JP5121869B2 - 不揮発性半導体記憶装置の製造方法 - Google Patents
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- 239000004065 semiconductor Substances 0.000 title claims description 174
- 238000000034 method Methods 0.000 title claims description 90
- 238000004519 manufacturing process Methods 0.000 title claims description 37
- 229910052732 germanium Inorganic materials 0.000 claims description 110
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 109
- 238000003860 storage Methods 0.000 claims description 50
- 229910052710 silicon Inorganic materials 0.000 claims description 44
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 43
- 239000010703 silicon Substances 0.000 claims description 43
- 125000006850 spacer group Chemical group 0.000 claims description 41
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 36
- 230000008018 melting Effects 0.000 claims description 33
- 238000002844 melting Methods 0.000 claims description 33
- 238000010438 heat treatment Methods 0.000 claims description 30
- 239000011810 insulating material Substances 0.000 claims description 7
- 239000004020 conductor Substances 0.000 claims description 4
- 230000000149 penetrating effect Effects 0.000 claims description 4
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 3
- 229910000077 silane Inorganic materials 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 110
- 239000013078 crystal Substances 0.000 description 57
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 20
- 238000005229 chemical vapour deposition Methods 0.000 description 19
- 239000011229 interlayer Substances 0.000 description 18
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 18
- 229910052814 silicon oxide Inorganic materials 0.000 description 17
- 239000000758 substrate Substances 0.000 description 15
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 12
- 230000015572 biosynthetic process Effects 0.000 description 8
- 238000004891 communication Methods 0.000 description 8
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 8
- 230000001681 protective effect Effects 0.000 description 8
- 238000002425 crystallisation Methods 0.000 description 7
- 230000008025 crystallization Effects 0.000 description 7
- 238000005530 etching Methods 0.000 description 7
- 238000001459 lithography Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 229910052757 nitrogen Inorganic materials 0.000 description 6
- 229910052581 Si3N4 Inorganic materials 0.000 description 5
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 5
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 5
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000011159 matrix material Substances 0.000 description 4
- 238000001020 plasma etching Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- VLJQDHDVZJXNQL-UHFFFAOYSA-N 4-methyl-n-(oxomethylidene)benzenesulfonamide Chemical compound CC1=CC=C(S(=O)(=O)N=C=O)C=C1 VLJQDHDVZJXNQL-UHFFFAOYSA-N 0.000 description 1
- 229910019001 CoSi Inorganic materials 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910021193 La 2 O 3 Inorganic materials 0.000 description 1
