JP4903624B2 - プローブユニット及び検査装置 - Google Patents
プローブユニット及び検査装置 Download PDFInfo
- Publication number
- JP4903624B2 JP4903624B2 JP2007108380A JP2007108380A JP4903624B2 JP 4903624 B2 JP4903624 B2 JP 4903624B2 JP 2007108380 A JP2007108380 A JP 2007108380A JP 2007108380 A JP2007108380 A JP 2007108380A JP 4903624 B2 JP4903624 B2 JP 4903624B2
- Authority
- JP
- Japan
- Prior art keywords
- probe
- adjustment
- plate portion
- plate
- unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2601—Apparatus or methods therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Leads Or Probes (AREA)
- Tests Of Electronic Circuits (AREA)
- Liquid Crystal (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007108380A JP4903624B2 (ja) | 2007-04-17 | 2007-04-17 | プローブユニット及び検査装置 |
TW097110594A TWI361895B (en) | 2007-04-17 | 2008-03-25 | Probe unit and inspection apparatus |
KR1020080032098A KR100986640B1 (ko) | 2007-04-17 | 2008-04-07 | 프로브 유닛 및 검사장치 |
CNA2008100901996A CN101290329A (zh) | 2007-04-17 | 2008-04-17 | 探针单元以及检查装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007108380A JP4903624B2 (ja) | 2007-04-17 | 2007-04-17 | プローブユニット及び検査装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008267873A JP2008267873A (ja) | 2008-11-06 |
JP4903624B2 true JP4903624B2 (ja) | 2012-03-28 |
Family
ID=40034680
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007108380A Expired - Fee Related JP4903624B2 (ja) | 2007-04-17 | 2007-04-17 | プローブユニット及び検査装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4903624B2 (zh) |
KR (1) | KR100986640B1 (zh) |
CN (1) | CN101290329A (zh) |
TW (1) | TWI361895B (zh) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5156970B2 (ja) * | 2008-11-10 | 2013-03-06 | 株式会社日本マイクロニクス | 電気的検査のためのプローブユニット、電気的検査装置および点灯検査装置 |
JP2010127706A (ja) * | 2008-11-26 | 2010-06-10 | Micronics Japan Co Ltd | プローブユニット及び検査装置 |
KR101410991B1 (ko) * | 2012-11-20 | 2014-06-23 | 리노정밀(주) | 지그 장치 |
CN106873195B (zh) * | 2015-12-11 | 2020-10-30 | De&T株式会社 | 探针单元更换装置 |
KR101684449B1 (ko) * | 2016-04-05 | 2016-12-09 | 주식회사 프로이천 | 프로브블록의 지지기구를 구비한 프로브장치 |
CN109143634B (zh) * | 2018-10-16 | 2024-05-17 | 武汉精毅通电子技术有限公司 | 一种简易手动压接治具 |
CN109459595A (zh) * | 2018-12-29 | 2019-03-12 | 深圳市杰普特光电股份有限公司 | 可调节式探针装置 |
CN115754556B (zh) * | 2022-11-25 | 2024-01-05 | 温州众彩汽车零部件有限公司 | 一种多触手的车辆面板老化变形率检测设备 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0782032B2 (ja) * | 1990-01-23 | 1995-09-06 | 株式会社日本マイクロニクス | 表示パネル用プローブとその組み立て方法 |
JP3187855B2 (ja) * | 1991-03-27 | 2001-07-16 | 株式会社日本マイクロニクス | 表示パネル用プローバ |
JPH0682539U (ja) * | 1992-01-13 | 1994-11-25 | 株式会社リードエレクトロニクス | マルチブロック液晶検査装置 |
JP3592831B2 (ja) * | 1996-02-26 | 2004-11-24 | 株式会社日本マイクロニクス | プローブユニット及びその調節方法 |
JP4167150B2 (ja) * | 2003-09-01 | 2008-10-15 | 株式会社日本マイクロニクス | 電気的接続装置 |
JP4790997B2 (ja) * | 2004-03-26 | 2011-10-12 | 株式会社日本マイクロニクス | プローブ装置 |
US7471094B2 (en) * | 2005-06-24 | 2008-12-30 | Formfactor, Inc. | Method and apparatus for adjusting a multi-substrate probe structure |
KR100648014B1 (ko) | 2006-06-05 | 2006-11-23 | (주)엠씨티코리아 | 평판형 디스플레이패널 검사용 프로브장치의 pcb 접속용지그 |
-
2007
- 2007-04-17 JP JP2007108380A patent/JP4903624B2/ja not_active Expired - Fee Related
-
2008
- 2008-03-25 TW TW097110594A patent/TWI361895B/zh active
- 2008-04-07 KR KR1020080032098A patent/KR100986640B1/ko active IP Right Grant
- 2008-04-17 CN CNA2008100901996A patent/CN101290329A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
TW200902988A (en) | 2009-01-16 |
CN101290329A (zh) | 2008-10-22 |
TWI361895B (en) | 2012-04-11 |
KR100986640B1 (ko) | 2010-10-08 |
KR20080093873A (ko) | 2008-10-22 |
JP2008267873A (ja) | 2008-11-06 |
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