirling flow in the direction away from the surface are generated on the surface side of the ring-shaped member, and the object to be conveyed is levitated. It is possible to carry at a low fluid flow rate of about 100 L / min, about / 2. In addition, by ejecting fluid from the fluid ejection port, a fluid flow in the direction of the back surface is generated in the vicinity of the opening of the through hole on the ring-shaped member surface side, which is equivalent to vacuum suction for maintaining the flying height accuracy. As a result, a vacuum suction pump is not required and energy consumption can be kept low.

上記非接触搬送装置において、前記第１の流体噴出手段が、前記搬送レールの搬送面に２列にわたって各列に複数個配置され、一方の列に属する第１の流体噴出手段の各々の旋回流の向きと、他方の列に属する第１の流体噴出手段の各々の旋回流の向きとが互いに異なるように構成することができる。この構成によって、隣接する列の隣り合う第１の流体噴出手段からの旋回流が増強され、第１の流体噴出手段から噴出する流体によって被搬送物を浮上させながら搬送することができる。   In the non-contact transfer apparatus, a plurality of the first fluid ejecting means are arranged in each row over two rows on the transport surface of the transport rail, and each swirl flow of the first fluid ejecting means belonging to one row And the direction of each swirl flow of the first fluid ejection means belonging to the other row can be configured to be different from each other. With this configuration, the swirl flow from the adjacent first fluid ejecting means in the adjacent row is enhanced, and the object to be transported can be transported while floating by the fluid ejected from the first fluid ejecting means.

以上のように、本発明によれば、製造コストや運転コストが増大したり、装置の設置場所に制限を受けるのを回避しつつ、被搬送物が搬送レールの継ぎ目に引っ掛かって搬送不良が生じたり、被搬送物に傷が付くのを防止することが可能になる。   As described above, according to the present invention, while the manufacturing cost and the operating cost are increased and the restriction on the installation location of the apparatus is avoided, the object to be conveyed is caught at the joint of the conveyance rail, resulting in a conveyance failure. It is possible to prevent the object to be conveyed from being damaged.

次に、本発明の実施の形態について図面を参照しながら説明する。尚、以下の説明においては、搬送用流体として空気を用い、被搬送物として液晶用のガラス３を搬送する場合を例にとって説明する。   Next, embodiments of the present invention will be described with reference to the drawings. In the following description, the case where air is used as the transfer fluid and the liquid crystal glass 3 is transferred as an object to be transferred will be described as an example.

図１は、本発明にかかる非接触搬送装置の第１の実施形態を示し、この非接触搬送装置１は、ガラス３の搬送方向に延びる角柱状の搬送レール２を、ガラス３の搬送方向及び該搬送方向と直交する方向に並べて配置して構成される。   FIG. 1 shows a first embodiment of a non-contact conveyance device according to the present invention. This non-contact conveyance device 1 includes a rectangular column-shaped conveyance rail 2 extending in the conveyance direction of the glass 3, and the conveyance direction of the glass 3. They are arranged side by side in a direction perpendicular to the transport direction.

各搬送レール２の表面上には、複数の旋回流形成体４ａ、４ｂが２列にわたって設置され、これら旋回流形成体４ａ、４ｂは、図１０に示す旋回流形成体６４と同様のものである。各旋回流形成体４は、図２に示すように、表面から裏面に貫通する貫通孔４１と、図２（ｃ）及び（ｄ）に示すように、裏面に、空気通路としての凹部４２と、凹部４２からの空気を貫通孔４１の内周面近傍に、内周面に対して接線方向に噴出するための噴出口４４とを一対備える。   A plurality of swirl flow forming bodies 4a, 4b are installed in two rows on the surface of each transport rail 2, and these swirl flow forming bodies 4a, 4b are similar to the swirl flow forming body 64 shown in FIG. is there. As shown in FIG. 2, each swirl flow forming body 4 includes a through hole 41 penetrating from the front surface to the back surface, and a concave portion 42 as an air passage on the back surface as shown in FIGS. 2 (c) and 2 (d). A pair of jet outlets 44 are provided in the vicinity of the inner peripheral surface of the through-hole 41 in the vicinity of the inner peripheral surface of the through hole 41 for jetting air from the inner peripheral surface.

