JP4127320B2 - 低融点金属粒子の製造方法及びその装置 - Google Patents
低融点金属粒子の製造方法及びその装置 Download PDFInfo
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- JP4127320B2 JP4127320B2 JP2007506950A JP2007506950A JP4127320B2 JP 4127320 B2 JP4127320 B2 JP 4127320B2 JP 2007506950 A JP2007506950 A JP 2007506950A JP 2007506950 A JP2007506950 A JP 2007506950A JP 4127320 B2 JP4127320 B2 JP 4127320B2
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- metal particles
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- liquid
- porous body
- point metal
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Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F9/00—Making metallic powder or suspensions thereof
- B22F9/02—Making metallic powder or suspensions thereof using physical processes
- B22F9/06—Making metallic powder or suspensions thereof using physical processes starting from liquid material
- B22F9/08—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
- B22F1/05—Metallic powder characterised by the size or surface area of the particles
- B22F1/052—Metallic powder characterised by the size or surface area of the particles characterised by a mixture of particles of different sizes or by the particle size distribution
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/02—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
- B23K35/0222—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in soldering, brazing
- B23K35/0244—Powders, particles or spheres; Preforms made therefrom
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/40—Making wire or rods for soldering or welding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F9/00—Making metallic powder or suspensions thereof
- B22F9/02—Making metallic powder or suspensions thereof using physical processes
- B22F9/06—Making metallic powder or suspensions thereof using physical processes starting from liquid material
- B22F9/08—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying
- B22F2009/0804—Dispersion in or on liquid, other than with sieves
- B22F2009/0808—Mechanical dispersion of melt, e.g. by sieves
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Description
ここで近時の電子部品の状況について簡単に説明する。携帯機器の多機能化と小型軽量化に伴い、チップ部品も1005(10mm×5mm)から0603(6mm×3mm)の時代となり、さらに0402(4mm×2mm)と微小化が進んでいる。半導体の加工も主流のワイヤーボンディングから小型化と信号の高速処理を目的にフリップチップ実装が増加傾向となっている。また先端分野では品質・信頼性とともに部品価格の追求が一段と厳しくなっている。フリップチップ実装においてもコストを重視して金バンプからソルダバンプ、ソルダバンプもはんだメッキ・ソルダボールよりもコスト的に有利なソルダペーストによる安定したバンプ形成法が多く研究開発されている。
B 成形室側
T 膜状多孔質体
H 孔
L 耐熱性連続相液体
P 液体金属粉末
G 液体金属粒子
「分散安定剤」は液体金属同士の合一を抑制する作用を示す物質の総称である。
本明細書では積算体積分布の50%径を平均粒径とし、個々の粒子そのものの大きさを粒子の粒径と呼ぶこととする。
本発明は、溶融状態の低融点金属粉末と該低融点金属の融点以上の温度となった耐熱性連続相液体とからなる混合物に一定以上の圧力をかけて、二個以上の孔が連通した膜状多孔質体に該混合物を透過させることにより液体金属粉末を所定の径の液体金属粒子に成形し、その後、該液体金属粒子と耐熱性連続相液体を低融点金属の融点以下に冷却することにより固体金属粒子を得ることを特徴とする低融点金属粒子の製造方法である。
