JP3456235B2 - Anisotropic conductive sheet, circuit board electrical inspection method and electrical inspection apparatus - Google Patents
Anisotropic conductive sheet, circuit board electrical inspection method and electrical inspection apparatusInfo
- Publication number
- JP3456235B2 JP3456235B2 JP27504293A JP27504293A JP3456235B2 JP 3456235 B2 JP3456235 B2 JP 3456235B2 JP 27504293 A JP27504293 A JP 27504293A JP 27504293 A JP27504293 A JP 27504293A JP 3456235 B2 JP3456235 B2 JP 3456235B2
- Authority
- JP
- Japan
- Prior art keywords
- conductive sheet
- anisotropic conductive
- circuit board
- inspected
- sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Description
【発明の詳細な説明】Detailed Description of the Invention
【０００１】[0001]
【発明の属する技術分野】
本発明は、例えばプリント回
路基板などを検査対象としてその電気的性能を検査する
ため、当該検査対象回路基板と電気的検査装置との間の
電気的接続を達成するために用いられる異方導電性シー
ト、回路基板の電気的検査方法および電気的検査装置に
関するものである。 BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is intended to achieve electrical connection between a circuit board to be inspected and an electrical inspection device in order to inspect the electrical performance of the printed circuit board or the like as an inspection object. The present invention relates to an anisotropic conductive sheet , a method for electrically inspecting a circuit board, and an electrical inspecting device used in the above.
【０００２】[0002]
【従来の技術】一般に、プリント回路基板などの回路基
板は、電極数が増加し、高密度化し、それに応じて配線
が複雑化する傾向にある。このため、内層回路基板と外
層回路基板とからなる多層基板が多く用いられるように
なってきている。また、生産性を高める意味から、製造
の際は同一回路基板複数枚を、一枚の基材上に形成し製
造を進める、多面づけが行なわれている。このような内
層回路基板のリード電極と、これに接続すべき他の回路
端子などとの電気的な接続を達成するために、従来、各
リード電極領域上に異方導電性シートを介在させること
が行なわれている。この異方導電性シートは、厚さ方向
にのみ導電性を示すもの、または加圧されたときに厚さ
方向にのみ導電性を示す多数の加圧導電性導電部を有す
るものであり、種々の構造のものが、例えば特公昭５６
−４８９５１号公報、特開昭５１−９３３９３号公報、
特開昭５３−１４７７７２号公報、特開昭５４−１４６
８７３号公報などにより知られている。しかし、上記異
方導電性シートはいずれもシート上任意の点に加圧導電
性導電部を有するものであった。2. Description of the Related Art Generally, a circuit board such as a printed circuit board tends to have an increased number of electrodes and a higher density, and the wiring tends to be complicated accordingly. For this reason, a multilayer substrate including an inner layer circuit board and an outer layer circuit board has been widely used. Further, from the viewpoint of increasing productivity, in manufacturing, a plurality of identical circuit boards are formed on a single base material to proceed with the manufacturing, which is a multifaceted process. In order to achieve such electrical connection between the lead electrodes of the inner layer circuit board and other circuit terminals to be connected thereto, conventionally, an anisotropic conductive sheet is interposed on each lead electrode area. Is being carried out. This anisotropically conductive sheet is one that exhibits conductivity only in the thickness direction, or one that has a large number of pressed conductive parts that exhibit conductivity only in the thickness direction when pressed, and various The structure of is, for example, Japanese Patent Publication Sho 56
-48951, JP-A-51-93393,
JP-A-53-147772, JP-A-54-146
It is known from Japanese Patent No. 873. However, each of the above anisotropically conductive sheets has a pressurizing conductive portion at an arbitrary point on the sheet.
【０００３】[0003]
【発明が解決しようとする課題】しかし、従来のシート
上任意の点に加圧導電性導電部を有する異方導電性シー
トは、内層回路基板のような配線部が露出している回路
基板の検査に対しては、必ずしも十分な性能を発揮し得
なかった。さらに、近年における内層回路基板の配線密
度の微細化および製造の際の多面づけに伴なうサイズの
増大化傾向に対しては、従来の異方導電性シートによる
検査が益々困難なものとなってきている。本発明は以上
のような問題点を解決するものであって、その目的は、
検査対象である回路基板におけるリード電極などの被検
査電極が電極ピッチ微小であり、かつ微細で高密度の複
雑なパターンのものであり、これらのリード電極に接続
された微細な配線が露出されている場合にも、当該回路
基板について所要の電気的接続を確実に達成することが
でき、従って接続信頼性が高く、しかも所要の位置精度
を確保しながら当該回路基板の検査を十分に行なうこと
ができる異方導電性シートを提供することにある。However, an anisotropic conductive sheet having a pressure conductive conductive portion at an arbitrary point on a conventional sheet is not suitable for a circuit board such as an inner layer circuit board where a wiring portion is exposed. It did not always exhibit sufficient performance for inspection. Furthermore, with respect to the recent trend toward miniaturization of wiring density of inner layer circuit boards and increase in size due to multifaceting during manufacturing, it becomes more and more difficult to inspect using a conventional anisotropic conductive sheet. Is coming. The present invention solves the above problems, and its purpose is to:
The electrodes to be inspected such as the lead electrodes on the circuit board to be inspected have a fine electrode pitch, and have a fine and high-density complex pattern, and the fine wiring connected to these lead electrodes is exposed. In this case, the required electrical connection can be reliably achieved for the circuit board, and therefore the connection reliability is high, and the circuit board can be sufficiently inspected while ensuring the required positional accuracy. An object is to provide an anisotropic conductive sheet that can be used.
