JP5250193B2 - ヒートシンクへの熱伝導を向上させるための冶金的接合を含む集積回路デバイス - Google Patents
ヒートシンクへの熱伝導を向上させるための冶金的接合を含む集積回路デバイス Download PDFInfo
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- JP5250193B2 JP5250193B2 JP2006261623A JP2006261623A JP5250193B2 JP 5250193 B2 JP5250193 B2 JP 5250193B2 JP 2006261623 A JP2006261623 A JP 2006261623A JP 2006261623 A JP2006261623 A JP 2006261623A JP 5250193 B2 JP5250193 B2 JP 5250193B2
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- layer
- gold
- integrated circuit
- heat sink
- metallurgically bonded
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- 239000010410 layer Substances 0.000 claims description 88
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 63
- 229910052737 gold Inorganic materials 0.000 claims description 63
- 239000010931 gold Substances 0.000 claims description 63
- 229910052751 metal Inorganic materials 0.000 claims description 42
- 239000002184 metal Substances 0.000 claims description 42
- 239000000956 alloy Substances 0.000 claims description 33
- 229910045601 alloy Inorganic materials 0.000 claims description 31
- 238000000034 method Methods 0.000 claims description 26
- 239000000758 substrate Substances 0.000 claims description 22
- 229910052710 silicon Inorganic materials 0.000 claims description 18
- 239000010703 silicon Substances 0.000 claims description 18
- 229910000679 solder Inorganic materials 0.000 claims description 17
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 16
- 239000012790 adhesive layer Substances 0.000 claims description 15
- 230000003014 reinforcing effect Effects 0.000 claims description 15
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 14
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 14
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 12
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 12
- 229910052719 titanium Inorganic materials 0.000 claims description 12
- 239000010936 titanium Substances 0.000 claims description 12
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 11
- 229910052732 germanium Inorganic materials 0.000 claims description 11
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 11
- 229910052718 tin Inorganic materials 0.000 claims description 11
- 229910001020 Au alloy Inorganic materials 0.000 claims description 10
- 238000005192 partition Methods 0.000 claims description 9
- 239000011135 tin Substances 0.000 claims description 9
- 239000003353 gold alloy Substances 0.000 claims description 8
- 229910052759 nickel Inorganic materials 0.000 claims description 7
- 230000002093 peripheral effect Effects 0.000 claims description 7
- 229910052697 platinum Inorganic materials 0.000 claims description 7
- 229910052763 palladium Inorganic materials 0.000 claims description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 5
- 239000010949 copper Substances 0.000 claims description 5
- 229910052802 copper Inorganic materials 0.000 claims description 5
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 4
- 230000004888 barrier function Effects 0.000 claims description 4
- 239000011651 chromium Substances 0.000 claims description 4
- 229910052804 chromium Inorganic materials 0.000 claims description 4
