JP2021180317A - 素子アレイの製造方法と特定素子の除去方法 - Google Patents
素子アレイの製造方法と特定素子の除去方法 Download PDFInfo
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- JP2021180317A JP2021180317A JP2021112857A JP2021112857A JP2021180317A JP 2021180317 A JP2021180317 A JP 2021180317A JP 2021112857 A JP2021112857 A JP 2021112857A JP 2021112857 A JP2021112857 A JP 2021112857A JP 2021180317 A JP2021180317 A JP 2021180317A
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Abstract
Description
そこで、基板上に等間隔で形成した微小な発光ダイオード素子を選択的に剥離して、他の基板に対して素子を転写する技術が提案されている(たとえば特許文献1参照)。
粘着性シートの粘着層の表面に、所定の配列で素子を並べて付着させる工程と、
所定の配列で並べられた素子の内、特定の素子にレーザを照射し、前記特定の素子を前記粘着シートから除去する工程と、
前記粘着シートの表面に付着してある所定配列の素子を、直接または間接的に実装用基板上に転写する工程と、を有する。
素子形成用基板上に、前記素子を所定の配列で作り込む工程と、
前記素子形成用基板上に作り込まれた所定の配列の前記素子を、前記粘着性シートの粘着層の表面に転写する工程と、をさらに有してもよい。
粘着性シートの粘着層の表面に、所定の配列で素子を並べて付着させる工程と、
所定の配列で並べられた素子の内、特定の素子にレーザを照射し、前記特定の素子を前記粘着シートから除去し、前記粘着シートの表面には、その他の素子を残す工程と、を有する。
法に限定されず、粘着力の差を用いた転写、 加熱剥離を伴う転写などの方法でもよい。
マレーザ、UVレーザなどが用いられる。レーザの波長や除去に係るエネルギーを考慮するとYAGレーザが好ましい。
レーザ照射によって素子23aに加わるエネルギーが、素子23aと粘着層の界面に到達
し、そのエネルギーが物理的な応力として粘着層と素子23aとの粘着を剥がす形で加わ
るため。
あるいは、レーザ照射によって素子23aに加わるエネルギーが直接素子に及ぼす外力
として作用することとなり、その外力によって素子23aが剥がされることが考えられる
。
に、図1に示す基板ステージ24を移動制御してあるが、たとえばガルバノミラーとFθレンズなどを用いて、たとえば特定の素子23aのみにレーザ光Lが照射されるように、レーザ光Lが照射される方向を制御してもよい。ガルバノミラーとFθレンズなどを用いる機構は、レーザスキャニングの機構と同様であってもよい。ただし、基板ステージ24を移動制御する方が、全体としての装置構成をシンプルにすることができる。
20… 特定素子の除去装置
22… 基板(粘着シート)
22a… 基板本体
22b… 粘着層
23… 素子
23a… 特定の素子
24… 基板ステージ
25… 素子形成用基板
26… Z軸移動テーブル
26a… 設置台
28… Y軸移動ベース
29… レール
30… レーザ照射器具
32… レーザ出射部
34… 撮像装置
40… 回収機構
42… 気体吹付機構
50… 基板取り付け装置
52… 基板吸着器具
54… 回動ロッド
56… 支持ロッド
58… Y軸移動ブロック
59… レール
60… 仮置き台
L… レーザ光
La… 照射範囲
Y1… 処理位置
Y2… 取付位置
Y3… 受け渡し位置
Claims (17)
- 粘着性シートの粘着層の表面に、所定の配列で素子が並べられた前記粘着性シートを準備する工程と、
所定の配列で並べられた素子の内、特定の素子の表面にレーザを直接照射し、前記特定の素子を前記粘着性シートから除去する工程と、
前記粘着性シートの表面に付着してある所定配列の素子を、直接または間接的に実装用基板上に転写する工程と、を有する素子アレイの製造方法。 - 前記特定の素子を前記粘着性シートから除去した空の位置で、前記粘着性シートの前記粘着層の表面に、別の良品な素子を付着させる工程をさらに有する請求項1に記載の素子アレイの製造方法。
- 素子形成用基板上に、前記素子を所定の配列で作り込む工程と、
前記素子形成用基板上に作り込まれた所定の配列の前記素子を、前記粘着性シートの粘着層の表面に転写する工程と、をさらに有する請求項1または2に記載の素子アレイの製造方法。 - 前記素子形成用基板上に作り込まれた所定の配列の前記素子を、それぞれ検査する工程をさらに有する請求項3に記載の素子アレイの製造方法。
- 前記粘着性シートの粘着層の表面に所定の配列で並べられた素子を、それぞれ検査する工程をさらに有する請求項1〜4のいずれかに記載の素子アレイの製造方法。
- 前記素子が表示素子である請求項1〜5のいずれかに記載の素子アレイの製造方法。
- 前記特定の素子には、当該素子の平面形状に合わせた角型スポット形状の照射範囲で、前記レーザが照射される請求項1〜6のいずれかに記載の素子アレイの製造方法。
- 前記特定の素子には、当該素子の平面形状の全体を含む範囲で、前記レーザが照射される請求項1〜7のいずれかに記載の素子アレイの製造方法。
- 前記特定の素子には、3ショット以内のショット数で、前記レーザが照射されることにより、前記特定の素子を前記粘着性シートから弾き飛ばせるように、前記レーザの出力と波長が選択してある請求項1〜8のいずれかに記載の素子アレイの製造方法。
- 前記レーザの波長が532nm以下である請求項9に記載の素子アレイの製造方法。
- 前記素子は、平面視で5μm×5μm〜200μm×300μmのサイズを有する請求項1〜10のいずれかに記載の素子アレイの製造方法。
- 粘着性シートの粘着層の表面に、所定の配列で素子が並べられた前記粘着性シートを準備する工程と、
所定の配列で並べられた素子の内、特定の素子の表面にレーザを直接照射し、前記特定の素子を前記粘着性シートから除去し、前記粘着シートの表面には、その他の素子を残す工程と、を有する特定素子の除去方法。 - 前記特定の素子には、当該素子の平面形状に合わせた角型スポット形状の照射範囲で、前記レーザが照射される請求項12に記載の特定素子の除去方法。
- 前記特定の素子には、当該素子の平面形状の全体を含む範囲で、前記レーザが照射される請求項12または13に記載の特定素子の除去方法。
- 前記特定の素子には、3ショット以内のショット数で、前記レーザが照射されることにより、前記特定の素子を前記粘着性シートから弾き飛ばせるように、前記レーザの出力と波長が選択してある請求項12〜14のいずれかに記載の特定素子の除去方法。
- 前記レーザの波長が532nm以下である請求項15に記載の特定素子の除去方法。
- 前記素子は、平面視で5μm×5μm〜200μm×300μmのサイズを有する請求項12〜16のいずれかに記載の特定素子の除去方法。
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