【０００４】[0004]
【課題を解決するための手段】本発明の異方導電性シー
トは、検査対象回路基板の電気的検査に使用される異方
導電性シートであって、 絶縁部により相互に絶縁された
状態で厚さ方向に伸びる複数の導電部が、一面側におい
て検査対象回路基板の被検査電極に対応した突出部を形
成し、かつ絶縁性で弾性を有する高分子物質中に導電性
粒子が密に充填されてなる異方導電性シート体と、この
異方導電性シート体の前記一面側に一体的に接合され
た、検査対象回路基板の被検査電極に対応した開口部を
有し、弾性を有する高分子物質、熱可塑性樹脂または熱
硬化性樹脂からなる厚さが０．０１〜０．８ｍｍの絶縁
シート体とよりなり、 前記異方導電性シート体の導電部
の突出部が前記絶縁シート体の開口部中に突出して当該
突出部の端部の表面が絶縁シート体の表面とほぼ同一レ
ベルになる形状であることを特徴とする。The anisotropic conductive sheet of the present invention is used for electrical inspection of a circuit board to be inspected.
Conductive sheet, insulated from each other by the insulating part
A plurality of conductive parts, one side odor extending in the thickness direction while
Inspected circuit forms form <br/> a protruding portion corresponding to electrodes to be inspected of the substrate Te, and electrically conductive in a polymer material having elasticity with insulating
An anisotropic conductive sheet body in which particles are densely packed, and
It is integrally joined to the one surface side of the anisotropic conductive sheet body.
In addition, open the opening corresponding to the electrode to be inspected on the circuit board to be inspected.
Having a high elasticity, high molecular substance, thermoplastic resin or heat
Insulation made of curable resin with a thickness of 0.01-0.8 mm
More becomes sheet, the conductive portion of the anisotropic conductive sheet body
The projecting portion of the
The surface of the end of the protrusion is almost the same as the surface of the insulating sheet.
It is characterized by a bell shape .
【０００５】本発明の異方導電性シートによれば、検査
対象回路基板の検査電極に対応した開口部を有する絶縁
シート体が、異方導電性シート体の一面側において一体
的に接合されてなり、各導電部が絶縁シート体の開口部
中に突出してその表面が絶縁シート体の表面とほぼ同一
レベルになる形状で形成されているため、検査対象であ
る回路基板におけるリード電極などの被検査電極が電極
ピッチ微小であり、かつ微細で高密度の複雑なパターン
のものであり、これらのリード電極に接続された微細な
配線が露出されている場合にも、当該回路基板について
所要の電気的接続を確実に達成することができ、従って
接続信頼性が高く、しかも所要の位置精度を確保しなが
ら当該回路基板の検査を十分に行なうことができる。According to the anisotropic conductive sheet of the present invention, inspection
Insulation with openings corresponding to the inspection electrodes of the target circuit board
The sheet body is integrated on one side of the anisotropic conductive sheet body
Are joined together, and each conductive part is an opening of the insulating sheet.
It projects inward and its surface is almost the same as the surface of the insulating sheet
Because it is formed in a shape to be level, the electrodes to be inspected such as a lead electrode in the circuit board to be inspected is the electrode pitch small, and is of fine and dense complex patterns, these lead electrodes Even if the fine wiring connected to is exposed, the required electrical connection can be reliably achieved for the circuit board, and therefore the connection reliability is high and the required position accuracy is ensured. The inspection of the circuit board can be sufficiently performed.
【０００６】また、本発明の異方導電性シートは、異方
導電性シート体の一面側に、検査対象回路基板の被検査
電極に対応した開口部を有する絶縁シート体が一体的に
接合されてなり、異方導電性シート体は、その各導電部
が絶縁シート体の開口部中に突出してその表面が絶縁シ
ート体の表面とほぼ同一レベルになる形状で形成されて
いるため、一対の絶縁シート体間に成形材料層を配し、
当該成形材料層に平行磁場を当該層の厚さ方向にかけて
その磁力によって導電性粒子を移動させながら当該層を
流動させて硬化する際、例えば加圧下で絶縁シート体と
異方導電性シート体とを接合することにより、製造する
ことができる。 The anisotropic conductive sheet of the present invention is an anisotropic conductive sheet.
Inspecting the circuit board to be inspected on one side of the conductive sheet
Insulating sheet body with openings corresponding to the electrodes is integrated
The anisotropically conductive sheet body, which is joined, has its conductive parts
Project into the opening of the insulating sheet and its surface is insulated.
It has a shape that is almost the same level as the surface of the body
Therefore, the molding material layer is placed between the pair of insulating sheets,
A parallel magnetic field is applied to the molding material layer in the thickness direction of the layer.
The magnetic force moves the conductive particles to move the layer.
When it is made to flow and cure, for example, under pressure
Manufacture by joining with anisotropic conductive sheet
be able to.
【０００７】[0007]
【発明の実施の形態】
以下、図面によって本発明を具体
的に説明する。図９および図１０は、本発明に係る異方
導電性シート１１の具体的構成例を示すものであって、
絶縁シート体１が異方導電性シート体８の一面上に配置
されて一体的に接合されている。異方導電性シート体８
においては、その厚さ方向に伸びる複数の導電部１０
が、絶縁部１２により相互に絶縁された状態で、検査対
象回路基板の被検査電極に対応して配置され、各導電部
１０は絶縁シート体１の開口部２中に突出し、この突出
した導電部１０の端部の表面は、絶縁シート体１の表面
とほぼ同一レベルになる形状で形成されている。 BEST MODE FOR CARRYING OUT THE INVENTION The present invention will be described in detail below with reference to the drawings. 9 and 10 show an anisotropic method according to the present invention.
1 shows a specific configuration example of the conductive sheet 11 ,
The insulating sheet body 1 is arranged on one surface of the anisotropic conductive sheet body 8.
Are joined together. Anisotropically conductive sheet body 8
In, the plurality of conductive portions 10 extending in the thickness direction
But in a state of being insulated from each other by the insulating portion 12 is arranged corresponding to the test electrodes of the test object circuit board, the conductive part 10 is protruded into the opening 2 of the insulating sheet body 1, and the protruding The surface of the end portion of the conductive portion 10 is formed in a shape having substantially the same level as the surface of the insulating sheet body 1 .
