JP5115872B2 - 角度測定方法及び角度測定システム - Google Patents
角度測定方法及び角度測定システム Download PDFInfo
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- JP5115872B2 JP5115872B2 JP2010241173A JP2010241173A JP5115872B2 JP 5115872 B2 JP5115872 B2 JP 5115872B2 JP 2010241173 A JP2010241173 A JP 2010241173A JP 2010241173 A JP2010241173 A JP 2010241173A JP 5115872 B2 JP5115872 B2 JP 5115872B2
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- 238000000034 method Methods 0.000 title claims description 19
- 238000005259 measurement Methods 0.000 claims description 62
- 238000001514 detection method Methods 0.000 claims description 39
- 230000001105 regulatory effect Effects 0.000 claims description 9
- 238000000691 measurement method Methods 0.000 claims description 8
- 238000012937 correction Methods 0.000 claims description 4
- 238000006073 displacement reaction Methods 0.000 description 20
- 101100444142 Neurospora crassa (strain ATCC 24698 / 74-OR23-1A / CBS 708.71 / DSM 1257 / FGSC 987) dut-1 gene Proteins 0.000 description 16
- 238000010168 coupling process Methods 0.000 description 16
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- 230000008878 coupling Effects 0.000 description 10
- 238000005859 coupling reaction Methods 0.000 description 10
- 230000003287 optical effect Effects 0.000 description 10
- 238000012360 testing method Methods 0.000 description 9
- 238000012545 processing Methods 0.000 description 8
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- 230000006872 improvement Effects 0.000 description 2
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- 230000005540 biological transmission Effects 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/24471—Error correction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/24471—Error correction
- G01D5/24485—Error correction using other sensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Description
図9は、第2実施形態における角度測定システムの一例の全体構成図である。図9にて、図1〜8に示した第1実施形態と同じ構成要素には同じ符号を付した。以下では、第1実施形態で説明した内容については説明を省略し、主として第1実施形態と異なる点を説明する。
Claims (5)
- エンコーダ本体と、前記エンコーダ本体に対し回転自在な回転軸とを有し、前記エンコーダ本体に対する前記回転軸の相対的な回転角度を検出するロータリエンコーダと、
前記エンコーダ本体の前記回転軸周りの絶対的な回転角度を一定範囲内に規制する規制部材と、
前記ロータリエンコーダによる相対的な回転角度の検出と同時に前記エンコーダ本体の前記回転軸周りの絶対的な回転角度を検出する絶対角度検出手段と、
前記ロータリエンコーダが検出した回転角度を、前記絶対角度検出手段で検出した回転角度に基づいて補正する補正手段と、
を備えたことを特徴とする角度測定システム。 - 前記絶対角度検出手段は、前記エンコーダ本体に対して非接触で前記回転角度を検出する非接触角度検出手段であることを特徴とする請求項1に記載の角度測定システム。
- 前記非接触角度検出手段は、レーザ干渉計を用いたものであることを特徴とする請求項2に記載の角度測定システム。
- 前記規制部材は、前記エンコーダ本体の基準位置を鉛直下方に付勢する錘部材からなることを特徴とする請求項1〜3のいずれか1項に記載の角度測定システム。
- エンコーダ本体と、前記エンコーダ本体に対し回転自在な回転軸とを有し、前記エンコーダ本体に対する前記回転軸の相対的な回転角度を検出するロータリエンコーダを用いる角度測定方法であって、
前記エンコーダ本体の前記回転軸周りの絶対的な回転角度を一定範囲内に規制し、
前記ロータリエンコーダによる相対的な回転角度の検出と同時に前記エンコーダ本体の前記回転軸周りの絶対的な回転角度を検出し、
前記ロータリエンコーダが検出した回転角度を、前記検出した絶対的な回転角度に基づいて補正することを特徴とする角度測定方法。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010241173A JP5115872B2 (ja) | 2010-10-27 | 2010-10-27 | 角度測定方法及び角度測定システム |
EP16181443.9A EP3104130A1 (en) | 2010-10-27 | 2011-10-26 | Angle measuring method and angle measuring system |
EP15152832.0A EP2899513B1 (en) | 2010-10-27 | 2011-10-26 | Rotary encoder with laser interferometer for determining position changes of the stator |
EP17163605.3A EP3214414A3 (en) | 2010-10-27 | 2011-10-26 | Rotary encoder with laser interferometer for determining position changes of the stator |
EP15156327.7A EP2905583B1 (en) | 2010-10-27 | 2011-10-26 | Angle measuring method and angle measuring system |
