JP5136632B2 - 電子部品 - Google Patents
電子部品 Download PDFInfo
- Publication number
- JP5136632B2 JP5136632B2 JP2010278004A JP2010278004A JP5136632B2 JP 5136632 B2 JP5136632 B2 JP 5136632B2 JP 2010278004 A JP2010278004 A JP 2010278004A JP 2010278004 A JP2010278004 A JP 2010278004A JP 5136632 B2 JP5136632 B2 JP 5136632B2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor chip
- terminal
- electronic component
- wiring board
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000010410 layer Substances 0.000 claims description 153
- 239000004065 semiconductor Substances 0.000 claims description 106
- 239000011229 interlayer Substances 0.000 claims description 28
- 239000003990 capacitor Substances 0.000 claims description 5
- 239000002184 metal Substances 0.000 description 53
- 229910052751 metal Inorganic materials 0.000 description 53
- 239000011888 foil Substances 0.000 description 46
- 238000003475 lamination Methods 0.000 description 17
- 238000004519 manufacturing process Methods 0.000 description 12
- 239000011241 protective layer Substances 0.000 description 11
- 238000007789 sealing Methods 0.000 description 10
- 229920005989 resin Polymers 0.000 description 9
- 239000011347 resin Substances 0.000 description 9
- 230000015572 biosynthetic process Effects 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 6
- 229910000679 solder Inorganic materials 0.000 description 6
- 238000000059 patterning Methods 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 4
- 239000004020 conductor Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000011810 insulating material Substances 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 230000006378 damage Effects 0.000 description 3
- 239000011889 copper foil Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 229920001187 thermosetting polymer Polymers 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000012779 reinforcing material Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0213—Electrical arrangements not otherwise provided for
- H05K1/0216—Reduction of cross-talk, noise or electromagnetic interference
- H05K1/023—Reduction of cross-talk, noise or electromagnetic interference using auxiliary mounted passive components or auxiliary substances
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
- H01L21/486—Via connections through the substrate with or without pins
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- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49827—Via connections through the substrates, e.g. pins going through the substrate, coaxial cables
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- H01L23/538—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
- H01L23/5383—Multilayer substrates
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- H01L23/538—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
- H01L23/5389—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates the chips being integrally enclosed by the interconnect and support structures
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
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- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
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- H—ELECTRICITY
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/18—Printed circuits structurally associated with non-printed electric components
- H05K1/182—Printed circuits structurally associated with non-printed electric components associated with components mounted in the printed circuit board, e.g. insert mounted components [IMC]
- H05K1/185—Components encapsulated in the insulating substrate of the printed circuit or incorporated in internal layers of a multilayer circuit
- H05K1/186—Components encapsulated in the insulating substrate of the printed circuit or incorporated in internal layers of a multilayer circuit manufactured by mounting on or connecting to patterned circuits before or during embedding
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- H—ELECTRICITY
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/4038—Through-connections; Vertical interconnect access [VIA] connections
- H05K3/4053—Through-connections; Vertical interconnect access [VIA] connections by thick-film techniques