【０００８】各導電部１０は、絶縁性で弾性を有する高
分子物質４中に導電性粒子５が密に充填されて構成さ
れ、通常、加圧により抵抗値が減少する加圧導電性を有
する。導電部１０における導電性粒子５の充填率は３体
積％以上３０体積％以下、好ましくは５体積％以上２０
体積％以下である。なお、導電性粒子５の充填率が低い
ときは、加圧力を大きくしても抵抗値が減少せず、従っ
て信頼性の高い電気的接続が困難となる。導電部１０の
厚さＤは、０．１〜５ｍｍ、特に０．３〜３ｍｍである
ことが好ましい。導電部１０の厚さＤがこの範囲にあれ
ば、小さな圧力でも有効な導電性が確実に得られる。Each of the conductive parts 10 is formed by densely filling conductive particles 5 in a polymeric substance 4 which is insulative and has elasticity, and usually has a pressure conductivity in which a resistance value is reduced by pressurization. . The filling rate of the conductive particles 5 in the conductive portion 10 is 3 vol% or more and 30 vol% or less, preferably 5 vol% or more 20
Volume% or less. When the filling rate of the conductive particles 5 is low, the resistance value does not decrease even if the applied pressure is increased, and thus reliable electrical connection becomes difficult. The thickness D of the conductive portion 10 is preferably 0.1 to 5 mm, particularly 0.3 to 3 mm. If the thickness D of the conductive portion 10 is within this range, effective conductivity can be reliably obtained even with a small pressure.
【０００９】また、絶縁シート体１の厚さｄは、実用的
には０．０１〜０．８ｍｍ、特に好ましくは０．０２〜
０．２ｍｍである。絶縁シート体１の厚さｄがこの範囲
にあれば、異方導電性シート体８の製造における成形の
際に生じる成形歪みに基づく導電部の位置ずれを回路基
板検査に十分耐える範囲内に抑えることができ、なおか
つ、小さな圧力でも有効な導電性が確実に得られる。絶
縁シート体１の開口部２中に突出した導電部１０の高さ
ｈは、絶縁シート体１の厚さｄと同一であることが好ま
しい。 The thickness d of the insulating sheet 1 is practically 0.01 to 0.8 mm, particularly preferably 0.02.
It is 0.2 mm. If the thickness d of the insulating sheet body 1 is within this range, it is possible to perform molding in the production of the anisotropic conductive sheet body 8.
It is possible to suppress the displacement of the conductive portion due to molding strain that occurs at a time within a range that can sufficiently withstand the inspection of the circuit board, and it is possible to reliably obtain effective conductivity even with a small pressure. Absence
The height h of the conductive portion 10 protruding into the opening 2 of the edge sheet body 1 is preferably the same as the thickness d of the insulating sheet body 1.
Good
【００１０】導電部１０を構成する導電性粒子５として
は、例えばニッケル、鉄、コバルトなどの磁性を示す金
属の粒子もしくはこれらの合金の粒子、またはこれらの
粒子に金、銀、パラジウム、ロジウムなどのメッキを施
したもの、非磁性金属粒子もしくはガラスビーズなどの
無機質粒子またはポリマー粒子にニッケル、コバルトな
どの導電性磁性体のメッキを施したものなどを挙げるこ
とができる。製造コストの低減化を図る観点からは、特
にニッケル、鉄またはこれらの合金の粒子が好ましく、
また接触抵抗が小さいなどの電気的特性の点で金メッキ
された粒子を好ましく用いることができる。The conductive particles 5 constituting the conductive portion 10 are, for example, particles of a metal exhibiting magnetism such as nickel, iron and cobalt, particles of an alloy thereof, or gold, silver, palladium, rhodium and the like. And non-magnetic metal particles or glass beads or other inorganic particles or polymer particles plated with a conductive magnetic material such as nickel or cobalt. From the viewpoint of reducing the manufacturing cost, particles of nickel, iron or alloys thereof are particularly preferable,
In addition, gold-plated particles can be preferably used in terms of electrical characteristics such as low contact resistance.
【００１１】導電性粒子５の粒径は、導電部１０におい
て導電性粒子間の電気的な接触を十分なものとし、かつ
導電部１０の接触安定性を十分保つ観点から、１０〜４
００μｍが好ましく、特に２０〜１００μｍが好まし
い。The particle size of the conductive particles 5 is 10 to 4 from the viewpoint of ensuring sufficient electrical contact between the conductive particles in the conductive portion 10 and maintaining sufficient contact stability of the conductive portion 10.
00 μm is preferable, and 20 to 100 μm is particularly preferable.
【００１２】導電部１０を構成する絶縁性で弾性を有す
る高分子物質としては、架橋構造の高分子物質が好まし
く、かかる架橋構造の高分子物質を得るために用いるこ
とができる未架橋の高分子材料としては、シリコーンゴ
ム、ポリブタジエン、天然ゴム、ポリイソプレン、スチ
レン−ブタジエン共重合体ゴム、アクリロニトリル−ブ
タジエン共重合体ゴム、エチレン−プロピレン共重合体
ゴム、ウレタンゴム、ポリエステル系ゴム、クロロプレ
ンゴム、エピクロルヒドリンゴムなどを挙げることがで
きる。As the insulating and elastic polymer substance forming the conductive portion 10, a polymer substance having a crosslinked structure is preferable, and an uncrosslinked polymer that can be used to obtain the polymer substance having such a crosslinked structure. Materials include silicone rubber, polybutadiene, natural rubber, polyisoprene, styrene-butadiene copolymer rubber, acrylonitrile-butadiene copolymer rubber, ethylene-propylene copolymer rubber, urethane rubber, polyester rubber, chloroprene rubber, epichlorohydrin. Examples thereof include rubber.
【００１３】また、絶縁シート体１としては、異方導電
性シート体８の導電部１０を構成す るものとして挙げら
れた前記の絶縁性で弾性を有する高分子物質や、熱可塑
性樹脂、例えばポリエチレンテレフタレート樹脂、塩化
ビニル樹脂、ポリスチレン樹脂、ポリアクリロニトリル
樹脂、ポリエチレン樹脂、アクリル樹脂、ポリブタジエ
ン樹脂などや、熱硬化性樹脂、例えばポリイミド樹脂、
エポキシ樹脂などが用いられる。The insulating sheet body 1 is made of anisotropic conductive material.
