JP4913640B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
- Publication number
- JP4913640B2 JP4913640B2 JP2007070396A JP2007070396A JP4913640B2 JP 4913640 B2 JP4913640 B2 JP 4913640B2 JP 2007070396 A JP2007070396 A JP 2007070396A JP 2007070396 A JP2007070396 A JP 2007070396A JP 4913640 B2 JP4913640 B2 JP 4913640B2
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- chip
- memory chip
- pad
- memory
- pads
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Description
このうち、メモリチップをリードフレームのリード端子に接続する技術として、特許文献1〜3に記載のものがある。
特許文献4(特開平1−235264号公報)には、チップの角部に、プリント基板のチップイネーブル端子CEにボンディングされる端子が配置された例が示されている。
図13および図14に示した半導体装置200においては、チップの端子つまり電極パッドがすべて一辺に配置されている。チップセレクト(以下、「CS」ともいう。)端子として機能するパッドの配置を考慮していない。
第一メモリチップ203a、第二メモリチップ203bおよび第三メモリチップ203cは、同じ平面形状の矩形であって、矩形の一辺に沿う一列にのみ、電極パッドが配置されている。チップは、各チップの電極パッドの形成領域が露出するように階段状にずらして積層されている。各チップに設けられた電極パッドのうち、アドレスまたはデータ端子として機能するパッドについては、チップ間で電極パッド同士をワイヤボンディングする(たとえば、ワイヤ217、ワイヤ219)。
実装基板の一方の面に、第一および第二メモリチップが下からこの順に搭載され、
前記第一および第二メモリチップが、いずれも、矩形の平面形状を有し、かつ、前記矩形の一辺に沿って一列にのみ配置された複数の電極パッドを含み、
前記第二メモリチップの前記電極パッドの列が、前記第一メモリチップの前記電極パッドの列に平行に配置され、
前記複数の電極パッドがチップセレクトパッドを含み、前記チップセレクトパッドは、前記電極パッドの列の端部にのみ配置され、
前記実装基板の前記一方の面に、前記第一メモリチップの前記一辺に沿って一列に配置された複数の第一ステッチと、前記チップセレクトパッドの側で前記一辺に隣接する辺に沿って一列に配置された複数の第二ステッチと、が設けられ、
前記第一メモリチップの前記複数の電極パッドのうち、前記チップセレクトパッド以外のパッドが、前記第一ステッチにワイヤボンディングされるとともに、前記第一および第二メモリチップの前記チップセレクトパッドが、それぞれ異なる前記第二ステッチにワイヤボンディングされ、
前記第二メモリチップの前記チップセレクトパッド以外のパッドが、前記第一メモリチップの前記チップセレクトパッド以外のパッドを介して、前記第一ステッチに接続する、半導体装置が提供される。
また、実装基板には、異なる方向に一列ずつ配置されたステッチが設けられている。具体的には、第一メモリチップの上記一辺に沿って配置された第一ステッチと、チップセレクトパッド側で該一辺に隣接する辺に沿って配置された第二ステッチである。
そして、各メモリチップのチップセレクトパッドを、異なる第二ステッチにワイヤボンディングし、チップセレクトパッド以外の電極パッドを第一パッドにワイヤボンディングする。
図1は、本実施形態における半導体パッケージの構成を示す斜視図である。図2は、図1のA−A’断面図であり、図3は、図1のB−B’断面図である。また、図4は、図1に示した半導体パッケージ100の裏面を示す平面図である。
まず、矩形の一辺に沿って一列の第一ステッチ109が設けられ、この辺に隣接する辺に沿って一列の第二ステッチ111が設けられた実装基板101を準備する。また、矩形の一辺に沿って一列にのみ電極パッドが配置された第一メモリチップ103a〜第三メモリチップ103cを準備する。本実施形態では、第一メモリチップ103a〜第三メモリチップ103cは、いずれも、同じ平面形状であり、電極パッドの数および配置も同じである。
図5および図6に示したように、実装基板101の上部に接して第一メモリチップ103aを配置する。このとき、実装基板101の第一ステッチ109に隣接して第一メモリチップ103aの電極パッド列を配置する。コントロール、アドレスまたはデータパッド113aについては、隣接する第一ステッチ109にそれぞれワイヤボンディングする。また、第一メモリチップ103aの電極パッドのうち、チップセレクトパッド121aについては、隣接する第二ステッチ111aにワイヤボンディングする。
本実施形態においては、メモリチップ103の矩形の一辺に沿ってのみ、一列に電極パッドを配置し、一辺に並べられた端子(電極パッド)列の一番端にチップセレクト端子(チップセレクトパッド)を配置している。