- H05K3/4069—Through-connections; Vertical interconnect access [VIA] connections by thick-film techniques for via connections in organic insulating substrates
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- H05K3/00—Apparatus or processes for manufacturing printed circuits
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- H05K3/4611—Manufacturing multilayer circuits by laminating two or more circuit boards
- H05K3/4614—Manufacturing multilayer circuits by laminating two or more circuit boards the electrical connections between the circuit boards being made during lamination
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- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/04105—Bonding areas formed on an encapsulation of the semiconductor or solid-state body, e.g. bonding areas on chip-scale packages
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- H01L2224/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
- H01L2224/23—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process
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- H01L2224/241—Disposition
- H01L2224/24151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/24153—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being arranged next to each other, e.g. on a common substrate
- H01L2224/24195—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being arranged next to each other, e.g. on a common substrate the item being a discrete passive component
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- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
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- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
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- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
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- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
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- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
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- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
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- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0213—Electrical arrangements not otherwise provided for
- H05K1/0216—Reduction of cross-talk, noise or electromagnetic interference
- H05K1/0218—Reduction of cross-talk, noise or electromagnetic interference by printed shielding conductors, ground planes or power plane
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- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/03—Conductive materials
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- H05K2201/0335—Layered conductors or foils
- H05K2201/0355—Metal foils
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- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10613—Details of electrical connections of non-printed components, e.g. special leads
- H05K2201/10621—Components characterised by their electrical contacts
- H05K2201/10636—Leadless chip, e.g. chip capacitor or resistor
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/06—Lamination
- H05K2203/061—Lamination of previously made multilayered subassemblies
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/06—Lamination
- H05K2203/063—Lamination of preperforated insulating layer
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- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
- H05K3/4647—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits by applying an insulating layer around previously made via studs
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Electromagnetism (AREA)
- Ceramic Engineering (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
Description
図1は、本発明の第1の実施形態における電子部品100を表す断面図である。電子部品100は、配線板110、半導体チップ120、受動部品130、封止層140、及び保護層150を有している。
脂の層である。
図4は、本発明の比較例に係る電子部品100Xを表す断面図である。図5は、半導体チップ120Xおよび受動部品130Xを上から見た状態を示す平面図である。電子部品100Xは、多層配線板110X、半導体チップ120X、受動部品130X、封止層140X、及び保護層150Xを有する。配線層L1X〜L6Xは、下方から上方に向けて順次に配置されており、それぞれが絶縁層111X〜115Xによって電気的に絶縁されている。なお、絶縁層111〜115は、樹脂等の絶縁材料で構成される層である。また、配線層L1X〜L6Xは、金属等の導電性材料のパターンで構成される配線を有する層である。配線層L1X〜L6X間は、導電性バンプ等の層間接続部B1X〜B5Xで電気的に接続されている。
以下に、電子部品100の製造方法を説明する。