一方、搬送レール２の表面（搬送面）には、図３に示すように、後述する給気経路５ａ、５ｂを介して空気が供給される貫通孔４５と、貫通孔４５からの空気を旋回流形成体４ａ、４ｂの裏面に設けられた凹部４２（図２参照）に供給するための平面視円形状の環状溝４６とが設けられる。また、搬送レール２の内部には、図４（ａ）に示すように、搬送レール２の長軸に沿って配置され、ポンプ（不図示）から供給される空気を搬送するための２本の給気経路５ａ、５ｂが設けられる。   On the other hand, on the surface (transport surface) of the transport rail 2, as shown in FIG. 3, a through hole 45 to which air is supplied via air supply paths 5 a and 5 b described later, and air from the through hole 45 are swirled. An annular groove 46 having a circular shape in a plan view is provided to be supplied to a recess 42 (see FIG. 2) provided on the back surface of the flow forming bodies 4a and 4b. Further, as shown in FIG. 4 (a), the inside of the transport rail 2 is arranged along the long axis of the transport rail 2 and is used for transporting air supplied from a pump (not shown). Air supply paths 5a and 5b are provided.

さらに、図４（ａ）、（ｂ）に示すように、搬送レール２の一方の端部２ａには、複数の取付ねじ６ａを通じて板状のスロットプレート６が固着され、その内部には、給気経路５ａ、５ｂと連続するように配置された凹部（空気経路）６ｂと、凹部６ｂの上部から搬送レール２の表面に向けて延びる上面視細長の噴出スロット６ｃとが設けられる。これら凹部６ｂ及び噴出スロット６ｃは、搬送レール２の端部２ａで上方への空気流を生じさせるために備えられる。ここで、噴出スロット６ｃの長さＬは、給気経路５ａ、５ｂの直径よりも大きく形成される。また、噴出スロット６ｃの幅Ｄ１は、凹部６ｂを介して供給される空気を圧縮して吹き出す（噴き出す）ため、凹部６ｂの幅（深さ）Ｄ２よりも小さく形成され、具体的には０．１ｍｍ以下とすることが好ましい。   Further, as shown in FIGS. 4 (a) and 4 (b), a plate-like slot plate 6 is fixed to one end portion 2a of the transport rail 2 through a plurality of mounting screws 6a. A recess (air path) 6b disposed so as to be continuous with the air paths 5a and 5b, and an elongated ejection slot 6c extending from the top of the recess 6b toward the surface of the transport rail 2 are provided. The recess 6b and the ejection slot 6c are provided to generate an upward air flow at the end 2a of the transport rail 2. Here, the length L of the ejection slot 6c is formed larger than the diameter of the air supply paths 5a and 5b. Further, the width D1 of the ejection slot 6c is formed smaller than the width (depth) D2 of the recess 6b in order to compress and blow out (spout) air supplied through the recess 6b. It is preferable to be 1 mm or less.

次に、上記非接触搬送装置の動作について、図１〜図５を参照しながら説明する。   Next, the operation of the non-contact conveyance device will be described with reference to FIGS.

図３に示すように、ポンプから搬送レール２の給気経路５ａ、５ｂに供給された空気は、貫通孔４５を介して環状溝４６に供給され、環状溝４６から旋回流形成体４ａ、４ｂの凹部４２に供給され、噴出口４４から貫通孔４１に噴出する。これにより、旋回流形成体４ａ、４ｂの上方に上昇旋回流を発生させ、この旋回流にてガラス３を浮上させる。また、噴出口４４から空気を噴出することにより、旋回流形成体４ａ、４ｂの貫通孔４１の中央部（貫通孔４１の開口部近傍）に負圧による裏面方向への空気流れを生じさせ、浮上高さ精度を保つための真空吸着と同等の効果を奏する。   As shown in FIG. 3, the air supplied from the pump to the air supply paths 5 a and 5 b of the transport rail 2 is supplied to the annular groove 46 through the through hole 45, and the swirl flow forming bodies 4 a and 4 b are supplied from the annular groove 46. And is ejected from the ejection port 44 to the through hole 41. As a result, an upward swirling flow is generated above the swirling flow forming bodies 4a and 4b, and the glass 3 is floated by the swirling flow. In addition, by ejecting air from the spout 44, an air flow in the back surface direction due to negative pressure is generated in the central portion of the swirl flow forming bodies 4a and 4b (near the opening of the through hole 41), It has the same effect as vacuum suction for maintaining the flying height accuracy.