Et al mentioned as shall make up the conductive section 10 of the sexual sheet 8
The above-mentioned insulating and elastic polymer substance, thermoplastic resin such as polyethylene terephthalate resin, vinyl chloride resin, polystyrene resin, polyacrylonitrile resin, polyethylene resin, acrylic resin, polybutadiene resin, or thermosetting resin , For example, polyimide resin,
Epoxy resin or the like is used.
【００１４】次に、本発明の異方導電性シートの製造方
法について説明する。図１は、検査対象回路基板の被検
査電極に対応した開口部が形成された状態の２枚の絶縁
シート体を示す説明用斜視図、図２は同じく説明用断面
図、図３は、開口部が形成された２枚の絶縁シート体に
粘着シートが貼付された状態を示す説明用断面図、図４
は、磁性を有する導電性粒子と高分子材料との混合物か
らなる成形材料の層を、粘着シートが貼付された２枚の
絶縁シート体の間に配置した状態を示す説明用断面図、
図５は、図４の成形材料の層に、加圧力および平行磁場
を作用させる状態を示す説明用断面図である。 Next, a method for producing the anisotropic conductive sheet of the present invention
The method will be explained. Figure 1 shows the inspection of the circuit board to be inspected.
Insulation of two sheets with an opening corresponding to the inspection electrode
An explanatory perspective view showing a sheet body, and FIG.
Figures and 3 show two insulating sheets with openings.
An explanatory cross-sectional view showing a state in which the adhesive sheet is attached, FIG.
Is a mixture of magnetically conductive particles and polymeric material
The layer of the molding material consisting of
An explanatory cross-sectional view showing a state of being arranged between the insulating sheet bodies,
FIG. 5 shows that the layer of the molding material of FIG.
FIG. 6 is an explanatory cross-sectional view showing a state in which is applied.
【００１５】図１および図２に示すように、絶縁シート
体１には、検査対象回路基板の被検査電極に対応する部
分に、被検査電極の幅とほぼ同一の径を有する円形の開
口部２が、ＮＣ制御のドリル穴あけ装置、またはエキシ
マレーザー光を光源とするレーザー加工装置などを用い
て形成されている。このような絶縁シート体１を２枚用
意する。６はガイド穴である。 As shown in FIGS. 1 and 2, the insulating sheet
The body 1 has a portion corresponding to the electrode to be inspected of the circuit board to be inspected.
In addition , a circular opening with a diameter almost the same as the width of the electrode to be inspected
The mouth part 2 uses an NC-controlled drilling device or a laser processing device using an excimer laser light as a light source.
Is formed. For two such insulating sheet bodies 1
I mean. 6 is a guide hole.
【００１６】次に、図３に示すように、これらの絶縁シ
ート体１の開口部２上およびその周辺を、表面が平滑で
厚みが均一な粘着シート３で覆い、ガイドピンなどによ
り、２枚の絶縁シート体１の対応する開口部２が向き合
うように位置合わせをした状態で、図４に示すように、
磁性を有する導電性粒子５と、高分子物質４となる高分
子材料４Ａとの混合物からなる成形材料の層（「混合物
シート」ともいう。）を形成して異方導電性シート用材
料層２０を得る。 [0016] Next, as shown in FIG. 3, these insulating sheet
The adhesive sheet 3 having a smooth surface and a uniform thickness covers the opening 2 of the package body 1 and its periphery so that the corresponding openings 2 of the two insulating sheet bodies 1 face each other by a guide pin or the like. With the alignment done, as shown in Figure 4 ,
Conductive particles 5 having magnetism and high content which becomes the polymer substance 4
Layer of molding material consisting of a mixture with child material 4A (“Mixture
Also called a "sheet". ) To form anisotropic conductive sheet material
The material layer 20 is obtained.
【００１７】次いで、図５に示すように、２枚の絶縁シ
ート体１と成形材料の層からなる異 方導電性シート用材
料層２０を加圧して成形材料を流動させて当該混合物シ
ートの外形を変化させつつ、平行磁場を当該混合物シー
トの厚さ方向にかけて、その磁力によって導電性粒子５
を当該混合物シートの厚さ方向に配向させながら当該成
形材料を硬化させて、２枚の絶縁シート体１と硬化した
成形材料層が一体化した図８に示す異方導電性シート用
材料層一体化物２０Ａを製造する。なお、混合物シート
の外形を変化させた後に成形材料を硬化させるための手
段としては、一般的には架橋が用いられる。次に、図９
に示すように、粘着シート３の両方および絶縁シート体
１の片方を除去して異方導電性シート１１を製造する。[0017] Then, as shown in FIG. 5, two insulation sheet
Anisotropically conductive sheet timber where the over preparative body 1 consists of a layer of the molding material
The material layer 20 is pressurized to cause the molding material to flow and the mixture mixture
A parallel magnetic field is applied to the mixture while changing the outer shape of the sheet.
Conductive particles 5 are applied by the magnetic force in the thickness direction of the
While were oriented in the thickness direction of the mixture sheet the formation
For the anisotropic conductive sheet shown in Fig. 8, in which the shaped material is cured to integrate the two insulating sheet bodies 1 and the cured molding material layer
The material layer integrated product 20A is manufactured. Cross-linking is generally used as a means for curing the molding material after changing the outer shape of the mixture sheet. Next, FIG.
As shown in , both the adhesive sheet 3 and the insulating sheet body
One side of 1 is removed and the anisotropic conductive sheet 11 is manufactured.
【００１８】図５の金型は、各々電磁石を構成する上型
２１と下型２２よりなり、上型２１と下型２２には、検
査対象回路基板の被検査電極に対応したパターンの強磁
性体部分Ｍと、それ以外の非磁性体部分Ｎとよりなる、
表面が平坦面である磁極板２３および磁極板２４が設け
られている。 The mold of FIG . 5 is an upper mold that constitutes an electromagnet.