電子部品100を製造するに際しては、最初に、受動部品130を内蔵する多層配線板110を作製する。このとき、多層配線板110は、上層部110A、中層部110B、下層部110Cに区分して作製する。そして、上層部110A、中層部110B、下層部110Cを合体することで多層配線板110が作製される。
上層部110Aは、絶縁層111、配線層L1、L2、受動部品130を有する。
配線層L1となる金属箔(例えば銅箔)21上に、層間接続部B1となる導電性バンプ22を形成する。導電性バンプ22は、例えば、導電性ペーストのスクリーン印刷により形成できる。導電性ペーストは、例えば、ペースト状樹脂の中に金属粒(銀、金、銅、半田など)を分散させ、揮発性の溶剤を混合させたものである。導電性ペーストをスクリーン印刷により金属箔21上に印刷し、ほぼ円錐形の導電性バンプ22を形成できる。
導電性バンプ22が形成された金属箔21に、絶縁層111とすべきプリプレグ23を積層する。即ち、金属箔21上にプリプレグ23を配置し、加圧する。プリプレグ23は、例えば、エポキシ樹脂のような硬化性樹脂をガラス繊維のような補強材に含浸させたものである。また、硬化する前には半硬化状態にあり、熱可塑性及び熱硬化性を有する。この積層の段階では、加熱しないことから、プリプレグ23は未硬化状態に保たれる。
金属箔21、プリプレグ23の積層体に、金属箔24を積層し、加圧した状態で加熱する。この結果、プリプレグ23が硬化して、絶縁層111となり、金属箔21、24と強固に接続される。また、導電性バンプ22(層間接続部B1)が金属箔21、24を電気的に接続する。
金属箔21、24がパターニングされ、配線層L1、L2が形成される。パターニングは、例えば、フォトレジストの塗布・露光によるマスクの形成、このマスクによる金属箔21、24のエッチングなど、により実行できる。
配線層L2上に受動部品130を配置し、固定する。
中層部110Bは、絶縁層112、一部の絶縁層113、配線層L3に対応する。
(1)金属箔31への導電性バンプ32の形成(図7(a))次に、層間接続部B3の一部となる金属箔(例えば銅箔)31上に、層間接続部B3の一部となる導電性バンプ32を形成する。
導電性バンプ32が形成された金属箔31に、絶縁層113の一部とすべきプリプレグ33を積層する。即ち、金属箔31上にプリプレグ23を配置し、加圧する。積層の結果、導電性バンプ32はプリプレグ33を貫通する。
金属箔31、プリプレグ33の積層体に、金属箔34を積層し、加圧した状態で加熱する。この結果、プリプレグ33が硬化して、絶縁層33Aとなり、金属箔31、34と強固に接続される。また、導電性バンプ32(層間接続部B3の一部)が金属箔31、34を電気的に接続する。絶縁層33Aおよび後述のプリプレグ49が絶縁層113に対応する。
金属箔31、34がパターニングされ、金属箔パターン31Aおよび配線層L3が形成される。金属箔パターン31A、導電性バンプ32、および後述の導電性バンプ48が層間接続部B3に対応する。
配線層L3上に、層間接続部B2となる導電性バンプ35を形成する。
配線層L3に、絶縁層112とすべきプリプレグ36を積層する。即ち、金属箔31上にプリプレグ36を配置し、加圧する。積層の結果、導電性バンプ35はプリプレグ36を貫通する。この積層の段階では、加熱しないことから、プリプレグ36は未硬化状態に保たれる。
金属箔31、プリプレグ33、金属箔34、プリプレグ36の積層体に貫通孔37を形成する。この貫通孔37は、受動部品130を収容するための空間となる。受動部品130がある程度厚い場合に、このような貫通孔37が必要となる。
下層部110Cは、絶縁層114、115、配線層L4〜L5を有する。
(1)配線層L6、絶縁層115、配線層L5の積層体の形成(図8(a))
次の工程により、配線層L6、絶縁層115、配線層L5の積層体を形成する。
1)金属箔41(配線層L6に対応)への導電性バンプ42(層間接続部B5に対応)
の形成
2)プリプレグ43の積層
3)金属箔44の積層、加熱
4)金属箔41、44のパターニング
この工程1)〜4)は、既述の図6(a)〜(d)及び図7(a)〜(d)に対応する工程と同様なので詳細な説明を省略する。
配線層L5上に、層間接続部B4となる導電性バンプ45を形成する。
導電性バンプ45が形成された配線層L5に、絶縁層114とすべきプリプレグ46を積層する。即ち、配線層L5上にプリプレグ46を配置し、加圧する。積層の結果、導電性バンプ45はプリプレグ46を貫通する。
プリプレグ46上に、金属箔47を積層し、加圧した状態で加熱する。この結果、プリプレグ46が硬化して、絶縁層114となり、配線層L5、金属箔47と強固に接続される。また、導電性バンプ45(層間接続部B4)が配線層L5、金属箔47を電気的に接続する。
金属箔47がパターニングされ、配線層L4が形成される。
配線層L4上に、層間接続部B3の一部となる導電性バンプ48を形成する。
導電性バンプ48が形成された配線層L4に、絶縁層113の一部とすべきプリプレグ49を積層する。即ち、配線層L4上にプリプレグ49を配置し、加圧する。積層の結果、導電性バンプ48はプリプレグ49を貫通する。
上層部110A、中層部110B、下層部110Cを接合する。すなわち、上層部110A、中層部110B、下層部110Cを積層し、圧力を掛けた状態で加熱する。このとき、上層部110Aは図6の状態とは上下が逆に配置される。
多層配線板110上に半導体チップ120を固定し、ワイヤWで多層配線板110と電気的に接続する。さらに、封止層140で半導体チップ120を封止し、保護層150で多層配線板110の下面を保護する。
図13は、本発明の第2の実施形態における電子部品200を示す断面図であり、図14は、図13に示す電子部品200の、受動部品230近傍を示す平面図である。
図15は本発明の第3の実施形態における電子部品300を表す断面図である。電子部品300は、多層配線板310、半導体チップ320、受動部品330a〜330d、保護層350a、350bを有する。
110,210,310 多層配線板
111〜115,211〜215,311〜315 絶縁層
L1〜L6、L21〜L25,L31〜L35 配線層
L2a,L2b,L4a,L4b,L22a,L22b,L35a
120,220,330 半導体チップ
121,221,321 入力端
122,222,322 出力端
130,230,330a〜330d 受動部品
131,231,331a 第1の端子
132,232,332a 第2の端子
140,240,350 封止層
150,250,350a,350b 保護層
Claims (8)
- 多層配線板と、
前記多層配線板の主面上又は内部に配置される半導体チップと、
前記多層配線板の内部に配置され、前記半導体チップの入力端及び出力端にそれぞれ接続される第1の端子及び第2の端子を有する受動部品とを具え、
前記多層配線板を構成する導電性部材が、その前記第1の端子及び前記第2の端子の少なくとも一方からの距離が、前記第1の端子及び第2の端子間の距離よりも小さくなるような位置に配置されてなることを特徴とする、電子部品。 - 前記多層配線板を構成する導電性部材は、前記第1の端子及び前記第2の端子からの距離が、前記第1の端子及び第2の端子間の距離よりも小さくなるような位置に配置されてなることを特徴とする、請求項1に記載の電子部品。
- 前記導電性部材は、グランドに接続されていることを特徴とする、請求項1又は2に記載の電子部品。
- 前記導電性部材は、前記多層配線板を構成する配線層であることを特徴とする、請求項1〜3のいずれか一に記載の電子部品。
- 前記導電性部材は、前記多層配線板を構成する層間接続部であることを特徴とする、請求項1〜3のいずれか一に記載の電子部品。
- 前記受動部品と前記半導体チップとは、相対向して配置されていることを特徴とする、請求項1〜5のいずれか一に記載の電子部品。
- 前記受動部品が、前記半導体チップに対する帰還素子であることを特徴とする、請求項1〜6のいずれか一に記載の電子部品。
- 前記受動部品は、インダクタ、キャパシタ、及び抵抗器から選ばれる少なくとも1つである ことを特徴とする請求項1〜7のいずれか一に記載の電子部品。
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US13/520,980 US9066422B2 (en) | 2010-01-08 | 2011-01-04 | Electronic component |
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PCT/JP2011/000002 WO2011083753A1 (ja) | 2010-01-08 | 2011-01-04 | 電子部品 |
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US9066422B2 (en) | 2015-06-23 |
US20120281379A1 (en) | 2012-11-08 |
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CN102726129A (zh) | 2012-10-10 |
TW201141329A (en) | 2011-11-16 |
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WO2011083753A1 (ja) | 2011-07-14 |
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