JPS55149023A - Infrared ray spectroscopic method - Google Patents

Infrared ray spectroscopic method

Info

Publication number
JPS55149023A
JPS55149023A JP5746979A JP5746979A JPS55149023A JP S55149023 A JPS55149023 A JP S55149023A JP 5746979 A JP5746979 A JP 5746979A JP 5746979 A JP5746979 A JP 5746979A JP S55149023 A JPS55149023 A JP S55149023A
Authority
JP
Japan
Prior art keywords
filter
infrared ray
light
single color
color light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5746979A
Other languages
Japanese (ja)
Inventor
Fumitaka Yasujima
Shingo Ishikawa
Naoyuki Shiratori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asahi Dow Ltd
Asahi Chemical Industry Co Ltd
Original Assignee
Asahi Dow Ltd
Asahi Chemical Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Dow Ltd, Asahi Chemical Industry Co Ltd filed Critical Asahi Dow Ltd
Priority to JP5746979A priority Critical patent/JPS55149023A/en
Publication of JPS55149023A publication Critical patent/JPS55149023A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)

Abstract

PURPOSE:To obtain the infrared ray single color light of plural different wavelengths suited for measurement of the thicknesses of films, etc. by letting nonspectral infrared rays enter one sheet of interference filter and changing the incident angle thereof. CONSTITUTION:In the measurement of an infrared ray film thickness meter, moisture meter, etc., the light from the light source 14 of the projecting part 11 of, e.g., thickness meter, is entered to an interference filter 16 as parallel luminous flux by a lens system 15. The filter 16 is rotated and vibrated continuously or within a fixed angle together with a wavelength detecting disc 17 by a motor or rotation-vibrating device 18. The disc 17 monitors the incident angle of the incident light to the filter 16. With the small hole 19 of the disc 17 inbetween, a light emitting diode 21 and photo transistor 22 are provided and the single color light of infrared ray wavelength passing the small hole 19 is detected. The infrared ray single color light from the filter 16 passes a visible light cutoff filter 23, then goes through a film thickness measuring sample 23 out through the visible light cutoff filter 24 of the photo detecting part 24 and is focused by a lens system 25 at a detector 26, by which it is detected as an electric signal. In this way, the infrared ray single color light of discontinuous or continuous different wavelengths is obtained by the use of one sheet of the interference filter.
JP5746979A 1979-05-09 1979-05-09 Infrared ray spectroscopic method Pending JPS55149023A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5746979A JPS55149023A (en) 1979-05-09 1979-05-09 Infrared ray spectroscopic method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5746979A JPS55149023A (en) 1979-05-09 1979-05-09 Infrared ray spectroscopic method

Publications (1)

Publication Number Publication Date
JPS55149023A true JPS55149023A (en) 1980-11-20

Family

ID=13056542

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5746979A Pending JPS55149023A (en) 1979-05-09 1979-05-09 Infrared ray spectroscopic method

Country Status (1)

Country Link
JP (1) JPS55149023A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6222034A (en) * 1985-07-22 1987-01-30 Koshin Kogaku:Kk Interference filter spectral device
JPS63500267A (en) * 1985-07-04 1988-01-28 カマン　カ−ル Method and device for improving separation characteristics in spectroscopic measurements
JPS63215925A (en) * 1987-03-04 1988-09-08 Shimadzu Corp Etalon spectroscope
WO2011089931A1 (en) * 2010-01-21 2011-07-28 浜松ホトニクス株式会社 Spectral device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63500267A (en) * 1985-07-04 1988-01-28 カマン　カ−ル Method and device for improving separation characteristics in spectroscopic measurements
JPS6222034A (en) * 1985-07-22 1987-01-30 Koshin Kogaku:Kk Interference filter spectral device
JPS63215925A (en) * 1987-03-04 1988-09-08 Shimadzu Corp Etalon spectroscope
WO2011089931A1 (en) * 2010-01-21 2011-07-28 浜松ホトニクス株式会社 Spectral device
US9488827B2 (en) 2010-01-21 2016-11-08 Hamamatsu Photonics K.K. Spectral device

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