21 and the lower die 22, and the upper die 21 and the lower die 22 are inspected.
Strong magnetism of the pattern corresponding to the electrode to be inspected on the circuit board to be inspected
Consisting of the body portion M and the other non-magnetic portion N,
A magnetic pole plate 23 and a magnetic pole plate 24 having flat surfaces are provided.
Has been.
【００１９】磁極板２３および磁極板２４の代わりに、
図６に示すように、検査対象回路基板の被検査電極に対
応したパターンの強磁性体部分Ｍと、それ以外の非磁性
体部分Ｎとよりなり、当該上型２１の下面および下型２
２の上面において、強磁性体部分Ｍが非磁性体部分Ｎよ
り突出した磁性板２５および磁性板２６を用いることも
できる。この場合には、異方導電性シート用材料層２０
に対しては、検査対象回路基板の被検査電極に対応して
配置された導電部において、より強い平行磁場が作用さ
れることになる。 Instead of the pole plate 23 and the pole plate 24,
As shown in FIG. 6, the electrodes to be inspected on the circuit board to be inspected are
Ferromagnetic part M of the corresponding pattern and other non-magnetic parts
The lower part of the upper mold 21 and the lower mold 2 which are composed of the body part N
On the upper surface of 2, the ferromagnetic material portion M is not the non-magnetic material portion N.
It is also possible to use the magnetic plate 25 and the magnetic plate 26 which are projected.
it can. In this case, the anisotropic conductive sheet material layer 20
For the corresponding electrodes to be inspected on the circuit board to be inspected
A stronger parallel magnetic field acts on the arranged conductive parts.
Will be done.
【００２０】また、磁極板２３および磁極板２４の代わ
りに、図７に示すように、表面が平滑で厚みの均一な強
磁性体の板２７および２８を用いることもできる。この
場合には、異方導電性シート用材料層２０の任意の点に
おいて均一な平行磁場が作用されることになる。この場
合、形成された異方導電性シートにおける検査対象回路
基板の被検査電極に対応して配置された導電部における
電気抵抗値は、磁極板２３および磁極板２４または磁極
板２５および磁極板２６を用いて成形した場合に比べ
て、やや高い値を示す。 Further , instead of the magnetic pole plate 23 and the magnetic pole plate 24,
In addition, as shown in Fig. 7, the surface is smooth and the strength is uniform.
It is also possible to use magnetic plates 27 and 28. this
In some cases, at any point of the anisotropic conductive sheet material layer 20.
Here, a uniform parallel magnetic field is applied. This place
Circuit in the formed anisotropic conductive sheet
In the conductive part arranged corresponding to the electrode to be inspected on the board
The electric resistance value is the magnetic pole plate 23 and the magnetic pole plate 24 or the magnetic pole.
Compared to the case of molding using the plate 25 and the pole plate 26
It shows a slightly high value.
【００２１】以下、本発明の実施例を説明するが、本発
明はこれらの実施例に限定されるものではない。Examples of the present invention will be described below, but the present invention is not limited to these examples.
【００２２】[0022]
【実施例】厚さ０．０５ｍｍ、縦３００ｍｍ、横４００
ｍｍのポリエチレンテレフタレートシートを２枚重ね
て、ＮＣ制御のドリル穴あけ装置で、検査対象回路基板
の被検査電極に対応した位置に、０．２ｍｍの径を有す
る穴による開口部２と、シートの四隅に３．０ｍｍの径
を有するガイド穴６を４点あけ（図１、２参照）、２枚
の絶縁シート体１を形成した。次に、この２枚の絶縁シ
ート体１のガイド穴６を除く開口部２上およびその周辺
を、それぞれ厚さ０．０５ｍｍのポリイミド製粘着シー
ト３で覆った（図３参照）。次に、２枚の絶縁シート体
１のうち１枚には、その表面を＃６００のサンドペーパ
ーで粗面化した後、その表面に熱硬化型のシリコーンゴ
ムを薄く塗布した。[Example] Thickness 0.05 mm, length 300 mm, width 400
2 sheets of polyethylene terephthalate sheet are piled up, and an NC controlled drilling device is used to form an opening 2 with a hole having a diameter of 0.2 mm at the position corresponding to the electrode to be inspected on the circuit board to be inspected and four corners of the sheet. Four guide holes 6 having a diameter of 3.0 mm are formed in the hole (see Figs. 1 and 2), and two
The insulating sheet body 1 was formed. Next, these two insulation sheets
A 0.05 mm-thick polyimide adhesive sheet is formed on and around the opening 2 except the guide hole 6 of the base body 1.
It was covered with grate 3 (see FIG. 3). Next, two insulating sheets
The one of the 1, the after roughening with a # 600 sand paper surface was coated thinly silicone rubber thermosetting its surface.
【００２３】次に、室温硬化型シリコーンゴムに平均粒
径４０μｍの金メッキしたニッケルよりなる磁性体導電
性粒子５を１２体積％となる割合で混合してなる成形材
料を調製し、これを上記の一対の絶縁シート体間に配置
して異方導電性シート用材料層２０を形成し、これを金
型のキャビティ内に配置した。この金型は、各々電磁石
を構成する上型２１と下型２２よりなり、上型２１と下
型２２には、検査対象回路基板の被検査電極に対応した
パターンの強磁性体部分Ｍと、それ以外の非磁性体部分
Ｎとよりなる、表面が平坦面である磁極板２３および磁
極板２４が設けられたものである。この磁極板２３およ
び磁極板２４の強磁性体部分Ｍと、異方導電性シート用
材料層２０の絶縁シート体１の開口部２とが重なるよう
にガイドピンにより位置合わせを行なった（図５参
照）。この状態で上型２１と下型２２の電磁石を動作さ
せ、これにより異方導電性シート用材料層２０の厚さ方
向に加圧力と平行磁場を作用させて、この状態で６０℃
で８時間放置して硬化させた後、ポリイミド製粘着テー
プ３および一対の絶縁シート体１の片方を除去し、１枚
の絶縁シート体１と、硬化した成形材料による異方導電
性シート体８が一体化し た異方導電性シート１１を製造
した。Next, a magnetic conductive material made of nickel plated with gold having an average particle size of 40 μm on room temperature curable silicone rubber.