また、実装基板101については、電極パッドの設けられた辺に沿って第一ステッチ109を一列にのみ配置し、かつ、チップセレクト端子が配置された側の隣接辺に沿って一列に第二ステッチ111を配置している。
図7は、本実施形態における半導体パッケージの電極パッドの配置例を示す平面図である。図7においては、第一メモリチップ103aおよび第二メモリチップ103bのそれぞれの一辺に設けられた電極パッドの数が等しく、チップセレクトパッド同士(CS1、CS2)が隣接して配置されるとともに、コントロール、アドレスまたはデータパッド同士が隣接して配置されている。
(第二の実施形態)
図8は、本実施形態における半導体パッケージの構成を示す断面図である。図8に示した半導体パッケージ110の基本構成は、第一の実施形態に記載の半導体パッケージ100(図2)と同様であるが、上層のチップほど、第二ステッチ111に隣接する辺、つまり電極パッドが形成された辺の隣接辺の長さが小さくなっている点が異なる。
また、本実施形態においては、平面視において、各チップの電極パッドが配置された辺に対向する辺が、すべて重なっている。このため、第一の実施形態に記載の半導体パッケージ(図1)に比べて、実装面積をより一層小さくすることができるため、パッケージサイズをさらに小さくすることができる。
図10は、本実施形態における半導体パッケージの構成を示す平面図であり、図11は、図10のA−A’断面図である。
そして、実装基板101には、第一チップセレクトパッド131a、第二チップセレクトパッド133b、第一チップセレクトパッド131cおよび第二チップセレクトパッド133dが配置された辺に沿って、第二ステッチ111a〜第二ステッチ111dが一列に配置されている。
コントロール、アドレスまたはデータパッド113aおよびコントロール、アドレスまたはデータパッド113cは、それぞれ、第一ワイヤ115および第一ワイヤ127により、共通の第一ステッチ109aに接続する。また、コントロール、アドレスまたはデータパッド113bおよびコントロール、アドレスまたはデータパッド113dは、それぞれ、第一ワイヤ125および第一ワイヤ129により、共通の第一ステッチ109bに接続する。
101 実装基板
103 メモリチップ
103a 第一メモリチップ
103b 第二メモリチップ
103c 第三メモリチップ
103d 第四メモリチップ
105 封止樹脂
107 バンプ電極
109 第一ステッチ
109a 第一ステッチ
109b 第一ステッチ
110 半導体パッケージ
111 第二ステッチ
111a 第二ステッチ
111b 第二ステッチ
111c 第二ステッチ
111d 第二ステッチ
113a コントロール、アドレスまたはデータパッド
113b コントロール、アドレスまたはデータパッド
113c コントロール、アドレスまたはデータパッド
113d コントロール、アドレスまたはデータパッド
115 第一ワイヤ
117 第一ワイヤ
119 第一ワイヤ
120 半導体パッケージ
121a チップセレクトパッド
121b チップセレクトパッド
121c チップセレクトパッド
123a 第二ワイヤ
123b 第二ワイヤ
123c 第二ワイヤ
123d 第二ワイヤ
125 第一ワイヤ
127 第一ワイヤ
129 第一ワイヤ
131a 第一チップセレクトパッド
131b 第一チップセレクトパッド
131c 第一チップセレクトパッド
131d 第一チップセレクトパッド
133a 第二チップセレクトパッド
133b 第二チップセレクトパッド
133c 第二チップセレクトパッド
133d 第二チップセレクトパッド
200 半導体パッケージ
201 実装基板
203a 第一メモリチップ
203b 第二メモリチップ
203c 第三メモリチップ
205 封止樹脂
207 バンプ電極
211a ステッチ
211b ステッチ
211c ステッチ
217 ワイヤ
219 ワイヤ
221a CSパッド
221b CSパッド
221c CSパッド
231 ワイヤ
233 ワイヤ
235 ワイヤ
Claims (10)
- 実装基板の一方の面に、第一および第二メモリチップが下からこの順に搭載され、
前記第一および第二メモリチップが、いずれも、矩形の平面形状を有し、かつ、前記矩形の一辺に沿って一列にのみ配置された複数の電極パッドを含み、
前記第二メモリチップの前記電極パッドの列が、前記第一メモリチップの前記電極パッドの列に平行に配置され、
前記複数の電極パッドがチップセレクトパッドを含み、前記チップセレクトパッドは、前記電極パッドの列の端部にのみ配置され、
前記実装基板の前記一方の面に、前記第一メモリチップの前記一辺に沿って一列に配置された複数の第一ステッチと、前記チップセレクトパッドの側で前記一辺に隣接する辺に沿って一列に配置された複数の第二ステッチと、が設けられ、
前記第一メモリチップの前記複数の電極パッドのうち、前記チップセレクトパッド以外のパッドが、前記第一ステッチにワイヤボンディングされるとともに、前記第一および第二メモリチップの前記チップセレクトパッドが、それぞれ異なる前記第二ステッチにワイヤボンディングされ、
前記第二メモリチップの前記チップセレクトパッド以外のパッドが、前記第一メモリチップの前記チップセレクトパッド以外のパッドを介して、前記第一ステッチに接続する、半導体装置。 - 請求項1に記載の半導体装置において、前記実装基板に設けられたステッチが、一列の前記第一ステッチと一列の前記第二ステッチからなる、半導体装置。
