JP5048795B2 - 分光装置 - Google Patents
分光装置 Download PDFInfo
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- JP5048795B2 JP5048795B2 JP2010011012A JP2010011012A JP5048795B2 JP 5048795 B2 JP5048795 B2 JP 5048795B2 JP 2010011012 A JP2010011012 A JP 2010011012A JP 2010011012 A JP2010011012 A JP 2010011012A JP 5048795 B2 JP5048795 B2 JP 5048795B2
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- 239000010409 thin film Substances 0.000 claims description 41
- 230000002093 peripheral effect Effects 0.000 claims description 7
- 230000001154 acute effect Effects 0.000 claims description 2
- 230000010287 polarization Effects 0.000 description 65
- 230000005540 biological transmission Effects 0.000 description 23
- 230000003287 optical effect Effects 0.000 description 18
- 230000007246 mechanism Effects 0.000 description 15
- 230000000052 comparative effect Effects 0.000 description 13
- 238000006243 chemical reaction Methods 0.000 description 9
- 238000000926 separation method Methods 0.000 description 9
- 238000001514 detection method Methods 0.000 description 8
- 238000002834 transmittance Methods 0.000 description 8
- 230000004048 modification Effects 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 238000001917 fluorescence detection Methods 0.000 description 4
- 239000013307 optical fiber Substances 0.000 description 4
- 230000005284 excitation Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/007—Optical devices or arrangements for the control of light using movable or deformable optical elements the movable or deformable optical element controlling the colour, i.e. a spectral characteristic, of the light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0235—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using means for replacing an element by another, for replacing a filter or a grating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
- G01J3/32—Investigating bands of a spectrum in sequence by a single detector
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J2003/1226—Interference filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J2003/1226—Interference filters
- G01J2003/1243—Pivoting IF or other position variation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N2021/6417—Spectrofluorimetric devices
- G01N2021/6419—Excitation at two or more wavelengths
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/645—Specially adapted constructive features of fluorimeters
- G01N2021/6463—Optics
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/645—Specially adapted constructive features of fluorimeters
- G01N2021/6463—Optics
- G01N2021/6471—Special filters, filter wheel
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Life Sciences & Earth Sciences (AREA)