- 229910005883 NiSi Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910019899 RuO Inorganic materials 0.000 description 1
- 229910020328 SiSn Inorganic materials 0.000 description 1
- 229910010037 TiAlN Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 229910008812 WSi Inorganic materials 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 238000004380 ashing Methods 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052949 galena Inorganic materials 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910021340 platinum monosilicide Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 1
- 239000011856 silicon-based particle Substances 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- VEDJZFSRVVQBIL-UHFFFAOYSA-N trisilane Chemical compound [SiH3][SiH2][SiH3] VEDJZFSRVVQBIL-UHFFFAOYSA-N 0.000 description 1
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/792—Field effect transistors with field effect produced by an insulated gate with charge trapping gate insulator, e.g. MNOS-memory transistors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66833—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a charge trapping gate insulator, e.g. MNOS transistors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/792—Field effect transistors with field effect produced by an insulated gate with charge trapping gate insulator, e.g. MNOS-memory transistors
- H01L29/7926—Vertical transistors, i.e. transistors having source and drain not in the same horizontal plane
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- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/20—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels
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- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
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- H10B43/23—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels
- H10B43/27—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels the channels comprising vertical portions, e.g. U-shaped channels
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Description
図1−1は、本発明の実施の形態による不揮発性半導体記憶装置の構造の一例を模式的に示す斜視図であり、図1−2は、図1のメモリセル部の構造を詳細に示す斜視図である。不揮発性半導体記憶装置1は、主として、メモリセル部12、ワード線駆動回路13、ソース側選択ゲート線駆動回路14、ドレイン側選択ゲート線駆動回路15、センスアンプ16、ソース線駆動回路17、バックゲートトランジスタ駆動回路18、ワード線19、ソース側選択ゲート線20、ドレイン側選択ゲート線21、ビット線22、ソース線23およびバックゲート線24などを有している。
第2の実施の形態では、第1の実施の形態の図2に示される構造の不揮発性半導体記憶装置の他の製造方法について説明する。図4−1〜図4−2は、第2の実施の形態による不揮発性半導体記憶装置の製造方法の手順の一例を模式的に示す断面図である。これらの図では、ワード線方向に垂直な方向の断面を示している。
図5は、第3の実施の形態による不揮発性半導体記憶装置の構成の一例を模式的に示す断面図であり、ワード線方向に垂直な方向の断面を示している。第3の実施の形態では、所定の数のメモリセルトランジスタが直列に接続されたメモリブロックが、メモリセルトランジスタの積層方向に複数積層して形成される構造を有している。たとえば、図5に示される不揮発性半導体記憶装置は、半導体基板101上に、絶縁膜102と、平板状のバックゲート線103と、所定の数のメモリセルMCが高さ方向に複数層形成された構造の第1のメモリブロックMB1および第2のメモリブロックMB2と、選択トランジスタと、が形成される構造を有している。
図7は、第4の実施の形態による不揮発性半導体記憶装置の構成の一例を模式的に示す断面図であり、ワード線方向に垂直な方向の断面を示している。第4の実施の形態では、メモリセルトランジスタのチャネルを構成する半導体膜131Cが、中空の柱状の単結晶ゲルマニウム膜によって構成されており、中空の柱状の半導体膜131Cの内部を埋め込むようにシリコン酸化膜などの絶縁膜171が形成されている。
Claims (4)
- 柱状の半導体膜の側面に電荷蓄積層を介してゲート電極膜が形成されたトランジスタが前記柱状の半導体膜の高さ方向に複数直列接続されたメモリストリングスを複数有する不揮発性半導体記憶装置の製造方法において、
