JP4657105B2 - 面外複屈折の測定 - Google Patents

面外複屈折の測定 Download PDF

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Publication number: JP4657105B2
Authority: JP; Japan
Prior art keywords: sample; rays; birefringence; light; angularly separated
Prior art date: 2002-12-20
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

JP2005510008A

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English (en)

Japanese (ja)

Other versions

JP2006511823A (ja

Inventor

バオリャンワン、

Original Assignee

ハインズインスツルメンツインコーポレイテッド

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2002-12-20

Filing date

2003-12-19

Publication date

2011-03-23

2003-02-10 Priority claimed from US10/364,006 external-priority patent/US7016039B2/en

2003-12-19 Application filed by ハインズインスツルメンツインコーポレイテッド filed Critical ハインズインスツルメンツインコーポレイテッド

2006-04-06 Publication of JP2006511823A publication Critical patent/JP2006511823A/ja

2011-03-23 Application granted granted Critical

2011-03-23 Publication of JP4657105B2 publication Critical patent/JP4657105B2/ja

2023-12-19 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Links

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Images

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J4/00—Measuring polarisation of light
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
- G01N21/23—Bi-refringence
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light

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Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
General Health & Medical Sciences (AREA)
Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Biochemistry (AREA)
Life Sciences & Earth Sciences (AREA)
Health & Medical Sciences (AREA)
Immunology (AREA)
Pathology (AREA)
Spectroscopy & Molecular Physics (AREA)
Investigating Or Analysing Materials By Optical Means (AREA)
Testing Of Optical Devices Or Fibers (AREA)

JP2005510008A 2002-12-20 2003-12-19 面外複屈折の測定 Expired - Fee Related JP4657105B2 (ja)

Applications Claiming Priority (4)

Application Number	Priority Date	Filing Date	Title
US43558802P	2002-12-20	2002-12-20
US10/364,006 US7016039B2 (en)	2003-02-10	2003-02-10	Purging light beam paths in optical equipment
US49283803P	2003-08-06	2003-08-06
PCT/US2003/040366 WO2004059266A2 (en)	2002-12-20	2003-12-19	Out-of-plane birefringence measurement

Publications (2)

Publication Number	Publication Date
JP2006511823A JP2006511823A (ja)	2006-04-06
JP4657105B2 true JP4657105B2 (ja)	2011-03-23

Family

ID=32685986

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP2005510008A Expired - Fee Related JP4657105B2 (ja)	2002-12-20	2003-12-19	面外複屈折の測定

Country Status (6)

Country	Link
EP (1)	EP1573287A4 (zh)
JP (1)	JP4657105B2 (zh)
KR (1)	KR20050093790A (zh)
CN (1)	CN1739007B (zh)
AU (1)	AU2003299695A1 (zh)
WO (1)	WO2004059266A2 (zh)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2009508170A (ja) *	2005-09-14	2009-02-26	カール・ツァイス・エスエムティー・アーゲー	マイクロリソグラフィ露光システムの光学システム
JP4317558B2 (ja) *	2006-08-23	2009-08-19	株式会社堀場製作所	試料解析方法、試料解析装置及びプログラム
TWI331213B (en)	2005-11-29	2010-10-01	Horiba Ltd	Sample analyzing method, sample analyzing apparatus,and recording medium
US7746465B2 (en)	2007-01-18	2010-06-29	Hinds Instruments, Inc.	Sample holder for an optical element
KR100911626B1 (ko) *	2007-07-13	2009-08-12	서강대학교산학협력단	바이오 센서 측정 장치
JP5917803B2 (ja)	2007-07-31	2016-05-18	ザジェネラルホスピタルコーポレイション	高速ドップラー光周波数領域撮像法のためのビーム走査パターンを放射するシステムおよび方法
JP5140451B2 (ja) *	2008-02-05	2013-02-06	富士フイルム株式会社	複屈折測定方法及び装置並びにプログラム
JP2009229229A (ja) *	2008-03-21	2009-10-08	Fujifilm Corp	複屈折測定装置及び複屈折測定方法
US8582101B2 (en) *	2008-07-08	2013-11-12	Hinds Instruments, Inc.	High throughput birefringence measurement
JP2012150107A (ja) *	2010-12-27	2012-08-09	Nippon Zeon Co Ltd	光学異方性膜の評価方法、光学異方性膜の光学特性の測定装置および光学異方性膜の製造方法
GB201308434D0 (en) *	2013-05-10	2013-06-19	Innovia Films Sarl	Authentication apparatus and method
WO2014189967A2 (en)	2013-05-23	2014-11-27	Hinds Instruments, Inc.	Polarization properties imaging systems

