JP4508016B2 - 部品実装方法 - Google Patents
部品実装方法 Download PDFInfo
- Publication number
- JP4508016B2 JP4508016B2 JP2005198331A JP2005198331A JP4508016B2 JP 4508016 B2 JP4508016 B2 JP 4508016B2 JP 2005198331 A JP2005198331 A JP 2005198331A JP 2005198331 A JP2005198331 A JP 2005198331A JP 4508016 B2 JP4508016 B2 JP 4508016B2
- Authority
- JP
- Japan
- Prior art keywords
- component
- mounting
- chip
- head
- stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title claims description 31
- 229910000679 solder Inorganic materials 0.000 abstract description 20
- 239000004065 semiconductor Substances 0.000 description 20
- 238000003860 storage Methods 0.000 description 17
- 230000036544 posture Effects 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000003384 imaging method Methods 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 238000005304 joining Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000003028 elevating effect Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/04—Mounting of components, e.g. of leadless components
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/04—Mounting of components, e.g. of leadless components
- H05K13/046—Surface mounting
- H05K13/0465—Surface mounting by soldering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/757—Means for aligning
- H01L2224/75743—Suction holding means
- H01L2224/75745—Suction holding means in the upper part of the bonding apparatus, e.g. in the bonding head
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/758—Means for moving parts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01087—Francium [Fr]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/06—Polymers
- H01L2924/078—Adhesive characteristics other than chemical
- H01L2924/0781—Adhesive characteristics other than chemical being an ohmic electrical conductor
- H01L2924/07811—Extrinsic, i.e. with electrical conductive fillers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/4913—Assembling to base an electrical component, e.g., capacitor, etc.
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/4913—Assembling to base an electrical component, e.g., capacitor, etc.
- Y10T29/49144—Assembling to base an electrical component, e.g., capacitor, etc. by metal fusion
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/53—Means to assemble or disassemble
- Y10T29/5313—Means to assemble electrical device
- Y10T29/53174—Means to fasten electrical component to wiring board, base, or substrate
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Wire Bonding (AREA)
- Supply And Installment Of Electrical Components (AREA)
- Die Bonding (AREA)
Description
図1は本発明の実施の形態1の部品実装装置の斜視図、図2は本発明の実施の形態1の部品実装装置の正面図、図3,図4は本発明の実施の形態1の部品実装方法を示す工程説明図である。
吸引孔18aから真空吸引することにより、下チップ14は実装ステージ18に吸着保持される。
aが溶融して接続用電極14aに半田接合され、これにより上チップ15は下チップ14に実装される。部品実装部5は、上チップ15を実装ヘッド27によって保持して、実装ステージ18に載置された下チップ14に実装する実装手段となっている。
ド27との間に進出させ、認識ユニット30に備えられた2視野光学系によって下チップ14と上チップ15とを同一撮像動作で撮像する。撮像結果は認識手段(図示省略)によって認識処理され、下チップ14の接続用電極14aと上チップ15の半田バンプ15aが認識される(認識工程)。そしてこの認識結果に基づいて、接続用電極14aと半田バンプ15aの位置ずれが検出される。
図5は本発明の実施の形態2の部品実装装置の斜視図、図6は本発明の実施の形態2の部品実装装置の正面図、図7,図8は本発明の実施の形態2の部品実装方法を示す工程説明図である。
段を兼ねた構成となっている。
2 部品収納部
3 部品位置決め部
4 部品移送部
5 部品実装部
6 搬出部
13A 第1の部品トレイ
13B 第2の部品トレイ
14 下チップ
15 上チップ
18 実装ステージ
19 実装体
21 部品移送ヘッド
27 実装ヘッド
33 部品搬出ヘッド
Claims (3)
- 第1の部品に第2の部品を実装する部品実装方法であって、
前記第1の部品を部品移送手段によって部品受渡位置にて実装ステージ上に移載する移載工程と、前記第2の部品を前記部品移送手段によって前記部品受渡位置にて実装ヘッドに受け渡して保持させる保持工程と、前記実装ヘッドによって保持した第2の部品を前記部品受渡位置とは異なる部品実装位置にて前記実装ステージ上の第1の部品に実装する実装工程とを含み、