また、旋回流形成体４ａ、４ｂの旋回流は互いに逆方向であり、図１の紙面上で上下左右に旋回流形成体４ａ、４ｂを交互に配置したため、各々の旋回流形成体４ａ、４ｂが形成した旋回流の水平分力が相殺される。これにより、旋回流によってガラス３に付加される力は、浮上力及び吸引力の２つの鉛直成分の力のみとなり、ガラス３の回転を確実に防止することができる。   In addition, the swirl flows of the swirl flow forming bodies 4a and 4b are opposite to each other, and the swirl flow formation bodies 4a and 4b are alternately arranged vertically and horizontally on the paper surface of FIG. The horizontal component force of the swirling flow formed by is canceled out. As a result, the force applied to the glass 3 by the swirl flow is only the force of two vertical components of the levitation force and the suction force, and the rotation of the glass 3 can be reliably prevented.

このようにして浮上したガラス３は、図示しないリニアモータ、摩擦コロ、ベルトなどにより搬送駆動力が与えられ、図１に示す矢印方向に搬送される。そして、ガラス３の端部３ａが搬送レール２の継ぎ目に近付くと、スロットプレート６の噴出スロット６ｃから噴出する空気がガラス３の裏面に吹き付けられ、ガラス３の端部３ａに浮上力が付与される。その結果、図５に示すように、ガラス３の端部３ａ及びその近傍領域が浮上し、搬送レール２の継ぎ目の段差２ｃ及び搬送レール２間の間隙２ｄをガラス３が容易に乗り越えることができる。   The glass 3 that has floated in this manner is supplied with a transport driving force by a linear motor, a friction roller, a belt or the like (not shown) and is transported in the direction of the arrow shown in FIG. And when the edge part 3a of the glass 3 approaches the joint of the conveyance rail 2, the air which ejects from the ejection slot 6c of the slot plate 6 is sprayed on the back surface of the glass 3, and a levitation force is given to the edge part 3a of the glass 3. The As a result, as shown in FIG. 5, the end portion 3 a of the glass 3 and the vicinity thereof float up, and the glass 3 can easily get over the step 2 c of the joint of the transport rail 2 and the gap 2 d between the transport rails 2. .

このため、搬送レール２を設置するに際しての段差２ｃ及び間隙２ｄの許容値を緩和することができ、非接触搬送装置の製造コストが増大したり、装置の設置場所に制限を受けるのを回避することが可能になる。また、ガラス３全体の浮上量を大きくするのではなく、搬送レール２の継ぎ目に位置する部分のみに浮上力を付与することで、搬送レール２間の乗り越えの改善を図るため、ポンプからの空気量を増大する必要がなく、運転コストの増大を招くこともない。   For this reason, the allowable value of the step 2c and the gap 2d when installing the transport rail 2 can be relaxed, and it is avoided that the manufacturing cost of the non-contact transport device is increased and that the place where the device is installed is restricted. It becomes possible. In addition, since the floating amount of the glass 3 as a whole is not increased but a floating force is applied only to the portion located at the joint of the conveyance rail 2, the air from the pump is improved in order to improve overcoming between the conveyance rails 2. There is no need to increase the amount and the operation cost is not increased.