Citations (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH02159540A (ja) *	1988-12-12	1990-06-19	Orc Mfg Co Ltd	複屈折測定方法
JPH0545278A (ja) *	1991-08-09	1993-02-23	Matsushita Electric Ind Co Ltd	複屈折測定装置
JPH08201277A (ja) *	1995-01-31	1996-08-09	New Oji Paper Co Ltd	複屈折測定方法及び装置
JPH10267831A (ja) *	1997-03-25	1998-10-09	Unie Opt:Kk	複屈折測定光学系および高空間分解能偏光解析装置
JP2002504673A (ja) *	1998-02-20	2002-02-12	ハインズインスツルメンツインコーポレイテッド	複屈折特性測定方法および装置
JP2003519789A (ja) *	2000-01-14	2003-06-24	ハインズインスツルメンツインコーポレイテッド	複屈折特性測定装置の校正方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE3106818A1 (de) *	1981-02-24	1982-09-09	Basf Ag, 6700 Ludwigshafen	Verfahren zur kontinuierlichen bestimmung mehrachsiger orientierungszustaende von verstreckten folien oder platten
US5956146A (en) *	1997-01-29	1999-09-21	Victor Company Of Japan, Ltd.	Birefringence measuring apparatus for optical disc substrate
US5864403A (en) *	1998-02-23	1999-01-26	National Research Council Of Canada	Method and apparatus for measurement of absolute biaxial birefringence in monolayer and multilayer films, sheets and shapes

2003
- 2003-12-19 EP EP03799977A patent/EP1573287A4/en not_active Withdrawn
- 2003-12-19 WO PCT/US2003/040366 patent/WO2004059266A2/en active Application Filing
- 2003-12-19 JP JP2005510008A patent/JP4657105B2/ja not_active Expired - Fee Related
- 2003-12-19 KR KR1020057011535A patent/KR20050093790A/ko not_active Application Discontinuation
- 2003-12-19 CN CN2003801088823A patent/CN1739007B/zh not_active Expired - Fee Related
- 2003-12-19 AU AU2003299695A patent/AU2003299695A1/en not_active Abandoned

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH02159540A (ja) *	1988-12-12	1990-06-19	Orc Mfg Co Ltd	複屈折測定方法
JPH0545278A (ja) *	1991-08-09	1993-02-23	Matsushita Electric Ind Co Ltd	複屈折測定装置
JPH08201277A (ja) *	1995-01-31	1996-08-09	New Oji Paper Co Ltd	複屈折測定方法及び装置
JPH10267831A (ja) *	1997-03-25	1998-10-09	Unie Opt:Kk	複屈折測定光学系および高空間分解能偏光解析装置
JP2002504673A (ja) *	1998-02-20	2002-02-12	ハインズインスツルメンツインコーポレイテッド	複屈折特性測定方法および装置
JP2003519789A (ja) *	2000-01-14	2003-06-24	ハインズインスツルメンツインコーポレイテッド	複屈折特性測定装置の校正方法

Also Published As

Publication number	Publication date
KR20050093790A (ko)	2005-09-23
WO2004059266A3 (en)	2004-10-21
CN1739007B (zh)	2013-06-19
JP2006511823A (ja)	2006-04-06
EP1573287A4 (en)	2009-11-11
WO2004059266A2 (en)	2004-07-15
AU2003299695A1 (en)	2004-07-22
AU2003299695A8 (en)	2004-07-22
EP1573287A2 (en)	2005-09-14
CN1739007A (zh)	2006-02-22

Legal Events

Date	Code	Title	Description
2006-12-15	A621	Written request for application examination	Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20061214
2009-09-29	A131	Notification of reasons for refusal	Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20090929
2009-12-15	A601	Written request for extension of time	Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20091214
2009-12-22	A602	Written permission of extension of time	Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20091221
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2010-09-28	A521	Written amendment	Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100927
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2011-01-07	FPAY	Renewal fee payment (event date is renewal date of database)	Free format text: PAYMENT UNTIL: 20140107 Year of fee payment: 3
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2016-02-02	R250	Receipt of annual fees	Free format text: JAPANESE INTERMEDIATE CODE: R250
2017-01-07	LAPS	Cancellation because of no payment of annual fees

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US20040233434A1 (en)	2004-11-25	Accuracy calibration of birefringence measurement systems
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JPH05158084A (ja)	1993-06-25	線形及び非線形光学感受率測定装置
CN118090663A (zh)	2024-05-28	近红外光谱和拉曼光谱同步测量装置
JPH0720094A (ja)	1995-01-24	超音波振動測定装置
JPH1123233A (ja)	1999-01-29	赤外線膜厚計および赤外線膜厚測定法
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JPH03115953A (ja)	1991-05-16	３次非線形光学特性の測定装置
JPS59228128A (ja)	1984-12-21	偏波面保存光フアイバを用いた光センサ