A molding material prepared by mixing the conductive particles 5 in a ratio of 12% by volume is arranged between the pair of insulating sheet bodies to form the anisotropic conductive sheet material layer 20, and Money
It was placed in the mold cavity. This mold is composed of an upper mold 21 and a lower mold 22 which respectively form an electromagnet, and the upper mold 21 and the lower mold 22 each have a ferromagnetic portion M having a pattern corresponding to an electrode to be inspected of a circuit board to be inspected. The magnetic pole plate 23 and the magnetic pole plate 24, which are made of the other non-magnetic material portion N and have a flat surface, are provided . For the ferromagnetic material portion M of the magnetic pole plate 23 and the magnetic pole plate 24 and for the anisotropic conductive sheet
Positioning was performed with the guide pin so that the material layer 20 overlapped with the opening 2 of the insulating sheet body 1 (see FIG. 5). In this state, the electromagnets of the upper die 21 and the lower die 22 are operated, thereby applying a pressing force and a parallel magnetic field in the thickness direction of the anisotropic conductive sheet material layer 20 , and in this state, 60 ° C.
After leaving it for 8 hours to cure, the polyimide adhesive tape
Removing the one of the flops 3 and a pair of the insulating sheet body 1, and one of the insulating sheet body 1, the anisotropic conductive by the cured molding material
An anisotropic conductive sheet 11 in which the conductive sheet body 8 is integrated was manufactured.
【００２４】以上の実施例で得られた異方導電性シート
を用いて、図１１に示した構成で電気的検査を行なっ
た。図１１において、６１は検査ヘッド、６２は異方導
電性シート、６３はオフグリッドアダプター、６４は検
査対象のプリント回路基板、６４Ａは被検査電極、６５
は検査電極である。 この例の異方導電性シート６２は、
厚さ方向に複数の導電部を有し、表面が平坦なものであ
る。 検査対象のプリント回路基板６４の配線部はすべて
露出されており、配線および被検査電極の最小ピッチが
０．５ｍｍと微細であったが、十分な性能をもって検査
対象回路基板の電気的導通およびショートの検査を行な
うことができた。 Anisotropically conductive sheet obtained in the above examples
Was used to perform an electrical inspection with the configuration shown in FIG. In FIG. 11, 61 is an inspection head, and 62 is an anisotropic guide.
Electrical sheet, 63 for off-grid adapter, 64 for inspection
Printed circuit board to be inspected, 64A is electrode to be inspected, 65
Is an inspection electrode. The anisotropic conductive sheet 62 of this example is
A flat surface with multiple conductive parts in the thickness direction.
It All the wiring parts of the printed circuit board 64 to be inspected are exposed, and the minimum pitch of the wiring and the electrodes to be inspected was as small as 0.5 mm, but the electrical continuity and short circuit of the circuit board to be inspected with sufficient performance. The inspection of
I was able to
【００２５】[0025]
【発明の効果】本発明の異方導電性シートによれば、検
査対象回路基板の検査電極に対応した開口部を有する絶
縁シート体が、異方導電性シート体の一面側において一
体的に接合されてなり、各導電部が絶縁シート体の開口
部中に突出してその表面が絶縁シート体の表面とほぼ同
一レベルになる形状で形成されているため、検査対象で
ある回路基板におけるリード電極などの被検査電極が電
極ピッチ微小であり、かつ微細で高密度の複雑なパター
ンのものであり、これらのリード電極に接続された微細
な配線が露出されている場合にも、当該回路基板につい
て所要の電気的接続を確実に達成することができ、従っ
て接続信頼性が高く、しかも所要の位置精度を確保しな
がら当該回路基板の検査を十分に行なうことができる。According to the anisotropic conductive sheet of the present invention, it is possible to detect
Insulation with an opening corresponding to the inspection electrode of the circuit board to be inspected
The edge sheet body is placed on one side of the anisotropically conductive sheet body.
Physically joined, each conductive part is an opening in the insulating sheet
And the surface is almost the same as the surface of the insulating sheet.
Since the electrodes to be inspected such as the lead electrodes on the circuit board to be inspected have a fine electrode pitch and have a fine and high-density complex pattern because they are formed in the shape of one level, Even if the fine wiring connected to the electrodes is exposed, the required electrical connection can be reliably achieved for the circuit board, and therefore the connection reliability is high and the required position accuracy is ensured. However, the circuit board can be sufficiently inspected.
【００２６】また、本発明の異方導電性シートは、異方
導電性シート体の一面側に、検査対象回路基板の被検査
電極に対応した開口部を有する絶縁シート体が一体的に
接合されてなり、異方導電性シート体は、その各導電部
が絶縁シート体の開口部中に突出してその表面が絶縁シ
ート体の表面とほぼ同一レベルになる形状で形成されて
いるため、一対の絶縁シート体間に成形材料層を配し、
当該成形材料層に平行磁場を当該層の厚さ方向にかけて
その磁力によって導電性粒子を移動させながら 当該層を
流動させて硬化する際、例えば加圧下で絶縁シート体と
異方導電性シート体とを接合することにより、製造する
ことができる。 The anisotropic conductive sheet of the present invention is anisotropic.
Inspecting the circuit board to be inspected on one side of the conductive sheet
Insulating sheet body with openings corresponding to the electrodes is integrated
The anisotropically conductive sheet body, which is joined, has its conductive parts
Project into the opening of the insulating sheet and its surface is insulated.
It has a shape that is almost the same level as the surface of the body
Therefore, the molding material layer is placed between the pair of insulating sheets,
A parallel magnetic field is applied to the molding material layer in the thickness direction of the layer.
The magnetic force moves the conductive particles to move the layer.
When it is made to flow and cure, for example, under pressure
Manufacture by joining with anisotropic conductive sheet
be able to.