尚、上記実施の形態においては、流体として空気を用いる場合について説明したが、空気以外の窒素等のプロセスガスを使用することもできる。また、搬送レール２間の継ぎ目でガラス３の端部３ａを浮上させる手段として、上面視細長状の噴出スロット６ｃを設けたが、上面視楕円状等の貫通孔を設けたり、複数の小さな貫通孔を直線上に並べて穿設するようにしてもよい。   In addition, in the said embodiment, although the case where air was used as a fluid was demonstrated, process gas, such as nitrogen other than air, can also be used. In addition, as a means for floating the end portion 3a of the glass 3 at the joint between the conveyance rails 2, an elongated slot 6c in the top view is provided, but a through hole having an elliptical shape in the top view is provided, or a plurality of small through holes are provided. The holes may be formed side by side on a straight line.

さらに、上記実施の形態においては、搬送レール２の端部２ａにスロットプレート６を付設した上で噴出スロット６ｃを形成するが、スロットプレート６を付設することなく、搬送レール２の端部２ａにおいて、搬送レール２の表面（搬送面）から内部の給気経路５ａ、５ｂに繋がる貫通孔を穿設してもよい。   Further, in the above embodiment, the slot 2 is formed on the end 2a of the transport rail 2 and the ejection slot 6c is formed. However, the end 2a of the transport rail 2 is not provided with the slot plate 6. A through hole that connects the surface (transport surface) of the transport rail 2 to the internal air supply paths 5a and 5b may be formed.

図７は、本発明にかかる非接触搬送装置の第２の実施形態を示す上面図であり、図８は、図７の領域Ｇの拡大図である。尚、これらの図において、先の図１〜図５と同一の構成要素については同一符号を付し、その説明を省略する。   FIG. 7 is a top view showing a second embodiment of the non-contact transport apparatus according to the present invention, and FIG. 8 is an enlarged view of a region G in FIG. In these drawings, the same components as those in FIGS. 1 to 5 are given the same reference numerals, and the description thereof is omitted.

第１の実施形態の非接触搬送装置１においては、噴出スロット６ｃを搬送レール２の端面２ｂに沿って配置するため（図４（ａ）参照）、ガラス３の搬送先側の端面３ｂ（図１、図５参照）と噴出スロット６ｃとが平行な位置関係となる。この場合、図６に示すように、ガラス３の上方に渦気流が発生し易くなり、ガラス３を上下に振動させることがある。   In the non-contact conveyance device 1 of the first embodiment, since the ejection slot 6c is arranged along the end surface 2b of the conveyance rail 2 (see FIG. 4A), the end surface 3b on the conveyance destination side of the glass 3 (see FIG. 4). 1 and FIG. 5) and the ejection slot 6c are in a parallel positional relationship. In this case, as shown in FIG. 6, an eddy current is likely to be generated above the glass 3, and the glass 3 may be vibrated up and down.

そこで、本実施形態の非接触搬送装置１０においては、図７及び図８に示すように、搬送レール２とスロットプレート６との間に上面視直角三角形の斜角ブロック７を配置し、噴出スロット６ｃをガラス３の搬送先側の端面３ｂに対して斜めに交差させる（スロットプレート６の配置面７ｃを搬送レール２の端面２ｂに対して斜めに配置する）。尚、斜角ブロック７の内部には、図８（ａ）に示すように、搬送レール２内の給気経路５ａ、５ｂとスロットプレート６内の凹部６ｂとを繋ぐ給気経路７ａ、７ｂが設けられ、また、スロットプレート６の配置面７ｃには、スロットプレート６をねじ止めするための複数の取付穴（不図示）が設けられる。   Therefore, in the non-contact conveyance device 10 of the present embodiment, as shown in FIGS. 7 and 8, a diagonal block 7 having a right triangle in a top view is disposed between the conveyance rail 2 and the slot plate 6, and the ejection slot is formed. 6c is made to cross diagonally with respect to the end surface 3b on the conveyance destination side of the glass 3 (the arrangement surface 7c of the slot plate 6 is arranged obliquely with respect to the end surface 2b of the conveyance rail 2). In addition, as shown in FIG. 8A, air supply paths 7a and 7b connecting the air supply paths 5a and 5b in the transport rail 2 and the recess 6b in the slot plate 6 are provided inside the oblique block 7. A plurality of mounting holes (not shown) for screwing the slot plate 6 are provided on the arrangement surface 7 c of the slot plate 6.