EP11186603.4A EP2447677B1 (en) | 2010-10-27 | 2011-10-26 | Angle measuring method and angle measuring system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010241173A JP5115872B2 (ja) | 2010-10-27 | 2010-10-27 | 角度測定方法及び角度測定システム |
Related Child Applications (1)
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JP2012230847A Division JP5187607B2 (ja) | 2012-10-18 | 2012-10-18 | 角度測定方法及び角度測定システム |
Publications (3)
Publication Number | Publication Date |
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JP2012093252A JP2012093252A (ja) | 2012-05-17 |
JP2012093252A5 JP2012093252A5 (ja) | 2012-09-06 |
JP5115872B2 true JP5115872B2 (ja) | 2013-01-09 |
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JP2010241173A Active JP5115872B2 (ja) | 2010-10-27 | 2010-10-27 | 角度測定方法及び角度測定システム |
Country Status (2)
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EP (5) | EP3104130A1 (ja) |
JP (1) | JP5115872B2 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013122037A1 (ja) * | 2012-02-15 | 2013-08-22 | 株式会社東京精密 | 回転角度測定装置及び回転角度測定方法 |
JP6090656B2 (ja) * | 2012-02-15 | 2017-03-08 | 株式会社東京精密 | 回転角度測定装置及び回転角度測定方法 |
US9134145B2 (en) | 2013-04-03 | 2015-09-15 | Tokyo Seimitsu Co., Ltd. | Angle measuring method and angle measuring system |
KR102377478B1 (ko) * | 2016-05-03 | 2022-03-21 | 아르게스 게엠베하 | 광학 회전각 측정 시스템 |
JP7034822B2 (ja) * | 2018-05-01 | 2022-03-14 | 新東エスプレシジョン株式会社 | 角度測定システム |
CN113639674B (zh) * | 2021-10-13 | 2022-01-14 | 成都宏明电子股份有限公司 | 基于光折射原理的非接触式旋转电位器 |
Family Cites Families (9)
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SE396108B (sv) * | 1975-03-12 | 1977-09-05 | Akermans Verkstad Ab | Vinkelmetdon for grevarmen vid grevmaskiner |
GB9013390D0 (en) * | 1990-06-15 | 1990-08-08 | Renishaw Plc | Method and apparatus for measurement of angular displacement |
GB9119304D0 (en) * | 1991-09-10 | 1991-10-23 | Renishaw Transducer Syst | Method and apparatus for calibration of angular displacement |
US5508806A (en) * | 1995-02-13 | 1996-04-16 | Hewlett-Packard Company | Apparatus and method for making rotary calibrations of a machine tool table |
JP3698796B2 (ja) * | 1996-03-12 | 2005-09-21 | オリンパス株式会社 | 角度検出装置、及び頭部搭載型映像表示装置 |
JP3192992B2 (ja) * | 1996-08-27 | 2001-07-30 | 株式会社東京精密 | 工作機械の角度割出精度測定方法及びシステム |
JP2005292037A (ja) * | 2004-04-02 | 2005-10-20 | Tokyo Seimitsu Co Ltd | 角度測定装置 |
NL1033040C2 (nl) * | 2006-12-12 | 2008-06-18 | Iac Geometrische Ingenieurs B | Een methode voor de kalibratie van de hoek waarover een object geroteerd is om een rotatie-as zoals van een rondtafel. |
WO2013122037A1 (ja) * | 2012-02-15 | 2013-08-22 | 株式会社東京精密 | 回転角度測定装置及び回転角度測定方法 |
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2010
- 2010-10-27 JP JP2010241173A patent/JP5115872B2/ja active Active
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2011
- 2011-10-26 EP EP16181443.9A patent/EP3104130A1/en not_active Withdrawn
- 2011-10-26 EP EP15156327.7A patent/EP2905583B1/en active Active
- 2011-10-26 EP EP17163605.3A patent/EP3214414A3/en not_active Withdrawn
- 2011-10-26 EP EP15152832.0A patent/EP2899513B1/en active Active
- 2011-10-26 EP EP11186603.4A patent/EP2447677B1/en active Active
Also Published As
Publication number | Publication date |
---|---|
EP3214414A2 (en) | 2017-09-06 |
EP3104130A1 (en) | 2016-12-14 |
EP2447677A2 (en) | 2012-05-02 |
EP2905583B1 (en) | 2016-12-07 |
EP2899513B1 (en) | 2017-05-10 |
JP2012093252A (ja) | 2012-05-17 |
EP2905583A1 (en) | 2015-08-12 |
EP2899513A1 (en) | 2015-07-29 |
EP2447677A3 (en) | 2014-05-21 |
EP2447677B1 (en) | 2016-12-07 |
EP3214414A3 (en) | 2017-09-20 |
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