本発明の装置に使用する膜状多孔質体としては、均一な貫通孔を有し、しかも低融点金属の溶融温度で変質したり破壊したりしないものであればよい。膜状多孔質体の細孔は円柱状であっても、角柱状であっても、あるいは他の形状であってもかまわない。また、細孔が膜面に対して垂直あるいは斜めに貫通したり、あるいは絡み合い構造でも粒子は生成する。肝心なのは、細孔の水力学的直径及び有効長さが均一であることであり、こうした細孔構造を有し、液体金属の融点より高い耐熱性がある膜状多孔質体であれば本発明に使用することができる。一般に、膜状多孔質体はパイプ状、或いは平膜型など形状によって多くの種類があり、構造的にも対称膜と非対称膜あるいは均質膜と不均質膜などに分けられるが、そうした形状や構造は本質的に本発明の効果に影響を与えないので、特に制限されない。膜状多孔質体の材質も、例えば、ガラス、セラミックス、シリコン、耐熱性高分子や金属などが挙げられ、接触角が90°を越えて液体金属に濡れないものであれば、特に制限されない。
本発明においては液体金属粉末を膜状多孔質体に圧入するために最低限必要な臨界圧が存在する。該臨界圧以下では混合物中の液体金属粉末が膜状多孔質体によって阻止され、耐熱性連続相液体のみが膜状多孔質体を透過するという濾過の状態になり、やがて膜状多孔質体上に堆積した液体金属粉末により膜状多孔質体の孔が閉塞する。また臨界圧以上であっても、部分的に液体金属粉末の濃度が高い部分が存在すると、そこで液体金属粉末の圧入に要する圧力が増大し、臨界圧以下の場合と同様に閉塞する場合がある。従って、できるだけ液体金属粉末が混合物中で均一に分散した状態で速やかに膜状多孔質体を透過させることが望ましい。
加圧容器4の外側には、電熱ヒーター10が巻回されており、さらに該電熱ヒーターの外側は断熱材11で覆われている。加圧容器4の上部には、気体流入パイプ18を接続した蓋部材19が螺合されており、該気体流入パイプは図示しない気体圧縮源に接続されている。また加圧容器4の内側下部にも攪拌装置である攪拌子12が置かれている。攪拌子12は加圧室4の外側下部に配置された図示しないマグネットローターにより回転するようになっている。
連結パイプ9のボールバルブ8を閉めた状態にしておいて、上記の耐熱性液体と分散安定剤を混合した耐熱性連続相液体Rを混合室1と加圧室4に入れ、それぞれの攪拌子12で攪拌するとともにヒーター11で加熱する。そして耐熱性連続相液体Rの温度が低融点金属粉末の融点付近になったところで、混合室1の耐熱性連続相液体に固体金属粉末を投入し、さらに固体金属粉末の融点以上になるまで加熱する。耐熱性連続相液体中で液状となった液体金属粉末Pが攪拌子12の攪拌で耐熱性連続相液体に均一に分散して混合物Kとなる。この混合物Kの温度が一定になったのを確認してから加圧室4の気体流入パイプ18から窒素ガスボンベを加圧源として加圧室4の耐熱性連続相液体に必要なガス圧をかけ、連結パイプ8のボールバルブ9を開ける。すると加圧室4の耐熱性連続相液体は連結パイプ9から混合室1に流入して、混合物Kを膜状多孔質体に対して一気に透過させて成形室2に流入させる。成形室2に流入した耐熱性連続相液体と液体金属粒子は、成形室2の穴15に接続された排出パイプ16を通って冷却容器5内に入る。冷却容器5は周囲がウオータージャケット20で冷却されているため、冷却容器5に入った耐熱性連続相液体と低融点金属粒子は冷やされ、液体金属粒子は固化する。
低融点金属粉末として実施例4の平均粒径37μmの低融点金属粉末を用い、膜状多孔質体にスキン層の公称細孔径が3μmのパイプ状非対称セラミックス膜(組成Al2O3、東芝セラミックス(株)製)、耐熱性液体は市販の潤滑油、分散安定剤としてショ糖脂肪酸エステル(商品名ER290、三菱化学フーズ(株)製)を5質量%の濃度で使用し、実施例1と同様の手順で低融点金属粒子の製造を行った。ただし、膜状多孔質体を透過させる直前の温度は240℃に設定し、加圧力は4MPaで行った。得られた低融点金属粒子は、平均粒径が2.6μmであり粒径分布も比較的揃ったものが得られた。
Claims (7)
- 溶融状態の低融点金属粉末と、該低融点金属粉末を分散させ、該金属粉末の融点以上の温度となった耐熱性連続相液体とからなる混合物に一定以上の圧力をかけて、二個以上の連通孔を有する膜状多孔質体に該混合物を透過させることにより液体金属粉末を所定の径の液体金属粒子に成形し、その後、該液体金属粒子と耐熱性連続相液体を低融点金属の融点以下に冷却することにより固体金属粒子を得ることを特徴とする低融点金属粒子の製造方法。
- 液体金属粉末の膜に対する透過速度を制御することにより、得られる液体金属粒子の粒径を膜状多孔質体の細孔径と同程度もしくはそれ以下の一定の範囲内において調整することを特徴とする請求項1記載の低融点金属粒子の製造方法。
- 生成した液体金属粒子を繰り返し膜状多孔質体に透過させることにより、より粒径の揃った液体金属粒子を得ることを特徴とする請求項1記載の低融点金属粒子の製造方法。
- 前記耐熱性連続相液体は、鉱物油、植物油、グリコール類のいずれかであることを特徴とする請求項1記載の低融点金属粒子の製造方法。
- 耐熱性連続相液体には、分散安定剤が添加されていることを特徴とする請求項1記載の低融点金属粒子の製造方法。
- 少なくとも、液体金属粉末を耐熱性連続相液体に分散させる分散機構と二個以上の連通した孔を有する膜状多孔質及び膜状多孔質体を透過した液体金属粒子を冷却する冷却機構から成ることを特徴とする低融点金属粒子の製造装置。
- 前記膜状多孔質体は、非対称膜であって、多孔質ガラス、多孔質無機セラミックス、金属多孔質体のいずれかであることを特徴とする請求項6記載の低融点金属粒子の製造装置。
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JP5463845B2 (ja) * | 2009-10-15 | 2014-04-09 | 三菱電機株式会社 | 電力半導体装置とその製造方法 |
CN101985177B (zh) * | 2010-10-21 | 2012-12-19 | 深圳市福英达工业技术有限公司 | 球形低熔点金属粉末的生产方法 |
JP5807421B2 (ja) | 2011-07-19 | 2015-11-10 | 三菱マテリアル株式会社 | はんだ粉末用洗浄剤及びはんだ粉末の製造方法 |
CN103381483B (zh) * | 2012-05-03 | 2016-05-18 | 中国石油化工股份有限公司 | 一种可调整金属锂粒度的分散调节剂及应用 |
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