上記非接触搬送装置１０においては、図９に示すように、ガラス３の端部３ａが搬送レール２の継ぎ目に近付いた際、ガラス３と噴出スロット６ｃが斜めに交差する状態で、ガラス３の裏面に空気が吹き付けられる。この場合、一気に渦気流が発生しないため振動を発生させる力は弱く、ガラス３の上方での渦気流の発生が軽減される。これにより、ガラス３が上下に振動するのを抑制することができ、より円滑に搬送レール２の継ぎ目を移動させることが可能になる。   In the non-contact conveyance device 10, as shown in FIG. 9, when the end 3 a of the glass 3 approaches the seam of the conveyance rail 2, the glass 3 and the ejection slot 6 c are obliquely intersected with each other. Air is blown on the back side. In this case, since the vortex is not generated at a stretch, the force for generating the vibration is weak and the generation of the vortex above the glass 3 is reduced. Thereby, it can control that glass 3 vibrates up and down, and it becomes possible to move the joint of conveyance rail 2 more smoothly.

ここで、ガラス３の端面３ｂに対する噴出スロット６ｃの設置角度θ（図８（ａ）参照）は、１０°以上とすることが好ましい。角度θが１０°未満の場合には、渦気流の影響が大きくなり、振動が発生し易くなる虞がある。一方、角度θが１０°以上の場合には、渦気流の影響が小さくなり振動の発生を軽減することができるという利点を有する。この利点は、角度θが９０°近くになるまで継続するが、その反面、角度θが大きければ大きいほど、斜角ブロック７の長手方向への張り出し量が大きくなる。このため、配置、取付け上のスペースを必要とする欠点が生じ、この点を考慮すると、角度θは、４５°以下に抑えるのが好ましい。従って、ガラス３の端面３ｂに対する噴出スロット６ｃの設置角度θは、１０°以上とすることが好ましく、１０°以上４５°以下とすることがさらに好ましい。   Here, the installation angle θ (see FIG. 8A) of the ejection slot 6c with respect to the end face 3b of the glass 3 is preferably set to 10 ° or more. When the angle θ is less than 10 °, the influence of the vortex airflow becomes large, and there is a possibility that vibration is likely to occur. On the other hand, when the angle θ is 10 ° or more, there is an advantage that the influence of the vortex airflow is reduced and the occurrence of vibration can be reduced. This advantage continues until the angle θ is close to 90 °. On the other hand, the larger the angle θ, the larger the amount of the oblique block 7 that projects in the longitudinal direction. For this reason, the fault which requires the space on arrangement | positioning and attachment arises, and when this point is considered, it is preferable to suppress angle (theta) to 45 degrees or less. Therefore, the installation angle θ of the ejection slot 6c with respect to the end surface 3b of the glass 3 is preferably 10 ° or more, and more preferably 10 ° or more and 45 ° or less.

尚、本実施の形態においても、第１の実施形態と同様、流体として空気以外のプロセスガスを使用することができ、また、噴出スロット６ｃに代えて上面視楕円状の貫通孔等を用いることができ、さらに、スロットプレート６を付設することなく、斜角ブロック７の表面から内部の給気経路７ａ、７ｂに繋がる貫通孔を斜角ブロック７に穿設してもよい。   In the present embodiment, similarly to the first embodiment, a process gas other than air can be used as a fluid, and an elliptical through hole or the like in top view is used instead of the ejection slot 6c. In addition, a through hole that connects the surface of the bevel block 7 to the internal air supply paths 7 a and 7 b may be formed in the bevel block 7 without attaching the slot plate 6.