- Astronomy & Astrophysics (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Optics & Photonics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Spectrometry And Color Measurement (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Filters (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Description
図1は、本発明の第1実施形態に係る光源装置の概略構成を示す平面図である。同図に示す光源装置1は、半導体検査装置等の各種検査装置において、特定の発光波長域(例えば、近赤外波長域)を有する光源として用いられる装置である。この光源装置1は、光源からの光のうちの特定の波長域を選択する分光装置の一態様であり、放熱機構としてのヒートシンク2上に取り付けられた光源3と、その光源3から照射された光が入射されて、その光を変換して光ファイバ4を経由して外部出力する光変換光学系5と、光源3及び光変換光学系5を制御する制御系30とから構成されている。ここで、図1においては、紙面上において光源3の光軸に沿った方向にX軸をとり、紙面上においてX軸に垂直な方向に沿ってY軸、X軸及びY軸に垂直な方向に沿ってZ軸をとるものとする。
その中心点15a〜15dと回転中心C1とを結んだ線に対する光入射面12および光出射面13の傾斜角を微調整するためにシャフト部材やネジ部材等の回転軸部材18a〜18dが取り付けられていてもよい。
更にこの場合に、波長選択素子7の透過率を適宜選択して複数段配置し、それに対応して波長選択機構を設けることで、多波長出力を得ることも可能になる。
次に、本発明の第2実施形態について説明する。図6は、本発明の第2実施形態に係る光源装置の概略構成を示す平面図である。同図に示す光源装置101と第1実施形態にかかる光源装置1との相違点は、フィルタ回転体8と同一構成を有する2つのフィルタ回転体8A,8Bを用いて、光L2から分離された2つの直線偏光成分L4,L5を、それぞれP偏光としてフィルタ回転体8A,8Bを透過させる構成を有する点である。
図8は、本発明の第3実施形態に係る光源装置の概略構成を示す平面図である。同図に示す光源装置201と第2実施形態にかかる光源装置101との相違点は、偏光成分L4,L5を、それぞれS偏光として2つのフィルタ回転体8C,8Dを透過させる構成を有する点である。
Claims (6)
- 光源からの光を、前記光の入射角に応じた波長範囲で選択的に透過させるn個(nは3以上の整数)の誘電体薄膜干渉フィルタと、
前記誘電体薄膜干渉フィルタが主面上に立設され、前記主面に沿って所定点の周りを回転可能にされた平板状の回転支持部材とを備える分光装置であって、
前記n個の誘電体薄膜干渉フィルタは、それぞれ、光入射側或いは光出射側の端面が、前記回転支持部材の前記主面上の前記所定点と前記主面上の該誘電体薄膜干渉フィルタの中心点とを結ぶ線に対して鋭角に傾斜するように配置されており、
前記回転支持部材は、前記光が前記主面上の前記所定点から前記主面の周縁部側に外れた位置に入射するように配置されている、
ことを特徴とする分光装置。 - 前記n個の誘電体薄膜干渉フィルタは、前記主面と前記端面とで形成されるそれぞれの交線が1つの内接円に接するように搭載されている、
ことを特徴とする請求項1記載の分光装置。 - 前記n個の誘電体薄膜干渉フィルタは、それぞれ、前記主面上において前記内接円の外側に位置するように配置されている、
ことを特徴とする請求項2記載の分光装置。 - 前記n個の誘電体薄膜干渉フィルタは、前記主面上の前記所定点と前記主面上の該誘電体薄膜干渉フィルタの中心点とを結ぶ線が互いに等角度を成すように配置されている、
ことを特徴とする請求項1〜3のいずれか1項に記載の分光装置。 - 前記n個の誘電体薄膜干渉フィルタは、前記主面上において前記所定点を中心にしてn回回転対称となるように配置されている、
ことを特徴とする請求項4記載の分光装置。 - 前記n個の誘電体薄膜干渉フィルタには、それぞれ、前記主面上の前記所定点と前記主面上の該誘電体薄膜干渉フィルタの中心点とを結ぶ線に対する傾斜角を調整するための回転軸部材が取り付けられている、
ことを特徴とする請求項1〜5のいずれか1項に記載の分光装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010011012A JP5048795B2 (ja) | 2010-01-21 | 2010-01-21 | 分光装置 |
PCT/JP2011/050122 WO2011089931A1 (ja) | 2010-01-21 | 2011-01-06 | 分光装置 |
US13/574,103 US9488827B2 (en) | 2010-01-21 | 2011-01-06 | Spectral device |
DE112011100321.8T DE112011100321B4 (de) | 2010-01-21 | 2011-01-06 | Spektralvorrichtung |
CN201180006885.0A CN102713543B (zh) | 2010-01-21 | 2011-01-06 | 分光装置 |
TW100101961A TWI495855B (zh) | 2010-01-21 | 2011-01-19 | A spectroscopic device, a light detection device and a light detection system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010011012A JP5048795B2 (ja) | 2010-01-21 | 2010-01-21 | 分光装置 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012160662A Division JP5646555B2 (ja) | 2012-07-19 | 2012-07-19 | 光検出装置及び光検出システム |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011149799A JP2011149799A (ja) | 2011-08-04 |
JP5048795B2 true JP5048795B2 (ja) | 2012-10-17 |
Family
ID=44306735