- 請求項1または2に記載の半導体装置において、前記第二メモリチップの上部から見たときに、前記第一メモリチップの前記電極パッドの形成領域に隣接して、前記第二メモリチップの前記電極パッドの形成領域が配置された、半導体装置。
- 請求項3に記載の半導体装置において、前記第二メモリチップの上部から見たときに、前記第二メモリチップが、前記第一メモリチップの前記電極パッドの形成領域の幅だけずらして前記第一メモリチップ上に搭載された、半導体装置。
- 請求項4に記載の半導体装置において、前記第二メモリチップの上部から見たときに、前記第一メモリチップに対する第二メモリチップのずれ幅が、複数の前記第二ステッチの間隔と等しい、半導体装置。
- 請求項1乃至5いずれか一項に記載の半導体装置において、前記第二メモリチップの上部から見たときに、前記第一メモリチップの前記電極パッドの形成領域以外の領域が前記第二メモリチップに覆われている、半導体装置。
- 請求項1乃至6いずれか一項に記載の半導体装置において、前記第一および第二メモリチップの平面形状が同じである、半導体装置。
- 請求項1乃至6いずれか一項に記載の半導体装置において、
前記第一メモリチップと前記第二メモリチップの前記一辺の長さが等しく、
前記第二メモリチップの上部から見たときに、前記第一メモリチップの前記一辺と前記第二メモリチップの前記一辺とが隣接するとともに、前記第一メモリチップの前記一辺に対向する辺と、前記第二メモリチップの前記一辺に対向する辺とが重なっている、半導体装置。 - 請求項1乃至8いずれか一項に記載の半導体装置において、
前記第一および第二メモリチップのそれぞれの前記一辺に設けられた電極パッドの数が等しく、
前記第一および第二メモリチップのチップセレクトパッド同士が隣接して配置されるとともに、チップセレクトパッド以外の電極パッド同士が隣接して配置された、半導体装置。 - 請求項9に記載の半導体装置において、
前記第一および第二メモリチップの前記チップセレクトパッド以外の電極パッドが、いずれも、p個のアドレスパッドとq個のデータパッドとr個のコントロールパッドとからなり(p、qおよびrはそれぞれ独立に0以上の整数であり、p+q+rは正の整数である。)、
前記第一および第二メモリチップのp番目のアドレスパッド同士が隣接して配置されるとともに、q番目のデータパッド同士、r番目のコントロールパッド同士が隣接して配置された、半導体装置。
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Families Citing this family (42)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8243467B2 (en) * | 2007-02-13 | 2012-08-14 | Nec Corporation | Semiconductor device |
CN101866915B (zh) * | 2009-04-15 | 2015-08-19 | 三星电子株式会社 | 集成电路装置及其操作方法、存储器存储装置及电子*** |
KR20100114421A (ko) | 2009-04-15 | 2010-10-25 | 삼성전자주식회사 | 적층 패키지 |
JP5341717B2 (ja) * | 2009-11-10 | 2013-11-13 | ルネサスエレクトロニクス株式会社 | 半導体パッケージ及びシステム |
US8158457B2 (en) * | 2010-02-08 | 2012-04-17 | Sandisk Technologies Inc. | Rule-based semiconductor die stacking and bonding within a multi-die package |
US8502368B2 (en) * | 2010-03-18 | 2013-08-06 | Mosaid Technologies Incorporated | Multi-chip package with offset die stacking |
JP5667381B2 (ja) | 2010-06-01 | 2015-02-12 | ピーエスフォー ルクスコ エスエイアールエルPS4 Luxco S.a.r.l. | 半導体装置及びその製造方法 |
KR101766725B1 (ko) * | 2010-10-06 | 2017-08-09 | 삼성전자 주식회사 | 칩 스택을 구비하는 반도체 장치, 반도체 시스템 및 그 제조 방법 |
JP5822370B2 (ja) * | 2011-07-05 | 2015-11-24 | インテル・コーポレーション | セルフディセーブルチップイネーブル入力 |
US8513817B2 (en) | 2011-07-12 | 2013-08-20 | Invensas Corporation | Memory module in a package |
US8823165B2 (en) * | 2011-07-12 | 2014-09-02 | Invensas Corporation | Memory module in a package |