本発明にかかる非接触搬送装置の第１の実施形態を示す上面図である。It is a top view which shows 1st Embodiment of the non-contact conveying apparatus concerning this invention. 図１の旋回流形成体を示す図であって、（ａ）は上面図、（ｂ）は（ａ）のＢ−Ｂ線断面図、（ｃ）は下面図、（ｄ）は（ｃ）のＣ−Ｃ線断面図、（ｅ）は、旋回流形成体の裏面を（ｃ）に示す旋回流形成体の裏面と勝手違いとなるように形成した場合を示す下面図である。It is a figure which shows the swirl | vortex flow formation body of FIG. 1, Comprising: (a) is a top view, (b) is BB sectional drawing of (a), (c) is a bottom view, (d) is (c). CC sectional drawing, (e) is a bottom view which shows the case where the back surface of a swirl flow formation body is formed so as to be different from the back surface of the swirl flow formation body shown in (c). 図１の旋回流形成体を搬送レールに設置した状態を示す図であって、（ａ）は正面断面図、（ｂ）は（ａ）のＥ−Ｅ線断面図である。It is a figure which shows the state which installed the turning flow formation body of FIG. 1 in the conveyance rail, Comprising: (a) is front sectional drawing, (b) is the EE sectional view taken on the line (a). （ａ）は図１の領域Ａの拡大図、（ｂ）は（ａ）のＦ−Ｆ線断面図である。(A) is the enlarged view of the area | region A of FIG. 1, (b) is the FF sectional view taken on the line of (a). 搬送レール間の継ぎ目におけるガラスの搬送状態を示す図である。It is a figure which shows the conveyance state of the glass in the joint line between conveyance rails. ガラスの上方での渦気流の発生状況を示す図である。It is a figure which shows the generation | occurrence | production state of the vortex | airflow above glass. 本発明にかかる非接触搬送装置の第２の実施形態を示す上面図である。It is a top view which shows 2nd Embodiment of the non-contact conveying apparatus concerning this invention. （ａ）は図７の領域Ｇの拡大図、（ｂ）は（ａ）の斜視図である。(A) is the enlarged view of the area | region G of FIG. 7, (b) is a perspective view of (a). 搬送レール間の継ぎ目におけるガラスの搬送状態を示す図である。It is a figure which shows the conveyance state of the glass in the joint line between conveyance rails. 従来の非接触搬送装置を示す断面図である。It is sectional drawing which shows the conventional non-contact conveying apparatus. 従来の非接触搬送装置を示す上面図である。It is a top view which shows the conventional non-contact conveying apparatus. 搬送レール間の継ぎ目におけるガラスの搬送状態を示す図である。It is a figure which shows the conveyance state of the glass in the joint line between conveyance rails. 従来の非接触搬送装置を示す上面図である。It is a top view which shows the conventional non-contact conveying apparatus.

１ 非接触搬送装置
２ 搬送レール
２ａ 端部
２ｂ 端面
２ｃ 段差
２ｄ 間隙
３ ガラス
３ａ 端部
３ｂ 端面
４（４ａ、４ｂ） 旋回流形成体
５（５ａ、５ｂ） 給気経路
６ スロットプレート
６ａ 取付ねじ
６ｂ 凹部
６ｃ 噴出スロット
７ 斜角ブロック
７ａ、７ｂ 給気経路
７ｃ スロットプレートの配置面
１０ 非接触搬送装置
４１ 貫通孔
４２ 凹部
４４ 噴出口
４５ 貫通孔
４６ 環状溝DESCRIPTION OF SYMBOLS 1 Non-contact conveying apparatus 2 Conveying rail 2a End part 2b End surface 2c Level difference 2d Gap 3 Glass 3a End part 3b End surface 4 (4a, 4b) Swirl flow formation body 5 (5a, 5b) Air supply path 6 Slot plate 6a Mounting screw 6b Recess 6c Ejection slot 7 Bevel block 7a, 7b Air supply path 7c Slot plate placement surface 10 Non-contact conveying device 41 Through hole 42 Recess 44 Ejection port 45 Through hole 46 Annular groove

Claims (7)