【図１】本発明の実施例において、検査対象回路基板の
被検査電極に対応した開口部が形成された状態の２枚の
絶縁シート体を示す説明用斜視図である。 FIG. 1 is a plan view showing an embodiment of the present invention, in which two opening portions corresponding to electrodes to be inspected of a circuit board to be inspected are formed .
It is an explanatory perspective view showing an insulating sheet body.
【図２】実施例において、検査対象回路基板の被検査電
極に対応した開口部が形成された状態の２枚の絶縁シー
ト体を示す説明用断面図である。FIG. 2 is a view showing an example in which two insulating sheets having openings corresponding to electrodes to be inspected of a circuit board to be inspected are formed in the embodiment.
It is an explanatory sectional view showing the tongue body .
【図３】実施例において、２枚の絶縁シート体に、粘着
シートが貼付された状態を示す説明用断面図である。FIG. 3 is an explanatory cross-sectional view showing a state where an adhesive sheet is attached to two insulating sheet bodies in an example.
【図４】実施例において、磁性を有する導電性粒子と高
分子材料との混合物からなる成形材料の層を、粘着シー
トが貼付された２枚の絶縁シート体の間に配置した状態
を示す説明用断面図である。FIG. 4 is a view showing a state in which a layer of a molding material made of a mixture of conductive particles having magnetism and a polymer material is arranged between two insulating sheet bodies to which an adhesive sheet is stuck, in Examples . FIG.
【図５】図４の成形材料の層に、加圧力および平行磁場
を作用させる状態を示す説明用断面図である。FIG. 5 is a diagram showing a layer of the molding material of FIG .
FIG. 6 is an explanatory cross-sectional view showing a state in which is applied.
【図６】他の磁極板を有する金型を用いた場合におけ
る、図５と同様の状態を示す説明用断面図である。FIG. 6 Only when a mold having another magnetic pole plate is used
FIG. 6 is an explanatory sectional view showing a state similar to that of FIG. 5 .
【図７】磁極板の代わりに強磁性体の板を有する金型を
用いた場合における、図５と同様の状態を示す説明用断
面図である。FIG. 7 shows a mold having a ferromagnetic plate instead of a magnetic pole plate .
FIG. 6 is an explanatory cross-sectional view showing a state similar to that of FIG. 5 when used .
【図８】実施例において、絶縁シート体と異方導電性シ
ート体とが一体化成形された異方導電性シート用材料層
一体化物を示す説明用断面図である。FIG. 8 shows an insulating sheet member and an anisotropic conductive sheet in the embodiment .
Material layer for anisotropically conductive sheet integrally formed with sheet body
It is an explanatory sectional view showing an integrated product .
【図９】図８の異方導電性シート用材料層一体化物より
粘着シートの両方および絶縁シート体の片方が除去され
て、完成した異方導電性シートを示す説明用断面図であ
る。9 is a view of the material layer integrated with the anisotropic conductive sheet of FIG .
FIG. 3 is an explanatory cross-sectional view showing a completed anisotropically conductive sheet in which both the pressure-sensitive adhesive sheet and one of the insulating sheet bodies are removed.
【図１０】図８の異方導電性シート用材料層一体化物よ
り粘着シートの両方および絶縁シート体の片方が除去さ
れて、完成した異方導電性シートを示す説明用斜視図で
ある。FIG. 10 is an integrated material layer for an anisotropic conductive sheet of FIG.
FIG. 3 is an explanatory perspective view showing a completed anisotropic conductive sheet in which both the adhesive sheet and one of the insulating sheet bodies are removed.
【図１１】実施例において製作した異方導電性シートを
用いた電気的検査を行なう装置の構成を示す説明用断面
図である。FIG. 11 is an explanatory cross-sectional view showing the configuration of an apparatus that performs an electrical inspection using the anisotropic conductive sheet manufactured in the example.
【符号の説明】 １ 絶縁シート体 ２ 開口部 ３ 粘着シート ４ 絶縁性で弾性を有する高分子物質４Ａ 高分子材料 ５ 導電性粒子 ６ ガイド穴 ７ スペーサー８ 異方導電性シート体 １０ 導電部 １１ 異方導電性シート１２ 絶縁部 ２０ 異方導電性シート用材料層 ２０Ａ 異方導電性シート用材料層一体化物 ２１ 上型 ２２ 下型 ２３ 磁極板 ２４ 磁極板 ２５ 磁極板 ２６ 磁極板 ２７ 磁極板 ２８ 磁極板 Ｍ 強磁性体部分 Ｎ 非磁性体部分 ６１ 検査ヘッド ６２ 異方導電性シート ６３ オフグリッドアダプター ６４ プリント回路基板 ６４Ａ 被検査電極 ６５ 検査電極[Explanation of reference numerals] 1 Insulating sheet body 2 Opening portion 3 Adhesive sheet 4 Insulating and elastic polymer substance 4A Polymer material 5 Conductive particles 6 Guide holes 7 Spacer 8 Anisotropic conductive sheet body 10 Conductive portion 11 Different Directional conductive sheet 12 Insulating portion 20 Material layer for anisotropic conductive sheet 20A Integrated material layer for anisotropic conductive sheet 21 Upper mold 22 Lower mold 23 Magnetic pole plate 24 Magnetic pole plate 25 Magnetic pole plate 26 Magnetic pole plate 27 Magnetic pole plate 28 Magnetic pole Plate M Ferromagnetic part N Non-magnetic part 61 Inspection head 62 Anisotropically conductive sheet 63 Off-grid adapter 64 Printed circuit board 64A Inspected electrode 65 Inspected electrode
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平３−183974（ＪＰ，Ａ) 特開 昭62−232805（ＪＰ，Ａ) 特開 平５−36755（ＪＰ，Ａ) 特開 平４−151889（ＪＰ，Ａ) 実開 平５−50365（ＪＰ，Ｕ) (58)調査した分野(Int.Cl.7，ＤＢ名) H01B 5/16 G01R 31/28 H01R 11/01 H01B 13/00 501 H05K 3/00 ─────────────────────────────────────────────────── --- Continuation of the front page (56) Reference JP-A-3-183974 (JP, A) JP-A-62-232805 (JP, A) JP-A-5-36755 (JP, A) JP-A-4- 151889 (JP, A) Actual Kaihei 5-50365 (JP, U) (58) Fields investigated (Int.Cl. 7 , DB name) H01B 5/16 G01R 31/28 H01R 11/01 H01B 13/00 501 H05K 3/00
Claims (5)
れる異方導電性シートであって、絶縁部により相互に絶縁された状態で 厚さ方向に伸びる
複数の導電部が、一面側において検査対象回路基板の被
検査電極に対応した突出部を形成し、かつ絶縁性で弾性
を有する高分子物質中に導電性粒子が密に充填されてな
る異方導電性シート体と、この異方導電性シート体の前
記一面側に一体的に接合された、検査対象回路基板の被
検査電極に対応した開口部を有し、弾性を有する高分子
物質、熱可塑性樹脂または熱硬化性樹脂からなる厚さが
０．０１〜０．８ｍｍの絶縁シート体とよりなり、 前記異方導電性シート体の導電部の突出部が前記絶縁シ
ート体の開口部中に突出して当該突出部の端部の表面が
絶縁シート体の表面とほぼ同一レベルになる形状である
ことを特徴とする異方導電性シート。1. An anisotropic conductive sheet used for electrical inspection of a circuit board to be inspected, wherein a plurality of conductive portions extending in a thickness direction in a state of being insulated from each other by an insulating portion are provided on one surface side. Insulation and elasticity are formed by forming protrusions corresponding to the electrodes to be inspected on the circuit board to be inspected.