第2の部品供給部に収納された前記第2の部品を保持する動作と平行して、前記第1の部品が載置された前記実装ステージは前記部品受渡位置から前記部品実装位置に戻ることを特徴とする部品実装方法。 - 前記実装ステージ上の前記第1の部品および前記実装ヘッドによって保持された前記第2の部品を認識手段によって認識する認識工程を含むことを特徴とする請求項1記載の部品実装方法。
- 前記第1の部品に実装された第2の部品を前記実装手段によって保持して第1の部品とともに前記実装ステージから搬出する搬出工程を含むことを特徴とする請求項1記載の部品実装方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005198331A JP4508016B2 (ja) | 2005-07-07 | 2005-07-07 | 部品実装方法 |
US11/426,735 US7281322B2 (en) | 2005-07-07 | 2006-06-27 | Component mounting method |
TW095124619A TW200741899A (en) | 2005-07-07 | 2006-07-06 | Component mounting apparatus and component mounting method |
CNB2006101031799A CN100511615C (zh) | 2005-07-07 | 2006-07-07 | 元件安装装置和元件安装方法 |
KR1020060064118A KR101196789B1 (ko) | 2005-07-07 | 2006-07-07 | 부품 실장 장치 및 부품 실장 방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005198331A JP4508016B2 (ja) | 2005-07-07 | 2005-07-07 | 部品実装方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007019207A JP2007019207A (ja) | 2007-01-25 |
JP4508016B2 true JP4508016B2 (ja) | 2010-07-21 |
Family
ID=37597703
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005198331A Expired - Fee Related JP4508016B2 (ja) | 2005-07-07 | 2005-07-07 | 部品実装方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7281322B2 (ja) |
JP (1) | JP4508016B2 (ja) |
KR (1) | KR101196789B1 (ja) |
CN (1) | CN100511615C (ja) |
TW (1) | TW200741899A (ja) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008120461A1 (ja) * | 2007-04-03 | 2008-10-09 | Panasonic Corporation | 部品実装方法 |
TWI432306B (zh) * | 2008-07-08 | 2014-04-01 | Gala Inc | 利用熱及大氣壓控制之熱塑材料給料系統以達成配方及反應聚合作用之方法及裝置 |
JP5444885B2 (ja) * | 2009-06-29 | 2014-03-19 | 富士通株式会社 | 実装装置及び実装方法 |
JP5702114B2 (ja) * | 2010-11-02 | 2015-04-15 | 芝浦メカトロニクス株式会社 | チップの積層装置及び積層方法 |
CN103962817B (zh) * | 2013-01-30 | 2018-08-07 | 苏州宝时得电动工具有限公司 | 将工作头从动力工具上拆卸下来的操作方法 |
CN104517876B (zh) * | 2013-09-30 | 2018-11-27 | 韩华泰科株式会社 | 封装件运送器组件 |
CN103811361B (zh) * | 2014-03-04 | 2016-06-01 | 广州市明森机电设备有限公司 | 一种智能卡芯片封装装置及封装方法 |
CN106133893B (zh) * | 2014-03-24 | 2018-11-06 | 株式会社富士 | 裸片安装***及裸片安装方法 |
DE102015200414A1 (de) * | 2015-01-14 | 2016-07-14 | Siemens Aktiengesellschaft | Verfahren und System zur Bestückung von Leiterplatten |
JP6705727B2 (ja) * | 2016-09-26 | 2020-06-03 | ファスフォードテクノロジ株式会社 | フリップチップボンダおよび半導体装置の製造方法 |
JP7450429B2 (ja) * | 2020-03-26 | 2024-03-15 | 芝浦メカトロニクス株式会社 | 電子部品の実装装置 |
JP7451259B2 (ja) * | 2020-03-26 | 2024-03-18 | 芝浦メカトロニクス株式会社 | 電子部品の実装装置 |
CN116387209B (zh) * | 2023-06-06 | 2023-09-05 | 北京中科同志科技股份有限公司 | 芯片封装***及芯片封装方法 |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04370945A (ja) * | 1991-06-20 | 1992-12-24 | Fujitsu Ltd | フェースダウンボンディング方法及び装置 |
JP2002026074A (ja) * | 2000-06-30 | 2002-01-25 | Shibaura Mechatronics Corp | ボンディング装置及びボンディング方法 |
JP2003086758A (ja) * | 2001-09-10 | 2003-03-20 | Mitsubishi Electric Corp | 半導体装置の製造方法、製造装置、及び、半導体装置 |
JP2003124238A (ja) * | 2001-10-12 | 2003-04-25 | Matsushita Electric Ind Co Ltd | 電子部品実装装置および電子部品実装方法 |
JP2004119664A (ja) * | 2002-09-26 | 2004-04-15 | Toray Eng Co Ltd | 接合方法および装置 |
JP2005026278A (ja) * | 2003-06-30 | 2005-01-27 | Nikon Corp | チップ積層装置 |
JP2005123638A (ja) * | 2004-11-18 | 2005-05-12 | Matsushita Electric Ind Co Ltd | 電子部品実装装置および電子部品実装方法 |
JP2006093321A (ja) * | 2004-09-22 | 2006-04-06 | Matsushita Electric Ind Co Ltd | 部品実装装置及び部品実装方法 |
JP2007005455A (ja) * | 2005-06-22 | 2007-01-11 | Matsushita Electric Ind Co Ltd | 部品の実装装置および実装方法 |