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010011012A Active JP5048795B2 (ja) | 2010-01-21 | 2010-01-21 | 分光装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US9488827B2 (ja) |
JP (1) | JP5048795B2 (ja) |
CN (1) | CN102713543B (ja) |
DE (1) | DE112011100321B4 (ja) |
TW (1) | TWI495855B (ja) |
WO (1) | WO2011089931A1 (ja) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
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JP5502623B2 (ja) * | 2010-07-07 | 2014-05-28 | 浜松ホトニクス株式会社 | 分光装置 |
JP5759117B2 (ja) * | 2010-07-07 | 2015-08-05 | 浜松ホトニクス株式会社 | 分光装置 |
DE112012006501B4 (de) * | 2012-06-11 | 2016-04-28 | Protectlife International Biomedical Inc. | Biochemisches Analysesystem und Lichtmodul desselben |
TWI648561B (zh) * | 2012-07-16 | 2019-01-21 | 美商唯亞威方案公司 | 光學濾波器及感測器系統 |
JP5987573B2 (ja) * | 2012-09-12 | 2016-09-07 | セイコーエプソン株式会社 | 光学モジュール、電子機器、及び駆動方法 |
JP2014095594A (ja) * | 2012-11-08 | 2014-05-22 | Yokogawa Electric Corp | 分光装置および分光用光源 |
US9523850B2 (en) * | 2014-02-16 | 2016-12-20 | Apple Inc. | Beam scanning using an interference filter as a turning mirror |
EP3165904B1 (en) * | 2014-07-03 | 2019-11-13 | Murata Manufacturing Co., Ltd. | Gas concentration measurement device |
WO2016002468A1 (ja) * | 2014-07-03 | 2016-01-07 | 株式会社村田製作所 | ガス濃度測定装置 |
CN104266756B (zh) * | 2014-10-10 | 2016-05-25 | 中国电子科技集团公司第四十一研究所 | 一种宽波段红外扫描分光装置及校准方法 |
CN104898268B (zh) * | 2015-06-02 | 2017-06-23 | 深圳市华星光电技术有限公司 | 一种滤波组件及机台 |
CN108139270B (zh) * | 2015-10-02 | 2021-06-08 | 浜松光子学株式会社 | 光检测装置 |
CN105891804A (zh) * | 2016-06-27 | 2016-08-24 | 北方民族大学 | 一种多波长拉曼偏振激光分光***及雷达*** |
CN106770146B (zh) * | 2017-03-13 | 2020-01-14 | 西安理工大学 | 一种生物气溶胶本征荧光峰值波长检测***及其检测方法 |
WO2020179628A1 (ja) * | 2019-03-04 | 2020-09-10 | コニカミノルタ株式会社 | 分光装置 |
CN110068540B (zh) * | 2019-05-17 | 2022-04-22 | 重庆科技学院 | 基于气体成份浓度检测***的检测方法 |
US11606147B1 (en) * | 2022-06-06 | 2023-03-14 | Bae Systems Information And Electronic Systems Integration Inc. | Frequency and bandwidth agile optical bench |
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-
2010
- 2010-01-21 JP JP2010011012A patent/JP5048795B2/ja active Active
-
2011
- 2011-01-06 US US13/574,103 patent/US9488827B2/en active Active
- 2011-01-06 DE DE112011100321.8T patent/DE112011100321B4/de active Active
- 2011-01-06 CN CN201180006885.0A patent/CN102713543B/zh active Active
- 2011-01-06 WO PCT/JP2011/050122 patent/WO2011089931A1/ja active Application Filing
- 2011-01-19 TW TW100101961A patent/TWI495855B/zh active
Also Published As
Publication number | Publication date |
---|---|
US20120314295A1 (en) | 2012-12-13 |
CN102713543A (zh) | 2012-10-03 |
DE112011100321T5 (de) | 2012-10-31 |
WO2011089931A1 (ja) | 2011-07-28 |
TW201142254A (en) | 2011-12-01 |
US9488827B2 (en) | 2016-11-08 |
TWI495855B (zh) | 2015-08-11 |
JP2011149799A (ja) | 2011-08-04 |
CN102713543B (zh) | 2015-03-25 |
DE112011100321B4 (de) | 2023-05-11 |
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