Conductive particles should not be densely packed in a polymer substance having
The anisotropic conductive sheet body and the anisotropic conductive sheet body
The circuit board to be inspected, which is integrally bonded to one side
Polymer with elasticity that has an opening corresponding to the inspection electrode
The thickness of the material, thermoplastic or thermosetting resin
The insulating sheet body has a thickness of 0.01 to 0.8 mm, and the protruding portion of the conductive portion of the anisotropically conductive sheet body has the insulating sheet body .
The surface of the end portion of the projecting portion is projected by projecting into the opening of the body.
An anisotropically conductive sheet having a shape that is substantially at the same level as the surface of the insulating sheet body .
弾性を有する高分子物質がシリコーンゴムであることを
特徴とする請求項１に記載の異方導電性シート。2. An insulating material which constitutes an anisotropic conductive sheet body.
That the polymeric material with elasticity is silicone rubber
The anisotropic conductive sheet according to claim 1, which is characterized in that.
０．１〜５ｍｍであることを特徴とする請求項１または
請求項２に記載の異方導電性シート。3. The thickness of the conductive portion of the anisotropic conductive sheet body is
It is 0.1-5 mm, or 1 characterized by the above-mentioned.
The anisotropic conductive sheet according to claim 2 .
された異方導電性シートを使用して行われることを特徴
とする回路基板の電気的検査方法。 4. The method according to any one of claims 1 to 3.
Characterized in that it is performed using the anisotropic conductive sheet
Electrical inspection method for circuit boards.
された異方導電性シートが、検査対象回路基板と検査ヘ
ッドとの間に介在されることを特徴とする回路基板の電
気的検査装置。 5. The method according to any one of claims 1 to 3.
The anisotropic conductive sheet that has been
Circuit board characterized by being interposed between the
Physical examination device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27504293A JP3456235B2 (en) | 1993-10-06 | 1993-10-06 | Anisotropic conductive sheet, circuit board electrical inspection method and electrical inspection apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27504293A JP3456235B2 (en) | 1993-10-06 | 1993-10-06 | Anisotropic conductive sheet, circuit board electrical inspection method and electrical inspection apparatus |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002102631A Division JP3589228B2 (en) | 2002-04-04 | 2002-04-04 | Method for producing anisotropic conductive sheet |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07105741A JPH07105741A (en) | 1995-04-21 |
| JP3456235B2 true JP3456235B2 (en) | 2003-10-14 |
Family
ID=17550057
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27504293A Expired - Fee Related JP3456235B2 (en) | 1993-10-06 | 1993-10-06 | Anisotropic conductive sheet, circuit board electrical inspection method and electrical inspection apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3456235B2 (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6103359A (en) * | 1996-05-22 | 2000-08-15 | Jsr Corporation | Process and apparatus for manufacturing an anisotropic conductor sheet and a magnetic mold piece for the same |
| JP2002025351A (en) * | 2000-07-10 | 2002-01-25 | Jsr Corp | Anisotropic conduction sheet and manufacturing method of the same, and electric inspection device for circuit device |
| US6849335B2 (en) | 2000-08-09 | 2005-02-01 | Jsr Corporation | Anisotropic conductive sheet |
| US7279914B2 (en) | 2003-01-17 | 2007-10-09 | Jsr Corporation | Circuit board checker and circuit board checking method |
| JP4397774B2 (en) | 2004-09-27 | 2010-01-13 | 日東電工株式会社 | Method for manufacturing anisotropic conductive sheet |
| JP5081534B2 (en) * | 2007-08-23 | 2012-11-28 | ポリマテック株式会社 | Anisotropic conductive connector |
| JP5523181B2 (en) * | 2010-04-15 | 2014-06-18 | 信越ポリマー株式会社 | Anisotropic conductive sheet, circuit board electrical inspection method, and circuit board electrical inspection apparatus |
| JP5624396B2 (en) * | 2010-07-28 | 2014-11-12 | 信越ポリマー株式会社 | Anisotropic conductive sheet and method for producing anisotropic conductive sheet |
| JP2013195331A (en) * | 2012-03-22 | 2013-09-30 | Jsr Corp | Anisotropic conductive sheet and its application |
-
1993
- 1993-10-06 JP JP27504293A patent/JP3456235B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07105741A (en) | 1995-04-21 |
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