絶縁材料からなるスペーサ膜と導電性材料からなる電極膜とが交互に積層された積層膜を形成する第1の工程と、
前記積層膜を貫通する貫通孔と、前記積層膜の下部で所定の方向に隣接する2つの前記貫通孔間の下部を結ぶ連結孔と、を形成する第2の工程と、
前記貫通孔および前記連結孔の内部にゲルマニウム膜を形成する第3の工程と、
前記貫通孔に形成された前記ゲルマニウム膜の上面と接するようにシリコン膜を形成する第4の工程と、
ゲルマニウムの融点以上でシリコンの融点以下の温度で熱処理を行う第5の工程と、
を含むことを特徴とする不揮発性半導体記憶装置の製造方法。 - 前記第3の工程では、前記ゲルマニウム膜を形成する前に、高次シランを用いて前記貫通孔および前記連結孔の内部にアモルファスシリコン膜を堆積し、前記アモルファスシリコン膜上に前記ゲルマニウム膜を形成することを特徴とする請求項1に記載の不揮発性半導体記憶装置の製造方法。
- 柱状の半導体膜の側面に電荷蓄積層を介してゲート電極膜が形成されたトランジスタが前記柱状の半導体膜の高さ方向に複数直列接続されたメモリストリングスを複数有する不揮発性半導体記憶装置の製造方法において、
絶縁材料からなるスペーサ膜と導電性材料からなる電極膜とが交互に積層された積層膜を形成する第1の工程と、
前記積層膜を貫通する貫通孔と、前記積層膜の下部で所定の方向に隣接する2つの前記貫通孔間の下部を結ぶ連結孔と、を形成する第2の工程と、
前記貫通孔および前記連結孔の内面を被覆するとともに、シリコンとゲルマニウムの濃度比が周囲とは異なる領域が少なくとも1箇所存在するように、アモルファスシリコン膜を所定の厚さで形成し、続けて、前記アモルファスシリコン膜が形成された前記貫通孔および前記連結孔内にゲルマニウム膜を形成する第3の工程と、
ゲルマニウムの融点以上でシリコンの融点以下の温度で熱処理を行う第4の工程と、
を含むことを特徴とする不揮発性半導体記憶装置の製造方法。 - 前記第3の工程では、前記ゲルマニウム膜を前記貫通孔の内面を覆うように中空の柱状に形成した後、前記中空の柱状のゲルマニウム膜の内部に絶縁膜を埋め込むことを特徴とする請求項1〜3のいずれか1つに記載の不揮発性半導体記憶装置の製造方法。
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US12/886,135 US8415242B2 (en) | 2010-03-23 | 2010-09-20 | Nonvolatile semiconductor memory device and method of manufacturing the same |
US13/791,041 US8530957B2 (en) | 2010-03-23 | 2013-03-08 | Nonvolatile semiconductor memory device and method of manufacturing the same |
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Publication number | Priority date | Publication date | Assignee | Title |
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JP2007317874A (ja) | 2006-05-25 | 2007-12-06 | Toshiba Corp | 不揮発性半導体記憶装置 |
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JP5311851B2 (ja) * | 2007-03-23 | 2013-10-09 | 株式会社半導体エネルギー研究所 | 半導体装置 |
KR101226685B1 (ko) | 2007-11-08 | 2013-01-25 | 삼성전자주식회사 | 수직형 반도체 소자 및 그 제조 방법. |
JP2009135328A (ja) * | 2007-11-30 | 2009-06-18 | Toshiba Corp | 不揮発性半導体記憶装置 |
JP5142692B2 (ja) * | 2007-12-11 | 2013-02-13 | 株式会社東芝 | 不揮発性半導体記憶装置 |
JP2009200443A (ja) * | 2008-02-25 | 2009-09-03 | Toshiba Corp | 不揮発性半導体記憶装置、及びその製造方法 |
JP2009212280A (ja) * | 2008-03-04 | 2009-09-17 | Toshiba Corp | 不揮発性半導体記憶装置の製造方法 |
JP5112201B2 (ja) * | 2008-07-11 | 2013-01-09 | 株式会社東芝 | 不揮発性半導体記憶装置 |
JP5430890B2 (ja) * | 2008-07-25 | 2014-03-05 | 株式会社東芝 | 半導体記憶装置 |
JP5300419B2 (ja) * | 2008-11-05 | 2013-09-25 | 株式会社東芝 | 不揮発性半導体記憶装置及びその製造方法 |
JP5364342B2 (ja) * | 2008-11-10 | 2013-12-11 | 株式会社東芝 | 不揮発性半導体記憶装置、及びその製造方法 |
JP5388600B2 (ja) * | 2009-01-22 | 2014-01-15 | 株式会社東芝 | 不揮発性半導体記憶装置の製造方法 |
JP5330027B2 (ja) | 2009-02-25 | 2013-10-30 | 株式会社東芝 | 不揮発性半導体記憶装置、及びその製造方法 |
JP2011003833A (ja) * | 2009-06-22 | 2011-01-06 | Toshiba Corp | 不揮発性半導体記憶装置及びその製造方法 |
JP2011023610A (ja) * | 2009-07-16 | 2011-02-03 | Toshiba Corp | 半導体装置の製造方法 |
JP4975794B2 (ja) * | 2009-09-16 | 2012-07-11 | 株式会社東芝 | 不揮発性半導体記憶装置 |
JP2011198806A (ja) * | 2010-03-17 | 2011-10-06 | Toshiba Corp | 半導体記憶装置及びその製造方法 |
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2010
- 2010-03-23 JP JP2010066706A patent/JP5121869B2/ja not_active Expired - Fee Related
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