JP4903624B2 - プローブユニット及び検査装置 - Google Patents

プローブユニット及び検査装置 Download PDF

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Publication number
JP4903624B2
JP4903624B2 JP2007108380A JP2007108380A JP4903624B2 JP 4903624 B2 JP4903624 B2 JP 4903624B2 JP 2007108380 A JP2007108380 A JP 2007108380A JP 2007108380 A JP2007108380 A JP 2007108380A JP 4903624 B2 JP4903624 B2 JP 4903624B2
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JP
Japan
Prior art keywords
probe
adjustment
plate portion
plate
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007108380A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008267873A (ja
Inventor
康晃 小山内
一佳 三浦
裕樹 斉藤
俊雄 福士
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Micronics Japan Co Ltd
Original Assignee
Micronics Japan Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micronics Japan Co Ltd filed Critical Micronics Japan Co Ltd
Priority to JP2007108380A priority Critical patent/JP4903624B2/ja
Priority to TW097110594A priority patent/TWI361895B/zh
Priority to KR1020080032098A priority patent/KR100986640B1/ko
Priority to CNA2008100901996A priority patent/CN101290329A/zh
Publication of JP2008267873A publication Critical patent/JP2008267873A/ja
Application granted granted Critical
Publication of JP4903624B2 publication Critical patent/JP4903624B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2601—Apparatus or methods therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Liquid Crystal (AREA)
JP2007108380A 2007-04-17 2007-04-17 プローブユニット及び検査装置 Expired - Fee Related JP4903624B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2007108380A JP4903624B2 (ja) 2007-04-17 2007-04-17 プローブユニット及び検査装置
TW097110594A TWI361895B (en) 2007-04-17 2008-03-25 Probe unit and inspection apparatus
KR1020080032098A KR100986640B1 (ko) 2007-04-17 2008-04-07 프로브 유닛 및 검사장치
CNA2008100901996A CN101290329A (zh) 2007-04-17 2008-04-17 探针单元以及检查装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007108380A JP4903624B2 (ja) 2007-04-17 2007-04-17 プローブユニット及び検査装置

Publications (2)

Publication Number Publication Date
JP2008267873A JP2008267873A (ja) 2008-11-06
JP4903624B2 true JP4903624B2 (ja) 2012-03-28

Family

ID=40034680

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007108380A Expired - Fee Related JP4903624B2 (ja) 2007-04-17 2007-04-17 プローブユニット及び検査装置

Country Status (4)

Country Link
JP (1) JP4903624B2 (zh)
KR (1) KR100986640B1 (zh)
CN (1) CN101290329A (zh)
TW (1) TWI361895B (zh)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5156970B2 (ja) * 2008-11-10 2013-03-06 株式会社日本マイクロニクス 電気的検査のためのプローブユニット、電気的検査装置および点灯検査装置
JP2010127706A (ja) * 2008-11-26 2010-06-10 Micronics Japan Co Ltd プローブユニット及び検査装置
KR101410991B1 (ko) * 2012-11-20 2014-06-23 리노정밀(주) 지그 장치
CN106873195B (zh) * 2015-12-11 2020-10-30 De&T株式会社 探针单元更换装置
KR101684449B1 (ko) * 2016-04-05 2016-12-09 주식회사 프로이천 프로브블록의 지지기구를 구비한 프로브장치
CN109143634B (zh) * 2018-10-16 2024-05-17 武汉精毅通电子技术有限公司 一种简易手动压接治具
CN109459595A (zh) * 2018-12-29 2019-03-12 深圳市杰普特光电股份有限公司 可调节式探针装置
CN115754556B (zh) * 2022-11-25 2024-01-05 温州众彩汽车零部件有限公司 一种多触手的车辆面板老化变形率检测设备

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0782032B2 (ja) * 1990-01-23 1995-09-06 株式会社日本マイクロニクス 表示パネル用プローブとその組み立て方法
JP3187855B2 (ja) * 1991-03-27 2001-07-16 株式会社日本マイクロニクス 表示パネル用プローバ
JPH0682539U (ja) * 1992-01-13 1994-11-25 株式会社リードエレクトロニクス マルチブロック液晶検査装置
JP3592831B2 (ja) * 1996-02-26 2004-11-24 株式会社日本マイクロニクス プローブユニット及びその調節方法
JP4167150B2 (ja) * 2003-09-01 2008-10-15 株式会社日本マイクロニクス 電気的接続装置
JP4790997B2 (ja) * 2004-03-26 2011-10-12 株式会社日本マイクロニクス プローブ装置
US7471094B2 (en) * 2005-06-24 2008-12-30 Formfactor, Inc. Method and apparatus for adjusting a multi-substrate probe structure
KR100648014B1 (ko) 2006-06-05 2006-11-23 (주)엠씨티코리아 평판형 디스플레이패널 검사용 프로브장치의 ｐｃｂ 접속용지그

Also Published As

Publication number Publication date
TW200902988A (en) 2009-01-16
CN101290329A (zh) 2008-10-22
TWI361895B (en) 2012-04-11
KR100986640B1 (ko) 2010-10-08
KR20080093873A (ko) 2008-10-22
JP2008267873A (ja) 2008-11-06

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