複数の搬送レールを被搬送物の搬送方向に沿って配置し、該複数の搬送レール上で該被搬送物を浮上させながら搬送する非接触搬送装置であって、
前記搬送レールの端部以外の搬送面に設けられ、上昇旋回流を生じさせて前記被搬送物を浮上させる第１の流体噴出手段と、
前記搬送レールの端部の搬送面に設けられ、該搬送レール上を搬送される被搬送物の端部が、隣り合う前記搬送レール間の継ぎ目又はその近傍に達したときに、該被搬送物の端部に流体を吹き付け、該被搬送物の端部を浮上させる第２の流体噴出手段とを備えることを特徴とする非接触搬送装置。A non-contact conveyance device that arranges a plurality of conveyance rails along a conveyance direction of a conveyance object, and conveys the conveyance object while floating on the plurality of conveyance rails,
A first fluid ejection means provided on a conveyance surface other than an end of the conveyance rail, and causing an upward swirling flow to float the object to be conveyed;
When the end of the object to be conveyed that is provided on the conveyance surface at the end of the conveyance rail and is conveyed on the conveyance rail reaches the joint between adjacent conveyance rails or the vicinity thereof, the object to be conveyed And a second fluid ejecting means for spraying a fluid onto the end of the object and floating the end of the object to be conveyed. 前記第２の流体噴出手段は、前記搬送レールの端部において、該搬送レールの搬送面から上方に向けて流体を噴出する上面視細長状の噴出スロットであることを特徴とする請求項１に記載の非接触搬送装置。   The said 2nd fluid ejection means is an elongate slot-like ejection slot which ejects a fluid upwards from the conveyance surface of this conveyance rail in the edge part of the said conveyance rail. The non-contact conveying apparatus as described. 前記第２の流体噴出手段は、前記被搬送物の端面に対して斜めに交差するように配置されることを特徴とする請求項１又は２に記載の非接触搬送装置。   3. The non-contact transfer apparatus according to claim 1, wherein the second fluid ejection unit is disposed so as to obliquely intersect an end surface of the transfer object. 前記第２の流体噴出手段と前記被搬送物の端面とのなす角度が１０°以上であることを特徴とする請求項３に記載の非接触搬送装置。   The non-contact transfer apparatus according to claim 3, wherein an angle formed between the second fluid ejection unit and an end surface of the transferred object is 10 ° or more. 前記第２の流体噴出手段と前記被搬送物の端面とのなす角度が１０°以上４５°以下であることを特徴とする請求項３に記載の非接触搬送装置。   The non-contact conveying apparatus according to claim 3, wherein an angle formed between the second fluid ejecting unit and the end surface of the object to be conveyed is 10 ° or more and 45 ° or less. 前記第１の流体噴出手段は、表面から裏面に貫通する横断面円形の貫通孔を有するリング状部材の裏面に、流体噴出口を備え、該流体噴出口から流体を噴出することにより、該リング状部材の表面側に該表面から離れる方向へ向かう旋回流を生じさせるとともに、該リング状部材の表面側の前記貫通孔の開口部近傍に前記裏面方向への流体流れを生じさせることを特徴とする請求項１乃至５のいずれかに記載の非接触搬送装置。   The first fluid ejection means includes a fluid ejection port on the back surface of a ring-shaped member having a circular through-hole penetrating from the front surface to the back surface, and ejects fluid from the fluid ejection port, thereby A swirling flow in the direction away from the surface is generated on the surface side of the ring-shaped member, and a fluid flow is generated in the vicinity of the opening of the through hole on the surface side of the ring-shaped member. The non-contact conveyance apparatus in any one of Claim 1 thru | or 5. 前記第１の流体噴出手段は、前記搬送レールの搬送面に２列にわたって各列に複数個配置され、一方の列に属する第１の流体噴出手段の各々の旋回流の向きと、他方の列に属する第１の流体噴出手段の各々の旋回流の向きとが互いに異なることを特徴とする請求項１乃至６のいずれかに記載の非接触搬送装置。   A plurality of the first fluid ejection means are arranged in each row in two rows on the transport surface of the transport rail, the direction of the swirl flow of the first fluid ejection means belonging to one row, and the other row 7. The non-contact transfer device according to claim 1, wherein the directions of the swirling flows of the first fluid ejecting means belonging to each other are different from each other.
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