US8502390B2 (en) | 2011-07-12 | 2013-08-06 | Tessera, Inc. | De-skewed multi-die packages |
US8659139B2 (en) | 2011-10-03 | 2014-02-25 | Invensas Corporation | Stub minimization using duplicate sets of signal terminals in assemblies without wirebonds to package substrate |
US8436457B2 (en) | 2011-10-03 | 2013-05-07 | Invensas Corporation | Stub minimization for multi-die wirebond assemblies with parallel windows |
KR101894823B1 (ko) | 2011-10-03 | 2018-09-04 | 인벤사스 코포레이션 | 평행한 윈도우를 갖는 다중-다이 와이어 본드 어셈블리를 위한 스터브 최소화 |
US8513813B2 (en) | 2011-10-03 | 2013-08-20 | Invensas Corporation | Stub minimization using duplicate sets of terminals for wirebond assemblies without windows |
JP5857129B2 (ja) * | 2011-10-03 | 2016-02-10 | インヴェンサス・コーポレイション | 窓なしのワイヤボンドアセンブリのためのスタブ最小化 |
US8659143B2 (en) | 2011-10-03 | 2014-02-25 | Invensas Corporation | Stub minimization for wirebond assemblies without windows |
KR20140069343A (ko) | 2011-10-03 | 2014-06-09 | 인벤사스 코포레이션 | 패키지의 중심으로부터 옵셋된 단자 그리드를 구비하는 스터드 최소화 |
JP5964439B2 (ja) * | 2011-10-03 | 2016-08-03 | インヴェンサス・コーポレイション | ウインドウを用いないワイヤボンドアセンブリに対して端子の2重の組を使用するスタブ最小化 |
US8629545B2 (en) | 2011-10-03 | 2014-01-14 | Invensas Corporation | Stub minimization for assemblies without wirebonds to package substrate |
EP2769409A1 (en) | 2011-10-03 | 2014-08-27 | Invensas Corporation | Stub minimization for multi-die wirebond assemblies with orthogonal windows |
US8441111B2 (en) | 2011-10-03 | 2013-05-14 | Invensas Corporation | Stub minimization for multi-die wirebond assemblies with parallel windows |
JP2014241309A (ja) * | 2011-10-06 | 2014-12-25 | 株式会社村田製作所 | 半導体装置およびその製造方法 |
US20130111122A1 (en) * | 2011-10-31 | 2013-05-02 | Futurewei Technologies, Inc. | Method and apparatus for network table lookups |
US8716876B1 (en) * | 2011-11-11 | 2014-05-06 | Altera Corporation | Systems and methods for stacking a memory chip above an integrated circuit chip |
KR101963314B1 (ko) | 2012-07-09 | 2019-03-28 | 삼성전자 주식회사 | 반도체 패키지 및 이의 제조 방법 |
US8848392B2 (en) | 2012-08-27 | 2014-09-30 | Invensas Corporation | Co-support module and microelectronic assembly |
US9368477B2 (en) | 2012-08-27 | 2016-06-14 | Invensas Corporation | Co-support circuit panel and microelectronic packages |
US8848391B2 (en) | 2012-08-27 | 2014-09-30 | Invensas Corporation | Co-support component and microelectronic assembly |