JP2007019208A (ja) * | 2005-07-07 | 2007-01-25 | Matsushita Electric Ind Co Ltd | 部品実装装置および部品実装方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4617708A (en) * | 1982-12-23 | 1986-10-21 | At&T Technologies, Inc. | Component module for piggyback mounting on a circuit package having dual-in-line leads, and methods of fabricating same |
US4521828A (en) * | 1982-12-23 | 1985-06-04 | At&T Technologies, Inc. | Component module for piggyback mounting on a circuit package having dual-in-line leads |
KR890004820B1 (ko) * | 1984-03-28 | 1989-11-27 | 인터내셔널 비지네스 머신즈 코포레이션 | 배저장밀도의 메모리 모듈 및 보드와 그 형성방법 |
US6205654B1 (en) * | 1992-12-11 | 2001-03-27 | Staktek Group L.P. | Method of manufacturing a surface mount package |
GB9502178D0 (en) | 1995-02-03 | 1995-03-22 | Plessey Semiconductors Ltd | MCM-D Assemblies |
JP3132353B2 (ja) | 1995-08-24 | 2001-02-05 | 松下電器産業株式会社 | チップの搭載装置および搭載方法 |
US6572387B2 (en) * | 1999-09-24 | 2003-06-03 | Staktek Group, L.P. | Flexible circuit connector for stacked chip module |
TW569403B (en) * | 2001-04-12 | 2004-01-01 | Siliconware Precision Industries Co Ltd | Multi-chip module and its manufacturing method |
US6608763B1 (en) * | 2000-09-15 | 2003-08-19 | Staktek Group L.P. | Stacking system and method |
US6462408B1 (en) * | 2001-03-27 | 2002-10-08 | Staktek Group, L.P. | Contact member stacking system and method |
US7196427B2 (en) * | 2005-04-18 | 2007-03-27 | Freescale Semiconductor, Inc. | Structure having an integrated circuit on another integrated circuit with an intervening bent adhesive element |
US7098073B1 (en) * | 2005-04-18 | 2006-08-29 | Freescale Semiconductor, Inc. | Method for stacking an integrated circuit on another integrated circuit |
-
2005
- 2005-07-07 JP JP2005198331A patent/JP4508016B2/ja not_active Expired - Fee Related
-
2006
- 2006-06-27 US US11/426,735 patent/US7281322B2/en active Active
- 2006-07-06 TW TW095124619A patent/TW200741899A/zh unknown
- 2006-07-07 KR KR1020060064118A patent/KR101196789B1/ko not_active IP Right Cessation
- 2006-07-07 CN CNB2006101031799A patent/CN100511615C/zh not_active Expired - Fee Related
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04370945A (ja) * | 1991-06-20 | 1992-12-24 | Fujitsu Ltd | フェースダウンボンディング方法及び装置 |
JP2002026074A (ja) * | 2000-06-30 | 2002-01-25 | Shibaura Mechatronics Corp | ボンディング装置及びボンディング方法 |
JP2003086758A (ja) * | 2001-09-10 | 2003-03-20 | Mitsubishi Electric Corp | 半導体装置の製造方法、製造装置、及び、半導体装置 |
JP2003124238A (ja) * | 2001-10-12 | 2003-04-25 | Matsushita Electric Ind Co Ltd | 電子部品実装装置および電子部品実装方法 |
JP2004119664A (ja) * | 2002-09-26 | 2004-04-15 | Toray Eng Co Ltd | 接合方法および装置 |
JP2005026278A (ja) * | 2003-06-30 | 2005-01-27 | Nikon Corp | チップ積層装置 |
JP2006093321A (ja) * | 2004-09-22 | 2006-04-06 | Matsushita Electric Ind Co Ltd | 部品実装装置及び部品実装方法 |
JP2005123638A (ja) * | 2004-11-18 | 2005-05-12 | Matsushita Electric Ind Co Ltd | 電子部品実装装置および電子部品実装方法 |
JP2007005455A (ja) * | 2005-06-22 | 2007-01-11 | Matsushita Electric Ind Co Ltd | 部品の実装装置および実装方法 |
JP2007019208A (ja) * | 2005-07-07 | 2007-01-25 | Matsushita Electric Ind Co Ltd | 部品実装装置および部品実装方法 |
Also Published As
Publication number | Publication date |
---|---|
TW200741899A (en) | 2007-11-01 |
JP2007019207A (ja) | 2007-01-25 |
CN1893009A (zh) | 2007-01-10 |
US20070006454A1 (en) | 2007-01-11 |
KR20070006620A (ko) | 2007-01-11 |
KR101196789B1 (ko) | 2012-11-05 |
US7281322B2 (en) | 2007-10-16 |
CN100511615C (zh) | 2009-07-08 |
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