- 238000009792 diffusion process Methods 0.000 claims description 3
- 239000000155 melt Substances 0.000 claims description 3
- 238000002844 melting Methods 0.000 claims description 3
- 230000008018 melting Effects 0.000 claims description 3
- 230000002787 reinforcement Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 description 15
- 239000000463 material Substances 0.000 description 14
- 230000008569 process Effects 0.000 description 12
- 239000004519 grease Substances 0.000 description 9
- 238000010438 heat treatment Methods 0.000 description 9
- 239000000203 mixture Substances 0.000 description 9
- 239000004020 conductor Substances 0.000 description 6
- 230000005496 eutectics Effects 0.000 description 6
- 239000011241 protective layer Substances 0.000 description 6
- 238000007747 plating Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 238000004806 packaging method and process Methods 0.000 description 3
- BYDQGSVXQDOSJJ-UHFFFAOYSA-N [Ge].[Au] Chemical compound [Ge].[Au] BYDQGSVXQDOSJJ-UHFFFAOYSA-N 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 239000000806 elastomer Substances 0.000 description 2
- 238000007772 electroless plating Methods 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- JVPLOXQKFGYFMN-UHFFFAOYSA-N gold tin Chemical compound [Sn].[Au] JVPLOXQKFGYFMN-UHFFFAOYSA-N 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 229910000927 Ge alloy Inorganic materials 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 229910001128 Sn alloy Inorganic materials 0.000 description 1
- OFLYIWITHZJFLS-UHFFFAOYSA-N [Si].[Au] Chemical compound [Si].[Au] OFLYIWITHZJFLS-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000011231 conductive filler Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000006355 external stress Effects 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 238000010309 melting process Methods 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- 238000010295 mobile communication Methods 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000012782 phase change material Substances 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
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- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
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- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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- H01L2224/732—Location after the connecting process
- H01L2224/73201—Location after the connecting process on the same surface
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- H01L2224/732—Location after the connecting process
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- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49811—Additional leads joined to the metallisation on the insulating substrate, e.g. pins, bumps, wires, flat leads
- H01L23/49816—Spherical bumps on the substrate for external connection, e.g. ball grid arrays [BGA]
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- H01L2924/151—Die mounting substrate
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- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
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- H01L2924/161—Cap