US8787034B2 (en) | 2012-08-27 | 2014-07-22 | Invensas Corporation | Co-support system and microelectronic assembly |
KR102043369B1 (ko) | 2012-11-21 | 2019-11-11 | 삼성전자주식회사 | 반도체 메모리 칩 및 이를 포함하는 적층형 반도체 패키지 |
US9070423B2 (en) | 2013-06-11 | 2015-06-30 | Invensas Corporation | Single package dual channel memory with co-support |
US9123555B2 (en) | 2013-10-25 | 2015-09-01 | Invensas Corporation | Co-support for XFD packaging |
US9281296B2 (en) | 2014-07-31 | 2016-03-08 | Invensas Corporation | Die stacking techniques in BGA memory package for small footprint CPU and memory motherboard design |
US9691437B2 (en) | 2014-09-25 | 2017-06-27 | Invensas Corporation | Compact microelectronic assembly having reduced spacing between controller and memory packages |
US9484080B1 (en) | 2015-11-09 | 2016-11-01 | Invensas Corporation | High-bandwidth memory application with controlled impedance loading |
US9679613B1 (en) | 2016-05-06 | 2017-06-13 | Invensas Corporation | TFD I/O partition for high-speed, high-density applications |
JP6761180B2 (ja) * | 2016-12-28 | 2020-09-23 | 株式会社バッファロー | 半導体装置 |
KR102499034B1 (ko) | 2018-02-08 | 2023-02-13 | 삼성전자주식회사 | 다수의 반도체 칩을 갖는 반도체 패키지 |
KR102591697B1 (ko) * | 2019-03-06 | 2023-10-20 | 에스케이하이닉스 주식회사 | 하이브리드 와이어 본딩 구조를 포함한 스택 패키지 |
CN112018093A (zh) * | 2019-05-31 | 2020-12-01 | 西部数据技术公司 | 具有定位成减少模片开裂的顶部模片的半导体器件 |
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JPH01235264A (ja) | 1988-03-15 | 1989-09-20 | Toshiba Corp | 半導体集積回路装置 |
JPH0380548A (ja) * | 1989-05-15 | 1991-04-05 | Toshiba Corp | 半導体装置 |
JPH1154693A (ja) * | 1997-07-29 | 1999-02-26 | Sanyo Electric Co Ltd | 半導体装置 |
JP3172472B2 (ja) * | 1997-08-29 | 2001-06-04 | 三洋電機株式会社 | 半導体装置 |
JP2000332194A (ja) | 1999-05-20 | 2000-11-30 | Nec Ic Microcomput Syst Ltd | マルチチップパッケージ |
JP3304921B2 (ja) * | 1999-06-18 | 2002-07-22 | 日本電気株式会社 | 半導体記憶装置 |
JP3822768B2 (ja) * | 1999-12-03 | 2006-09-20 | 株式会社ルネサステクノロジ | Icカードの製造方法 |
JP4679751B2 (ja) | 2001-04-10 | 2011-04-27 | 日本エステル株式会社 | 高撥水性繊維 |
US6900528B2 (en) * | 2001-06-21 | 2005-05-31 | Micron Technology, Inc. | Stacked mass storage flash memory package |
JP2005317830A (ja) * | 2004-04-30 | 2005-11-10 | Elpida Memory Inc | 半導体装置、マルチチップパッケージ、およびワイヤボンディング方法 |
JP2006164302A (ja) * | 2006-01-17 | 2006-06-22 | Renesas Technology Corp | 不揮発性記憶装置 |
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