JP4623955B2 - 微細成形炭化ケイ素ナノインプリントスタンプ - Google Patents
微細成形炭化ケイ素ナノインプリントスタンプ Download PDFInfo
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- JP4623955B2 JP4623955B2 JP2003364007A JP2003364007A JP4623955B2 JP 4623955 B2 JP4623955 B2 JP 4623955B2 JP 2003364007 A JP2003364007 A JP 2003364007A JP 2003364007 A JP2003364007 A JP 2003364007A JP 4623955 B2 JP4623955 B2 JP 4623955B2
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- JP
- Japan
- Prior art keywords
- layer
- mold
- substrate
- etching
- silicon carbide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C99/00—Subject matter not provided for in other groups of this subclass
- B81C99/0075—Manufacture of substrate-free structures
- B81C99/009—Manufacturing the stamps or the moulds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
- B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
- B29C2059/023—Microembossing
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/12—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/887—Nanoimprint lithography, i.e. nanostamp
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
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- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
- Theoretical Computer Science (AREA)
- Mathematical Physics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Micromachines (AREA)
- Ceramic Products (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
- Carbon And Carbon Compounds (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Description
11 基礎層
12 極小形状部
13 基準面
15 ハンドリング基板
17 接着層
21 基板
22 スルーホール
23 離型層
25 型枠層
50 媒体
Claims (5)
- 炭化ケイ素ナノインプリントスタンプ(10)を微細成形する方法であって、
基板層(21)の上に離型層(23)を形成するステップと、
前記離型層(23)の上に型枠層(25)を形成するステップと、
前記型枠層(25)をパターニングした後エッチングして、前記離型層(23)まで延びる極小の型穴(31)を形成するステップと、
前記極小の型穴(31)に炭化ケイ素を充填することにより、複数の極小形状部(12)と、該極小形状部(12)に接続された基礎層(11)を形成するステップと、
前記基礎層(11)を平坦化して実質的に平坦な表面(11s)を形成するステップと、
前記基礎層(11)の平坦な表面(11s)上に接着層(17)を形成するステップと、
前記接着層(17)が、前記基礎層(11)及びハンドリング基板(15)との間に機械的接合を形成するまで、前記ハンドリング基板(15)及び前記基板層(21)に圧力P及び熱hを加えることにより、前記ハンドリング基板(15)を前記接着層(17)に接合するステップと、
前記基板層(21)の背面(21b)をパターニングした後エッチングして、前記離型層(23)まで延びる複数のスルーホール(22)を形成するステップと、
前記スルーホール(22)にエッチング剤を注入し、前記離型層(23)をエッチングして除去することで、前記基板層(21)を切り離すことにより、前記基板層(21)を取り除くステップと、
前記型枠層(25)をエッチングすることにより、前記極小形状部(12)及び前記基礎層(11)から前記型枠層(25)を除去するステップと、
からなる方法。 - 前記型枠層(25)は、前記型枠層(25)の表面が実質的に平坦な表面(25s)になるように均一な堆積速度で堆積される、請求項1に記載の方法。
- 炭化ケイ素ナノプリンティングスタンプ(10)を微細成形する方法であって、
基板層(21)上に型枠層(25)を形成するステップと、
前記型枠層(25)をパターニングした後エッチングして、前記基板層(21)まで延びる複数の極小の型穴(31)を形成するステップと、
前記極小の型穴(31)を炭化ケイ素を含む材料で充填することにより、複数の極小形状部(12)と、基礎層(11)とを形成するステップと、
前記基礎層(11)を平坦化して実質的に平坦な表面(11s)を形成するステップと、
前記基礎層(11)の平坦な表面(11s)上に接着層(17)を形成するステップと、
前記接着層(17)が、前記基礎層(11)及びハンドリング基板(15)との間に機械的接合を形成するまで、前記ハンドリング基板(15)及び前記基板層(21)に圧力P及び熱hを加えることにより、前記ハンドリング基板(15)を前記接着層(17)に接合するステップと、
前記型枠層(25)から前記基板層(21)を除去するステップと、
前記型枠層(25)をエッチングして、前記極小形状部(12)及び前記基礎層(11)から前記型枠層(25)を除去するステップと
を含み、
前記基板層(21)を除去するステップ、および前記型枠層(25)をエッチングして除去するステップは、
前記基板層(21)の背面(21b)をパターニングした後エッチングして、その中に前記型枠層(25)まで延びる複数のスルーホール(22)を形成するステップと、
前記スルーホール(22)にエッチング剤を注入して前記型枠層(25)をエッチングで取り除くことにより、前記基板層(21)を切り離すステップと
を含む方法。 - 前記型枠層(25)は、前記型枠層(25)の表面が実質的に平坦な表面(25s)になるように均一な堆積速度で堆積される、請求項3に記載の方法。
- 炭化ケイ素ナノインプリントスタンプ(10)を微細成形する方法であって、
型枠層(25)をパターニングした後エッチングして、その中に複数の極小の型穴(31)を形成するステップと、
前記型穴(31)に炭化ケイ素を含む物質を充填することにより、複数の極小形状部(12)と、該複数の極小形状部に接続された基礎層(11)とを形成するステップと、
前記基礎層(11)を平坦化して実質的に平坦な表面(11s)を形成するステップと、
前記基礎層(11)の平坦な表面(11s)上に接着層(17)を形成するステップと、
前記接着層(17)が、前記基礎層(11)及びハンドリング基板(15)との間に機械的接合を形成するまで、前記ハンドリング基板(15)及び前記型枠層(25)に圧力P及び熱hを加えることにより、前記ハンドリング基板(15)を前記接着層(17)に接合するステップと、
前記基礎層(11)から前記型枠層(25)を除去するステップと
を含み、
前記型枠層(25)を除去するステップは、前記型枠層(25)を選択的にエッチングすることにより、前記基礎層(11)から前記型枠層(25)を切り離すステップを含み、
前記型枠層(25)は、前記極小形状部の上面が薄い層で覆われるところまで背面から研削され、前記選択的エッチングは、その後に実施されることからなる方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/279,643 US6755984B2 (en) | 2002-10-24 | 2002-10-24 | Micro-casted silicon carbide nano-imprinting stamp |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2004160647A JP2004160647A (ja) | 2004-06-10 |
JP4623955B2 true JP4623955B2 (ja) | 2011-02-02 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003364007A Expired - Fee Related JP4623955B2 (ja) | 2002-10-24 | 2003-10-24 | 微細成形炭化ケイ素ナノインプリントスタンプ |
Country Status (5)
Country | Link |
---|---|
US (2) | US6755984B2 (ja) |
EP (1) | EP1413923A3 (ja) |
JP (1) | JP4623955B2 (ja) |
CN (1) | CN1499289A (ja) |
TW (1) | TW200406834A (ja) |
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CN104597719B (zh) * | 2015-01-12 | 2016-09-14 | 北京同方生物芯片技术有限公司 | 基于正性光刻胶的镍阳模具制作方法 |
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US20040169003A1 (en) | 2004-09-02 |
EP1413923A2 (en) | 2004-04-28 |
CN1499289A (zh) | 2004-05-26 |
US20040081800A1 (en) | 2004-04-29 |
TW200406834A (en) | 2004-05-01 |
EP1413923A3 (en) | 2006-05-17 |
US7080596B2 (en) | 2006-07-25 |
US6755984B2 (en) | 2004-06-29 |
JP2004160647A (ja) | 2004-06-10 |
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