- H01L2924/1615—Shape
- H01L2924/16195—Flat cap [not enclosing an internal cavity]
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- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Description
12.パッケージ基板
14.集積回路ダイ
16.アクティブ面
18.背面
20.半田バンプ
22.アンダーフィル材料
24.半田ボール
26.回路基板
28.ヒートシンク
30.接合層
32.補強リング
34.接着層
36.接合層
40.半導体ウエハ
42.アクティブ面
44.背面
46.金属積層
48.接着層
50.隔壁層
52.金包含層
60.回路側内部予備形成物
62.外部予備形成物
70.金属積層
72.下面
74.金属積層
76.接着層
78.保護層
80.金系合金
82.背面
90.金属積層
94.金系合金層
Claims (5)
- フリップチップ集積回路デバイスであって、
上表面および下表面を有するパッケージ基板(12)であって、前記上表面が、集積回路デバイスを受容するための内部領域の相互接続部、および周縁領域を有する、パッケージ基板(12);
前記内部領域に位置し、かつ、第1の面および反対側の第2の面を有し、前記第1の面が前記内部領域の相互接続部と電気的接触状態にある複数の半田バンプ(20)を含む、集積回路ダイ(14);
ヒートシンク(28);
前記ヒートシンク(28)の第1の面と前記集積回路ダイ(14)の前記第2の面とに冶金的に接合される、第1の冶金接合層(30)であって、前記第1の冶金接合層(30)が、金または金系合金層(60)の上下の面それぞれに冶金的に接合された第1および第2の冶金積層(46、70)を含み、前記第1および第2の冶金積層(46、70)の各々が、
チタン接着層、
ニッケル、プラチナ、銅、クロム、またはそれらの合金からなる、隔壁層(50)、および
金包含層、
からなり、
前記第1の冶金積層(46)がさらに前記集積回路ダイ(14)の前記第2の面に冶金的に接合されており、前記第2の冶金積層(70)がさらに前記ヒートシンク(28)の第1の面に冶金的に接合されている、第1の冶金接合層(30);および
前記集積回路ダイ(14)を囲み、上表面および下表面を有する補強リング(32)であって、前記下表面が前記パッケージ基板(12)の前記周縁領域に接着され、前記上表面が、前記補強リング(32)と前記ヒートシンク(28)とに冶金的に接着された、第2の金または金系合金層からなる第2の冶金接合層(36)によって前記ヒートシンク(28)に接着された、補強リング(32)、
からなり、
前記第2の冶金接合層(36)が、第2の金または金系合金層(36または62)および前記ヒートシンク(28)の第1の面に冶金的に接合されている金属積層(90)からなる、
ことを特徴とするデバイス。 - 前記第1の冶金積層(46)が、
前記集積回路ダイ(14)の第2の面に冶金的に接合された第1のチタン接着層(48);
前記第1のチタン接着層(48)に冶金的に接合された、ニッケル、プラチナ、パラジウム、銅、クロム、またはそれらの合金からなる、第1の隔壁層(50);および
前記第1の隔壁層(50)に冶金的に接合された、シリコン、ゲルマニウム、またはスズからなる第1の金包含層(52);
を含み、前記金または金系合金層(60)が前記第1の冶金積層(46)に冶金的に接合されており、
前記第2の冶金積層(70)が、
前記ヒートシンク(28)の第1の面に冶金的に接合された第2のチタン接着層(76);
前記第2のチタン接着層(76)に冶金的に接合された、ニッケル、プラチナ、パラジウム、銅、クロム、またはそれらの合金からなる、第2の隔壁層(78);および
前記第2の隔壁層(78)に冶金的に接合されたシリコン、ゲルマニウム、またはスズからなり、前記金または金系合金層(60)に冶金的に接合された、第2の金包含層(80);を含み、
前記第2の冶金接合層(36)が、
前記補強リング(32)の上表面に冶金的に接合されたシリコン、ゲルマニウム、またはスズからなる、金の合金の第1の金属積層(62);および
前記第2の冶金接合層(36)の前記第1の金属積層(62)に冶金的に接合された、チタン、ニッケル、プラチナ、またはパラジウム、および金または金の合金層からなる第2の金属積層(90);
からなる、請求項1に記載のデバイス。 - フリップチップ集積回路デバイスを製造する方法であって、
上表面および下表面を有するパッケージ基板(12)の上表面上に集積回路ダイ(14)を配置するステップであって、前記上表面が内部領域および周辺領域を有し、前記集積回路ダイ(14)が前記パッケージ基板(12)と接触する第1の面と反対側の第2の面を有する、ステップ;
上表面および下表面を有する補強リング(32)を前記集積回路ダイ(14)の周辺に配置するステップであって、前記下表面を前記パッケージ基板(12)の周辺領域に接着することを含む、ステップ;
前記集積回路ダイ(14)の第2の面上に位置する第1の金属積層(46)上に、金系合金からなる第1の金属予備形成物(60)を形成するステップ;
前記補強リング(32)の上表面上に、金系合金からなる第2の金属予備形成物(62)を形成するステップ;
前記第1および第2の予備形成物(60、62)上にヒートシンク(28)を配置するステップ;
前記ヒートシンク(28)を、前記第1および第2予備形成物(60、62)を使用して、前記集積回路ダイ(14)および前記補強リング(32)に冶金的に接合するステップ;
前記ヒートシンク(28)の第1の面上に第2の金属積層(70)を形成するステップ;
前記ヒートシンク(28)の第1の面上に第3の金属積層(90)を形成するステップであって、前記第3の金属積層(90)は前記第2の金属積層(70)から離間している、ステップ;および
前記第1および第2金属予備形成物(60、62)ならびに前記第1、第2および第3金属積層(46、70、90)を融解することによって、前記ヒートシンク(28)を前記集積回路ダイ(14)に冶金的に接合する、ステップ;
からなり、
前記第1、第2、および第3金属積層(46、70、90)各々が、チタン接着層、ニッケル、プラチナ、またはパラジウムからなる隔壁層、および、シリコン、スズおよびゲルマニウムからなる群から選択される少なくとも1つの元素を含む金包含層からなる、
ことを特徴とする方法。 - 前記第1の金属積層(46)の前記チタン接着層が、前記集積回路ダイ(14)の前記第2の面に冶金的に接合され、前記第2および第3金属積層(70、90)の前記チタン接着層が、前記ヒートシンク(28)に冶金的に接合される、請求項3に記載の方法。
- 前記集積回路ダイ(14)の前記第1の面がシリコンからなり、前記ヒートシンク(28)を前記集積回路ダイ(14)に冶金的に接合するステップが、前記集積回路ダイ(14)の前記第1の面から前記第1金属予備形成物(60)へのシリコンの拡散を含み、それにより前記第1の金属予備形成物(60)が融解する温度を下げる、請求項3に記載の方法。
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